JP6289454B2 - センサー素子、その製造方法、及びその使用方法 - Google Patents

センサー素子、その製造方法、及びその使用方法 Download PDF

Info

Publication number
JP6289454B2
JP6289454B2 JP2015520214A JP2015520214A JP6289454B2 JP 6289454 B2 JP6289454 B2 JP 6289454B2 JP 2015520214 A JP2015520214 A JP 2015520214A JP 2015520214 A JP2015520214 A JP 2015520214A JP 6289454 B2 JP6289454 B2 JP 6289454B2
Authority
JP
Japan
Prior art keywords
conductive electrode
porous dielectric
detection layer
porous
sensor element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2015520214A
Other languages
English (en)
Japanese (ja)
Other versions
JP2015525362A (ja
JP2015525362A5 (https=
Inventor
ステファン エイチ． グリスカ，
ステファン エイチ． グリスカ，
クシシュトフ エー． レビンスキー，
クシシュトフ エー． レビンスキー，
マイケル シー． パラゾット，
マイケル シー． パラゾット，
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Innovative Properties Co
Original Assignee
3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Publication of JP2015525362A publication Critical patent/JP2015525362A/ja
Publication of JP2015525362A5 publication Critical patent/JP2015525362A5/ja
Application granted granted Critical
Publication of JP6289454B2 publication Critical patent/JP6289454B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/226—Construction of measuring vessels; Electrodes therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/228—Circuits therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0036—General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
    • G01N33/0047—Organic compounds
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0062—General constructional details of gas analysers, e.g. portable test equipment concerning the measuring method or the display, e.g. intermittent measurement or digital display

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP2015520214A 2012-06-25 2013-06-03 センサー素子、その製造方法、及びその使用方法 Expired - Fee Related JP6289454B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201261663688P 2012-06-25 2012-06-25
US61/663,688 2012-06-25
PCT/US2013/043861 WO2014003979A1 (en) 2012-06-25 2013-06-03 Sensor element, method of making, and method of using the same

Publications (3)

Publication Number Publication Date
JP2015525362A JP2015525362A (ja) 2015-09-03
JP2015525362A5 JP2015525362A5 (https=) 2016-06-16
JP6289454B2 true JP6289454B2 (ja) 2018-03-07

Family

ID=48703818

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015520214A Expired - Fee Related JP6289454B2 (ja) 2012-06-25 2013-06-03 センサー素子、その製造方法、及びその使用方法

Country Status (6)

Country Link
US (1) US10267758B2 (https=)
EP (1) EP2864770B1 (https=)
JP (1) JP6289454B2 (https=)
KR (1) KR102131314B1 (https=)
CN (1) CN104583763B (https=)
WO (1) WO2014003979A1 (https=)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6263179B2 (ja) 2012-08-02 2018-01-17 スリーエム イノベイティブ プロパティズ カンパニー 携帯用電子装置及び蒸気センサカード
CN106660039B (zh) * 2014-06-13 2020-10-27 3M创新有限公司 含磺酸聚合物材料作为胺吸附剂
TWI711806B (zh) 2014-07-22 2020-12-01 美商布魯爾科技公司 傳感器、感測器以及偵測條件之存在的方法
WO2016121952A1 (ja) * 2015-01-29 2016-08-04 アラム株式会社 液体センサ
EP3078964B1 (en) * 2015-04-09 2017-05-24 Honeywell International Inc. Relative humidity sensor and method
EP3211408B1 (en) * 2016-02-29 2019-04-10 Honeywell International Inc. Relative humidity sensor and method
US10801985B2 (en) * 2016-06-03 2020-10-13 Texas Instruments Incorporated Sensing capacitor with a permeable electrode
US11287395B2 (en) 2016-09-09 2022-03-29 Hokuriku Electric Industry Co., Ltd. Capacitive gas sensor
TWI601954B (zh) * 2016-09-09 2017-10-11 長庚大學 電容式感濕元件及其使用方法
JP2019168289A (ja) * 2018-03-22 2019-10-03 株式会社東芝 ガスセンシング方法、ガスセンサ、及びガスセンシングシステム
GB2583739B (en) 2019-05-07 2022-05-18 Sensorhut Ltd Detection of analytes in gases using porous sorbents
KR102583269B1 (ko) * 2020-05-07 2023-10-04 한국전자통신연구원 습도 센서 및 그를 포함하는 버튼 장치
US11828718B2 (en) 2020-05-07 2023-11-28 Electronics And Telecommunications Research Institute Humidity sensor and button device including the same
US12480556B2 (en) * 2021-04-15 2025-11-25 Korea Advanced Institute Of Science And Technology Composite material capable of measuring bending deformation, spring including the same, and manufacturing method thereof
CN116857785A (zh) * 2023-06-30 2023-10-10 珠海格力节能环保制冷技术研究中心有限公司 一种家用电器、空气净化的控制方法及空气净化控制装置

