JP6276069B2 - Inspection apparatus and inspection method for hollow columnar structure aggregate - Google Patents

Description

  The present invention relates to an inspection apparatus and an inspection method for a hollow columnar structure aggregate, and for example, a hollow columnar shape used for a filter or the like for cleaning a fluid by utilizing a chemical reaction with a fluid or filtering particulate matter. The present invention relates to a technique for inspecting a structural assembly.

  For example, in a hollow columnar structure assembly having a large number of hollow portions extending through two opposing ends and extending in a straight tubular shape, if there is clogging, the contact area with the fluid decreases, so that the fluid is cleaned. The function cannot be performed sufficiently. Therefore, for example, Patent Document 1 discloses a configuration for inspecting clogging by irradiating parallel light from one end side of the hollow columnar structure aggregate and collecting and imaging light that has passed through the hollow portion on the other end side. Is disclosed.

  However, since the telecentric optical system and observation system for irradiating and detecting parallel light are generally large in size, the configuration as disclosed in Patent Document 1 increases the size of the inspection apparatus. In addition, when the inspection target is tilted or the like, if the extending axis of the through hole does not coincide with the optical axis of the parallel light, it is difficult to determine whether or not the hole is clogged. Parallel light incident from one end side of the through hole hits the partition wall that defines the hollow portion, and the light is absorbed and is not emitted from the other end side. This is because misjudgment may occur when the observation system cannot receive light. Therefore, in the above configuration, a structure for determining the posture of the inspection object is required, but this further increases the size of the inspection apparatus.

  On the other hand, Patent Document 2 discloses that a hollow columnar structure aggregate or a through-hole is formed by irradiating diffuse light instead of parallel light from one end surface (hereinafter also referred to as a light incident end) of the hollow columnar structure aggregate. A configuration is disclosed for enabling inspection even if the axis is inclined. Then, as a first embodiment, a translucent screen is placed in contact with the other end surface (hereinafter also referred to as a light emitting end) of the hollow columnar structure aggregate, and an image projected on the screen is captured as a whole. The configuration for performing the inspection is described. Further, as a second embodiment, an image system using a telecentric lens or a close contact type sensor is arranged on the other end surface side, and imaging is performed for each hollow portion, and the obtained images for each hollow portion are combined to form an overall image. A configuration for obtaining an image and performing an inspection is described. That is, Patent Document 2 uses a diffusion light source on the light incident end side, while applying a contact type sensor in close contact with the light emitting end combination or a combination of a screen and a general camera, Alternatively, by applying a telecentric video system perpendicular to the light exit end, it is possible to detect unevenness or constriction on the inner surface of the hollow portion for each hollow portion based on the change in the amount of emitted light, while eliminating the need to align the light entrance end with the light source To do.

  However, in Patent Document 2, it is necessary that the screen or the close contact type sensor is in close proximity or close to the light exit end of the hollow columnar structure aggregate, or that the telecentric video system is directly facing. Strict positioning must be performed with respect to those light detection systems arranged on the emission end side. Therefore, for example, when the inspection is performed while moving the screen or the close contact type sensor relative to the hollow columnar structure, if a gap is generated between the two due to such relative movement, the entire number of the hollow portions are subjected to the same condition. It becomes difficult to perform the inspection. In particular, when a telecentric video system is used, if the hollow columnar structure aggregate is tilted or a change in posture occurs, the light exit end and the telecentric video system do not face each other, and the intended parallel light It is also conceivable that light cannot be received.

JP 2005-283603 A JP 2005-134140 A

  Therefore, an object of the present invention is to make it possible to accurately inspect the hollow columnar structure aggregate while relaxing the inclination of the axis of the hollow portion, the distance between the subject and the sensor, or the restriction on the variation thereof. To do.

Therefore, the present invention is an inspection apparatus for a hollow columnar structure assembly in which a plurality of columnar hollow portions, in which the emitted light becomes light that spreads slightly when the light is emitted, are arranged in parallel,
A diffused light illuminating device for irradiating uniform diffused light to one end face of the hollow columnar structure aggregate where one end of the plurality of hollow parts is located;
A detection element array and a lens that are disposed at a position that can be opposed to the other end surface of the hollow columnar structure aggregate where the other ends of the plurality of hollow portions are positioned, and have a dimension that is equal to or greater than the width of the hollow columnar structure aggregate. A line sensor array for detecting the amount of light received from the plurality of hollow portions, including an array;
The provided, in order to check the status of the plurality of hollow portions, the line sensor array, the focal length or intervals against the other end of the entrance end of the light the hollow columnar structure aggregate of the lens array The basic configuration is to be placed at the position where
In order to remove the stripe pattern caused by the joint between the lenses, which appears in the image of the other end surface of the hollow columnar structure aggregate constructed based on the detection output of the line sensor array,
The joint position between the lenses is shifted, at least two of the line sensor arrays are arranged, and the joint is complemented by their detection signals,
The striped pattern is removed by mathematical processing, or
Increasing the amount of irradiation light of the diffused light illumination device ,
Ru with a characterizing feature of the.

