JP6271905B2 - 液体吐出ヘッド、液体吐出装置、および液体吐出ヘッドの製造方法 - Google Patents

液体吐出ヘッド、液体吐出装置、および液体吐出ヘッドの製造方法 Download PDF

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Publication number
JP6271905B2
JP6271905B2 JP2013163850A JP2013163850A JP6271905B2 JP 6271905 B2 JP6271905 B2 JP 6271905B2 JP 2013163850 A JP2013163850 A JP 2013163850A JP 2013163850 A JP2013163850 A JP 2013163850A JP 6271905 B2 JP6271905 B2 JP 6271905B2
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Japan
Prior art keywords
flow path
groove
forming member
path forming
discharge ports
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Expired - Fee Related
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JP2013163850A
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English (en)
Japanese (ja)
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JP2015030261A5 (https=
JP2015030261A (ja
Inventor
明夫 後藤
明夫 後藤
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Canon Inc
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Canon Inc
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Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2013163850A priority Critical patent/JP6271905B2/ja
Priority to US14/450,099 priority patent/US9597874B2/en
Publication of JP2015030261A publication Critical patent/JP2015030261A/ja
Publication of JP2015030261A5 publication Critical patent/JP2015030261A5/ja
Application granted granted Critical
Publication of JP6271905B2 publication Critical patent/JP6271905B2/ja
Expired - Fee Related legal-status Critical Current
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/1433—Structure of nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14145—Structure of the manifold
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/162—Manufacturing of the nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14387—Front shooter
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14411—Groove in the nozzle plate

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2013163850A 2013-08-07 2013-08-07 液体吐出ヘッド、液体吐出装置、および液体吐出ヘッドの製造方法 Expired - Fee Related JP6271905B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2013163850A JP6271905B2 (ja) 2013-08-07 2013-08-07 液体吐出ヘッド、液体吐出装置、および液体吐出ヘッドの製造方法
US14/450,099 US9597874B2 (en) 2013-08-07 2014-08-01 Liquid ejection head, liquid ejecting apparatus, and method for manufacturing liquid ejection head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013163850A JP6271905B2 (ja) 2013-08-07 2013-08-07 液体吐出ヘッド、液体吐出装置、および液体吐出ヘッドの製造方法

Publications (3)

Publication Number Publication Date
JP2015030261A JP2015030261A (ja) 2015-02-16
JP2015030261A5 JP2015030261A5 (https=) 2016-09-08
JP6271905B2 true JP6271905B2 (ja) 2018-01-31

Family

ID=52448262

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013163850A Expired - Fee Related JP6271905B2 (ja) 2013-08-07 2013-08-07 液体吐出ヘッド、液体吐出装置、および液体吐出ヘッドの製造方法

Country Status (2)

Country Link
US (1) US9597874B2 (https=)
JP (1) JP6271905B2 (https=)

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT368283B (de) * 1980-11-07 1982-09-27 Philips Nv Duesenplatte fuer einen tintenstrahlschreibkopf und verfahren zur herstellung einer solchen duesen- platte
US5381166A (en) * 1992-11-30 1995-01-10 Hewlett-Packard Company Ink dot size control for ink transfer printing
JP3174539B2 (ja) * 1997-09-08 2001-06-11 キヤノン株式会社 記録方法および記録装置
US6527370B1 (en) * 1999-09-09 2003-03-04 Hewlett-Packard Company Counter-boring techniques for improved ink-jet printheads
US6474566B1 (en) * 2000-06-20 2002-11-05 Ngk Insulators, Ltd. Drop discharge device
JP2002219805A (ja) * 2001-01-26 2002-08-06 Canon Inc インクジェット記録ヘッド及びその製造方法
US6520617B2 (en) * 2001-07-02 2003-02-18 Hewlett-Packard Company Drop emitting apparatus
KR100503482B1 (ko) * 2002-12-30 2005-07-25 삼성전자주식회사 경화변형 방지부를 갖는 모노리식 버블-잉크젯 프린트헤드 및 그 제조방법
US6938988B2 (en) * 2003-02-10 2005-09-06 Hewlett-Packard Development Company, L.P. Counter-bore of a fluid ejection device
JP2004268359A (ja) * 2003-03-07 2004-09-30 Hitachi Printing Solutions Ltd インクジェットヘッド及びその製造方法
US7207648B2 (en) * 2003-09-12 2007-04-24 Fujifilm Corporation Inkjet head and method of cleaning inkjet head
US7524035B2 (en) * 2004-08-10 2009-04-28 Hewlett-Packard Development Company, L.P. Fluid ejection device
US7465032B2 (en) * 2005-10-11 2008-12-16 Silverbrook Research Pty Ltd. Printhead with inlet filter for ink chamber
JP2007276443A (ja) * 2006-03-14 2007-10-25 Seiko Epson Corp 液滴吐出ヘッドの製造方法、液滴吐出ヘッド、および液滴吐出装置の製造方法、液滴吐出装置
ATE548193T1 (de) * 2006-04-07 2012-03-15 Oce Tech Bv Tintenstrahldruckkopf
US8061808B2 (en) * 2007-10-10 2011-11-22 Canon Kabushiki Kaisha Recording head
JP2009137155A (ja) 2007-12-06 2009-06-25 Canon Inc 溶液吐出ヘッド及びその製造方法
EP2072262A1 (en) * 2007-12-21 2009-06-24 Océ-Technologies B.V. Orifice plate for an ink-jet print-head and a method for manufacturing an orifice plate
JP5714699B2 (ja) * 2010-05-10 2015-05-07 オセ−テクノロジーズ ビーブイ 非対称ラプラス圧による濡れ性制御

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Publication number Publication date
US9597874B2 (en) 2017-03-21
JP2015030261A (ja) 2015-02-16
US20150042712A1 (en) 2015-02-12

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