JP6290888B2 - 透明oled光抽出器 - Google Patents
透明oled光抽出器 Download PDFInfo
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- H10K59/875—Arrangements for extracting light from the devices
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- H10K50/858—Arrangements for extracting light from the devices comprising refractive means, e.g. lenses
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- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
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Description
本出願は、本明細書と同日付で出願された米国特許出願「MICROCAVITY OLED LIGHT EXTRACTION」(代理人整理番号第70115US002号)に関するものであり、これは本明細書において参照として組み込まれる。
D510安定した50nm TiO2ナノ粒子分散液の調製
およそ52%重量パーセントのTiO2で分散したTiO2ナノ粒子をSOLPLUS D510と1−メトキシ−2−プロパノールとの存在下で、粉砕工程を用いて調製した。SOLPLUS D510をTiO2の重量に基づいて25重量パーセントの量で加えた。混合物を10分間DISPERMATミキサー(Paul N.Gardner Company,Inc.(Pompano Beach,FL))を用いてあらかじめ混合し、次に、NETZSCH MiniCer Mill(NETZSCH Premier Technologies,LLC.(Exton,PA))を4300rpm、0.2mm YTZ粉砕媒体、及び250mL/分の流量の条件で用いた。1時間の粉砕後、1−メトキシ−2−プロパノール中に分散した白いペースト状のTiO2を得た。粒径は、Malvern Instruments ZETASIZER Nano ZS(Malvern Instruments Inc(Westborough,MA))を用いて50nm(Z−平均粒子径)であると判定された。
20gのD510安定した50nm TiO2溶液と、2.6gのSR833Sと、0.06gのIRGACURE 184と、25.6gの1−メトキシ−2−プロパノールと、38.4gの2−ブタノンと、を混合して、均一の高屈折率バックフィル溶液を調整した。
最初に(合成単結晶ダイヤモンド(Sumitomo Diamond(Japan))を使用して)米国特許第7,140,812号に記載されるような多重先端ダイヤモンド工具を作製することにより、400nm「鋸歯状」格子フィルムを製造した。
上部発光(TE)OLED試験クーポンは、約10−6トール(0.0001Pa)の基礎圧力において、真空系において標準的な熱堆積を使用して、形成された。基材は、正方形の構成で4つの5×5mm画素を生成するようにパターン化された、0.5μm厚さのフォトレジストコーティング、及び80nm ITOコーティングを備える、研磨したフロートガラス上に作製された。正方形の寸法を4×4mmに縮小し、はっきりと画定された画素縁部をもたらすように、画素画定層(PDL)が適用された。以下の構造が形成された:
基材/80nm ITO下部電極(カソード)/20nm EIL/25nm ETL/30nm EML/10nm HTL2/165nm HTL1/100nm HIL/80nm ITO上部電極(アノード)/200nm MoO3キャッピング層(CPL)。
透明なOLED装置は、実施例1に記載される手順に従って構築及び評価されるが、ガラス封入の直前に、200nm厚さのAgフィルムが4つの画素全てに真空堆積されて(対照画素、及びナノ構造取り出しフィルムが積層された画素の両方)光を底部発光(BE)側のみに方向を変更した。
400nmの構造を有するPETフィルムが、「400nmピッチを有するナノ構造化フィルムの作製」に記載されるように調整されたが、バックフィルは適用されなかった。フィルムは、0.66m(26インチ)のより低電力の電極による反応性イオンエッチング(RIE)、及び中央ガスポンピングに向けて構成された、市販のバッチプラズマシステム(Plasma−Therm,St.Petersburg,FLより入手可能なPlasma−Therm Model 3032)を使用してプラズマ処理された。チャンバは、乾式機械ポンプ(Edwards US,Sanborn,NYより入手可能なEdwards Model iQDP80)を取り付けたルーツ送風機(Edwards US,Sanborn,NYより入手可能なEdwards Model EH1200)によりポンピングされた。RF出力は、インピーダンス整合ネットワークを通じて3kW、13.56MHzのソリッドステート発生器(RF Power Products,Inc.,Voorhees,NJより入手可能なRFPP Model RF30S)によって供給した。システムは、5mTorr(0.7Pa)の公称基本圧力を有する。ガス流量は、MKS流量調整装置(MKS Instruments,Andover,MA)によって制御した。サンプルはバッチプラズマ装置の低電力電極上に配置された。表面調整工程は、500標準状態cm3/分の流量、200ワットのプラズマ電力で、30秒にわたり、O2を流すことにより行われた。プラズマ処理は、テトラメチルシランガスを150標準状態cm3/分の流量、200Wのプラズマ出力で120秒間流すことによって行われた。堆積中の圧力は、およそ20mTorr(2.7Pa)であった。ポストエッチは、500標準状態cm3/分の流量、300ワットのプラズマ電力で、20秒にわたり、O2を流すことにより行われた。プラズマ処理が完了した後、チャンバを大気に通気し、サンプルを取り出した。
Claims (3)
- 発光装置であって、
上部電極及び背面板上に配置された反対側の下部電極を有する有機発光ダイオード(OLED)装置であって、前記上部電極、前記反対側の下部電極、及び前記背面板はそれぞれ、前記OLED装置により発される光に対して実質的に透明である、有機発光ダイオード(OLED)装置と、
前記上部電極と直接隣接するように配置されたキャッピング層と、
前記キャッピング層と隣接するように配置された光取り出しフィルムと、を備え、
前記光取り出しフィルムは、前記OLED装置により発された光が背面板を通過するようにOLED装置により発された光を反射する材料を含む基材、前記基材に適用されたナノ構造の層、及び前記ナノ構造の上に、前記キャッピング層と隣接するように配置されたバックフィル層を含み、前記バックフィル層は前記ナノ構造の屈折率よりも高い屈折率を有する、
