JP6284495B2 - 真空ポンプの為のローター装置の製造の為の方法および真空ポンプの為のローター装置 - Google Patents
真空ポンプの為のローター装置の製造の為の方法および真空ポンプの為のローター装置 Download PDFInfo
- Publication number
- JP6284495B2 JP6284495B2 JP2015007996A JP2015007996A JP6284495B2 JP 6284495 B2 JP6284495 B2 JP 6284495B2 JP 2015007996 A JP2015007996 A JP 2015007996A JP 2015007996 A JP2015007996 A JP 2015007996A JP 6284495 B2 JP6284495 B2 JP 6284495B2
- Authority
- JP
- Japan
- Prior art keywords
- rotor
- disk
- rotor disk
- ring
- rotor shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000034 method Methods 0.000 title claims description 31
- 238000004519 manufacturing process Methods 0.000 title claims description 16
- 230000003014 reinforcing effect Effects 0.000 claims description 79
- 230000002787 reinforcement Effects 0.000 claims description 12
- 229920002430 Fibre-reinforced plastic Polymers 0.000 claims description 3
- 239000011151 fibre-reinforced plastic Substances 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims description 2
- 229920001897 terpolymer Polymers 0.000 claims 3
- 239000000463 material Substances 0.000 description 11
- 238000001816 cooling Methods 0.000 description 8
- 238000010438 heat treatment Methods 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 239000000835 fiber Substances 0.000 description 4
- 238000005086 pumping Methods 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 239000004918 carbon fiber reinforced polymer Substances 0.000 description 2
- 230000008602 contraction Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 230000009172 bursting Effects 0.000 description 1
- 238000002788 crimping Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/26—Rotors specially for elastic fluids
- F04D29/266—Rotors specially for elastic fluids mounting compressor rotors on shafts
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/26—Rotors specially for elastic fluids
- F04D29/32—Rotors specially for elastic fluids for axial flow pumps
- F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/60—Mounting; Assembling; Disassembling
- F04D29/64—Mounting; Assembling; Disassembling of axial pumps
- F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102014100622.4A DE102014100622A1 (de) | 2014-01-21 | 2014-01-21 | Verfahren zur Herstellung einer Rotoranordnung für eine Vakuumpumpe und Rotoranordnung für eine Vakuumpumpe |
DE102014100622.4 | 2014-01-21 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2015137648A JP2015137648A (ja) | 2015-07-30 |
JP6284495B2 true JP6284495B2 (ja) | 2018-02-28 |
Family
ID=52023357
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015007996A Active JP6284495B2 (ja) | 2014-01-21 | 2015-01-19 | 真空ポンプの為のローター装置の製造の為の方法および真空ポンプの為のローター装置 |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP2896837B1 (de) |
JP (1) | JP6284495B2 (de) |
DE (1) | DE102014100622A1 (de) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102014110073A1 (de) * | 2014-07-17 | 2016-01-21 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
DE202016005207U1 (de) * | 2016-08-30 | 2017-12-01 | Leybold Gmbh | Vakuumpumpen-Rotor |
EP3786457B1 (de) * | 2020-09-09 | 2022-09-07 | Pfeiffer Vacuum Technology AG | Rotoranordnung für eine vakuumpumpe, vakuumpumpe und verfahren zum herstellen einer solchen |
DE202022101760U1 (de) | 2022-04-01 | 2023-07-10 | Die Moebelbox UG (haftungsbeschränkt) | Faltbares Möbelstück |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3160039B2 (ja) * | 1991-08-22 | 2001-04-23 | エヌティエヌ株式会社 | ターボ分子ポンプと動翼の加工方法 |
DE19828525A1 (de) | 1998-06-26 | 1999-12-30 | Pfeiffer Vacuum Gmbh | Rotoranordnung |
DE19951954A1 (de) | 1999-10-28 | 2001-05-03 | Pfeiffer Vacuum Gmbh | Turbomolekularpumpe |
DE102007048703A1 (de) * | 2007-10-11 | 2009-04-16 | Oerlikon Leybold Vacuum Gmbh | Mehrstufiger Turbomolekularpumpen-Pumpenrotor |
DE102008056352A1 (de) * | 2008-11-07 | 2010-05-12 | Oerlikon Leybold Vacuum Gmbh | Vakuumpumpenrotor |
DE102009035812A1 (de) * | 2009-08-01 | 2011-02-03 | Pfeiffer Vacuum Gmbh | Turbomolekularpumpenrotor |
JP5664253B2 (ja) * | 2011-01-12 | 2015-02-04 | 株式会社島津製作所 | 高真空ポンプ |
DE102011119506A1 (de) * | 2011-11-26 | 2013-05-29 | Pfeiffer Vacuum Gmbh | Schnell drehender Rotor für eine Vakuumpumpe |
DE202013010937U1 (de) * | 2013-11-30 | 2015-03-02 | Oerlikon Leybold Vacuum Gmbh | Rotorscheibe sowie Rotor für eine Vakuumpumpe |
-
2014
- 2014-01-21 DE DE102014100622.4A patent/DE102014100622A1/de not_active Withdrawn
- 2014-12-15 EP EP14197861.9A patent/EP2896837B1/de active Active
-
2015
- 2015-01-19 JP JP2015007996A patent/JP6284495B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
EP2896837A3 (de) | 2015-08-12 |
JP2015137648A (ja) | 2015-07-30 |
DE102014100622A1 (de) | 2015-07-23 |
EP2896837A2 (de) | 2015-07-22 |
EP2896837B1 (de) | 2019-10-16 |
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