JP6389081B2 - 形状測定装置、塗布装置および形状測定方法 - Google Patents

形状測定装置、塗布装置および形状測定方法 Download PDF

Info

Publication number
JP6389081B2
JP6389081B2 JP2014161422A JP2014161422A JP6389081B2 JP 6389081 B2 JP6389081 B2 JP 6389081B2 JP 2014161422 A JP2014161422 A JP 2014161422A JP 2014161422 A JP2014161422 A JP 2014161422A JP 6389081 B2 JP6389081 B2 JP 6389081B2
Authority
JP
Japan
Prior art keywords
image
luminance
transparent film
peak
image number
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2014161422A
Other languages
English (en)
Japanese (ja)
Other versions
JP2016038284A (ja
JP2016038284A5 (enExample
Inventor
博明 大庭
博明 大庭
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTN Corp
Original Assignee
NTN Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NTN Corp filed Critical NTN Corp
Priority to JP2014161422A priority Critical patent/JP6389081B2/ja
Priority to PCT/JP2015/069618 priority patent/WO2016021359A1/ja
Priority to CN201580042360.0A priority patent/CN106662431B/zh
Publication of JP2016038284A publication Critical patent/JP2016038284A/ja
Publication of JP2016038284A5 publication Critical patent/JP2016038284A5/ja
Application granted granted Critical
Publication of JP6389081B2 publication Critical patent/JP6389081B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Coating Apparatus (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
JP2014161422A 2014-08-07 2014-08-07 形状測定装置、塗布装置および形状測定方法 Expired - Fee Related JP6389081B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2014161422A JP6389081B2 (ja) 2014-08-07 2014-08-07 形状測定装置、塗布装置および形状測定方法
PCT/JP2015/069618 WO2016021359A1 (ja) 2014-08-07 2015-07-08 形状測定装置、塗布装置および形状測定方法
CN201580042360.0A CN106662431B (zh) 2014-08-07 2015-07-08 形状测定装置、涂敷装置及形状测定方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014161422A JP6389081B2 (ja) 2014-08-07 2014-08-07 形状測定装置、塗布装置および形状測定方法

Publications (3)

Publication Number Publication Date
JP2016038284A JP2016038284A (ja) 2016-03-22
JP2016038284A5 JP2016038284A5 (enExample) 2017-09-07
JP6389081B2 true JP6389081B2 (ja) 2018-09-12

Family

ID=55263633

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014161422A Expired - Fee Related JP6389081B2 (ja) 2014-08-07 2014-08-07 形状測定装置、塗布装置および形状測定方法

Country Status (3)

