JP6317650B2 - 熱空気圧式アクチュエータの作業流体層 - Google Patents
熱空気圧式アクチュエータの作業流体層 Download PDFInfo
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- 238000002955 isolation Methods 0.000 claims description 40
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- 238000004519 manufacturing process Methods 0.000 description 14
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Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14032—Structure of the pressure chamber
- B41J2/14064—Heater chamber separated from ink chamber by a membrane
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
- B41J2/1603—Production of bubble jet print heads of the front shooter type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14387—Front shooter
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Description
Claims (9)
- 複数の熱空気圧式(TP)アクチュエータをTP式アクチュエータのアレイの一部として含む記録ヘッドであって、
前記TP式アクチュエータのアレイが、
基板と、
その中の各抵抗が個々にアドレス可能な複数の抵抗と、
前記基板の上に形成され、前記TP式アクチュエータのアレイ内で隣接するTP式アクチュエータ間に延在する貫通した複数のチャネルを含む隔離層と、
作業流体チャンバと、前記複数のTP式アクチュエータごとのインクチャンバとの間に配置され、前記隔離層に取り付けられるTP作動可能薄膜と、
前記TP作動可能薄膜に取り付けられる支持層であって、前記TP作動可能薄膜が当該支持層と前記隔離層との間に挟まれる支持層と、
前記支持層に取り付けられるノズルプレートと、
前記TP式アクチュエータのアレイの外面に配置される、少なくとも1つの作業流体入口と、
前記TP式アクチュエータのアレイの前記外面に配置される、少なくとも1つの作業流体出口と、
を含み、
前記複数のチャネルがそれぞれ、前記少なくとも1つの作業流体入口および前記少なくとも1つの作業流体出口と流体連通し、
吸引ノズルが1以上の前記作業流体出口に配置され、作業流体を前記作業流体入口に注入する間、前記作業流体出口に吸引力を加えて、前記作業流体を前記複数の作業流体チャンバに通して前記作業流体出口から外に流す、記録ヘッド。 - 前記複数のTP式アクチュエータの各々の前記作業流体チャンバが、前記少なくとも1つの作業流体入口および前記少なくとも1つの作業流体出口と、前記複数のチャネルのうちの少なくとも1つのチャネルを通して流体連通する、請求項1に記載の記録ヘッド。
- 前記複数のTP式アクチュエータの各々の前記作業流体チャンバ内に入る作業流体をさらに含み、前記記録ヘッドの動作中、前記作業流体チャンバの各々内の前記作業流体が、隣接するアクチュエータの前記作業流体チャンバに自由に流れ込む、請求項2に記載の記録ヘッド。
- 前記TP式アクチュエータのアレイの各TP式アクチュエータにおける前記作業流体チャンバは、その内部に通じる少なくとも4つのチャネルを含む、請求項3に記載の記録ヘッド。
- 複数の熱空気圧式(TP)アクチュエータをTP式アクチュエータのアレイの一部として含む記録ヘッドであって、
前記TP式アクチュエータのアレイが、
基板と、
その中の各抵抗が個々にアドレス可能な複数の抵抗と、
前記基板の上に形成され、前記TP式アクチュエータのアレイ内で隣接するTP式アクチュエータ間に延在する貫通した複数のチャネルを含む隔離層と、
作業流体チャンバと、前記複数のTP式アクチュエータごとのインクチャンバとの間に配置され、前記隔離層に取り付けられるTP作動可能薄膜と、
前記TP作動可能薄膜に取り付けられる支持層であって、前記TP作動可能薄膜が当該支持層と前記隔離層との間に挟まれる支持層と、
前記支持層に取り付けられるノズルプレートと、
前記TP式アクチュエータのアレイの外面に配置される、少なくとも1つの作業流体入口と、
前記TP式アクチュエータのアレイの前記外面に配置される、少なくとも1つの作業流体出口と、
を含み、
前記複数のチャネルがそれぞれ、前記少なくとも1つの作業流体入口および前記少なくとも1つの作業流体出口と流体連通し、
吸引ノズルが1以上の前記作業流体出口に配置され、作業流体を前記作業流体入口に注入する間、前記作業流体出口に吸引力を加えて、前記作業流体を前記複数の作業流体チャンバに通して前記作業流体出口から外に流す、記録ヘッドと、
前記記録ヘッドを収納するプリンタ筺体と、を含むプリンタ。 - 前記複数のTP式アクチュエータの各々の前記作業流体チャンバが、前記少なくとも1つの作業流体入口および前記少なくとも1つの作業流体出口と、前記複数のチャネルのうちの少なくとも1つのチャネルを通して流体連通する、請求項5に記載のプリンタ。
- 前記記録ヘッドが、前記複数のTP式アクチュエータの各々の前記作業流体チャンバ内に入る作業流体をさらに含み、
前記記録ヘッドの動作中、前記作業流体チャンバの各々内の前記作業流体が、隣接するアクチュエータの前記作業流体チャンバに自由に流れ込む、請求項6に記載のプリンタ。 - 前記TP式アクチュエータのアレイの各TP式アクチュエータにおける前記作業流体チャンバは、その内部に通じる少なくとも4つのチャネルを含む、請求項7に記載のプリンタ。
- 複数の熱空気圧式(TP)アクチュエータをTP式アクチュエータのアレイの一部として含む記録ヘッドを作成する方法であって、
基板および個々にアドレス可能な複数の抵抗を提供するステップと、
前記基板の上に隔離層を形成するステップと、
前記隔離層にエッチングを施して、前記隔離層を貫通する複数のチャネルを形成するステップと、
前記隔離層を貫通する前記複数のチャネルが複数の作業流体チャンバに通じるように、TP作動可能薄膜を前記隔離層に取り付けて、前記複数の抵抗の上に複数の作業流体チャンバを形成するステップと、
