JP6349382B2 - 補助エンクロージャを利用するガスエンクロージャシステムおよび方法 - Google Patents
補助エンクロージャを利用するガスエンクロージャシステムおよび方法 Download PDFInfo
- Publication number
- JP6349382B2 JP6349382B2 JP2016501353A JP2016501353A JP6349382B2 JP 6349382 B2 JP6349382 B2 JP 6349382B2 JP 2016501353 A JP2016501353 A JP 2016501353A JP 2016501353 A JP2016501353 A JP 2016501353A JP 6349382 B2 JP6349382 B2 JP 6349382B2
- Authority
- JP
- Japan
- Prior art keywords
- enclosure
- assembly
- gas
- gas enclosure
- printhead
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
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Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/6719—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the processing chambers, e.g. modular processing chambers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/17—Ink jet characterised by ink handling
- B41J2/175—Ink supply systems ; Circuit parts therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J29/00—Details of, or accessories for, typewriters or selective printing mechanisms not otherwise provided for
- B41J29/02—Framework
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J29/00—Details of, or accessories for, typewriters or selective printing mechanisms not otherwise provided for
- B41J29/12—Guards, shields or dust excluders
- B41J29/13—Cases or covers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07 e.g. sealing of a cap to a base of a container
- H01L21/54—Providing fillings in containers, e.g. gas fillings
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electroluminescent Light Sources (AREA)
- Coating Apparatus (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Facsimiles In General (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13/802,304 | 2013-03-13 | ||
| US13/802,304 US9048344B2 (en) | 2008-06-13 | 2013-03-13 | Gas enclosure assembly and system |
| PCT/US2014/023820 WO2014164932A2 (en) | 2013-03-13 | 2014-03-11 | Gas enclosure systems and methods utilizing an auxiliary enclosure |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017231845A Division JP6463827B2 (ja) | 2013-03-13 | 2017-12-01 | 補助エンクロージャを利用するガスエンクロージャシステムおよび方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2016518675A JP2016518675A (ja) | 2016-06-23 |
| JP6349382B2 true JP6349382B2 (ja) | 2018-06-27 |
Family
ID=51659308
Family Applications (5)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016501353A Active JP6349382B2 (ja) | 2013-03-13 | 2014-03-11 | 補助エンクロージャを利用するガスエンクロージャシステムおよび方法 |
| JP2017231845A Active JP6463827B2 (ja) | 2013-03-13 | 2017-12-01 | 補助エンクロージャを利用するガスエンクロージャシステムおよび方法 |
| JP2019000246A Active JP6831046B2 (ja) | 2013-03-13 | 2019-01-04 | 補助エンクロージャを利用するガスエンクロージャシステムおよび方法 |
| JP2020181803A Active JP7177521B2 (ja) | 2013-03-13 | 2020-10-29 | 補助エンクロージャを利用するガスエンクロージャシステムおよび方法 |
| JP2022177620A Active JP7454878B2 (ja) | 2013-03-13 | 2022-11-04 | 補助エンクロージャを利用するガスエンクロージャシステムおよび方法 |
Family Applications After (4)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017231845A Active JP6463827B2 (ja) | 2013-03-13 | 2017-12-01 | 補助エンクロージャを利用するガスエンクロージャシステムおよび方法 |
| JP2019000246A Active JP6831046B2 (ja) | 2013-03-13 | 2019-01-04 | 補助エンクロージャを利用するガスエンクロージャシステムおよび方法 |
| JP2020181803A Active JP7177521B2 (ja) | 2013-03-13 | 2020-10-29 | 補助エンクロージャを利用するガスエンクロージャシステムおよび方法 |
| JP2022177620A Active JP7454878B2 (ja) | 2013-03-13 | 2022-11-04 | 補助エンクロージャを利用するガスエンクロージャシステムおよび方法 |
Country Status (5)
| Country | Link |
|---|---|
| EP (2) | EP3474317B1 (enExample) |
| JP (5) | JP6349382B2 (enExample) |
| KR (6) | KR20220162809A (enExample) |
| CN (2) | CN109130549B (enExample) |
| WO (1) | WO2014164932A2 (enExample) |
Families Citing this family (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8383202B2 (en) | 2008-06-13 | 2013-02-26 | Kateeva, Inc. | Method and apparatus for load-locked printing |