Further, the present invention uses an inspection apparatus having the above basic configuration and any of the characteristic configurations ,
In response to the detection output of the sensor element array, constructing a two-dimensional image of the other end surface of the hollow columnar structure aggregate,
The quality of the hollow columnar structure aggregate is determined based on the constructed two-dimensional image.
It exists in the inspection method of a hollow columnar structure aggregate.

  According to the present invention, an illumination device for irradiating uniform diffused light is disposed on one end surface side of the hollow columnar structure aggregate, while a line sensor array including a lens array is disposed on the other end surface side. By setting the arrangement position of the sensor array at a position where the light incident end of the lens array is spaced from the other end surface of the hollow columnar structure aggregate by a focal length or more, the inclination of the axis of the hollow portion, The hollow columnar structure aggregate can be accurately inspected while relaxing the distance between the subject and the sensor or the restriction on the variation thereof.

It is a fracture perspective view showing typically an example of the hollow columnar structure aggregate which can become the inspection object of the present invention. It is a fracture | rupture perspective view which shows typically the other example of the hollow columnar structure aggregate | assembly which can become the test object of this invention. (A) And (b) is a schematic diagram for demonstrating the basic composition and inspection principle of the inspection apparatus of the hollow columnar structure aggregate | assembly which concerns on one Embodiment of this invention, (a) is a hollow columnar structure aggregate | assembly. (B) has shown the state with the inclination of a hollow columnar structure aggregate. It is typical sectional drawing for demonstrating an example of the defect which may arise in the hollow columnar structure aggregate | assembly F of a closure type | mold structure, and its detection aspect. (A) is an inspection in a state where the gap between the light emitting end of the hollow columnar structure having an open structure and the sensor device is uniform, and (b) is a state where the hollow columnar structure is removed from the horizontal plane with respect to the horizontal plane. It is a schematic diagram for demonstrating the test | inspection in the state inclined. (A) is an inspection in a state where the gap between the light emitting end of the hollow columnar structure having a closed structure and the sensor device is uniform, and (b) is a state in which the hollow columnar structure is removed from the horizontal plane with respect to the horizontal plane. It is a schematic diagram for demonstrating the test | inspection in the state inclined. (A) And (b) is the schematic diagram for demonstrating the light reception amount detection waveform by a detection element array in the case where a gap is not set and the case where a gap is set, respectively, with respect to an open-type hollow columnar structure. is there. (A) And (b) is the schematic diagram for demonstrating the light reception amount detection waveform by a detection element array in the case where a gap is not set and the case where a gap is set, respectively, with respect to a hollow columnar structure having a closed structure. is there. It is a typical side view which shows schematic structure of the test | inspection system comprised by applying the test | inspection apparatus shown in FIG. It is a block diagram which shows the structural example of the control system of the inspection system of FIG. It is a flowchart which shows an example of the test | inspection process procedure by the control system of FIG. (A) And (b) is a figure for demonstrating the influence which the joint between the lenses of a lens array has on a detection. (A)-(c) is a figure for demonstrating the moire produced by the joint between lenses and the partition of a test object. It is a figure which shows the two-dimensional image without the joint or moiré between lenses. It is explanatory drawing for demonstrating the fall of the detection accuracy in the edge part of the subject which may arise due to the structure of an illuminating device. It is explanatory drawing for demonstrating the principle for maintaining a detection precision in the edge part of a subject. (A)-(c) is a schematic diagram which shows three examples of the concrete structure for maintaining a detection precision in the edge part of a subject.

Hereinafter, the present invention will be described in detail with reference to the drawings.
1. Inspection Object of the Present Invention FIGS. 1 and 2 show two examples of a hollow columnar structure aggregate that can be an object (subject) of the inspection method and inspection apparatus of the present invention. The hollow columnar structure aggregate C shown in FIG. 1 has a large number of hollow columnar structures extending in a straight tube shape through two opposing ends, that is, one end face C1 of the hollow columnar structure aggregate C and the others facing this. Both ends of the end face C2 are open, and a plurality of hollow portions H defined by the partition walls P are included (hereinafter sometimes referred to as an open type structure). Further, the hollow columnar structure aggregate F shown in FIG. 2 has a hollow portion H1 whose one end face F1 is open and one end face is closed at the other end face F2, and one end face is closed at the one end face F1. In addition, it has a configuration in which the hollow portions H2 whose other ends are opened on the other end face F2 are alternately arranged (hereinafter also referred to as a closed structure).

  In addition, the hollow columnar structure aggregates shown in these drawings are only for illustrating the basic configuration, and the shape and dimensions of the hollow columnar structure aggregate itself, the number of hollow portions, the cross-sectional shape, It is not intended to limit the cross-sectional dimensions, axial length, and partition wall thickness. However, the hollow columnar structure aggregate to which the present invention can be preferably applied has a hollow portion having a cross-sectional dimension and a length such that the emitted light becomes a minutely spread light (quasi-parallel light) (for example, a circular cross-section) If it is a hollow part, it has a length more than a significant multiple of the diameter).

