JP6324425B2 - 六方晶格子を有する半導体ボディにトレンチゲート構造を備えた半導体デバイス - Google Patents
六方晶格子を有する半導体ボディにトレンチゲート構造を備えた半導体デバイス Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims description 103
- 239000013078 crystal Substances 0.000 claims description 92
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 13
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 8
- 239000002019 doping agent Substances 0.000 claims description 6
- 230000007480 spreading Effects 0.000 claims description 6
- 125000006850 spacer group Chemical group 0.000 claims description 4
- 238000009792 diffusion process Methods 0.000 claims 1
- 239000010410 layer Substances 0.000 description 18
- 239000000758 substrate Substances 0.000 description 9
- 230000000903 blocking effect Effects 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 239000002800 charge carrier Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 4
- 125000004432 carbon atom Chemical group C* 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000000407 epitaxy Methods 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- 239000011135 tin Substances 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- -1 FET metal oxide Chemical class 0.000 description 2
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 239000005388 borosilicate glass Substances 0.000 description 2
- 230000000295 complement effect Effects 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 239000005360 phosphosilicate glass Substances 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 229910052718 tin Inorganic materials 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 229910016570 AlCu Inorganic materials 0.000 description 1
- 229910000789 Aluminium-silicon alloy Inorganic materials 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910002601 GaN Inorganic materials 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000005380 borophosphosilicate glass Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000002085 persistent effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- 239000005368 silicate glass Substances 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 description 1
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- H01L29/70—Bipolar devices
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- H01L29/739—Transistor-type devices, i.e. able to continuously respond to applied control signals controlled by field-effect, e.g. bipolar static induction transistors [BSIT]
- H01L29/7393—Insulated gate bipolar mode transistors, i.e. IGBT; IGT; COMFET
- H01L29/7395—Vertical transistors, e.g. vertical IGBT
- H01L29/7396—Vertical transistors, e.g. vertical IGBT with a non planar surface, e.g. with a non planar gate or with a trench or recess or pillar in the surface of the emitter, base or collector region for improving current density or short circuiting the emitter and base regions
- H01L29/7397—Vertical transistors, e.g. vertical IGBT with a non planar surface, e.g. with a non planar gate or with a trench or recess or pillar in the surface of the emitter, base or collector region for improving current density or short circuiting the emitter and base regions and a gate structure lying on a slanted or vertical surface or formed in a groove, e.g. trench gate IGBT
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Description
Claims (21)
- 半導体デバイスにおいて、
六方晶格子を有する半導体ボディ(100)にトレンチゲート構造(150)が設けられており、
第1表面(101)の平均表面(101x)は、<1−100>結晶方向に対し所定のオフ角(α)だけ傾斜しており、
前記オフ角(α)の絶対値は、2°〜12°の範囲にあり、前記トレンチゲート構造(150)は、前記<1−100>結晶方向に沿った向きで延在しており、
隣り合ったトレンチゲート構造(150)の間に、前記半導体ボディ(100)の一部分から成るトランジスタメサ部(170)が形成されており、
前記トランジスタメサ部(170)の側壁は、前記平均表面(101x)に対する法線から、5°を超えない大きさで偏位し、
前記第1表面(101)は、(0001)結晶面により形成された第1表面セクション(101a)と、(1−100)結晶面により形成された第2表面セクション(101b)であって、前記第1表面セクション(101a)に対し傾斜した第2表面セクション(101b)と、から成る、
半導体デバイス。 - 前記第1表面(101)は、鋸歯状の面であり、前記鋸歯状の面は、前記第1表面セクション(101a)と、前記第2表面セクション(101b)と、から成り、前記第2表面セクション(101b)によって、前記第1表面セクション(101a)が互いに連結されている、
請求項1記載の半導体デバイス。 - 前記オフ角(α)は、3°〜8°または−3°〜−8°の範囲にある、
請求項1または2記載の半導体デバイス。 - 前記トレンチゲート構造(150)は、前記平均表面上への<1−100>結晶方向の投影に平行な長手方向軸を有するストリップ形状である、
請求項1から3のいずれか1項記載の半導体デバイス。 - 前記半導体ボディ(100)は、4Hポリタイプの炭化ケイ素を有する、
