JP6423004B2 - プロセスガスを重要工程処理に送達するための方法および系 - Google Patents

プロセスガスを重要工程処理に送達するための方法および系 Download PDF

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JP6423004B2
JP6423004B2 JP2016567342A JP2016567342A JP6423004B2 JP 6423004 B2 JP6423004 B2 JP 6423004B2 JP 2016567342 A JP2016567342 A JP 2016567342A JP 2016567342 A JP2016567342 A JP 2016567342A JP 6423004 B2 JP6423004 B2 JP 6423004B2
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hydrogen peroxide
gas
concentration
carrier gas
source
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JP2017518798A5 (https=
JP2017518798A (ja
Inventor
アルヴァレス,ダニエル,ジュニア
スピーゲルマン,ジェフリー,ジェイ.
ホルムズ,ラッセル,ジェイ.
ハインライン,エドワード
シャムシ,ゾーレ
ラモス,クリストファー
デプタラ,アレキサンダー
ホーガン,ジェイムズ
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Rasirc Inc
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Rasirc Inc
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    • CCHEMISTRY; METALLURGY
    • C12BIOCHEMISTRY; BEER; SPIRITS; WINE; VINEGAR; MICROBIOLOGY; ENZYMOLOGY; MUTATION OR GENETIC ENGINEERING
    • C12QMEASURING OR TESTING PROCESSES INVOLVING ENZYMES, NUCLEIC ACIDS OR MICROORGANISMS; COMPOSITIONS OR TEST PAPERS THEREFOR; PROCESSES OF PREPARING SUCH COMPOSITIONS; CONDITION-RESPONSIVE CONTROL IN MICROBIOLOGICAL OR ENZYMOLOGICAL PROCESSES
    • C12Q1/00Measuring or testing processes involving enzymes, nucleic acids or microorganisms; Compositions therefor; Processes of preparing such compositions
    • C12Q1/68Measuring or testing processes involving enzymes, nucleic acids or microorganisms; Compositions therefor; Processes of preparing such compositions involving nucleic acids
    • C12Q1/6844Nucleic acid amplification reactions
    • C12Q1/6848Nucleic acid amplification reactions characterised by the means for preventing contamination or increasing the specificity or sensitivity of an amplification reaction
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61LMETHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2/00Disinfection or sterilisation of materials or objects, in general; Accessories therefor
    • A61L2/16Disinfection or sterilisation of materials or objects, in general; Accessories therefor using chemical substances
    • A61L2/18Liquid substances
    • A61L2/186Peroxide solutions
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61LMETHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2/00Disinfection or sterilisation of materials or objects, in general; Accessories therefor
    • A61L2/16Disinfection or sterilisation of materials or objects, in general; Accessories therefor using chemical substances
    • A61L2/20Gaseous substances, e.g. vapours
    • A61L2/208Hydrogen peroxide
    • CCHEMISTRY; METALLURGY
    • C12BIOCHEMISTRY; BEER; SPIRITS; WINE; VINEGAR; MICROBIOLOGY; ENZYMOLOGY; MUTATION OR GENETIC ENGINEERING
    • C12QMEASURING OR TESTING PROCESSES INVOLVING ENZYMES, NUCLEIC ACIDS OR MICROORGANISMS; COMPOSITIONS OR TEST PAPERS THEREFOR; PROCESSES OF PREPARING SUCH COMPOSITIONS; CONDITION-RESPONSIVE CONTROL IN MICROBIOLOGICAL OR ENZYMOLOGICAL PROCESSES
    • C12Q1/00Measuring or testing processes involving enzymes, nucleic acids or microorganisms; Compositions therefor; Processes of preparing such compositions
    • C12Q1/68Measuring or testing processes involving enzymes, nucleic acids or microorganisms; Compositions therefor; Processes of preparing such compositions involving nucleic acids
    • C12Q1/6806Preparing nucleic acids for analysis, e.g. for polymerase chain reaction [PCR] assay
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61LMETHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2103/00Materials or objects being the target of disinfection or sterilisation
    • A61L2103/15Laboratory, medical or dentistry appliances, e.g. catheters or sharps

