JP6471159B2 - 回転機構及びこの回転機構を備えた膜厚モニター - Google Patents

回転機構及びこの回転機構を備えた膜厚モニター Download PDF

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Publication number
JP6471159B2
JP6471159B2 JP2016530808A JP2016530808A JP6471159B2 JP 6471159 B2 JP6471159 B2 JP 6471159B2 JP 2016530808 A JP2016530808 A JP 2016530808A JP 2016530808 A JP2016530808 A JP 2016530808A JP 6471159 B2 JP6471159 B2 JP 6471159B2
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Japan
Prior art keywords
motor
rotation mechanism
output shaft
rolling bearing
rotating
Prior art date
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Active
Application number
JP2016530808A
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English (en)
Japanese (ja)
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JPWO2016002122A1 (ja
Inventor
学 小高
学 小高
晴邦 古瀬
晴邦 古瀬
章弘 前田
章弘 前田
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Ulvac Inc
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Ulvac Inc
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Publication date
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Publication of JPWO2016002122A1 publication Critical patent/JPWO2016002122A1/ja
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Publication of JP6471159B2 publication Critical patent/JP6471159B2/ja
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C35/00—Rigid support of bearing units; Housings, e.g. caps, covers
    • F16C35/04—Rigid support of bearing units; Housings, e.g. caps, covers in the case of ball or roller bearings
    • F16C35/06—Mounting or dismounting of ball or roller bearings; Fixing them onto shaft or in housing
    • F16C35/067—Fixing them in a housing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C19/00—Bearings with rolling contact, for exclusively rotary movement
    • F16C19/02—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows
    • F16C19/04—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for radial load mainly
    • F16C19/06—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for radial load mainly with a single row or balls

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physical Vapour Deposition (AREA)
  • Mounting Of Bearings Or Others (AREA)
  • Rolling Contact Bearings (AREA)
  • Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
JP2016530808A 2014-07-02 2015-05-15 回転機構及びこの回転機構を備えた膜厚モニター Active JP6471159B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2014137033 2014-07-02
JP2014137033 2014-07-02
PCT/JP2015/002463 WO2016002122A1 (ja) 2014-07-02 2015-05-15 回転機構及びこの回転機構を備えた膜厚モニター

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2017224350A Division JP2018040493A (ja) 2014-07-02 2017-11-22 回転機構及びこの回転機構を備えた膜厚モニター

Publications (2)

Publication Number Publication Date
JPWO2016002122A1 JPWO2016002122A1 (ja) 2017-04-27
JP6471159B2 true JP6471159B2 (ja) 2019-02-13

Family

ID=55018706

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2016530808A Active JP6471159B2 (ja) 2014-07-02 2015-05-15 回転機構及びこの回転機構を備えた膜厚モニター
JP2017224350A Pending JP2018040493A (ja) 2014-07-02 2017-11-22 回転機構及びこの回転機構を備えた膜厚モニター

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2017224350A Pending JP2018040493A (ja) 2014-07-02 2017-11-22 回転機構及びこの回転機構を備えた膜厚モニター

Country Status (4)

Country Link
JP (2) JP6471159B2 (ko)
KR (2) KR102155098B1 (ko)
CN (1) CN106662155B (ko)
WO (1) WO2016002122A1 (ko)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106662155B (zh) * 2014-07-02 2019-08-02 株式会社爱发科 旋转机构及具有该旋转机构的薄膜厚度监控器
CN108728810A (zh) * 2018-08-16 2018-11-02 广东振华科技股份有限公司 一种真空低温磁控溅射镀膜机

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR970062372A (ko) * 1996-02-01 1997-09-12 배계환 고속회전체용 베어링장치
JPH11222670A (ja) 1998-02-06 1999-08-17 Ulvac Corp 膜厚モニター及びこれを用いた成膜装置
CN1313637C (zh) * 2002-05-13 2007-05-02 哨船头薄膜科技有限公司 动态薄膜厚度监控系统及方法
JP4174657B2 (ja) * 2002-06-07 2008-11-05 日本精工株式会社 深溝玉軸受及びファンカップリング装置
CN2833515Y (zh) * 2004-11-19 2006-11-01 华南理工大学 一种实时光学薄膜厚度监控设备
JP2006316804A (ja) * 2005-05-10 2006-11-24 Ntn Corp 車輪用軸受装置
JP5102358B2 (ja) * 2008-06-03 2012-12-19 株式会社アルバック アライメント機能付きステージ及びこのアライメント機能付きステージを備えた処理装置
JP2013167346A (ja) * 2012-02-17 2013-08-29 Nsk Ltd 転がり軸受
CN106662155B (zh) * 2014-07-02 2019-08-02 株式会社爱发科 旋转机构及具有该旋转机构的薄膜厚度监控器

Also Published As

Publication number Publication date
CN106662155B (zh) 2019-08-02
KR102155098B1 (ko) 2020-09-11
KR20170021327A (ko) 2017-02-27
JP2018040493A (ja) 2018-03-15
KR20180091946A (ko) 2018-08-16
WO2016002122A1 (ja) 2016-01-07
JPWO2016002122A1 (ja) 2017-04-27
CN106662155A (zh) 2017-05-10

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