請求項1から4のいずれか1項記載の半導体デバイス。 - 前記トランジスタメサ部(170)は、ボディゾーン(115)を有しており、
前記ボディゾーン(115)は、ドリフト構造(120)とともに第1pn接合部(pn1)を形成し、ソースゾーン(110)とともに第2pn接合部(pn2)を形成し、
前記ソースゾーン(110)は、前記ボディゾーン(115)と前記第1表面(101)との間に形成されている、
請求項1から5のいずれか1項記載の半導体デバイス。 - ダイオード領域(116)が設けられており、前記ダイオード領域(116)は、前記ドリフト構造(120)とともに第3pn接合部(pn3)を形成しており、前記平均表面(101x)と直交する垂直方向突出部分において隣り合うトレンチゲート構造(150)とオーバラップしている、
請求項6記載の半導体デバイス。 - メサコンタクト構造(305)が設けられており、前記メサコンタクト構造(305)は、前記平均表面(101x)から前記トランジスタメサ部(170)内に延在し、前記ソースゾーン(110)および前記ボディゾーン(115)にじかに隣接している、
請求項6または7記載の半導体デバイス。 - 前記半導体ボディ(100)における前記メサコンタクト構造(305)が垂直方向に延在する長さは、前記トレンチゲート構造(150)が垂直方向に延在する長さと等しいか、または前記長さよりも長い、
請求項8記載の半導体デバイス。 - トレンチコンタクト構造(306)が設けられており、前記トレンチコンタクト構造(306)は、前記第1表面(101)から前記トレンチゲート構造(150)を通って、前記ダイオード領域(116)にじかに隣接している、
請求項7記載の半導体デバイス。 - 前記トレンチコンタクト構造(306)が垂直方向に延在する長さは、前記トレンチゲート構造(150)が垂直方向に延在する長さと等しいか、または前記長さよりも長い、
請求項10記載の半導体デバイス。 - 前記トレンチゲート構造(150)は、個々のトレンチコンタクト構造(306)のそれぞれ反対側に、ゲート電極の第1スペーサ部分(155a)と第2スペーサ部分(155b)とを含んでいる、
請求項10または11記載の半導体デバイス。 - メサコンタクト構造(305)が設けられており、前記メサコンタクト構造(305)は、前記平均表面(101x)から前記トランジスタメサ部(170)内に延在し、前記ソースゾーン(110)および前記ボディゾーン(115)にじかに隣接している、
請求項10から12のいずれか1項記載の半導体デバイス。 - ダイオードメサ部(180)が設けられており、前記ダイオードメサ部(180)は、少なくとも、前記ドリフト構造(120)とともに第3pn接合部(pn3)を形成し、隣り合う2つのトレンチゲート構造(150)とそれぞれじかに隣接しているダイオード領域(116)の部分を含んでおり、
前記トランジスタメサ部(170)と前記ダイオードメサ部(180)とは、前記トレンチゲート構造(150)の長手方向軸に平行な第1水平方向に少なくとも沿って、交互に配置されている、
請求項6項記載の半導体デバイス。 - 前記第1表面(101)と前記第3pn接合部(pn3)との間の距離は、前記第1表面(101)に対し垂直な前記トレンチゲート構造(150)が垂直方向に延在する長さよりも長い、
請求項14記載の半導体デバイス。 - 前記ダイオード領域(116)は、前記トレンチゲート構造(150)の、前記第1表面(101)に対し垂直な突出部分に、遮蔽部分(116b)を含んでいる、
請求項14または15記載の半導体デバイス。 - 前記遮蔽部分(116b)は、前記トランジスタメサ部(170)とオーバラップしていない、
請求項16記載の半導体デバイス。 - 前記トランジスタメサ部(170)と前記ダイオードメサ部(180)とはさらに、前記第1水平方向と直交する第2水平方向に沿って、前記トレンチゲート構造(150)により隔てられて、交互に配置されている、
請求項14から17のいずれか1項記載の半導体デバイス。 - 前記ドリフト構造(120)は、低濃度でドーピングされたドリフトゾーン(121)と、前記ドリフトゾーン(121)と前記ボディゾーン(115)との間に配置された電流拡散ゾーン(122)と、を有しており、前記電流拡散ゾーン(122)の平均正味ドーパント濃度は、前記ドリフトゾーン(121)の平均正味ドーパント濃度の少なくとも2倍高い、
請求項6から18のいずれか1項記載の半導体デバイス。 - 前記トランジスタメサ部(170)の側壁は、(11−20)結晶面である、
請求項1から19のいずれか1項記載の半導体デバイス。 - 前記第1表面(101)は、平坦である、
請求項1記載の半導体デバイス。
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DE102015103067.5 | 2015-03-03 | ||
DE102015103067.5A DE102015103067B3 (de) | 2015-03-03 | 2015-03-03 | Halbleitervorrichtung mit trenchgatestrukturen in einem halbleiterkörper mit hexagonalem kristallgitter |
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JP6911486B2 (ja) * | 2017-04-20 | 2021-07-28 | 富士電機株式会社 | 炭化珪素半導体装置および炭化珪素半導体装置の製造方法 |
JP7067021B2 (ja) * | 2017-11-07 | 2022-05-16 | 富士電機株式会社 | 絶縁ゲート型半導体装置及びその製造方法 |
DE102017128633A1 (de) * | 2017-12-01 | 2019-06-06 | Infineon Technologies Ag | Siliziumcarbid-halbleiterbauelement mit grabengatestrukturen und abschirmgebieten |
JP7151076B2 (ja) | 2017-12-11 | 2022-10-12 | 富士電機株式会社 | 絶縁ゲート型半導体装置 |
JP7384236B2 (ja) | 2017-12-11 | 2023-11-21 | 富士電機株式会社 | 絶縁ゲート型半導体装置 |
DE102017130092A1 (de) * | 2017-12-15 | 2019-06-19 | Infineon Technologies Dresden Gmbh | IGBT mit vollständig verarmbaren n- und p-Kanalgebieten |
IT201800007780A1 (it) * | 2018-08-02 | 2020-02-02 | St Microelectronics Srl | Dispositivo mosfet in carburo di silicio e relativo metodo di fabbricazione |
DE102018120734A1 (de) | 2018-08-24 | 2020-02-27 | Infineon Technologies Ag | Halbleitervorrichtung, die ein übergangsmaterial in einem graben enthält, und herstellungsverfahren |
US11069770B2 (en) * | 2018-10-01 | 2021-07-20 | Ipower Semiconductor | Carrier injection control fast recovery diode structures |
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DE102019212642A1 (de) * | 2019-08-23 | 2021-02-25 | Robert Bosch Gmbh | Vertikaler feldeffekttransistor und verfahren zum ausbilden desselben |
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US11502192B2 (en) * | 2020-04-24 | 2022-11-15 | Stmicroelectronics Pte Ltd | Monolithic charge coupled field effect rectifier embedded in a charge coupled field effect transistor |
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JP5055786B2 (ja) | 2006-02-20 | 2012-10-24 | 富士電機株式会社 | Mos型半導体装置とその製造方法 |
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