Country Link
JP (1) JP6389081B2 (enExample)
CN (1) CN106662431B (enExample)
WO (1) WO2016021359A1 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106197310A (zh) * 2016-06-29 2016-12-07 中国科学院光电技术研究所 一种基于调制度的宽光谱微纳结构三维形貌检测方法
JP6333351B1 (ja) 2016-12-27 2018-05-30 Ntn株式会社 測定装置、塗布装置、および膜厚測定方法
CN109084678B (zh) * 2018-09-03 2021-09-28 深圳中科飞测科技股份有限公司 一种光学检测装置和光学检测方法
KR102541847B1 (ko) 2018-07-27 2023-06-14 스카이버스 테크놀로지 씨오., 엘티디. 발광 장치, 광학 검출 시스템, 광학 검출 장치 및 광학 검출 방법
CN111213029A (zh) * 2018-09-27 2020-05-29 合刃科技（深圳）有限公司 检测透明/半透明材料缺陷的方法、装置及系统
CN111076659B (zh) * 2019-12-02 2022-05-24 深圳市太赫兹科技创新研究院有限公司 一种信号处理方法、装置、终端和计算机可读存储介质
JP7615776B2 (ja) * 2021-03-09 2025-01-17 日本電気株式会社 画像処理装置、画像処理方法及び画像処理プログラム
KR102805953B1 (ko) * 2022-11-16 2025-05-14 주식회사 크레셈 튜너블 렌즈를 이용한 초점 가변 검사장치 및 이를 이용한 검사방법
JP2025136384A (ja) * 2024-03-07 2025-09-19 Ｔｏｗａ株式会社 切断装置及び切断品の製造方法
CN118243010A (zh) * 2024-03-21 2024-06-25 华中科技大学 一种新型显示喷印制造中薄膜形貌的白光干涉检测方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3203397B2 (ja) * 1992-08-25 2001-08-27 松下電器産業株式会社 はんだ付け状態検査装置とはんだ付け状態検査方法
JP2935412B2 (ja) * 1995-06-13 1999-08-16 東レ株式会社 薄膜の厚さ測定方法および測定装置ならびに光学フィルターの製造方法
JP2004340680A (ja) * 2003-05-14 2004-12-02 Toray Eng Co Ltd 表面形状および／または膜厚測定方法及びその装置
US7483147B2 (en) * 2004-11-10 2009-01-27 Korea Advanced Institute Of Science And Technology (Kaist) Apparatus and method for measuring thickness and profile of transparent thin film using white-light interferometer
CN100582655C (zh) * 2005-07-29 2010-01-20 大日本网目版制造株式会社 不均匀检查装置及不均匀检查方法
DE102006016131A1 (de) * 2005-09-22 2007-03-29 Robert Bosch Gmbh Interferometrische Messvorrichtung
KR101010189B1 (ko) * 2008-06-30 2011-01-21 에스엔유 프리시젼 주식회사 두께 또는 표면형상 측정방법
JP2012021781A (ja) * 2010-07-12 2012-02-02 Asahi Glass Co Ltd 表面形状の評価方法および評価装置
CN102445167A (zh) * 2010-09-30 2012-05-09 旭硝子株式会社 表面形状的评价方法以及评价装置
JP2012127675A (ja) * 2010-12-13 2012-07-05 Asahi Glass Co Ltd 表面形状の評価方法および評価装置
JP6189102B2 (ja) * 2013-06-25 2017-08-30 Ntn株式会社 塗布装置および高さ検出方法

Also Published As

Publication number Publication date
WO2016021359A1 (ja) 2016-02-11
CN106662431B (zh) 2019-10-25
CN106662431A (zh) 2017-05-10
JP2016038284A (ja) 2016-03-22

Similar Documents

Publication Publication Date Title
JP6389081B2 (ja) 形状測定装置、塗布装置および形状測定方法
KR100939537B1 (ko) 표면 형상 측정 시스템 및 그를 이용한 측정 방법
JP6749814B2 (ja) 高さ検出装置およびそれを搭載した塗布装置
JP6522344B2 (ja) 高さ検出装置、塗布装置および高さ検出方法
JP2014228486A (ja) 三次元プロファイル取得装置、パターン検査装置及び三次元プロファイル取得方法
CN110869696B (zh) 耐振白色光干涉显微镜及其振动影响去除方法
JP6333351B1 (ja) 測定装置、塗布装置、および膜厚測定方法
JP2005189069A (ja) 表面形状測定方法及び表面形状測定装置
US11181362B2 (en) Method of measuring volume of micro projection and method of applying liquid material
JP6557014B2 (ja) パターン修正装置およびパターン修正方法
US11326871B2 (en) Height detection apparatus and coating apparatus equipped with the same
JP6665028B2 (ja) 形状測定装置およびそれを搭載した塗布装置
JP6799046B2 (ja) 塗布方法および塗布装置
WO2016204062A1 (ja) 形状測定装置およびそれを搭載した塗布装置
WO2017122633A1 (ja) 微小突起の体積測定方法および液状材料の塗布方法
KR20090068838A (ko) 표면 형상 검사 장치

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20170726

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20170726

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20180508

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20180705

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20180724

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20180816

R150 Certificate of patent or registration of utility model

Ref document number: 6389081

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees