JP6287596B2 - 真空ポンプ - Google Patents

真空ポンプ Download PDF

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Publication number
JP6287596B2
JP6287596B2 JP2014114997A JP2014114997A JP6287596B2 JP 6287596 B2 JP6287596 B2 JP 6287596B2 JP 2014114997 A JP2014114997 A JP 2014114997A JP 2014114997 A JP2014114997 A JP 2014114997A JP 6287596 B2 JP6287596 B2 JP 6287596B2
Authority
JP
Japan
Prior art keywords
stator
base
hole
vacuum pump
heating unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2014114997A
Other languages
English (en)
Japanese (ja)
Other versions
JP2015229936A5 (enExample
JP2015229936A (ja
Inventor
徹也 坪川
徹也 坪川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP2014114997A priority Critical patent/JP6287596B2/ja
Priority to CN201510181590.7A priority patent/CN105317706B/zh
Priority to US14/720,129 priority patent/US9822783B2/en
Publication of JP2015229936A publication Critical patent/JP2015229936A/ja
Publication of JP2015229936A5 publication Critical patent/JP2015229936A5/ja
Application granted granted Critical
Publication of JP6287596B2 publication Critical patent/JP6287596B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/083—Sealings especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/584—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps cooling or heating the machine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/5853—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps heat insulation or conduction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/058—Bearings magnetic; electromagnetic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/059—Roller bearings

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP2014114997A 2014-06-03 2014-06-03 真空ポンプ Active JP6287596B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2014114997A JP6287596B2 (ja) 2014-06-03 2014-06-03 真空ポンプ
CN201510181590.7A CN105317706B (zh) 2014-06-03 2015-04-16 真空泵
US14/720,129 US9822783B2 (en) 2014-06-03 2015-05-22 Vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014114997A JP6287596B2 (ja) 2014-06-03 2014-06-03 真空ポンプ

Publications (3)

Publication Number Publication Date
JP2015229936A JP2015229936A (ja) 2015-12-21
JP2015229936A5 JP2015229936A5 (enExample) 2017-11-02
JP6287596B2 true JP6287596B2 (ja) 2018-03-07

Family

ID=54701198

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014114997A Active JP6287596B2 (ja) 2014-06-03 2014-06-03 真空ポンプ

Country Status (3)

Country Link
US (1) US9822783B2 (enExample)
JP (1) JP6287596B2 (enExample)
CN (1) CN105317706B (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6664269B2 (ja) * 2016-04-14 2020-03-13 東京エレクトロン株式会社 加熱装置およびターボ分子ポンプ
JP6916412B2 (ja) * 2017-03-29 2021-08-11 株式会社島津製作所 真空ポンプ
JP7514609B2 (ja) * 2019-10-28 2024-07-11 エドワーズ株式会社 真空ポンプ
JP7766998B2 (ja) * 2020-03-31 2025-11-11 エドワーズ株式会社 真空ポンプ
JP7480604B2 (ja) * 2020-06-26 2024-05-10 株式会社島津製作所 真空ポンプ
JP7533324B2 (ja) 2021-04-01 2024-08-14 株式会社島津製作所 真空ポンプ
JP2023179921A (ja) * 2022-06-08 2023-12-20 株式会社島津製作所 真空ポンプ
JP2025054585A (ja) * 2023-09-26 2025-04-08 株式会社ブリヂストン タイヤ加硫装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3160504B2 (ja) * 1995-09-05 2001-04-25 三菱重工業株式会社 ターボ分子ポンプ
JP3795979B2 (ja) * 1996-03-21 2006-07-12 株式会社大阪真空機器製作所 分子ポンプ
US6793466B2 (en) * 2000-10-03 2004-09-21 Ebara Corporation Vacuum pump
JP4156830B2 (ja) * 2001-12-13 2008-09-24 エドワーズ株式会社 真空ポンプ
JP5115622B2 (ja) * 2008-03-31 2013-01-09 株式会社島津製作所 ターボ分子ポンプ
JP5782378B2 (ja) * 2009-08-21 2015-09-24 エドワーズ株式会社 真空ポンプ
CN202073802U (zh) * 2011-05-06 2011-12-14 安徽华东光电技术研究所 可加热式微波管排气用分子泵
JP6069981B2 (ja) * 2012-09-10 2017-02-01 株式会社島津製作所 ターボ分子ポンプ
US9745989B2 (en) * 2012-09-24 2017-08-29 Shimadzu Corporation Turbo-molecular pump
KR102123135B1 (ko) * 2013-01-31 2020-06-15 에드워즈 가부시키가이샤 진공 펌프

Also Published As

Publication number Publication date
CN105317706A (zh) 2016-02-10
CN105317706B (zh) 2018-05-04
US9822783B2 (en) 2017-11-21
JP2015229936A (ja) 2015-12-21
US20150345499A1 (en) 2015-12-03

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