JP6415117B2 - 温度補正機能付測定機 - Google Patents
温度補正機能付測定機 Download PDFInfo
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- JP6415117B2 JP6415117B2 JP2014112976A JP2014112976A JP6415117B2 JP 6415117 B2 JP6415117 B2 JP 6415117B2 JP 2014112976 A JP2014112976 A JP 2014112976A JP 2014112976 A JP2014112976 A JP 2014112976A JP 6415117 B2 JP6415117 B2 JP 6415117B2
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Description
8a…測定対象部位
10…画像測定機
14…ステージ
20、62…赤外線可視一体型カメラ
30…パソコン(PC)
32…水平方向変位量算出手段
34…高さ算出手段
36…温度算出手段
38…線膨張係数データベース(DB)
40…温度補正量算出手段
42…測定結果温度補正手段
60…スタイラスチップ
Claims (2)
- 測定対象物又は測定対象部位に向けて装着された、赤外線カメラと可視カメラが一体化された赤外線可視一体型カメラを備え、
該赤外線可視一体型カメラを切り替えることによって得られる赤外線画像と可視画像のうち、赤外線画像から得た測定対象物又は測定対象部位の温度情報を用いて、同じ赤外線可視一体型カメラの可視画像から得た測定結果を温度補正することを特徴とする温度補正機能付測定機。 - 前記赤外線可視一体型カメラで、座標測定機のスタイラスチップの温度分布を測定して温度補正を行うことを特徴とする請求項1に記載の温度補正機能付測定機。
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JP2014112976A JP6415117B2 (ja) | 2014-05-30 | 2014-05-30 | 温度補正機能付測定機 |
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JP2014112976A JP6415117B2 (ja) | 2014-05-30 | 2014-05-30 | 温度補正機能付測定機 |
Publications (2)
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JP2015227795A JP2015227795A (ja) | 2015-12-17 |
JP6415117B2 true JP6415117B2 (ja) | 2018-10-31 |
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JP2014112976A Active JP6415117B2 (ja) | 2014-05-30 | 2014-05-30 | 温度補正機能付測定機 |
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JP (1) | JP6415117B2 (ja) |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JP4695374B2 (ja) * | 2003-11-25 | 2011-06-08 | 株式会社ミツトヨ | 表面倣い測定装置および倣いプローブの補正テーブル作成方法 |
JP4590592B2 (ja) * | 2004-11-29 | 2010-12-01 | 学校法人福岡工業大学 | 三次元計測装置および三次元計測方法 |
JP2010101808A (ja) * | 2008-10-24 | 2010-05-06 | Olympus Corp | 曲率半径測定方法および装置 |
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