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  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Zoology (AREA)
  • Wood Science & Technology (AREA)
  • Proteomics, Peptides & Aminoacids (AREA)
  • Analytical Chemistry (AREA)
  • Animal Behavior & Ethology (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Epidemiology (AREA)
  • General Chemical & Material Sciences (AREA)
  • Microbiology (AREA)
  • Immunology (AREA)
  • Molecular Biology (AREA)
  • Biotechnology (AREA)
  • Biophysics (AREA)
  • Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Bioinformatics & Cheminformatics (AREA)
  • General Engineering & Computer Science (AREA)
  • Genetics & Genomics (AREA)
  • Apparatus For Disinfection Or Sterilisation (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
JP2016567342A 2014-05-13 2015-05-12 プロセスガスを重要工程処理に送達するための方法および系 Active JP6423004B2 (ja)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US201461992806P 2014-05-13 2014-05-13
US61/992,806 2014-05-13
US201462027562P 2014-07-22 2014-07-22
US62/027,562 2014-07-22
US201462058987P 2014-10-02 2014-10-02
US62/058,987 2014-10-02
PCT/US2015/030422 WO2015175564A1 (en) 2014-05-13 2015-05-12 Methods and systems for delivering process gases to critical process applications

Related Child Applications (1)

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JP2018195494A Division JP6524570B2 (ja) 2014-05-13 2018-10-17 プロセスガスを重要工程処理に送達するための方法および系

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JP2017518798A JP2017518798A (ja) 2017-07-13
JP2017518798A5 JP2017518798A5 (https=) 2018-06-21
JP6423004B2 true JP6423004B2 (ja) 2018-11-14

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JP2016567342A Active JP6423004B2 (ja) 2014-05-13 2015-05-12 プロセスガスを重要工程処理に送達するための方法および系
JP2018195494A Active JP6524570B2 (ja) 2014-05-13 2018-10-17 プロセスガスを重要工程処理に送達するための方法および系

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US (3) US9410191B2 (https=)
EP (1) EP3142712B1 (https=)
JP (2) JP6423004B2 (https=)
SG (1) SG11201609469XA (https=)
WO (1) WO2015175564A1 (https=)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103796742B (zh) * 2011-06-07 2016-03-09 依姆泰克斯膜公司 膜用补充液体材料
AU2013240292B2 (en) * 2012-03-28 2018-02-15 Rasirc, Inc. Method of delivering a process gas from a multi-component solution
JP6423004B2 (ja) 2014-05-13 2018-11-14 ラシリック, インコーポレイテッドRASIRC, Inc. プロセスガスを重要工程処理に送達するための方法および系
US9783431B2 (en) * 2014-05-28 2017-10-10 Katz Water Tech, Llc Apparatus and method to remove contaminates from a fluid
US10150048B2 (en) 2014-10-23 2018-12-11 Rasirc, Inc. Method, system, and device for delivery of process gas
WO2018102139A1 (en) * 2016-12-01 2018-06-07 Rasirc, Inc. Method, system, and apparatus for inhibiting decomposition of hydrogen peroxide in gas delivery systems
DK3600456T3 (da) 2017-03-27 2023-10-02 Regeneron Pharma Fremgangsmåde til sterilisering
US10864482B2 (en) 2017-08-24 2020-12-15 Katz Water Tech, Llc Apparatus system and method to separate brine from water
US11713258B2 (en) 2017-08-24 2023-08-01 Katz Water Tech, Llc Apparatus system and method to extract minerals and metals from water
US11034605B2 (en) 2018-03-29 2021-06-15 Katz Water Tech, Llc Apparatus system and method to extract minerals and metals from water
US11458412B2 (en) * 2018-01-17 2022-10-04 Rasirc, Inc. Controlled vapor delivery into low pressure processes
JP6649417B2 (ja) * 2018-02-05 2020-02-19 日本エアーテック株式会社 過酸化水素ガス除染方法
IT201800011162A1 (it) * 2018-12-17 2020-06-17 Amira Srl Generatore di perossido di idrogeno in fase di vapore
CN118718181A (zh) 2019-06-05 2024-10-01 里珍纳龙药品有限公司 用于精确剂量递送的装置及方法
JP2024525420A (ja) * 2021-06-23 2024-07-12 バイオミスト,インコーポレイテッド 窒素発生及び殺菌システム
WO2024074929A1 (en) 2022-10-03 2024-04-11 Rasirc, Inc. Hydrogen peroxide plasma etch of ashable hard mask
USD1120314S1 (en) 2022-11-30 2026-03-24 Regeneron Pharmaceuticals, Inc. Dose delivery device
EP4726473A1 (en) * 2024-10-11 2026-04-15 ASML Netherlands B.V. Humidification of low gas flows

