JP6284495B2 - 真空ポンプの為のローター装置の製造の為の方法および真空ポンプの為のローター装置 - Google Patents

真空ポンプの為のローター装置の製造の為の方法および真空ポンプの為のローター装置 Download PDF

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JP6284495B2
JP6284495B2 JP2015007996A JP2015007996A JP6284495B2 JP 6284495 B2 JP6284495 B2 JP 6284495B2 JP 2015007996 A JP2015007996 A JP 2015007996A JP 2015007996 A JP2015007996 A JP 2015007996A JP 6284495 B2 JP6284495 B2 JP 6284495B2
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Prior art keywords
rotor
disk
rotor disk
ring
rotor shaft
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JP2015007996A
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Japanese (ja)
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JP2015137648A (ja
Inventor
フロリアン・バーダー
ティーロ・ヴィッレ
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プファイファー・ヴァキューム・ゲーエムベーハー
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/266—Rotors specially for elastic fluids mounting compressor rotors on shafts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP2015007996A 2014-01-21 2015-01-19 真空ポンプの為のローター装置の製造の為の方法および真空ポンプの為のローター装置 Active JP6284495B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102014100622.4A DE102014100622A1 (de) 2014-01-21 2014-01-21 Verfahren zur Herstellung einer Rotoranordnung für eine Vakuumpumpe und Rotoranordnung für eine Vakuumpumpe
DE102014100622.4 2014-01-21

Publications (2)

Publication Number Publication Date
JP2015137648A JP2015137648A (ja) 2015-07-30
JP6284495B2 true JP6284495B2 (ja) 2018-02-28

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JP2015007996A Active JP6284495B2 (ja) 2014-01-21 2015-01-19 真空ポンプの為のローター装置の製造の為の方法および真空ポンプの為のローター装置

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Country Link
EP (1) EP2896837B1 (de)
JP (1) JP6284495B2 (de)
DE (1) DE102014100622A1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014110073A1 (de) * 2014-07-17 2016-01-21 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE202016005207U1 (de) * 2016-08-30 2017-12-01 Leybold Gmbh Vakuumpumpen-Rotor
EP3786457B1 (de) * 2020-09-09 2022-09-07 Pfeiffer Vacuum Technology AG Rotoranordnung für eine vakuumpumpe, vakuumpumpe und verfahren zum herstellen einer solchen
DE202022101760U1 (de) 2022-04-01 2023-07-10 Die Moebelbox UG (haftungsbeschränkt) Faltbares Möbelstück

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3160039B2 (ja) * 1991-08-22 2001-04-23 エヌティエヌ株式会社 ターボ分子ポンプと動翼の加工方法
DE19828525A1 (de) 1998-06-26 1999-12-30 Pfeiffer Vacuum Gmbh Rotoranordnung
DE19951954A1 (de) 1999-10-28 2001-05-03 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
DE102007048703A1 (de) * 2007-10-11 2009-04-16 Oerlikon Leybold Vacuum Gmbh Mehrstufiger Turbomolekularpumpen-Pumpenrotor
DE102008056352A1 (de) * 2008-11-07 2010-05-12 Oerlikon Leybold Vacuum Gmbh Vakuumpumpenrotor
DE102009035812A1 (de) * 2009-08-01 2011-02-03 Pfeiffer Vacuum Gmbh Turbomolekularpumpenrotor
JP5664253B2 (ja) * 2011-01-12 2015-02-04 株式会社島津製作所 高真空ポンプ
DE102011119506A1 (de) * 2011-11-26 2013-05-29 Pfeiffer Vacuum Gmbh Schnell drehender Rotor für eine Vakuumpumpe
DE202013010937U1 (de) * 2013-11-30 2015-03-02 Oerlikon Leybold Vacuum Gmbh Rotorscheibe sowie Rotor für eine Vakuumpumpe

Also Published As

Publication number Publication date
EP2896837A3 (de) 2015-08-12
JP2015137648A (ja) 2015-07-30
DE102014100622A1 (de) 2015-07-23
EP2896837A2 (de) 2015-07-22
EP2896837B1 (de) 2019-10-16

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