  The form of the hollow columnar structure aggregate that is the subject of the present invention includes a filter that cleans the fluid by using a chemical reaction with the fluid or filtering the particulate matter. It is not limited to them. That is, a hollow columnar structure aggregate in which a plurality of hollow portions extending in a columnar shape are arranged in parallel can be used for inspecting the state (such as the presence or absence of defects) of the hollow columnar structure. It is. In the present specification, the term “defect” means, for example, in an open type structure, clogging of an open type hollow part caused by manufacturing factors or mixing of unnecessary substances (in addition to those that are completely blocked, Including those partially closed or narrowed), manufacturing factors of the hollow columnar structure aggregate itself, unevenness of the partition walls caused by unevenness of the substance applied to the inner surface of the hollow portion, and the like are included. Further, the “defect” in the closed structure includes a hole in the closed end, a notch of a partition between cells, and the like.

2. Basic Embodiment FIG. 3 is a schematic diagram for explaining a basic configuration and an inspection principle of an inspection apparatus for a hollow columnar structure aggregate according to an embodiment of the present invention, and (a) is a hollow columnar structure aggregate. (B) has shown the state with the inclination of a hollow columnar structure aggregate. The inspection apparatus according to the illustrated embodiment has a diffused light illuminating device 10 for irradiating one end of a hollow columnar structure aggregate with diffused light DL and a contact image sensor (CIS) that receives emitted light OL from the other end. A line sensor array 20.

  As the diffused light illuminating device 10, a device having an appropriate light emitter can be adopted as long as it can emit uniform diffused light. However, from the viewpoint of simple configuration, easy acquisition of necessary light quantity, and reduction of power consumption, it is not a planar light emitter, but a linear shape with linearly uniform diffusivity. It is advantageous to employ one having a light emitting part. Examples of the light emitting section include a straight tube fluorescent lamp, a transmission light type halogen lamp, a metal halide lamp, and the like. In this case, it has an effective irradiation width corresponding to the dimension of the end face of the hollow columnar structure that can be an inspection target. Another example of the light emitting unit is an LED array. In this case, instead of wiring all the included LEDs in series and driving them at the same time, it is possible to drive by an appropriate number of units, and irradiation corresponding to the dimensions of the end faces of the hollow columnar structures that can be inspected. Can be made possible.

  In the present embodiment, a part of the diffused light incident on one end of the hollow portion, that is, the light incident substantially parallel to the extending direction of the hollow portion proceeds to the other end as it is, as shown in FIG. Even so, the line sensor array 20 can perform the required detection. FIG. 3B shows a state in which the hollow columnar structure aggregate has an inclination. To be precise, the “inclination” which is a problem in the inspection is the axis of the hollow portion with respect to the optical axis. This means a tilted state and is not necessarily limited to the state shown in FIG. That is, for example, even when at least one of the end faces of the hollow columnar structure aggregate is not perpendicular to the axis of the hollow part and the non-perpendicular end face is a light emitting surface, the axis of the hollow part is inclined with respect to the optical axis. It is effective to use diffused light even in such a case.

  Further, as shown in FIG. 4, in the hollow columnar structure aggregate F having a closed structure, it is effective to use diffused light even when there is a defect of a partition wall that cannot be found only by visually observing the end face. . That is, the light incident from the hollow portion where the illumination device 10 side is open enters the adjacent hollow portion where the line sensor array 20 side is open through the defect portion, and is emitted from the open end. It is because the defect | deletion of a partition can be known by detecting.

  The line sensor array 20 of the present embodiment includes a lens array (for example, a rod lens array in which a plurality of rod lenses are linearly arranged over a range corresponding to the dimension of the end surface of a hollow columnar structure that can be a subject) and a detection element array. It is configured as including. When the diffused light illuminating device 10 has a linear light emitting part, it is strongly desirable that the diffused light illuminating device 10 and the line sensor array 20 are arranged on the same plane, preferably in parallel. In the present embodiment, the CIS-type line sensor array 20 is used, but the line sensor array 20 is not disposed in close contact with or close to the light emitting end of the hollow columnar structure that is the subject. The light incident end of the lens is disposed at a position where the distance from the light exit end of the other end surface of the hollow columnar structure assembly is equal to or greater than the focal length (hereinafter referred to as a gap) to capture the emitted light from the hollow portion. Is a requirement.

  This includes a case where the light emitting end of the hollow columnar structure is observed at a position out of focus (non-imaging position). However, in this embodiment, since the light emitted from the hollow portion is quasi-parallel light and the line sensor array 20 having the short-focus lens array is adopted, the light receiving angle is large, and therefore, to some extent. Light can be received even if a gap is present, and a necessary resolution can be secured in the sensor array. This also means that it is possible to observe even if there is a gap variation during the inspection of the hollow columnar structure aggregate, and even if there is an inclination of the hollow columnar structure aggregate.