Family Cites Families (78)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2193622A (en) 1935-07-03 1940-03-12 Toledo Scale Mfg Co Preserving bakery products
US2178496A (en) 1937-10-12 1939-10-31 Pennsylvania Salt Mfg Co Process for the production of highly concentrated hydrogen peroxide solutions
US2741584A (en) 1951-03-07 1956-04-10 Laporte Chemical Process and apparatus for concentrating hydrogen peroxide
US3205934A (en) 1961-11-13 1965-09-14 Shell Oil Co Hydrogen peroxide vaporization
DE2125192A1 (de) 1971-05-21 1972-11-23 Deutsche Gold- Und Silber-Scheideanstalt Vormals Roessler, 6000 Frankfurt Verfahren zur Konzentrierung von Wasserstoffperoxid
US3750735A (en) 1970-06-16 1973-08-07 Monsanto Co Removal of water from liquid mixtures containing formaldehyde using a porous polymeric membrane
US4169123A (en) 1975-12-11 1979-09-25 Moore-Perk Corporation Hydrogen peroxide vapor sterilization method
US4169124A (en) 1977-09-26 1979-09-25 Moore-Perk Corporation Cold gas sterilization process
US4564514A (en) 1982-07-07 1986-01-14 Degussa Aktiengesellschaft Process for the production of water-free organic hydrogen peroxide solution
LU85789A1 (fr) 1985-02-26 1986-09-02 Oreal Utilisation dans les domaines therapeutique et cosmetique d'une solution anhydre de peroxyde d'hydrogene
US5013436A (en) 1989-01-12 1991-05-07 Lee Eric K L Production of low-ethanol beverage by membrane extraction
US4806245A (en) 1986-10-14 1989-02-21 Bend Research, Inc. Pervaporation of phenols
US4863688A (en) 1986-12-31 1989-09-05 American Sterilizer Company Method of decontaminating surfaces on or near living cells with vapor hydrogen peroxide
IN170602B (https=) 1987-07-30 1992-04-18 Surgikos Inc
JP2765032B2 (ja) 1989-04-14 1998-06-11 東レ株式会社 揮発性有機液体水溶液の濃縮液の製造方法
WO1992001814A2 (en) 1990-07-24 1992-02-06 F. Hoffmann-La-Roche Ag The reduction of non-specific amplification during in vitro nucleic acid amplification using modified nucleic acid bases
US5612200A (en) 1992-06-24 1997-03-18 Gen-Probe Incorporated Method and kit for destroying ability of nucleic acid to be amplified
IL105442A (en) 1993-04-19 1996-01-19 Carbon Membranes Ltd Method for the separation of gases at low temperatures
US5667753A (en) 1994-04-28 1997-09-16 Advanced Sterilization Products Vapor sterilization using inorganic hydrogen peroxide complexes
US5674450A (en) 1994-04-28 1997-10-07 Johnson & Johnson Medical, Inc. Vapor sterilization using a non-aqueous source of hydrogen peroxide
US5681433A (en) 1994-09-14 1997-10-28 Bend Research, Inc. Membrane dehydration of vaporous feeds by countercurrent condensable sweep
US5910448A (en) 1994-10-31 1999-06-08 Umpqua Research Company Process for analyzing CO2 in air and in water
US5785934A (en) 1995-01-06 1998-07-28 Johnson & Johnson Medical, Inc. Vapor sterilization using inorganic hydrogen peroxide complexes
JPH0989732A (ja) 1995-09-21 1997-04-04 Toshiba Corp ガスの生成方法、ガスの生成装置及びこれを用いた気相成長装置
US5707499A (en) * 1995-10-06 1998-01-13 Ceramatec, Inc. Storage-stable, fluid dispensing device using a hydrogen gas generator
US6071810A (en) 1996-12-24 2000-06-06 Kabushiki Kaisha Toshiba Method of filling contact holes and wiring grooves of a semiconductor device
US5928409A (en) 1997-11-12 1999-07-27 New Jersey Institute Of Technology Method and apparatus for gas removal by cyclic flow swing membrane permeation
