JP6273365B2 - サーモグラフィ検査システム - Google Patents
サーモグラフィ検査システム Download PDFInfo
- Publication number
- JP6273365B2 JP6273365B2 JP2016536829A JP2016536829A JP6273365B2 JP 6273365 B2 JP6273365 B2 JP 6273365B2 JP 2016536829 A JP2016536829 A JP 2016536829A JP 2016536829 A JP2016536829 A JP 2016536829A JP 6273365 B2 JP6273365 B2 JP 6273365B2
- Authority
- JP
- Japan
- Prior art keywords
- heat source
- inspection system
- heat
- thermographic inspection
- heating elements
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000007689 inspection Methods 0.000 title claims description 28
- 238000001931 thermography Methods 0.000 title claims description 11
- 238000010438 heat treatment Methods 0.000 claims description 36
- 230000007547 defect Effects 0.000 claims description 20
- 238000000034 method Methods 0.000 claims description 16
- 239000002313 adhesive film Substances 0.000 claims description 5
- 239000004642 Polyimide Substances 0.000 claims description 2
- 229920001721 polyimide Polymers 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 10
- 230000005284 excitation Effects 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 238000003384 imaging method Methods 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- 238000009659 non-destructive testing Methods 0.000 description 3
- 239000011241 protective layer Substances 0.000 description 3
- 239000011800 void material Substances 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 230000001066 destructive effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 238000002310 reflectometry Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000002346 layers by function Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000007751 thermal spraying Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 230000036962 time dependent Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N25/00—Investigating or analyzing materials by the use of thermal means
- G01N25/72—Investigating presence of flaws
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/48—Thermography; Techniques using wholly visual means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N25/00—Investigating or analyzing materials by the use of thermal means
- G01N25/18—Investigating or analyzing materials by the use of thermal means by investigating thermal conductivity
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/20—Cameras or camera modules comprising electronic image sensors; Control thereof for generating image signals from infrared radiation only
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Pathology (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Immunology (AREA)
- General Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Signal Processing (AREA)
- Multimedia (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US14/097,143 US9518946B2 (en) | 2013-12-04 | 2013-12-04 | Thermographic inspection system |
| US14/097,143 | 2013-12-04 | ||
| PCT/US2014/068275 WO2015084909A1 (en) | 2013-12-04 | 2014-12-03 | Thermographic inspection system |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016539340A JP2016539340A (ja) | 2016-12-15 |
| JP2016539340A5 JP2016539340A5 (enExample) | 2018-01-11 |
| JP6273365B2 true JP6273365B2 (ja) | 2018-01-31 |
Family
ID=52130860
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016536829A Active JP6273365B2 (ja) | 2013-12-04 | 2014-12-03 | サーモグラフィ検査システム |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US9518946B2 (enExample) |