発光装置。 - 発光装置のアレイを含む、アクティブマトリックス有機発光ダイオード(AMOLED)装置であって、
各発光装置は、
上部電極及び背面板上に配置された反対側の下部電極を有する有機発光ダイオード(OLED)装置であって、前記上部電極、前記反対側の下部電極、及び前記背面板はそれぞれ、前記OLED装置により発される光に対して実質的に透明である、有機発光ダイオード(OLED)装置と、
前記上部電極と直接隣接するように配置されたキャッピング層と、
発光装置の前記アレイの上に配置された光取り出しフィルムであって、前記光取り出しフィルムは前記キャッピング層と隣接する、光取り出しフィルムと、を備え、
前記光取り出しフィルムは、前記OLED装置により発された光が背面板を通過するようにOLED装置により発された光を反射する材料を含む基材、前記基材に適用されたナノ構造の層、及び前記ナノ構造の上に、前記キャッピング層と隣接するように配置されたバックフィル層を含み、前記バックフィル層は前記ナノ構造の屈折率よりも高い屈折率を有する、
アクティブマトリックス有機発光ダイオード装置。 - 複数の発光装置を備える画像表示装置であって、
各発光装置は、
上部電極及び背面板上に配置された反対側の下部電極を有する有機発光ダイオード(OLED)装置であって、前記上部電極、前記反対側の下部電極、及び前記背面板はそれぞれ、前記OLED装置により発される光に対して実質的に透明である、有機発光ダイオード(OLED)装置と、
前記上部電極と直接隣接するように配置されたキャッピング層と、
前記キャッピング層と隣接するように配置された光取り出しフィルムと、
前記発光装置をそれぞれ起動することができる電子回路と
を含み、
前記光取り出しフィルムは、前記OLED装置により発された光が背面板を通過するようにOLED装置により発された光を反射する材料を含む基材、前記基材に適用されたナノ構造の層、及び前記ナノ構造の上に、前記キャッピング層と隣接するように配置されたバックフィル層を含み、前記バックフィル層は前記ナノ構造の屈折率よりも高い屈折率を有する、
画像表示装置。
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US61/691,945 | 2012-08-22 | ||
PCT/US2013/055043 WO2014031421A1 (en) | 2012-08-22 | 2013-08-15 | Transparent oled light extraction |
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Families Citing this family (43)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP4391768A2 (en) * | 2014-07-24 | 2024-06-26 | Universal Display Corporation | Oled device having enhancement layer(s) |
KR102355605B1 (ko) * | 2014-11-20 | 2022-01-26 | 엘지디스플레이 주식회사 | 유기발광다이오드 표시장치 및 그 제조방법 |
CN105244453B (zh) * | 2015-09-22 | 2017-08-25 | 深圳市华星光电技术有限公司 | 一种有机发光器件 |
KR101702570B1 (ko) * | 2015-10-30 | 2017-02-03 | 엘지디스플레이 주식회사 | 투명 유기 발광 표시 장치 |
CN105355798A (zh) * | 2015-11-25 | 2016-02-24 | 京东方科技集团股份有限公司 | 有机电致发光器件及其制作方法、显示装置 |
DE102016101872A1 (de) * | 2016-02-03 | 2017-08-03 | Osram Oled Gmbh | Leuchte und Verfahren zum Herstellen einer Leuchte |
BR112018067494B1 (pt) | 2016-03-03 | 2022-05-10 | The Procter & Gamble Company | Composição anticaspa em aerossol |
KR20180125018A (ko) | 2016-04-05 | 2018-11-21 | 코닝 인코포레이티드 | 향상된 광 추출을 갖춘 패턴화된 유기 발광 다이오드(oled) |
EP3443598B1 (en) * | 2016-04-15 | 2019-08-14 | Lumileds Holding B.V. | Broadband mirror, light emitting diode comprising a broadband mirror and manufacturing method of the broadband mirror. |
WO2017205174A1 (en) * | 2016-05-27 | 2017-11-30 | 3M Innovative Properties Company | Oled display with improved color uniformity |
US20180097202A1 (en) * | 2016-10-03 | 2018-04-05 | Regents Of The University Of Michigan | Enhanced oled outcoupling by suppressing surface plasmon modes |
BR112019007682B1 (pt) | 2016-10-21 | 2022-08-16 | The Procter & Gamble Company | Produtos de xampu compactos estáveis com baixa viscosidade e agente redutor de viscosidade |
CN109843258A (zh) | 2016-10-21 | 2019-06-04 | 宝洁公司 | 表示毛发调理有益效果的浓缩型洗发剂泡沫剂型 |
WO2018075841A1 (en) | 2016-10-21 | 2018-04-26 | The Procter & Gamble Company | Concentrated shampoo dosage of foam for providing hair care benefits |
CN109843252A (zh) | 2016-10-21 | 2019-06-04 | 宝洁公司 | 指定毛发体积有益效果的浓缩型洗发剂泡沫剂型 |
