JP6314295B1 - 半導体デバイス及びその製造方法 - Google Patents
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 86
- 238000004519 manufacturing process Methods 0.000 title claims description 16
- 239000000758 substrate Substances 0.000 claims abstract description 86
- 230000002093 peripheral effect Effects 0.000 claims abstract description 63
- 239000010410 layer Substances 0.000 description 42
- 238000010586 diagram Methods 0.000 description 11
- 229910052751 metal Inorganic materials 0.000 description 11
- 239000002184 metal Substances 0.000 description 11
- 239000012535 impurity Substances 0.000 description 7
- 229920005989 resin Polymers 0.000 description 7
- 239000011347 resin Substances 0.000 description 7
- 239000011241 protective layer Substances 0.000 description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 239000003822 epoxy resin Substances 0.000 description 4
- 239000010931 gold Substances 0.000 description 4
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 4
- 229920000647 polyepoxide Polymers 0.000 description 4
- 229910052814 silicon oxide Inorganic materials 0.000 description 4
- 229910000679 solder Inorganic materials 0.000 description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/861—Diodes
- H01L29/866—Zener diodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/12—Mountings, e.g. non-detachable insulating substrates
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/861—Diodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/861—Diodes
- H01L29/868—PIN diodes
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- Computer Hardware Design (AREA)
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- Semiconductor Integrated Circuits (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Abstract
Description
図1〜5は、本発明の第1実施形態に係る半導体デバイス100の構成を概略的に示す図である。具体的には、図1は、半導体デバイス100を表面側から見た斜視図である。図2は、半導体デバイス100を裏面側から見た斜視図である。図3は、半導体デバイス100を表面から見た平面図である。また、図4は、半導体デバイス100を裏面から見た平面図である。また、図5は、図3における半導体デバイス100のAA´断面図である。以下、各図を参照して、本発明の第1実施形態に係る半導体デバイス100について説明する。なお、図1〜図5においては、半導体デバイス100の構造における特徴の少なくとも一部を説明するのに必要な構成を抽出して記載しているが、半導体デバイス100が不図示の構成を備えることを妨げるものではない。
第2の実施形態以降では第1の実施形態と共通の事柄についての記述を省略し、異なる点についてのみ説明する。特に、同様の構成による同様の作用効果については実施形態毎には逐次言及しない。
図8は、第3実施形態に係る半導体デバイス100を裏面から見た平面図である。本実施形態では、矩形形状を有する基板10の四隅に、それぞれ、端子電極80A〜Dが設けられている。
図9を参照して、第1実施形態(図1〜図5)に係る半導体デバイス100を例に、半導体デバイス100の製造フローを説明する。なお、図9では、説明の便宜上、1つの半導体デバイス100に着目してその製造フローを説明するが、実際には、基板10に多数の半導体デバイス100が同一のプロセスで同時に形成される。
Claims (3)
- 第1主面、第2主面、及び側面を有する基板と、
前記基板において前記第1主面側に設けられ、半導体素子が形成された素子領域と、
前記第1主面上に設けられ、前記半導体素子に電気的に接続された複数の端子電極を含む配線層と
を備え、
前記基板は、前記第1主面の平面視において、前記基板の周縁に形成される複数の周縁領域を有し、
前記第1主面の平面視において、前記複数の端子電極のそれぞれは、前記複数の周縁領域のそれぞれに隣接し、