Family Cites Families (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5180280A (ja) * 1975-01-06 1976-07-13 Hitachi Ltd Roeikenshutsuki
JPS5844338A (ja) * 1981-09-09 1983-03-15 Nippon Soken Inc 湿度センサ
JPS60200152A (ja) * 1984-03-24 1985-10-09 Nisshinbo Ind Inc 感湿素子
US4662220A (en) 1985-06-20 1987-05-05 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Water-absorbing capacitor system for measuring relative humidity
JPS63290950A (ja) 1987-05-25 1988-11-28 Kyohei Mizushima 水分センサ−
US5536486A (en) 1989-03-15 1996-07-16 Petoca Ltd. Carbon fibers and non-woven fabrics
US5036704A (en) 1990-03-23 1991-08-06 Gas Research Institute Moisture sensor
JPH0421852U (https=) * 1990-06-12 1992-02-24
WO2001056103A1 (en) 2000-01-27 2001-08-02 Mitsubishi Rayon Co., Ltd. Porous carbon electrode material, method for manufacturing the same, and carbon fiber paper
JP2003232765A (ja) * 2002-02-08 2003-08-22 Nippon Soken Inc 湿度センサ用感湿素子
KR100594535B1 (ko) * 2002-04-17 2006-06-30 미쯔비시 레이온 가부시끼가이샤 탄소 섬유지 및 그것을 이용한 연료 전지용 다공질 탄소전극 기재
US7348088B2 (en) 2002-12-19 2008-03-25 3M Innovative Properties Company Polymer electrolyte membrane
GB0317557D0 (en) 2003-07-26 2003-08-27 Univ Manchester Microporous polymer material
US20080038589A1 (en) * 2004-06-21 2008-02-14 Mitsubishi Rayon Co., Ltd. Porous Electrode Base Material and Production Method Thereof
CN100521329C (zh) 2005-01-14 2009-07-29 松下电器产业株式会社 燃料电池用堆栈以及燃料电池
US7608334B2 (en) 2005-03-29 2009-10-27 3M Innovative Properties Company Oxidatively stable microlayers of gas diffusion layers
US8142883B2 (en) 2005-09-29 2012-03-27 Takashi Chida Porous carbon sheet and process for production thereof
US7556774B2 (en) 2005-12-21 2009-07-07 3M Innovative Properties Company Optochemical sensor and method of making the same
JP2010540966A (ja) * 2007-10-05 2010-12-24 スリーエム イノベイティブ プロパティズ カンパニー ミクロ孔質ポリマーを含む有機化学センサー、及び使用方法
EP2208058B1 (en) * 2007-10-05 2018-07-11 3M Innovative Properties Company Organic chemical sensor comprising plasma-deposited microporous layer, and method of making and using
CN101953012B (zh) 2007-12-27 2014-05-07 3M创新有限公司 具有组合添加剂的耐久性燃料电池膜电极组件
JP5662945B2 (ja) * 2008-12-23 2015-02-04 スリーエム イノベイティブ プロパティズ カンパニー 微多孔性有機ケイ酸塩材料を有する有機化学センサ
US8564740B2 (en) 2010-05-24 2013-10-22 3M Innovative Properties Company Directional backlight with reduced crosstalk
EP2583090B1 (en) 2010-06-15 2016-04-06 3M Innovative Properties Company Variable capacitance sensors and methods of making the same
JP5932806B2 (ja) 2010-09-30 2016-06-08 スリーエム イノベイティブ プロパティズ カンパニー センサー素子、その製造方法、及びそれを含むセンサー装置
CN103154712B (zh) * 2010-09-30 2015-11-25 3M创新有限公司 传感器元件及其制备方法和包括所述传感器元件的传感器装置
KR101968999B1 (ko) 2011-04-13 2019-04-15 쓰리엠 이노베이티브 프로퍼티즈 컴파니 흡수 센서 요소를 사용하는 방법
US9506888B2 (en) 2011-04-13 2016-11-29 3M Innovative Properties Company Vapor sensor including sensor element with integral heating
CN103477217B (zh) 2011-04-13 2015-12-23 3M创新有限公司 包含校准信息的电子器件及其使用方法
WO2012141925A1 (en) 2011-04-13 2012-10-18 3M Innovative Properties Company Method of detecting volatile organic compounds
EP2718706B1 (en) 2011-06-08 2015-03-11 3M Innovative Properties Company Humidity sensor and sensor element therefor
WO2013090188A1 (en) 2011-12-13 2013-06-20 3M Innovative Properties Company Method for identification and quantitative determination of an unknown organic compound in a gaseous medium

Also Published As

Publication number Publication date
CN104583763A (zh) 2015-04-29
WO2014003979A1 (en) 2014-01-03
KR102131314B1 (ko) 2020-07-07
KR20150023785A (ko) 2015-03-05
CN104583763B (zh) 2017-03-08
US20150168330A1 (en) 2015-06-18
JP2015525362A (ja) 2015-09-03
EP2864770A1 (en) 2015-04-29
US10267758B2 (en) 2019-04-23
EP2864770B1 (en) 2017-09-27

Similar Documents

Publication Publication Date Title
JP6289454B2 (ja) センサー素子、その製造方法、及びその使用方法
JP5932806B2 (ja) センサー素子、その製造方法、及びそれを含むセンサー装置
US10228344B2 (en) Sensor element, method of making the same, and sensor device including the same
JP6263179B2 (ja) 携帯用電子装置及び蒸気センサカード
JP6469124B2 (ja) 可撓性センサパッチ及びその使用方法
JP6576356B2 (ja) サブ周囲温度蒸気センサ及びその使用方法
CN103547915B (zh) 湿度传感器及其传感器元件
JP5968421B2 (ja) 吸収性センサ素子の使用方法
US20140021967A1 (en) Method of detecting volatile organic compounds
US9562872B2 (en) Humidity sensor and sensor element
CN114486767A (zh) Au/TiO2/PEDOT敏感膜材料及其制备方法和在传感器中的应用

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20160415

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20160415

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20170227

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20170314

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20170612

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20170814

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20170911

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20180109

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20180206

R150 Certificate of patent or registration of utility model

Ref document number: 6289454

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

LAPS Cancellation because of no payment of annual fees