FR3059788B1 (fr) | 2016-12-02 | 2019-01-25 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Dispositif optoelectronique a diode electroluminescente a extraction augmentee |
FR3059828B1 (fr) | 2016-12-02 | 2019-05-31 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Dispositif optoelectronique a diode electroluminescente a extraction augmentee |
US11224567B2 (en) | 2017-06-06 | 2022-01-18 | The Procter And Gamble Company | Hair compositions comprising a cationic polymer/silicone mixture providing improved in-use wet feel |
US11141370B2 (en) | 2017-06-06 | 2021-10-12 | The Procter And Gamble Company | Hair compositions comprising a cationic polymer mixture and providing improved in-use wet feel |
US11679073B2 (en) | 2017-06-06 | 2023-06-20 | The Procter & Gamble Company | Hair compositions providing improved in-use wet feel |
CN107528008B (zh) * | 2017-08-18 | 2020-03-06 | 京东方科技集团股份有限公司 | 有机发光显示器件及制备方法、显示装置 |
CN109427845B (zh) * | 2017-08-25 | 2021-02-09 | 京东方科技集团股份有限公司 | 显示面板及其制作方法、电致发光器件、显示装置 |
CN107492317B (zh) * | 2017-09-29 | 2024-05-17 | 京东方科技集团股份有限公司 | 一种显示装置 |
EP3694479A1 (en) | 2017-10-10 | 2020-08-19 | The Procter and Gamble Company | A method of treating hair or skin with a personal care composition in a foam form |
JP6945746B2 (ja) | 2017-10-10 | 2021-10-06 | ザ プロクター アンド ギャンブル カンパニーThe Procter & Gamble Company | サルフェートフリーの界面活性剤を含有するコンパクトなシャンプー組成物 |
EP4400092A2 (en) | 2017-10-10 | 2024-07-17 | The Procter & Gamble Company | Compact shampoo composition with amino acid based anionic surfactants and cationic polymers |
EP4108228A1 (en) | 2017-10-10 | 2022-12-28 | The Procter & Gamble Company | Sulfate free clear personal cleansing composition comprising low inorganic salt |
US11024775B2 (en) * | 2017-10-17 | 2021-06-01 | Lumileds Llc | LED emitters with integrated nano-photonic structures to enhance EQE |
JP2021533524A (ja) | 2018-06-06 | 2021-12-02 | コーニング インコーポレイテッド | 光抽出装置及びoledディスプレイ |
US11318073B2 (en) | 2018-06-29 | 2022-05-03 | The Procter And Gamble Company | Low surfactant aerosol antidandruff composition |
US10600980B1 (en) | 2018-12-18 | 2020-03-24 | Sharp Kabushiki Kaisha | Quantum dot light-emitting diode (LED) with roughened electrode |
WO2020185446A1 (en) | 2019-03-08 | 2020-09-17 | Array Photonics, Inc. | Electronic devices having displays with infrared components behind the displays |
KR102152124B1 (ko) | 2019-03-13 | 2020-09-04 | (주)사나이시스템 | 발광소자 내부 전기장 분포를 계산할 수 있는 광학 시뮬레이터 및 그 동작 방법 |
KR102132907B1 (ko) | 2019-07-15 | 2020-07-13 | (주)사나이시스템 | 광학 시뮬레이션 장치 및 그 방법 |
KR102164929B1 (ko) | 2019-08-28 | 2020-10-13 | (주)사나이시스템 | 모든 광 모드에 적용 가능한 광학 시뮬레이션 장치 및 그 방법 |
DE102019124950A1 (de) | 2019-09-17 | 2021-03-18 | Christian-Albrechts-Universität Zu Kiel | OLED-Wellenleiteranordnung sowie Herstellungsverfahren dazu |
EP4069375A1 (en) | 2019-12-06 | 2022-10-12 | The Procter & Gamble Company | Sulfate free composition with enhanced deposition of scalp active |
US11679065B2 (en) | 2020-02-27 | 2023-06-20 | The Procter & Gamble Company | Compositions with sulfur having enhanced efficacy and aesthetics |
CN115997488A (zh) * | 2020-08-20 | 2023-04-21 | 应用材料公司 | Oled光场架构 |