| EP (1) | EP3077802B1 (enExample) |
| JP (1) | JP6273365B2 (enExample) |
| KR (1) | KR101927093B1 (enExample) |
| CN (2) | CN105793699A (enExample) |
| WO (1) | WO2015084909A1 (enExample) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9518946B2 (en) * | 2013-12-04 | 2016-12-13 | Watlow Electric Manufacturing Company | Thermographic inspection system |
| KR101759862B1 (ko) * | 2016-06-21 | 2017-07-31 | 한국기초과학지원연구원 | 위상잠금 열화상 기법을 이용한 열물성 측정방법 |
| US10260953B2 (en) * | 2016-08-11 | 2019-04-16 | The Boeing Company | Applique and method for thermographic inspection |
| US10168217B2 (en) | 2016-09-28 | 2019-01-01 | Amazon Technologies, Inc. | Automated thermographic inspection for composite structures |
| US10175186B2 (en) * | 2016-09-28 | 2019-01-08 | Amazon Technologies, Inc. | Thermographic inspection process for composite vehicle and components |
| US10634631B2 (en) * | 2017-02-14 | 2020-04-28 | Itt Manufacturing Enterprises Llc | Methods and systems for detecting defects in layered devices and other materials |
| CN108760546B (zh) * | 2018-08-14 | 2020-05-08 | 湖南大学 | 一种基于红外热像技术的疲劳裂纹扩展速率测量方法 |
| US11474058B2 (en) * | 2019-01-10 | 2022-10-18 | General Electric Company | Systems and methods for detecting water in a fan case |
| WO2021158174A1 (en) | 2020-02-07 | 2021-08-12 | Agency For Science, Technology And Research | Active infrared thermography system and computer-implemented method for generating thermal image |
| WO2022087263A1 (en) * | 2020-10-21 | 2022-04-28 | The Regents Of The University Of California | Surface sensitization for high-resolution thermal imaging |
Family Cites Families (37)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3752956A (en) | 1972-05-03 | 1973-08-14 | Du Pont | Electrical resistance heating control circuit |
| JPH02218951A (ja) * | 1989-02-21 | 1990-08-31 | Nkk Corp | 管内の欠陥部の検出方法 |
| JPH05312745A (ja) * | 1992-05-15 | 1993-11-22 | Mitsubishi Denki Bill Techno Service Kk | 赤外線熱画像用投光装置 |
| JP3173367B2 (ja) * | 1996-04-09 | 2001-06-04 | 日立プラント建設株式会社 | 被測定物の内面状態の検出方法 |
| JP4040814B2 (ja) | 1998-11-30 | 2008-01-30 | 株式会社小松製作所 | 円盤状ヒータ及び温度制御装置 |
| JP4663941B2 (ja) * | 1999-09-16 | 2011-04-06 | ウェイン・ステイト・ユニバーシティ | 遠隔的非破壊検査のための小型非接触音波赤外線装置 |
| US7401976B1 (en) * | 2000-08-25 | 2008-07-22 | Art Advanced Research Technologies Inc. | Detection of defects by thermographic analysis |
| KR100431658B1 (ko) | 2001-10-05 | 2004-05-17 | 삼성전자주식회사 | 기판 가열 장치 및 이를 갖는 장치 |
| ES2567796T3 (es) | 2001-10-12 | 2016-04-26 | Whirlpool Corporation | Placa de cocina con elementos de calentamiento discretos distribuidos |
| CN100480693C (zh) * | 2002-01-23 | 2009-04-22 | 马雷纳系统有限公司 | 采用红外热成像法进行缺陷检测和分析 |
| DE10392293T5 (de) | 2002-02-15 | 2005-09-22 | Lm Glasfiber A/S | Verfahren und Vorrichtung zum Erfassen des Vorhandenseins von Polymer in einem Windturbinenblatt |
| US7060991B2 (en) | 2002-04-11 | 2006-06-13 | Reilly Thomas L | Method and apparatus for the portable identification of material thickness and defects along uneven surfaces using spatially controlled heat application |
| JP2005012172A (ja) | 2003-05-23 | 2005-01-13 | Dainippon Screen Mfg Co Ltd | 熱処理装置 |
| US8680443B2 (en) | 2004-01-06 | 2014-03-25 | Watlow Electric Manufacturing Company | Combined material layering technologies for electric heaters |
| FR2871650B1 (fr) * | 2004-06-11 | 2006-09-22 | Seb Sa | Element chauffant, son procede de fabrication, article dote d'un tel element et son procede de fabrication |
