JP6308904B2 - 試料ホルダ、荷電粒子線装置および観察方法 - Google Patents

試料ホルダ、荷電粒子線装置および観察方法 Download PDF

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Publication number
JP6308904B2
JP6308904B2 JP2014152939A JP2014152939A JP6308904B2 JP 6308904 B2 JP6308904 B2 JP 6308904B2 JP 2014152939 A JP2014152939 A JP 2014152939A JP 2014152939 A JP2014152939 A JP 2014152939A JP 6308904 B2 JP6308904 B2 JP 6308904B2
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Prior art keywords
sample
gear
rotation
jig
pin
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JP2014152939A
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Japanese (ja)
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JP2016031805A5 (enExample
JP2016031805A (ja
Inventor
智一 島倉
智一 島倉
高橋　由夫
由夫 高橋
鹿島　秀夫
秀夫 鹿島
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Hitachi Ltd
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Hitachi Ltd
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Priority to JP2014152939A priority Critical patent/JP6308904B2/ja
Priority to DE102015213764.3A priority patent/DE102015213764B4/de
Priority to US14/810,673 priority patent/US9773640B2/en
Publication of JP2016031805A publication Critical patent/JP2016031805A/ja
Publication of JP2016031805A5 publication Critical patent/JP2016031805A5/ja
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/202—Movement
    • H01J2237/20214—Rotation

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP2014152939A 2014-07-28 2014-07-28 試料ホルダ、荷電粒子線装置および観察方法 Active JP6308904B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2014152939A JP6308904B2 (ja) 2014-07-28 2014-07-28 試料ホルダ、荷電粒子線装置および観察方法
DE102015213764.3A DE102015213764B4 (de) 2014-07-28 2015-07-22 Probenhalter, Vorrichtung für einen Strahl geladener Teilchen und Beobachtungsverfahren
US14/810,673 US9773640B2 (en) 2014-07-28 2015-07-28 Sample holder, charged particle beam apparatus, and observation method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014152939A JP6308904B2 (ja) 2014-07-28 2014-07-28 試料ホルダ、荷電粒子線装置および観察方法

Publications (3)

Publication Number Publication Date
JP2016031805A JP2016031805A (ja) 2016-03-07
JP2016031805A5 JP2016031805A5 (enExample) 2016-11-17
JP6308904B2 true JP6308904B2 (ja) 2018-04-11

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JP2014152939A Active JP6308904B2 (ja) 2014-07-28 2014-07-28 試料ホルダ、荷電粒子線装置および観察方法

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US (1) US9773640B2 (enExample)
JP (1) JP6308904B2 (enExample)
DE (1) DE102015213764B4 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9734985B2 (en) * 2015-07-01 2017-08-15 Kabushiki Kaisha Toshiba Analytical apparatus, sample holder and analytical method
DE102015215323A1 (de) * 2015-08-11 2017-02-16 Georg-August-Universität Göttingen Stiftung Öffentlichen Rechts Technik zur tomografischen Bilderfassung
US11257656B2 (en) 2020-04-08 2022-02-22 Fei Company Rotating sample holder for random angle sampling in tomography

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5153434A (en) 1990-05-18 1992-10-06 Hitachi, Ltd. Electron microscope and method for observing microscopic image
US6410925B1 (en) 2000-07-31 2002-06-25 Gatan, Inc. Single tilt rotation cryotransfer holder for electron microscopes
JP2008107226A (ja) * 2006-10-26 2008-05-08 Jeol Ltd 試料作成装置
JP5268324B2 (ja) 2007-10-29 2013-08-21 株式会社日立ハイテクノロジーズ 荷電粒子線顕微装置及び顕微方法
DE102009001587A1 (de) * 2009-01-06 2010-07-08 Carl Zeiss Nts Gmbh Verfahren zur Einstellung eines Betriebsparameters eines Teilchenstrahlgeräts sowie Probenhalter zur Durchführung des Verfahrens
JP5250470B2 (ja) 2009-04-22 2013-07-31 株式会社日立ハイテクノロジーズ 試料ホールダ，該試料ホールダの使用法、及び荷電粒子装置
US8089053B1 (en) * 2009-11-10 2012-01-03 Dudley Finch Dynamically tilting specimen holder for stereo and tomographic imaging in a transmission electron microscope using a combination of micro electro mechanical systems (MEMS) and piezoelectric transducers (PZTs)
JP5403560B2 (ja) * 2010-11-17 2014-01-29 コリア ベイシック サイエンス インスティテュート 透過電子顕微鏡の、３方向以上から試片を観察し分析するための３軸駆動が可能な試片ホルダー
JP5883658B2 (ja) 2012-01-20 2016-03-15 株式会社日立ハイテクノロジーズ 荷電粒子線顕微鏡、荷電粒子線顕微鏡用試料ホルダ及び荷電粒子線顕微方法

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Publication number Publication date
US20160035535A1 (en) 2016-02-04
DE102015213764A1 (de) 2016-01-28
JP2016031805A (ja) 2016-03-07
US9773640B2 (en) 2017-09-26
DE102015213764B4 (de) 2018-05-30

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