JP6276905B2 - 縦型半導体装置の性能を精確に強化するための装置アーキテクチャおよび方法 - Google Patents
縦型半導体装置の性能を精確に強化するための装置アーキテクチャおよび方法 Download PDFInfo
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- 238000000034 method Methods 0.000 title claims description 64
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- 230000005669 field effect Effects 0.000 claims 4
- 239000002131 composite material Substances 0.000 description 85
- 230000015556 catabolic process Effects 0.000 description 69
- 238000009966 trimming Methods 0.000 description 33
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Description
この出願の発明に関連する先行技術文献情報としては、以下のものがある(国際出願日以降国際段階で引用された文献及び他国に国内移行した際に引用された文献を含む)。
(先行技術文献)
(特許文献)
(特許文献1) 米国特許第7,960,997号明細書
(特許文献2) 米国特許第5,446,310号明細書
(特許文献3) 米国特許第5,831,291号明細書
(特許文献4) 米国特許第7,782,083号明細書
(特許文献5) 米国特許第5,563,447号明細書
(特許文献6) 米国特許出願公開第2009/0200578号明細書
(特許文献7) 米国特許第6,433,386号明細書
(特許文献8) 米国特許出願公開第2005/0007160号明細書
図6を参照すると、特定のスイッチング時間にVDMOS装置素子500をトリミングする手順600の一例は、以下のとおりである。工程602では、目標スイッチング時間が選択される。工程604では、当該分野で周知の技術を使って、トリムされていない装置のスイッチング時間が測定される。工程606では、前記測定されたスイッチング時間が、前記目標スイッチング時間と比較され、その目標スイッチング時間を実現するため溶断しなければならない並列ゲートヒューズの数が予測される。工程608では、前記の数の並列ゲートヒューズが溶断されて、それらに対応する並列ゲート抵抗がトリム可能なゲート抵抗505から除去される。工程610では、前記トリム済みVDMOS装置素子のスイッチング時間Ttrimが測定される。工程612では、前記トリム済みVDMOS装置素子のスイッチング時間Ttrimが、前記目標スイッチング時間Ttargetと比較される。Ttrimが事前定義された許容範囲内でTtarget以上である場合、当該手順は終了する。TtrimがまだTtarget未満である場合は、当該手順が工程606から繰り返される。
図10を参照すると、図5Aの前記第3の実施形態または図9Aの前記第5の実施形態のどちらかのトリム可能なゲート抵抗を使う際、手順1000を使用すると、前記ゲート抵抗を特定のゲート抵抗にトリムすることができる。例えば、同じまたは別個のダイに手順1000を使うと、2若しくはそれ以上のVDMOSまたはIGBTのゲート抵抗値を合致させることができる。
Claims (7)
- ドレイン端子と、ソース端子と、ゲート端子とを有する縦型電界効果装置を作製する方法であって、
前記ドレイン端子、前記ソース端子、および前記ゲート端子に接続された第1の電界効果装置を提供する工程と、
トリムセクションの各装置のゲート電極の各々が第1のヒューズのセットのうち1個のヒューズにより前記ソース端子に接続され、さらにそのゲート電極の各々が直列に接続された第2のヒューズのセットのうち少なくとも1個のヒューズにより前記ゲート端子に接続された第2の電界効果装置のセットを提供する工程と、
装置パラメータ測定値を測定する工程と、
前記装置パラメータ測定値を目標値と比較する工程と、
前記装置パラメータ測定値が前記目標値を満たす場合、前記第1のヒューズのセットのうち少なくとも1個のヒューズを溶断する工程と
を有する方法。 - 請求項1記載の方法において、前記溶断する工程は、さらに、前記第1のヒューズのセットのうち複数のヒューズを溶断する工程を有するものである方法。
- 請求項1記載の方法において、さらに、
前記装置パラメータ測定値が前記目標値を満たさない場合、前記第2のヒューズのセットのうち少なくとも1個のヒューズを溶断する工程を有するものである方法。 - 請求項1記載の方法において、前記測定する工程は、さらに、しきい値電圧を測定する工程を有するものである方法。
- 請求項1記載の方法において、前記測定する工程は、さらに、オン抵抗を測定する工程を有するものである方法。
- 請求項1記載の方法において、前記第2の電界効果装置のセットを提供する工程は、さらに、前記第1のヒューズのセットに接続された抵抗のセットを提供する工程を有するものである方法。
- 請求項1記載の方法において、前記ゲート端子は、さらに、トリム可能な並列抵抗ネットワークに接続され、さらに、
前記並列抵抗ネットワークの抵抗に直列な少なくとも1個のヒューズを溶断する工程を有するものである方法。
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US201261729720P | 2012-11-26 | 2012-11-26 | |
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PCT/US2013/072111 WO2014082098A1 (en) | 2012-11-26 | 2013-11-26 | Device architecture and method for precision enhancement of vertical semiconductor devices |
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KR (1) | KR20150092212A (ja) |
CN (2) | CN108389807A (ja) |
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US9704598B2 (en) * | 2014-12-27 | 2017-07-11 | Intel Corporation | Use of in-field programmable fuses in the PCH dye |
WO2018008068A1 (ja) | 2016-07-04 | 2018-01-11 | 三菱電機株式会社 | 半導体装置の製造方法 |