  FIG. 5A shows an inspection in a state where a gap according to the provision of the present invention is set between the light emitting end of the hollow columnar structure C having an open structure and the light incident end of the lens array 22. b) shows inspections in a state inclined from the state of (a), that is, in a state where the gap is not uniform. In the state (b), the incident position is shifted in the lateral direction by tilting the optical axis incident on the lens array 22 as compared with the state (a). However, the incident light is refracted in the lens and is detected. Therefore, even if there is an inclination, a black spot corresponding to a defect such as clogging is detected.

  6A shows an inspection of the closed columnar structure F in a state where the gap is uniform as in FIG. 5A, and FIG. 6B shows the state of FIG. Similarly to FIG. 6, a case where the inspection is performed in a state inclined from the state of FIG. Even in the case of (b), since the incident light from the defective hollow portion H2 ′ is refracted in the lens and guided to the detection element array 24, the intention at the end portion that should be blocked even if there is an inclination. Bright spots corresponding to defects such as unperforated holes are detected.

  In addition to the above, the present inventors have further found that setting a gap appropriately enables a preferable inspection in light of the object of the present invention.

  FIGS. 7A and 7B show received light amount detection waveforms by the detection elements of the detection element array 24 when the gap is not set and when the gap is set, respectively, for the hollow columnar structure C having an open structure. It is a schematic diagram for demonstrating. In these drawings, Ha schematically represents a hollow part having no defect, Hb schematically represents a hollow part having a defect due to clogging, and Hc schematically represents a hollow part having a defect due to irregularities in the partition wall P. For simplification, the detection waveform of the detection element is drawn based on a simple rectangular wave.

  Part of the light passing through the hollow portion Hb is shielded by the clogged portion or reflected and reaches the light emitting end of the hollow portion. Further, a part of the light passing through the hollow portion Hc reaches the light emitting end by reflection while being attenuated by the uneven portion of the partition wall. Here, in the case of FIG. 7A, all the light appearing at the light exit end of each hollow part is trapped by the portion of the detection element array 24 at the opposite position, and therefore warps in an oblique direction from the light exit end. Light is not detected. Therefore, the detection waveform or observation result of the detection element whose outline is clarified by the part corresponding to the partition wall is obtained, and these defects are clearly defined depending on the degree of clogging of the hollow part and the degree of unevenness of the partition wall. Can be difficult to identify.

  On the other hand, in the case of FIG. 7B, since the gap is set, the detection element array 24 can capture the light coming inwardly while being warped from the light emitting end. The incident position and intensity of the light differ depending on the degree of clogging and the unevenness of the partition wall, and this appears as a difference in the contour of the detection waveform of the detection element, making it easy to identify the type of defect. .

  FIGS. 8A and 8B illustrate received light amount detection waveforms by the detection elements of the sensor array 24 when the gap is not set and when the gap is set, respectively, for the hollow columnar structure F having a closed structure. It is a schematic diagram for doing. In these figures, H1a and H2a schematically show a hollow part without a defect, and H2b schematically shows a hollow part in which a defect due to a hole is generated at the end to be closed, and is adjacent to the hollow part H2b. A state in which there is a partial defect in the partition wall P ′ between the hollow portion H1b is shown.

  The light that has entered the hollow portion H2b through the perforated portion reaches its open end. In addition, a part of the light incident on the adjacent hollow portion H1b enters the hollow portion H2b through the missing portion of the partition wall P ', and this also reaches the open end. Here, in the case of FIG. 8A, all of the light appearing at the open end of the hollow portion H2b is captured by the portion of the detection element array 24 at the opposite position, so that the detection element corresponding to the open end of the hollow portion H2b This detection waveform is difficult to distinguish from the detection waveform in the case where there is only a defect due to a hole in the end portion to be closed, and it is difficult to clearly determine that there is a defective portion in the partition wall P ′.

  On the other hand, in the case of FIG. 8B, since the gap is set, it enters through the missing portion of the partition wall P ′, and enters in an oblique direction from the open end of the hollow portion H2b. A weak signal change due to light can be detected. Therefore, it becomes easy to detect the defect of the partition wall, which is extremely difficult to detect when there is no gap or by visual inspection.

  The quality of the hollow columnar structure aggregate is comprehensively determined based on the number of defective hollow portions, the ratio to the total number, the distribution state of defective hollow portions, and the like. However, identifying the type of defect is extremely meaningful because it can contribute to improvement of the manufacturing process and the like by ascertaining the cause of occurrence through analysis of its occurrence frequency and distribution.

3. Effects of the present embodiment In the present embodiment, since the telecentric irradiation system and the observation system are not used, the apparatus configuration does not increase in size. Further, as shown in FIG. 3 (b), even when the hollow columnar structure aggregate is inclined during the inspection and the extending axis of the hollow portion does not coincide with the optical axis of the parallel light, it is possible to determine whether or not there is a cell defect. It becomes. Furthermore, even when a partition wall defect occurs in the closed columnar structure F, the partition wall defect can be detected by detecting this.