支持層を前記TP作動可能薄膜に取り付けるステップと、
前記隔離層にエッチングを施す間に、前記TP式アクチュエータのアレイの外面に少なくとも1つの作業流体入口を形成するステップと、
前記隔離層にエッチングを施す間に、前記TP式アクチュエータのアレイの前記外面に少なくとも1つの作業流体出口を形成するステップと、
吸引ノズルを1以上の前記作業流体出口に渡って配置するステップと、
前記作業流体が前記複数の作業流体チャンバに流れ込むように、作業流体を前記少なくとも1つの作業流体入口に注入するステップと、
前記作業流体を前記複数の作業流体チャンバに通して前記作業流体出口から外に流すステップと、
前記作業流体を前記作業流体入口に注入する間、前記作業流体出口に吸引力を加えるステップと、
を含み、前記TP作動可能薄膜が前記支持層と前記隔離層との間に挟まれる、方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US14/020,198 US9004651B2 (en) | 2013-09-06 | 2013-09-06 | Thermo-pneumatic actuator working fluid layer |
US14/020,198 | 2013-09-06 |
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JP2015051634A JP2015051634A (ja) | 2015-03-19 |
JP2015051634A5 JP2015051634A5 (ja) | 2017-10-05 |
JP6317650B2 true JP6317650B2 (ja) | 2018-04-25 |
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JPH06996A (ja) | 1992-06-19 | 1994-01-11 | Hitachi Koki Co Ltd | 液滴吐出器 |
US6315398B1 (en) | 1992-10-21 | 2001-11-13 | Xerox Corporation | Thermal ink jet heater design |
US5539437A (en) | 1994-01-10 | 1996-07-23 | Xerox Corporation | Hybrid thermal/hot melt ink jet print head |
GB2286157B (en) | 1994-01-31 | 1998-01-14 | Neopost Ltd | Ink jet printing device |
JP3542460B2 (ja) | 1996-06-07 | 2004-07-14 | キヤノン株式会社 | 液体吐出方法及び液体吐出装置 |
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KR100209498B1 (ko) | 1996-11-08 | 1999-07-15 | 윤종용 | 서로 다른 열팽창 계수 특성을 지닌 다중 멤브레인을 갖는 잉크젯 프린터의 분사장치 |
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KR100251132B1 (ko) | 1998-04-14 | 2000-04-15 | 윤종용 | 멤브레인을 이용한 잉크젯 프린트헤드 |
JP3728137B2 (ja) | 1998-04-16 | 2005-12-21 | キヤノン株式会社 | 液体吐出ヘッドの製造方法 |
JP3571929B2 (ja) * | 1998-09-10 | 2004-09-29 | キヤノン株式会社 | 液体吐出ヘッドおよび液体吐出装置 |
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KR20010045298A (ko) | 1999-11-04 | 2001-06-05 | 윤종용 | 잉크를 이용한 열압축방식의 유체분사장치 |
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JP2001162804A (ja) | 1999-12-10 | 2001-06-19 | Canon Inc | 液体吐出ヘッド、ヘッドカートリッジおよび液体吐出装置 |
US6312109B1 (en) | 2000-01-12 | 2001-11-06 | Pamelan Company Limited | Ink-jet head with bubble-driven flexible membrane |
US6705716B2 (en) | 2001-10-11 | 2004-03-16 | Hewlett-Packard Development Company, L.P. | Thermal ink jet printer for printing an image on a receiver and method of assembling the printer |
JP2007112099A (ja) * | 2005-10-24 | 2007-05-10 | Riso Kagaku Corp | インクジェット記録装置 |
JP2010023397A (ja) * | 2008-07-23 | 2010-02-04 | Canon Finetech Inc | 液体吐出ヘッド |
US8113627B2 (en) * | 2009-06-19 | 2012-02-14 | Eastman Kodak Company | Micro-fluidic actuator for inkjet printers |
-
2013
- 2013-09-06 US US14/020,198 patent/US9004651B2/en not_active Expired - Fee Related
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2014
- 2014-08-27 JP JP2014172399A patent/JP6317650B2/ja active Active
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US9004651B2 (en) | 2015-04-14 |
US20150070441A1 (en) | 2015-03-12 |
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