前記第1主面の平面視において、前記複数の端子電極及び前記素子領域は、前記複数の周縁領域よりも内側に位置し、
前記複数の周縁領域は互いに絶縁されており、前記素子領域及び前記複数の端子電極は前記複数の周縁領域と絶縁され、
前記基板は、前記複数の周縁領域のそれぞれの間、及び、前記複数の周縁領域のそれぞれと前記素子領域との間において、前記第1主面から前記第2主面に貫通するように設けられた絶縁部を有し、
前記絶縁部は、前記複数の周縁領域を互いに絶縁し、前記複数の周縁領域と前記素子領域とを絶縁する、半導体デバイス。 - 第1主面、第2主面及び側面を有する基板において、前記第1主面側に設けられ、半導体素子が形成された素子領域を形成する工程と、
前記第1主面上に設けられ、前記半導体素子に電気的に接続された複数の端子電極を含む配線層を形成する工程と、
前記第1主面の平面視において、前記基板の周縁に形成された複数の周縁領域と、前記素子領域との間に、前記第1主面から前記第2主面に貫通するように設けられた絶縁部を形成する工程と
を含み、
前記配線層を形成する工程は、前記第1主面の平面視において、前記複数の端子電極のそれぞれが前記複数の周縁領域のそれぞれに隣接するように、かつ、前記複数の周縁領域よりも内側に位置するように、当該複数の端子電極を形成する工程を含み、
前記素子領域を形成する工程は、前記第1主面の平面視において、前記素子領域が前記複数の周縁領域よりも内側に位置するように、当該素子領域を形成する工程を含む、半導体デバイスの製造方法。 - 前記絶縁部を形成する工程は、
前記基板の前記第1主面において、前記第2主面に向かう方向にトレンチを形成する工程と、
前記トレンチの内側に絶縁層を形成する工程と、
前記基板を前記第2主面側から削り、前記第2主面において前記絶縁層を露出させる工程と
を含む、請求項2に記載の半導体デバイスの製造方法。
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JP2016181269 | 2016-09-16 | ||
JP2016181269 | 2016-09-16 | ||
PCT/JP2017/030155 WO2018051749A1 (ja) | 2016-09-16 | 2017-08-23 | 半導体デバイス及びその製造方法 |
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JP6314295B1 true JP6314295B1 (ja) | 2018-04-18 |
JPWO2018051749A1 JPWO2018051749A1 (ja) | 2018-09-13 |
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JP (1) | JP6314295B1 (ja) |
CN (1) | CN208028042U (ja) |
WO (1) | WO2018051749A1 (ja) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03171660A (ja) * | 1989-11-29 | 1991-07-25 | Fujitsu Ltd | 半導体装置 |
JPH08204130A (ja) * | 1995-01-24 | 1996-08-09 | Nippondenso Co Ltd | 半導体集積回路装置 |
JP2000200905A (ja) * | 1999-01-06 | 2000-07-18 | Nissan Motor Co Ltd | 半導体装置 |
WO2007119278A1 (ja) * | 2006-03-17 | 2007-10-25 | Nec Corporation | 半導体装置 |
JP2008235372A (ja) * | 2007-03-16 | 2008-10-02 | Toyota Motor Corp | 半導体装置とその使用方法 |
-
2017
- 2017-08-23 JP JP2018502267A patent/JP6314295B1/ja active Active
- 2017-08-23 CN CN201790000368.5U patent/CN208028042U/zh active Active
- 2017-08-23 WO PCT/JP2017/030155 patent/WO2018051749A1/ja active Application Filing
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03171660A (ja) * | 1989-11-29 | 1991-07-25 | Fujitsu Ltd | 半導体装置 |
JPH08204130A (ja) * | 1995-01-24 | 1996-08-09 | Nippondenso Co Ltd | 半導体集積回路装置 |
JP2000200905A (ja) * | 1999-01-06 | 2000-07-18 | Nissan Motor Co Ltd | 半導体装置 |
WO2007119278A1 (ja) * | 2006-03-17 | 2007-10-25 | Nec Corporation | 半導体装置 |
JP2008235372A (ja) * | 2007-03-16 | 2008-10-02 | Toyota Motor Corp | 半導体装置とその使用方法 |
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CN208028042U (zh) | 2018-10-30 |
JPWO2018051749A1 (ja) | 2018-09-13 |
WO2018051749A1 (ja) | 2018-03-22 |
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