| JP2006112940A (ja) * | 2004-10-15 | 2006-04-27 | Railway Technical Res Inst | コンクリート部材の損傷診断方法 |
| JP2006189410A (ja) * | 2004-12-07 | 2006-07-20 | Raito Kogyo Co Ltd | 構造物の非破壊検査方法及びその装置 |
| US8038796B2 (en) | 2004-12-30 | 2011-10-18 | Lam Research Corporation | Apparatus for spatial and temporal control of temperature on a substrate |
| US7419298B2 (en) * | 2005-05-24 | 2008-09-02 | United Technologies Corporation | Thermal imaging method and apparatus |
| US7287902B2 (en) * | 2005-06-07 | 2007-10-30 | The Boeing Company | Systems and methods for thermographic inspection of composite structures |
| US20060289447A1 (en) | 2005-06-20 | 2006-12-28 | Mohamed Zakaria A | Heating chuck assembly |
| NL1031878C2 (nl) | 2006-05-24 | 2007-11-27 | Netherlands Inst For Metals Re | Niet-destructief onderzoek. |
| JP2007329008A (ja) | 2006-06-07 | 2007-12-20 | Tokyo Electron Ltd | 熱板及びその製造方法 |
| US7769201B2 (en) * | 2006-06-13 | 2010-08-03 | Uchicago Argonne, Llc | Method for analyzing multi-layer materials from one-sided pulsed thermal imaging |
| JP2009054932A (ja) | 2007-08-29 | 2009-03-12 | Shinko Electric Ind Co Ltd | 静電チャック |
| WO2009141472A1 (es) * | 2008-05-20 | 2009-11-26 | Antonio Miravete De Marco | Sistemay método de monitorización del daño en estructuras |
| JP4913264B2 (ja) * | 2008-09-17 | 2012-04-11 | 新日本製鐵株式会社 | 材料の欠陥検出方法およびそのシステム |
| CN102217054B (zh) | 2008-11-25 | 2013-05-08 | 京瓷株式会社 | 晶片加热装置、静电卡盘以及晶片加热装置的制造方法 |
| JP2010153730A (ja) | 2008-12-26 | 2010-07-08 | Omron Corp | 配線構造、ヒータ駆動装置、計測装置および制御システム |
| US8785821B2 (en) | 2009-07-06 | 2014-07-22 | Sokudo Co., Ltd. | Substrate processing apparatus with heater element held by vacuum |
| CN101666766A (zh) * | 2009-09-04 | 2010-03-10 | 邓安仲 | 弹性导电膜传感器和红外热成像技术对混凝土裂缝进行监测定位的方法 |
| US8637794B2 (en) * | 2009-10-21 | 2014-01-28 | Lam Research Corporation | Heating plate with planar heating zones for semiconductor processing |
| CN101806762A (zh) * | 2010-05-31 | 2010-08-18 | 哈尔滨工业大学 | 小温差条件下借助辅助热源识别热工缺陷的方法 |
| US8553233B2 (en) * | 2011-06-30 | 2013-10-08 | John W. Newman | Method and apparatus for the remote nondestructive evaluation of an object using shearography image scale calibration |
| BR112014004909A2 (pt) * | 2011-08-30 | 2017-03-28 | Watlow Electric Mfg | aquecedor de alta definição e método de operação |
| CN103308554B (zh) | 2012-03-15 | 2016-03-30 | 李莉 | 一种建筑用墙体围护结构的热工内部缺陷检测方法 |
| US9518946B2 (en) * | 2013-12-04 | 2016-12-13 | Watlow Electric Manufacturing Company | Thermographic inspection system |
-
2013
- 2013-12-04 US US14/097,143 patent/US9518946B2/en active Active
-
2014
- 2014-12-03 KR KR1020167017836A patent/KR101927093B1/ko active Active
- 2014-12-03 CN CN201480066127.1A patent/CN105793699A/zh active Pending
- 2014-12-03 CN CN202110491086.2A patent/CN113252723A/zh active Pending
- 2014-12-03 JP JP2016536829A patent/JP6273365B2/ja active Active
- 2014-12-03 WO PCT/US2014/068275 patent/WO2015084909A1/en not_active Ceased
- 2014-12-03 EP EP14815551.8A patent/EP3077802B1/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| KR20160093701A (ko) | 2016-08-08 |
| US9518946B2 (en) | 2016-12-13 |
| EP3077802B1 (en) | 2018-08-22 |
| KR101927093B1 (ko) | 2018-12-10 |
| CN113252723A (zh) | 2021-08-13 |
| CN105793699A (zh) | 2016-07-20 |
| WO2015084909A1 (en) | 2015-06-11 |
| EP3077802A1 (en) | 2016-10-12 |
| US20150153293A1 (en) | 2015-06-04 |
| JP2016539340A (ja) | 2016-12-15 |
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