MX2023005963A (es) | 2020-12-04 | 2023-06-07 | Procter & Gamble | Composiciones para el cuidado del cabello que comprenden materiales de reduccion del mal olor. |
US11985841B2 (en) | 2020-12-07 | 2024-05-14 | Oti Lumionics Inc. | Patterning a conductive deposited layer using a nucleation inhibiting coating and an underlying metallic coating |
US11771635B2 (en) | 2021-05-14 | 2023-10-03 | The Procter & Gamble Company | Shampoo composition |
US11986543B2 (en) | 2021-06-01 | 2024-05-21 | The Procter & Gamble Company | Rinse-off compositions with a surfactant system that is substantially free of sulfate-based surfactants |
Family Cites Families (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6433355B1 (en) * | 1996-06-05 | 2002-08-13 | International Business Machines Corporation | Non-degenerate wide bandgap semiconductors as injection layers and/or contact electrodes for organic electroluminescent devices |
US5952778A (en) * | 1997-03-18 | 1999-09-14 | International Business Machines Corporation | Encapsulated organic light emitting device |
US6432137B1 (en) * | 1999-09-08 | 2002-08-13 | Medennium, Inc. | High refractive index silicone for use in intraocular lenses |
US20070216300A1 (en) * | 2002-04-04 | 2007-09-20 | International Display Systems, Inc. | Organic opto-electronic device with environmentally protective barrier |
US7140812B2 (en) | 2002-05-29 | 2006-11-28 | 3M Innovative Properties Company | Diamond tool with a multi-tipped diamond |
US6933051B2 (en) * | 2002-08-17 | 2005-08-23 | 3M Innovative Properties Company | Flexible electrically conductive film |
JP4401657B2 (ja) * | 2003-01-10 | 2010-01-20 | 株式会社半導体エネルギー研究所 | 発光装置の製造方法 |
KR100563046B1 (ko) * | 2003-03-06 | 2006-03-24 | 삼성에스디아이 주식회사 | 유기 전계 발광 표시 장치 |
KR100999974B1 (ko) | 2003-03-12 | 2010-12-13 | 미쓰비시 가가꾸 가부시키가이샤 | 일렉트로루미네센스 소자 |
US20060063015A1 (en) | 2004-09-23 | 2006-03-23 | 3M Innovative Properties Company | Protected polymeric film |
JP4511440B2 (ja) * | 2004-10-05 | 2010-07-28 | 三星モバイルディスプレイ株式會社 | 有機発光素子及び有機発光素子の製造方法 |
US20070020451A1 (en) | 2005-07-20 | 2007-01-25 | 3M Innovative Properties Company | Moisture barrier coatings |
US20080006819A1 (en) * | 2006-06-19 | 2008-01-10 | 3M Innovative Properties Company | Moisture barrier coatings for organic light emitting diode devices |
DE102006040788B4 (de) * | 2006-08-31 | 2013-02-07 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Integrierter Optokoppler mit organischem Lichtemitter und anorganischem Photodetektor |
KR100796603B1 (ko) * | 2006-11-28 | 2008-01-21 | 삼성에스디아이 주식회사 | 유기전계발광소자 및 그의 제조방법 |
US7982396B2 (en) * | 2007-06-04 | 2011-07-19 | Global Oled Technology Llc | Light-emitting device with light-scattering particles and method of making the same |
US20090015142A1 (en) | 2007-07-13 | 2009-01-15 | 3M Innovative Properties Company | Light extraction film for organic light emitting diode display devices |
US8179034B2 (en) | 2007-07-13 | 2012-05-15 | 3M Innovative Properties Company | Light extraction film for organic light emitting diode display and lighting devices |
JP5214284B2 (ja) * | 2008-03-10 | 2013-06-19 | 株式会社東芝 | 発光装置用光取り出し層、およびそれを用いた有機エレクトロルミネッセンス素子 |