US11011481B2 (en) * | 2016-12-29 | 2021-05-18 | Intel Corporation | Configurable resistor |
CN107065997B (zh) * | 2017-02-09 | 2018-10-26 | 张帅 | 修调功率器件输入电阻的控制方法 |
CN107769767B (zh) * | 2017-10-16 | 2021-03-09 | 苏州浪潮智能科技有限公司 | 一种电阻修调电路及方法 |
US10650888B1 (en) * | 2018-12-26 | 2020-05-12 | Micron Technology, Inc. | Tuning voltages in a read circuit |
JP7381568B2 (ja) * | 2019-04-08 | 2023-11-15 | ローム株式会社 | デバイスパラメータの測定方法 |
CN115684864B (zh) * | 2023-01-05 | 2023-03-31 | 佛山市联动科技股份有限公司 | 适于开关时间测试和阈值电压测试的测试电路及测试方法 |
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DE3532383A1 (de) * | 1985-09-11 | 1987-03-19 | Bosch Gmbh Robert | Multizellentransistor |
US4779060A (en) * | 1987-06-01 | 1988-10-18 | Gentron Corporation | Linear power amplifying system |
JP2664793B2 (ja) * | 1990-04-06 | 1997-10-22 | 株式会社東芝 | 半導体装置の製造方法 |
US5446310A (en) * | 1992-06-08 | 1995-08-29 | North Carolina State University | Integrated circuit power device with external disabling of defective devices and method of fabricating same |
US5563447A (en) | 1993-09-07 | 1996-10-08 | Delco Electronics Corp. | High power semiconductor switch module |
JPH08316327A (ja) * | 1995-05-18 | 1996-11-29 | Sony Corp | 半導体装置の製造方法 |
GB9605672D0 (en) * | 1996-03-18 | 1996-05-22 | Westinghouse Brake & Signal | Insulated gate bipolar transistors |
KR100251528B1 (ko) * | 1997-10-22 | 2000-04-15 | 김덕중 | 복수개의 센스 소오스 패드를 구비한 센스 전계효과 트랜지스터 |
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JP2012160538A (ja) * | 2011-01-31 | 2012-08-23 | Elpida Memory Inc | 半導体装置 |
KR20130017349A (ko) * | 2011-08-10 | 2013-02-20 | 삼성전자주식회사 | 모니터링 패드 및 이를 포함하는 반도체 장치 |
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2013
- 2013-11-26 KR KR1020157017256A patent/KR20150092212A/ko not_active Application Discontinuation
- 2013-11-26 EP EP13856431.5A patent/EP2923375A4/en not_active Withdrawn
- 2013-11-26 US US14/091,315 patent/US9117709B2/en not_active Expired - Fee Related
- 2013-11-26 JP JP2015544198A patent/JP6276905B2/ja not_active Expired - Fee Related
- 2013-11-26 CN CN201810153423.5A patent/CN108389807A/zh active Pending
- 2013-11-26 WO PCT/US2013/072111 patent/WO2014082098A1/en active Application Filing
- 2013-11-26 MY MYPI2015001362A patent/MY170333A/en unknown
- 2013-11-26 CN CN201380071294.0A patent/CN105051876B/zh not_active Expired - Fee Related
-
2015
- 2015-08-03 US US14/816,911 patent/US9589889B2/en not_active Expired - Fee Related
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2017
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Also Published As
Publication number | Publication date |
---|---|
US20170179024A1 (en) | 2017-06-22 |
CN105051876A (zh) | 2015-11-11 |
US20150340318A1 (en) | 2015-11-26 |
EP2923375A4 (en) | 2016-07-20 |
US9589889B2 (en) | 2017-03-07 |
US9997455B2 (en) | 2018-06-12 |
US20140145240A1 (en) | 2014-05-29 |
US9117709B2 (en) | 2015-08-25 |
MY170333A (en) | 2019-07-17 |
EP2923375A1 (en) | 2015-09-30 |
KR20150092212A (ko) | 2015-08-12 |
WO2014082098A1 (en) | 2014-05-30 |
CN105051876B (zh) | 2018-03-27 |
JP2016508284A (ja) | 2016-03-17 |
CN108389807A (zh) | 2018-08-10 |
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