US6290820B1 (en) 1997-12-17 2001-09-18 Iowa State University Research Foundation, Inc. Apparatus and method for concentrating a dilute solution
JP3943782B2 (ja) 1999-11-29 2007-07-11 信越半導体株式会社 剥離ウエーハの再生処理方法及び再生処理された剥離ウエーハ
US20050084415A1 (en) 2001-02-16 2005-04-21 Steris, Inc. High capacity flash vapor generation systems
US7157046B2 (en) 2001-02-16 2007-01-02 Steris Inc. High capacity flash vapor generation systems
US6746652B2 (en) 2001-07-09 2004-06-08 Pharmaceutical Systems, Inc. Production of hydrogen peroxide vapor-air mixtures
DE10142620A1 (de) 2001-08-31 2003-03-20 Degussa Ammoximation von Ketonen und Aufarbeitung durch Pervaporation/Dampfpermeation
US7803315B2 (en) 2001-10-05 2010-09-28 American Sterilizer Company Decontamination of surfaces contaminated with prion-infected material with gaseous oxidizing agents
JP4426851B2 (ja) 2002-03-28 2010-03-03 バイオケル ユーケイ リミテッド 閉じた空間を除染する方法及び装置
US20040079491A1 (en) 2002-10-28 2004-04-29 Harris James Jeffrey Evaporative process for the reconstitution of glycol bearing deicing fluids
US20050193758A1 (en) 2003-10-27 2005-09-08 Wells David N. System and method for selective heating and cooling
EP1701747B1 (en) 2004-01-07 2014-03-12 Noxilizer, Inc. Sterilisation method
JP3642065B1 (ja) 2004-03-22 2005-04-27 東洋紡績株式会社 選択透過性分離膜および選択透過性分離膜の製造方法
JP3636199B1 (ja) 2004-03-23 2005-04-06 東洋紡績株式会社 ポリスルホン系選択透過性中空糸膜束とその製造方法および血液浄化器
TWI240951B (en) 2004-05-10 2005-10-01 Mosel Vitelic Inc Method for reclaiming wafer
US7122166B2 (en) 2004-05-11 2006-10-17 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Concentration of hydrogen peroxide
US7354551B2 (en) 2004-07-08 2008-04-08 Steris Inc Room decontamination with hydrogen peroxide vapor
US7753991B2 (en) 2004-07-30 2010-07-13 Kertzman Systems, Inc. Water transport method and assembly including a thin film membrane for the addition or removal of water from gases or liquids
US7399344B1 (en) 2005-01-28 2008-07-15 Uop Llc Hydrogen peroxide recovery with hydrophobic membrane
DE102005020459A1 (de) 2005-04-29 2006-11-09 Sig Technology Ag Verfahren und Vorrichtung zur Detektion von Substanzen in wasserhaltigen, gasförmigen Medien
TW200740476A (en) * 2005-08-04 2007-11-01 Saban Ventures Pty Ltd Membrane sterilization
US8926731B2 (en) 2005-09-13 2015-01-06 Rasirc Methods and devices for producing high purity steam
JP5537029B2 (ja) 2005-09-13 2014-07-02 ラサーク 高純度の蒸気を生成する方法
US20070196549A1 (en) 2006-02-17 2007-08-23 Western Precooling Systems Method and Apparatus for Killing Pathogens on Fresh produce
AU2007223448B2 (en) 2006-03-02 2011-10-20 Sei-Ichi Manabe Pore diffusion type flat membrane separating apparatus, flat membrane concentrating apparatus, regenerated cellulose porous membrane for pore diffusion, and method of non-destructive inspection of flat membrane
WO2007109214A2 (en) 2006-03-20 2007-09-27 Rasirc Vaporizer for delivery of low vapor pressure gasses
WO2007109215A2 (en) 2006-03-20 2007-09-27 Rasirc Fluid connector
CA2677100C (en) 2007-02-02 2018-03-27 Saban Ventures Pty Limited Membrane vapour concentrator
RU2010108227A (ru) 2007-08-07 2011-09-20 ЛИ АНТИМАЙКРОБАЙАЛ СОЛЮШНЗ ЭлЭлСи (US) Способы и устройства для защиты от микробиологического загрязнения с использованием газообразного очищенного пероксида водорода