  Further, the present embodiment uses a line sensor array 20 including a lens array 22 and a detection element array 24 in which a plurality of lenses are linearly arranged over a range corresponding to the dimension of the end face of a hollow columnar structure that can be a subject. Thus, it is possible to perform inspection by one-dimensional relative scanning in a direction intersecting with the longitudinal direction. Further, even if the distance between the light emitting end and the lens array incident end varies due to the inclination of the hollow columnar structure aggregate during the inspection, the influence on the inspection can be eliminated. Furthermore, by setting a gap between the end surface of the hollow columnar structure and the line sensor array 20, various defects can be identified.

  From the viewpoint of the above, the present invention can eliminate two major restrictions that occur on the irradiation system side and the observation system side.

4). Next, an embodiment in which the inspection apparatus according to the above-described embodiment is embodied in an inspection system will be described.

  9 is a schematic side view showing a schematic configuration of the inspection system according to the embodiment, FIG. 10 is a block diagram showing a configuration example of a control system of the inspection system, and FIG. 11 is an example of an inspection processing procedure by the control system of FIG. It is a flowchart to show.

  In FIG. 9, the hollow columnar structure aggregate C or F that is an object includes a transport unit 40 disposed on the upstream side in the transport direction indicated by the arrow Y, and a downstream side in the transport direction with a predetermined interval therebetween. Are transported by a transport unit 50 disposed in the. The conveyance unit 40 according to the illustrated example includes a timing pulley (not shown) arranged on the upstream side in the conveyance direction, a timing pulley 41 arranged on the downstream side, and a timing in the form of an endless belt conveyor stretched between them. Belt 43. The transport unit 50 also includes a timing pulley 51 disposed on the upstream side in the transport direction, a timing pulley (not shown) disposed on the downstream side, and a timing belt 53 in the form of an endless belt conveyor stretched around these. And have. In addition, as a conveyance part, not only the thing of the form of an endless type belt conveyor but the thing of appropriate forms, such as what conveys only with a roller, if at least the optical axis which faces the line sensor array 20 can be ensured. Can be used.

  The subject passes through the interval between the transfer unit 40 and the transfer unit 50, and in the process of passing, the line sensor array 20 arranged in the interval part scans the light emitting end side. Above the line sensor array 20, the distributed light illuminating device 10 having a linear light-emitting portion having a linearly uniform diffusivity faces the light incident end of the subject and is the same as the line sensor array 20. It is preferably arranged so as to be parallel to be in a plane. The line sensor array 20 and the distributed light illuminating device 10 can be arranged such that their longitudinal directions coincide with a direction intersecting the transport direction Y, for example, an orthogonal X direction.

  As described above, the line sensor array 20 can be arranged at a position where an appropriate gap is set. In the present embodiment, the line sensor array 20 is supported by the lifting device 30 so that information on the subject and the user's request can be obtained. The position in the Z direction can be changed according to the above. In addition, the distributed light illumination device 10 can also be instructed to a means for changing the position according to the height of the subject. Furthermore, the positional relationship between the distributed light illumination device 10 and the line sensor array 20 may be reversed.

  Each of the above parts is controlled by the control device 100 shown in FIG. The control device 100 has, for example, a basic configuration of the CPU 101, the ROM 103, the EEPROM 105, the RAM 107, and the VRAM 109. The CPU 101 controls each unit according to a program stored in the ROM 103 and corresponding to a processing procedure as will be described later. The EEPROM 105 is used to hold required information even when the system power is off, for example, while the RAM 107 can be used as a temporary work memory in the course of data processing by the CPU 101. . Furthermore, the VRAM 109 is used to develop information based on the detection output of the line sensor array 20, for example, data obtained from the light exit end of the subject in association with scanning, in association with the position of the light exit end. Can do.

  The diffused light illumination device 10, the line sensor array 20, the sensor lifting / lowering device 30, and the transport device 60 including the transport units 40 and 50 are connected to the CPU 101 via the input / output device 111, and driving / stopping and the like are controlled. . Further, the detection output of the line sensor array 20 is input via the input / output device 111, subjected to appropriate processing as necessary, and developed in the VRAM 109. A GUI 70 is further connected to the input / output device 111. The GUI 70 includes, for example, information on the subject, that is, the type of the subject (whether it is a hollow columnar structure aggregate C having an open structure or a hollow columnar structure aggregate F having a closed structure), shape, dimensions, In addition to input means such as a keyboard and a pointing device for setting the shape and dimensions of the hollow portion, information for assisting the operator in inputting the information, information transmitted from the control device 100 (according to a processing procedure described later) Display means for displaying the determined information and the light output end visualization information).

  In the configuration of the control system described above, when the examination processing procedure shown in FIG. 11 is started, information relating to the subject described above is first fetched in step S1, and then examination conditions are fetched in step S3. Is called. The inspection condition is, for example, whether the above-described defect type identification is desired, or whether it is desired to acquire clear data in order to know only the presence or absence of a defect. And in step S5, you may control the raising / lowering apparatus 30 in order to set an appropriate gap based on those information taken in.