| US10442226B2 (en) | 2008-06-13 | 2019-10-15 | Kateeva, Inc. | Gas enclosure assembly and system |
| US8899171B2 (en) | 2008-06-13 | 2014-12-02 | Kateeva, Inc. | Gas enclosure assembly and system |
| US12064979B2 (en) | 2008-06-13 | 2024-08-20 | Kateeva, Inc. | Low-particle gas enclosure systems and methods |
| US9048344B2 (en) | 2008-06-13 | 2015-06-02 | Kateeva, Inc. | Gas enclosure assembly and system |
| US11975546B2 (en) | 2008-06-13 | 2024-05-07 | Kateeva, Inc. | Gas enclosure assembly and system |
| US10434804B2 (en) | 2008-06-13 | 2019-10-08 | Kateeva, Inc. | Low particle gas enclosure systems and methods |
| US9604245B2 (en) | 2008-06-13 | 2017-03-28 | Kateeva, Inc. | Gas enclosure systems and methods utilizing an auxiliary enclosure |
| US12018857B2 (en) | 2008-06-13 | 2024-06-25 | Kateeva, Inc. | Gas enclosure assembly and system |
| KR20220162809A (ko) * | 2013-03-13 | 2022-12-08 | 카티바, 인크. | 가스 인클로저 시스템 및 보조 인클로저를 이용하는 방법 |
| KR20190014589A (ko) * | 2013-06-10 | 2019-02-12 | 카티바, 인크. | 저-입자 가스 인클로저 시스템 및 방법 |
| US10468279B2 (en) | 2013-12-26 | 2019-11-05 | Kateeva, Inc. | Apparatus and techniques for thermal treatment of electronic devices |
| WO2015112454A1 (en) | 2014-01-21 | 2015-07-30 | Kateeva, Inc. | Apparatus and techniques for electronic device encapsulation |
| WO2015168036A1 (en) | 2014-04-30 | 2015-11-05 | Kateeva, Inc. | Gas cushion apparatus and techniques for substrate coating |
| CN106489212B (zh) * | 2014-07-18 | 2019-07-12 | 科迪华公司 | 利用多区域循环及过滤的气体封闭系统和方法 |
| KR102068882B1 (ko) | 2014-11-26 | 2020-01-21 | 카티바, 인크. | 환경적으로 제어되는 코팅 시스템 |
| JP6254108B2 (ja) * | 2015-01-07 | 2017-12-27 | 住友化学株式会社 | 有機ｅｌパネルの製造方法 |
| FR3055108A1 (fr) | 2016-08-16 | 2018-02-23 | Dover Europe Sarl | Procede et dispositif de filtrage de l'atmosphere recyclee d'une tete d'impression |
| JP6544658B2 (ja) * | 2017-02-17 | 2019-07-17 | 株式会社ウエイト東海 | 載置物の転倒防止装置 |
| JP7178937B2 (ja) * | 2019-03-20 | 2022-11-28 | ローランドディー．ジー．株式会社 | プリンタ |
| CN111038108B (zh) * | 2019-12-10 | 2021-11-23 | Tcl华星光电技术有限公司 | 喷墨打印用墨盒的存储装置及其存储方法 |
| JP7555022B2 (ja) * | 2020-05-19 | 2024-09-24 | パナソニックＩｐマネジメント株式会社 | インクジェット印刷装置 |
| CN112319045B (zh) * | 2020-09-10 | 2022-05-31 | 季华实验室 | 一种玻璃基板的加工方法和喷墨打印设备 |
| KR102473786B1 (ko) * | 2021-01-07 | 2022-12-06 | (주)유니젯 | 인클로저 시스템 |
| CN115871332B (zh) * | 2021-09-28 | 2025-10-31 | 广东聚华印刷显示技术有限公司 | 一种喷墨打印装置、喷墨打印方法及喷墨打印系统 |
| CN114103454B (zh) * | 2021-11-22 | 2023-01-10 | Tcl华星光电技术有限公司 | 喷墨打印系统及喷头维护方法 |
| CN118181360B (zh) * | 2024-05-15 | 2024-07-16 | 成都德力斯实业有限公司 | 一种在役核手套箱及其改造方法 |
Family Cites Families (42)
| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2014164932A2 (en) | 2014-10-09 |
| KR20180107319A (ko) | 2018-10-01 |
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| JP2019091702A (ja) | 2019-06-13 |
| CN105190860A (zh) | 2015-12-23 |
| CN105190860B (zh) | 2018-09-21 |
| WO2014164932A3 (en) | 2015-02-26 |
| KR102098613B1 (ko) | 2020-04-08 |
| CN109130549A (zh) | 2019-01-04 |
| EP3474317B1 (en) | 2022-06-22 |
| CN109130549B (zh) | 2021-02-26 |
| JP2016518675A (ja) | 2016-06-23 |
| KR20150131111A (ko) | 2015-11-24 |
| JP7177521B2 (ja) | 2022-11-24 |
| KR102851236B1 (ko) | 2025-08-26 |
| JP6831046B2 (ja) | 2021-02-17 |
| KR101903226B1 (ko) | 2018-10-01 |
| KR102267858B1 (ko) | 2021-06-22 |
| EP3474317A1 (en) | 2019-04-24 |
| EP2973676B1 (en) | 2018-11-28 |
| JP7454878B2 (ja) | 2024-03-25 |
| EP2973676A2 (en) | 2016-01-20 |
| JP6463827B2 (ja) | 2019-02-06 |
| KR20220162809A (ko) | 2022-12-08 |
| KR20200038326A (ko) | 2020-04-10 |
| KR102470120B1 (ko) | 2022-11-22 |
| KR20240146089A (ko) | 2024-10-07 |
| KR20210077007A (ko) | 2021-06-24 |
| JP2018041744A (ja) | 2018-03-15 |
| JP2023010755A (ja) | 2023-01-20 |
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