WO2009064427A2 (en) 2007-11-13 2009-05-22 Mckinley James J Variable concentration dynamic headspace vapor source generator
US8215496B2 (en) 2008-01-28 2012-07-10 Promerus Llc Polynorbornene pervaporation membrane films, preparation and use thereof
CA2719089A1 (en) 2008-03-21 2009-09-24 Aptwater, Inc. Apparatus, systems, and methods for water treatment
US20090263499A1 (en) 2008-04-18 2009-10-22 Ethicon, Inc. Area decontamination via low-level concentration of germicidal agent
EP2320977B1 (en) 2008-07-30 2017-09-13 Genericus, Inc. Inline vaporizer
WO2010056576A1 (en) 2008-11-11 2010-05-20 Praxair Technology, Inc. Reagent dispensing apparatuses and delivery methods
US8490427B2 (en) 2008-11-25 2013-07-23 Donald Charles Erickson Liquid desiccant chiller
MX344243B (es) 2009-07-06 2016-12-08 Medizone Int Inc * Proceso y sistema de desinfeccion de centros de atencion medica con mezcla de oxigeno/ozono.
BR122013010298A2 (pt) 2009-09-30 2016-03-29 Tso3 Inc sistema de distribuição de peróxido de hidrogênio para um esterilizador tendo uma unidade de injeção de peróxido de hidrogênio e recipiente de solução de peróxido de hidrogênio para uso no sistema de distribuição
US10222078B2 (en) 2009-11-23 2019-03-05 Carrier Corporation Method and device for air conditioning with humidity control
JP5610186B2 (ja) * 2009-12-17 2014-10-22 日揮ユニバーサル株式会社 過酸化水素ガス発生装置
US20110183598A1 (en) 2010-01-26 2011-07-28 Holt Alton R Method and System for Controlling Microbiological Contamination in Buildings
JP4977233B2 (ja) 2010-05-24 2012-07-18 株式会社大気社 除染管理方法、及び、その除染管理方法に用いる除染管理装置
WO2012024131A2 (en) 2010-08-16 2012-02-23 Rasirc, Inc. Gas-liquid phase transition method and apparatus for cleaning of surfaces in semiconductor manufacturing
US20130276357A1 (en) 2010-09-08 2013-10-24 Medizone International Inc. Combating insect infestations
FR2966056B1 (fr) 2010-10-19 2016-03-18 Millipore Corp Procede de traitement des acides nucleiques residuels presents a la surface des consommables de laboratoire
CN101966981A (zh) 2010-10-20 2011-02-09 大连理工大学 一种过氧化氢溶液的膜蒸馏浓缩方法
US9364571B2 (en) 2011-04-01 2016-06-14 Goa Teknoloji Danismanlik Elektronik, Imalat Ticaret Ithalat Ihracat A.S. Sterilization with in-line concentrating and injection of hydrogen peroxide
US9714040B2 (en) 2011-07-26 2017-07-25 Nabtesco Corporation Unit brake
AU2013240292B2 (en) * 2012-03-28 2018-02-15 Rasirc, Inc. Method of delivering a process gas from a multi-component solution
WO2014014511A1 (en) * 2012-07-16 2014-01-23 Rasirc Method, system, and device for delivery of high purity hydrogen peroxide
US20160051928A1 (en) 2013-04-05 2016-02-25 Rasirc, Inc. Delivery of a High Concentration Hydrogen Peroxide Gas Stream
JP6423004B2 (ja) 2014-05-13 2018-11-14 ラシリック, インコーポレイテッドRASIRC, Inc. プロセスガスを重要工程処理に送達するための方法および系

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Publication number Publication date
EP3142712A1 (en) 2017-03-22
JP6524570B2 (ja) 2019-06-05
WO2015175564A1 (en) 2015-11-19
JP2017518798A (ja) 2017-07-13
US20170072081A1 (en) 2017-03-16
SG11201609469XA (en) 2016-12-29
US9932630B2 (en) 2018-04-03
US20160348160A1 (en) 2016-12-01
JP2019030706A (ja) 2019-02-28
EP3142712A4 (en) 2018-02-28
US9410191B2 (en) 2016-08-09
EP3142712B1 (en) 2019-08-07
US20150329901A1 (en) 2015-11-19
US10196685B2 (en) 2019-02-05

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