  Furthermore, when the diffused light illuminating device 10 having an LED array in which LEDs are wired so as to be able to be driven in units of an appropriate number is used as a light emitting unit, the hollow columnar structure captured in step S1 Settings can be made so that irradiation corresponding to the dimensions of the end face of the body is performed. At this time, since the width in the X direction changes in the process of transporting the hollow columnar structure aggregate with respect to the irradiation light, the irradiation light deviated from the edge of the hollow columnar structure aggregate is detected by the line sensor array. May be set so that the irradiation range dynamically changes in accordance with the change.

  After the above initial processing, the diffused light illumination device 10 is turned on and the transport device 60 is activated (step S7), and the light emitting end is scanned while transporting the subject. Data corresponding to 24 detection outputs (if necessary, noise removal, threshold setting or signal amplification processing for processing a weak detection signal change as described in FIG. 8B, waveform shaping or contour correction and Other processes can be performed) are expanded in the VRAM 109 (step S9). When the data development for one subject is completed, data processing as described later is performed as necessary (step S11).

  Next, in step S13, the state of each hollow portion is analyzed and determined (the presence or absence of a defect, and if desired, the result type is determined), and in step S15, a defective hollow The quality of the subject is determined based on the number of parts, the ratio to the total number, the distribution state of defective hollow parts, and the like. In step S17, these determinations and determination results are notified to the GUI 70 and can be presented to the operator via the display means. Further, based on the data developed in the VRAM 109 corresponding to the detection output of the detection element array 24, a two-dimensional image of the light emitting end of the subject as shown in FIGS. 5 and 6 is constructed and displayed on the display means. Or whether the subject is good or bad can be determined based on the two-dimensional image.

  Next, in step 19, it is determined whether or not there is a subject to be subsequently transferred. If an affirmative determination is made, the process returns to step S <b> 7 to repeat the subsequent steps, whereas if a negative determination is made. End processing including turning off the diffused light illumination device 10 and stopping the transport device 60 is performed.

  According to the above embodiment, the hollow columnar structure aggregate that is the subject in the process of passing between the line sensor array 20 and the diffused light illuminating device 10 arranged in the space between the transport unit 40 and the transport unit 50. Since the inspection is performed, a plurality of hollow columnar structure aggregates can be inspected continuously and at high speed while having a simple and small configuration. In addition, since the gap can be adjusted according to information and requests related to the subject, an appropriate inspection can be performed on the hollow columnar structure aggregate.

5. Embodiment for Ensuring Inspection Accuracy When a line sensor array 20 including a lens array 22 in which lenses are linearly arranged as in the present embodiment is used, the joint between the lenses is detected by the detection element array 24. Affect the signal. In addition, when the subject is a hollow columnar structure aggregate C having an open structure, a portion appears that basically corresponds to the amount of light received between the detected waveforms of the hollow portion corresponding to the partition wall. This will be described with reference to a schematic two-dimensional image (FIG. 12A) of the light exit end of the hollow columnar structure aggregate C having an open structure constructed based on the detection signal of the detection element array 24. As shown in the enlarged FIG. 12B, it can be seen that a stripe pattern corresponding to the joint between the lenses and a lattice pattern formed by the partition walls appear at the light emitting end.

  As is apparent from FIG. 12B, the stripe st corresponding to the joint between the lenses reduces the amount of light emitted from the hollow portion H. Further, although depending on the relative orientation and spatial frequency of the stripe st and the grid gr, the stripe st shown in FIG. 13A and the grid gr shown in FIG. Thus, moire may occur. Since these can reduce the detection accuracy, it is desirable to appropriately prevent the occurrence of stripes or moire and obtain a detection result corresponding to an image as shown in FIG.

  Therefore, the following three improvements can be added to the basic embodiment described above.

  First, at least two line sensor arrays 20 including the lens array 22 and the detection element array 24 are prepared and arranged so that the joints of the lens arrays do not overlap in the scanning direction. According to this, the joint between the lenses of one lens array is complemented by the lenses of the other lens array, and the generation of the stripe st can be prevented. As a specific configuration for complementation, for example, a development area of detection data of each detection element array 24 is prepared in the VRAM 109 of FIG. 10, and the logical sum of them is obtained in the process of step S11 of FIG. be able to. In addition to performing processing by such software, for example, the detection output of the detection element array 24 of the line sensor array 20 on the upstream side in the transport direction Y is detected by the detection element array 24 of the line sensor array 20 on the downstream side. It is also possible to provide a circuit that performs a logical OR operation of the two with a delay so as to coincide with the output.

  Secondly, although there is only one set of the lens array 22 and the detection element array 24, a mathematical process (for example, corresponding to the stripe st) for removing the stripe pattern caused by the joint in step S11 of FIG. The process of adding the inverse function of the function to be performed).

