CN105317706B - 真空泵 - Google Patents

真空泵 Download PDF

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Publication number
CN105317706B
CN105317706B CN201510181590.7A CN201510181590A CN105317706B CN 105317706 B CN105317706 B CN 105317706B CN 201510181590 A CN201510181590 A CN 201510181590A CN 105317706 B CN105317706 B CN 105317706B
Authority
CN
China
Prior art keywords
stator
base
hole
gap
peripheral surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201510181590.7A
Other languages
English (en)
Chinese (zh)
Other versions
CN105317706A (zh
Inventor
坪川彻也
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Publication of CN105317706A publication Critical patent/CN105317706A/zh
Application granted granted Critical
Publication of CN105317706B publication Critical patent/CN105317706B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/083—Sealings especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/584—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps cooling or heating the machine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/5853—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps heat insulation or conduction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/058—Bearings magnetic; electromagnetic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/059—Roller bearings

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
CN201510181590.7A 2014-06-03 2015-04-16 真空泵 Active CN105317706B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014-114997 2014-06-03
JP2014114997A JP6287596B2 (ja) 2014-06-03 2014-06-03 真空ポンプ

Publications (2)

Publication Number Publication Date
CN105317706A CN105317706A (zh) 2016-02-10
CN105317706B true CN105317706B (zh) 2018-05-04

Family

ID=54701198

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201510181590.7A Active CN105317706B (zh) 2014-06-03 2015-04-16 真空泵

Country Status (3)

Country Link
US (1) US9822783B2 (enExample)
JP (1) JP6287596B2 (enExample)
CN (1) CN105317706B (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6664269B2 (ja) * 2016-04-14 2020-03-13 東京エレクトロン株式会社 加熱装置およびターボ分子ポンプ
JP6916412B2 (ja) * 2017-03-29 2021-08-11 株式会社島津製作所 真空ポンプ
JP7514609B2 (ja) * 2019-10-28 2024-07-11 エドワーズ株式会社 真空ポンプ
JP7766998B2 (ja) * 2020-03-31 2025-11-11 エドワーズ株式会社 真空ポンプ
JP7480604B2 (ja) * 2020-06-26 2024-05-10 株式会社島津製作所 真空ポンプ
JP7533324B2 (ja) 2021-04-01 2024-08-14 株式会社島津製作所 真空ポンプ
JP2023179921A (ja) * 2022-06-08 2023-12-20 株式会社島津製作所 真空ポンプ
JP2025054585A (ja) * 2023-09-26 2025-04-08 株式会社ブリヂストン タイヤ加硫装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1321677A1 (en) * 2001-12-13 2003-06-25 BOC Edwards Technologies, Limited Vacuum pump
CN202073802U (zh) * 2011-05-06 2011-12-14 安徽华东光电技术研究所 可加热式微波管排气用分子泵
CN102472288A (zh) * 2009-08-21 2012-05-23 埃地沃兹日本有限公司 真空泵
CN103671138A (zh) * 2012-09-10 2014-03-26 株式会社岛津制作所 涡轮分子泵
CN104870825A (zh) * 2013-01-31 2015-08-26 埃地沃兹日本有限公司 真空泵

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3160504B2 (ja) * 1995-09-05 2001-04-25 三菱重工業株式会社 ターボ分子ポンプ
JP3795979B2 (ja) * 1996-03-21 2006-07-12 株式会社大阪真空機器製作所 分子ポンプ
US6793466B2 (en) * 2000-10-03 2004-09-21 Ebara Corporation Vacuum pump
US8591204B2 (en) * 2008-03-31 2013-11-26 Shimadzu Corporation Turbo-molecular pump
JP5924414B2 (ja) * 2012-09-24 2016-05-25 株式会社島津製作所 ターボ分子ポンプ

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1321677A1 (en) * 2001-12-13 2003-06-25 BOC Edwards Technologies, Limited Vacuum pump
CN102472288A (zh) * 2009-08-21 2012-05-23 埃地沃兹日本有限公司 真空泵
CN202073802U (zh) * 2011-05-06 2011-12-14 安徽华东光电技术研究所 可加热式微波管排气用分子泵
CN103671138A (zh) * 2012-09-10 2014-03-26 株式会社岛津制作所 涡轮分子泵
CN104870825A (zh) * 2013-01-31 2015-08-26 埃地沃兹日本有限公司 真空泵

Also Published As

Publication number Publication date
US20150345499A1 (en) 2015-12-03
JP2015229936A (ja) 2015-12-21
US9822783B2 (en) 2017-11-21
CN105317706A (zh) 2016-02-10
JP6287596B2 (ja) 2018-03-07

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