JP6447009B2 - 直動テーブル装置 - Google Patents

直動テーブル装置 Download PDF

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Publication number
JP6447009B2
JP6447009B2 JP2014220240A JP2014220240A JP6447009B2 JP 6447009 B2 JP6447009 B2 JP 6447009B2 JP 2014220240 A JP2014220240 A JP 2014220240A JP 2014220240 A JP2014220240 A JP 2014220240A JP 6447009 B2 JP6447009 B2 JP 6447009B2
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Japan
Prior art keywords
screw shaft
drive screw
weight
main table
main
Prior art date
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JP2014220240A
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Japanese (ja)
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JP2016083755A (ja
JP2016083755A5 (enExample
Inventor
明彦 石川
明彦 石川
吉田　圭一
圭一 吉田
聡志 橋本
聡志 橋本
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NSK Ltd
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NSK Ltd
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  • Machine Tool Units (AREA)
  • Bearings For Parts Moving Linearly (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2014220240A 2014-10-28 2014-10-29 直動テーブル装置 Active JP6447009B2 (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2014218915 2014-10-28
JP2014218945 2014-10-28
JP2014218915 2014-10-28
JP2014218945 2014-10-28

Publications (3)

Publication Number Publication Date
JP2016083755A JP2016083755A (ja) 2016-05-19
JP2016083755A5 JP2016083755A5 (enExample) 2017-07-20
JP6447009B2 true JP6447009B2 (ja) 2019-01-09

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ID=55972833

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JP2014220240A Active JP6447009B2 (ja) 2014-10-28 2014-10-29 直動テーブル装置

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JP (1) JP6447009B2 (enExample)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01193134A (ja) * 1988-01-27 1989-08-03 Komatsu Ltd スライドテーブルを有する構造物のカウンターバランス移動装置
DE10307308B4 (de) * 2003-02-20 2006-11-30 Siemens Ag Einrichtung zum linearen Verfahren einer Nutzmasse
JP4309680B2 (ja) * 2003-03-04 2009-08-05 キヤノンマシナリー株式会社 反力減衰駆動装置
JP2012232354A (ja) * 2011-04-28 2012-11-29 Nsk Ltd 位置決めテーブル装置
JP2014087852A (ja) * 2012-10-29 2014-05-15 Nsk Ltd 直動テーブル装置
JP6032028B2 (ja) * 2013-01-28 2016-11-24 日本精工株式会社 直動案内装置

Also Published As

Publication number Publication date
JP2016083755A (ja) 2016-05-19

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