  Thirdly, the amount of light emitted from the diffused light illumination device 10 is increased to enhance the contrast between the joints of the lens array and the lattice pattern of the partition walls, thereby improving the accuracy. According to this, the seam can be eliminated, but even if the light emission amount is increased, light is blocked at the partition wall portion, and light is not transmitted through the clogged opening. Inspection of the structure aggregate can be performed with high accuracy. Increasing the amount of light in this way reduces the burden on the control system because an image close to binarization can be obtained without requiring image processing or mathematical processing, as compared with the first and second improvements. it can.

  Next, an embodiment for ensuring inspection accuracy in relation to the diffused light illumination device 10 will be described.

  As described above, as the diffused light illuminating device 10, a device having an appropriate light emitter can be adopted as long as it can emit uniform diffused light. It is advantageous to employ one having a linear light emitting part. Then, considering that a hollow columnar structure aggregate having various end face dimensions can be a subject, the diffused light illumination device 10 having an irradiation range matched to the hollow columnar structure aggregate having the largest end face dimension is used. Is strongly desirable.

In that case, however, by arranging the light emitting end of the hollow columnar structure aggregate and the lens array of the line sensor array at an interval equal to or greater than the focal length, for example, as shown in FIG. Not only the light L that passes through the hollow portion H that is originally intended to be detected by the body C, but also the diffused light L ′ that is irradiated from the end of the light emitting portion 11 that does not face the subject is also present at the lower edge of the subject. Since it reaches the part of the line sensor array 20 facing the nearby part, the outline of the detection waveform of the detection element is broken at that part, that is, it affects the detection accuracy of the hollow part in the vicinity of the lower edge part. Sometimes. That is, as shown in FIG. 16, when the gap is a and the thickness of the partition wall P is b, the incident angle θ of the diffused light L ′ incident on the lens array 22 through the lower edge E of the subject is tan ^{−. This is because, when 1} (b / a) is exceeded, the diffused light L ′ reaches the portion of the lens array 22 facing the hollow portion H.

In order to suppress this, the configuration of the illumination device may be appropriately determined so that the incident angle of the diffused light is limited to an angle θ ′ of tan ⁻¹ (b / a) or less. The following three configurations can be adopted.

  First, as a light emitting unit, an incident angle θ of the diffused light L ′ is added by adding a louver 16 to the light emitting unit 12 in the form of a straight tube fluorescent lamp, a transmission light type halogen lamp or a metal halide lamp, or an LED array. 'Is limited to θ or less (FIG. 17A).

  Second, as a light emitting unit, a spherical lens array 18 is added to the light emitting unit 12 in the form of a straight tube fluorescent lamp, a transmission light type halogen lamp or a metal halide lamp, or an LED array. The incident angle θ ′ is limited to θ or less (FIG. 17B).

  Third, providing a mechanism that can change the light projection width of the light emitting unit, or providing a light shielding member in contact with the side surface of the hollow columnar structure aggregate, or as described above, the LEDs included in the LED array Rather than wiring all the elements in series and driving them at the same time, the LED array 14 is used which is wired so that it can be driven in units of an appropriate number, and lit as shown in FIG. By setting the region and the extinguishing region, it is possible to perform irradiation corresponding to the dimension of the end face of the hollow columnar structure that can be an inspection target. According to this, not only the power consumption can be further reduced, but also the occurrence of the diffused light L ′ that reaches the position of the line sensor array 20 corresponding to the edge of the subject itself is prevented, and in the carrying process. It is also possible to dynamically change the irradiation range in accordance with the change in the width in the X direction of the hollow columnar structure aggregate with respect to the irradiation light.

DESCRIPTION OF SYMBOLS 10 Diffuse light illuminating device 20 Line sensor array 22 Lens array 24 Detection element array 30 Line sensor raising / lowering apparatus 40, 50 Conveyance part 100 Control part

Claims (10)