EP2434840A1 (en) * | 2008-04-22 | 2012-03-28 | Zeon Corporation | Organic electroluminescent light source |
JP4909323B2 (ja) * | 2008-07-25 | 2012-04-04 | 住友化学株式会社 | アクティブマトリクス基板、ディスプレイパネル、表示装置およびアクティブマトリクス基板の製造方法 |
US20100110551A1 (en) | 2008-10-31 | 2010-05-06 | 3M Innovative Properties Company | Light extraction film with high index backfill layer and passivation layer |
US20100128351A1 (en) | 2008-11-21 | 2010-05-27 | 3M Innovative Properties Company | Curved sided cone structures for controlling gain and viewing angle in an optical film |
US7957621B2 (en) * | 2008-12-17 | 2011-06-07 | 3M Innovative Properties Company | Light extraction film with nanoparticle coatings |
US8538224B2 (en) * | 2010-04-22 | 2013-09-17 | 3M Innovative Properties Company | OLED light extraction films having internal nanostructures and external microstructures |
US8879067B2 (en) * | 2010-09-01 | 2014-11-04 | Lake Shore Cryotronics, Inc. | Wavelength dependent optical force sensing |
TWI562422B (en) * | 2010-12-16 | 2016-12-11 | Semiconductor Energy Lab Co Ltd | Light-emitting device and lighting device |
JP5386525B2 (ja) * | 2011-02-15 | 2014-01-15 | 株式会社半導体エネルギー研究所 | 発光装置及び発光装置の作製方法 |
US8692446B2 (en) | 2011-03-17 | 2014-04-08 | 3M Innovative Properties Company | OLED light extraction films having nanoparticles and periodic structures |
JP5672108B2 (ja) * | 2011-03-29 | 2015-02-18 | 日本ゼオン株式会社 | 面発光素子及び照明器具 |
US8659221B2 (en) | 2011-08-26 | 2014-02-25 | 3M Innovative Properties Company | OLED light extraction film with multi-periodic zones of nanostructures |
JP2012109262A (ja) * | 2012-01-30 | 2012-06-07 | Japan Display Central Co Ltd | 発光装置 |
KR102079583B1 (ko) | 2012-02-28 | 2020-04-07 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 광학 커플링 층에 적합한 표면 개질된 고굴절률 나노입자를 포함하는 조성물 |
KR20150046116A (ko) | 2012-08-22 | 2015-04-29 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 마이크로캐비티 oled 광 추출 |
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2013
- 2013-08-15 KR KR1020157006628A patent/KR102140985B1/ko active IP Right Grant
- 2013-08-15 CN CN201810706881.7A patent/CN108878685A/zh active Pending
- 2013-08-15 US US14/420,747 patent/US9537116B2/en active Active
- 2013-08-15 JP JP2015528530A patent/JP6290888B2/ja active Active
- 2013-08-15 CN CN201380046403.3A patent/CN104813500B/zh active Active
- 2013-08-15 WO PCT/US2013/055043 patent/WO2014031421A1/en active Application Filing
-
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- 2016-12-29 US US15/393,968 patent/US20170110690A1/en not_active Abandoned
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KR20150046128A (ko) | 2015-04-29 |
US20170110690A1 (en) | 2017-04-20 |
CN104813500B (zh) | 2018-07-24 |
US9537116B2 (en) | 2017-01-03 |
JP2015529959A (ja) | 2015-10-08 |
WO2014031421A1 (en) | 2014-02-27 |
CN104813500A (zh) | 2015-07-29 |
US20170301888A1 (en) | 2017-10-19 |
US20150228931A1 (en) | 2015-08-13 |
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CN108878685A (zh) | 2018-11-23 |
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