JP6389081B2 - 形状測定装置、塗布装置および形状測定方法 - Google Patents

形状測定装置、塗布装置および形状測定方法 Download PDF

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Publication number
JP6389081B2
JP6389081B2 JP2014161422A JP2014161422A JP6389081B2 JP 6389081 B2 JP6389081 B2 JP 6389081B2 JP 2014161422 A JP2014161422 A JP 2014161422A JP 2014161422 A JP2014161422 A JP 2014161422A JP 6389081 B2 JP6389081 B2 JP 6389081B2
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Japan
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image
luminance
transparent film
peak
image number
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JP2014161422A
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Japanese (ja)
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JP2016038284A5 (zh
JP2016038284A (ja
Inventor
博明 大庭
博明 大庭
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NTN Corp
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NTN Corp
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Priority to JP2014161422A priority Critical patent/JP6389081B2/ja
Priority to PCT/JP2015/069618 priority patent/WO2016021359A1/ja
Priority to CN201580042360.0A priority patent/CN106662431B/zh
Publication of JP2016038284A publication Critical patent/JP2016038284A/ja
Publication of JP2016038284A5 publication Critical patent/JP2016038284A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Coating Apparatus (AREA)
JP2014161422A 2014-08-07 2014-08-07 形状測定装置、塗布装置および形状測定方法 Expired - Fee Related JP6389081B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2014161422A JP6389081B2 (ja) 2014-08-07 2014-08-07 形状測定装置、塗布装置および形状測定方法
PCT/JP2015/069618 WO2016021359A1 (ja) 2014-08-07 2015-07-08 形状測定装置、塗布装置および形状測定方法
CN201580042360.0A CN106662431B (zh) 2014-08-07 2015-07-08 形状测定装置、涂敷装置及形状测定方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014161422A JP6389081B2 (ja) 2014-08-07 2014-08-07 形状測定装置、塗布装置および形状測定方法

Publications (3)

Publication Number Publication Date
JP2016038284A JP2016038284A (ja) 2016-03-22
JP2016038284A5 JP2016038284A5 (zh) 2017-09-07
JP6389081B2 true JP6389081B2 (ja) 2018-09-12

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Application Number Title Priority Date Filing Date
JP2014161422A Expired - Fee Related JP6389081B2 (ja) 2014-08-07 2014-08-07 形状測定装置、塗布装置および形状測定方法

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Country Link
JP (1) JP6389081B2 (zh)
CN (1) CN106662431B (zh)
WO (1) WO2016021359A1 (zh)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106197310A (zh) * 2016-06-29 2016-12-07 中国科学院光电技术研究所 一种基于调制度的宽光谱微纳结构三维形貌检测方法
JP6333351B1 (ja) * 2016-12-27 2018-05-30 Ntn株式会社 測定装置、塗布装置、および膜厚測定方法
CN109084678B (zh) * 2018-09-03 2021-09-28 深圳中科飞测科技股份有限公司 一种光学检测装置和光学检测方法
SG11202100892PA (en) 2018-07-27 2021-02-25 Skyverse Technology Co Ltd Light emitting device, optical detection system, optical detection device and optical detection method
CN111213029A (zh) * 2018-09-27 2020-05-29 合刃科技（深圳）有限公司 检测透明/半透明材料缺陷的方法、装置及系统
CN111076659B (zh) * 2019-12-02 2022-05-24 深圳市太赫兹科技创新研究院有限公司 一种信号处理方法、装置、终端和计算机可读存储介质

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3203397B2 (ja) * 1992-08-25 2001-08-27 松下電器産業株式会社 はんだ付け状態検査装置とはんだ付け状態検査方法
JP2935412B2 (ja) * 1995-06-13 1999-08-16 東レ株式会社 薄膜の厚さ測定方法および測定装置ならびに光学フィルターの製造方法
JP2004340680A (ja) * 2003-05-14 2004-12-02 Toray Eng Co Ltd 表面形状および／または膜厚測定方法及びその装置
US7483147B2 (en) * 2004-11-10 2009-01-27 Korea Advanced Institute Of Science And Technology (Kaist) Apparatus and method for measuring thickness and profile of transparent thin film using white-light interferometer
CN100582655C (zh) * 2005-07-29 2010-01-20 大日本网目版制造株式会社 不均匀检查装置及不均匀检查方法
DE102006016131A1 (de) * 2005-09-22 2007-03-29 Robert Bosch Gmbh Interferometrische Messvorrichtung
KR101010189B1 (ko) * 2008-06-30 2011-01-21 에스엔유 프리시젼 주식회사 두께 또는 표면형상 측정방법
JP2012021781A (ja) * 2010-07-12 2012-02-02 Asahi Glass Co Ltd 表面形状の評価方法および評価装置
CN102445167A (zh) * 2010-09-30 2012-05-09 旭硝子株式会社 表面形状的评价方法以及评价装置
JP2012127675A (ja) * 2010-12-13 2012-07-05 Asahi Glass Co Ltd 表面形状の評価方法および評価装置
JP6189102B2 (ja) * 2013-06-25 2017-08-30 Ntn株式会社 塗布装置および高さ検出方法

Also Published As

Publication number Publication date
JP2016038284A (ja) 2016-03-22
CN106662431B (zh) 2019-10-25
WO2016021359A1 (ja) 2016-02-11
CN106662431A (zh) 2017-05-10

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