A plurality of columnar hollow portions where the emitted light becomes micro-spread light when the light is emitted, an inspection device for a hollow columnar structure aggregate arranged in parallel,
A diffused light illuminating device for irradiating uniform diffused light to one end face of the hollow columnar structure aggregate where one end of the plurality of hollow parts is located;
A detection element array and a lens that are disposed at a position that can be opposed to the other end surface of the hollow columnar structure aggregate where the other ends of the plurality of hollow portions are positioned, and have a dimension that is equal to or greater than the width of the hollow columnar structure aggregate. A line sensor array for detecting the amount of light received from the plurality of hollow portions, including an array;
With
To check the status of the previous SL plurality of hollow portions, the line sensor array, the incident end of said light of said lens array is a the focal length or intervals against the other end of said hollow columnar structure aggregate while disposed in that position,
In order to remove the stripe pattern caused by the joint between the lenses, which appears in the image of the other end face of the hollow columnar structure aggregate constructed based on the detection output of the line sensor array, the joint position between the lenses An apparatus for inspecting a hollow columnar structure aggregate , wherein at least two line sensor arrays are arranged at different positions, and the joints are complemented by their detection signals . A plurality of columnar hollow portions where the emitted light becomes micro-spread light when the light is emitted, an inspection device for a hollow columnar structure aggregate arranged in parallel,
A diffused light illuminating device for irradiating uniform diffused light to one end face of the hollow columnar structure aggregate where one end of the plurality of hollow parts is located;
A detection element array and a lens that are disposed at a position that can be opposed to the other end surface of the hollow columnar structure aggregate where the other ends of the plurality of hollow portions are positioned, and have a dimension that is equal to or greater than the width of the hollow columnar structure aggregate. A line sensor array for detecting the amount of light received from the plurality of hollow portions, including an array;
With
In order to inspect the state of the plurality of hollow portions, the line sensor array has a position where the light incident end of the lens array is at an interval greater than or equal to the focal length with respect to the other end of the hollow columnar structure aggregate. And arranged in
The striped pattern is mathematically processed to remove the striped pattern caused by the joint between the lenses, which appears in the image of the other end face of the hollow columnar structure aggregate constructed based on the detection output of the line sensor array. inspection device of the air-columnar structure aggregate in you, characterized in that so as to remove the. A plurality of columnar hollow portions where the emitted light becomes micro-spread light when the light is emitted, an inspection device for a hollow columnar structure aggregate arranged in parallel,
A diffused light illuminating device for irradiating uniform diffused light to one end face of the hollow columnar structure aggregate where one end of the plurality of hollow parts is located;
A detection element array and a lens that are disposed at a position that can be opposed to the other end surface of the hollow columnar structure aggregate where the other ends of the plurality of hollow portions are positioned, and have a dimension that is equal to or greater than the width of the hollow columnar structure aggregate. A line sensor array for detecting the amount of light received from the plurality of hollow portions, including an array;
With
In order to inspect the state of the plurality of hollow portions, the line sensor array has a position where the light incident end of the lens array is at an interval greater than or equal to the focal length with respect to the other end of the hollow columnar structure aggregate. And arranged in
Irradiation of the diffused light illuminating device in order to remove the stripe pattern caused by the joint between the lenses, which appears in the image of the other end surface of the hollow columnar structure aggregate constructed based on the detection output of the line sensor array inspection device of the air-columnar structure aggregate in you, characterized in that so as to increase the amount of light. The hollow diffuser according to any one of claims 1 to 3 , wherein the diffuse light illuminating device has a linear light emitting portion, and the light emitting portion is arranged on the same plane as the line sensor array. Inspection device for structural assembly. In order to restrict the diffused light emitted from the light emitting part from reaching the part of the line sensor array facing the part in the vicinity of the edge part through the edge part of the other end surface, the light emitting part and the The inspection apparatus for a hollow columnar structure aggregate according to claim 4 , wherein a louver is interposed between the one end face and the end face. In order to restrict the diffused light emitted from the light emitting part from reaching the part of the line sensor array facing the part in the vicinity of the edge part through the edge part of the other end surface, 5. The inspection apparatus for a hollow columnar structure aggregate according to claim 4 , wherein an LED array and a spherical lens array provided in parallel to the LED array are disposed on the one end face side. In order to restrict the diffused light emitted from the light emitting part from reaching the part of the line sensor array facing the part in the vicinity of the edge through the edge part of the other end surface, the light emitted from the light emitting part is projected. An LED array provided with a mechanism that makes the light width variable, a light shielding member that contacts the side surface of the hollow columnar structure assembly, or a wiring that enables driving in units of one or more as the light emitting section is provided. an inspection apparatus of a hollow columnar structure aggregate according to claim 4, characterized in that the illumination regions corresponding to the dimensions of the end face of the hollow columnar structure aggregate is to be set. The hollow columnar structure aggregate has a hollow columnar structure aggregate of an open type structure having a plurality of hollow portions that are open at both end surfaces and the other end surface and partitioned by a partition wall, and an end portion at the one end surface. Including at least one of a hollow columnar structure aggregate of a closed type structure having an array of a hollow portion closed and a hollow portion closed at the other end surface,
Types of states to be inspected for the hollow columnar structure aggregate of the open type structure include the presence or absence of clogging of the hollow portion and the presence or absence of unevenness of the partition wall facing the hollow portion,
Types of the state to be inspected for the hollow columnar structure aggregate of the closed type structure include the presence or absence of an opening at the end to be closed and the presence or absence of a defect in the partition wall that partitions the adjacent hollow part.
The inspection apparatus for a hollow columnar structure aggregate according to any one of claims 1 to 7 . 9. The hollow columnar structure set according to claim 8 , wherein weak detection signal changes appearing in correspondence with the irregularities of the partition walls or defects of the partition walls are processed. Body inspection device. Using the inspection apparatus according to any one of claims 1 to 9,
A two-dimensional image of the other end surface of the hollow columnar structure aggregate is constructed corresponding to the detection output of the detection element array,
The quality of the hollow columnar structure aggregate is determined based on the constructed two-dimensional image.
A method for inspecting a hollow columnar structure aggregate.

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