JP6267235B2 - 橋渡し部材を備える光学構造およびその製造方法 - Google Patents

橋渡し部材を備える光学構造およびその製造方法 Download PDF

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JP6267235B2
JP6267235B2 JP2015555761A JP2015555761A JP6267235B2 JP 6267235 B2 JP6267235 B2 JP 6267235B2 JP 2015555761 A JP2015555761 A JP 2015555761A JP 2015555761 A JP2015555761 A JP 2015555761A JP 6267235 B2 JP6267235 B2 JP 6267235B2
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electrode
lens
layer
optical
bridging member
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JP2016508623A (ja
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ウィッパーマン，フランク
レイマン，アンドレアス
ランゲ，ニコラス
ブレウア，アンドレアス
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フラウンホーファー−ゲゼルシャフト・ツール・フェルデルング・デル・アンゲヴァンテン・フォルシュング・アインゲトラーゲネル・フェライン
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/008—Mountings, adjusting means, or light-tight connections, for optical elements with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lens Barrels (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Eyeglasses (AREA)
  • Optical Recording Or Reproduction (AREA)
JP2015555761A 2013-05-27 2014-05-23 橋渡し部材を備える光学構造およびその製造方法 Active JP6267235B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102013209823.5A DE102013209823B4 (de) 2013-05-27 2013-05-27 Optische Struktur mit daran angeordneten Stegen und Verfahren zur Herstellung derselben
DE102013209823.5 2013-05-27
PCT/EP2014/060725 WO2014191326A1 (de) 2013-05-27 2014-05-23 Optische struktur mit daran angeordneten stegen und verfahren zur herstellung derselben

Publications (2)

Publication Number Publication Date
JP2016508623A JP2016508623A (ja) 2016-03-22
JP6267235B2 true JP6267235B2 (ja) 2018-01-31

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JP2015555761A Active JP6267235B2 (ja) 2013-05-27 2014-05-23 橋渡し部材を備える光学構造およびその製造方法

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Country Link
US (1) US10359596B2 (de)
EP (1) EP2920636B1 (de)
JP (1) JP6267235B2 (de)
KR (2) KR102001603B1 (de)
CN (1) CN104937473B (de)
DE (1) DE102013209823B4 (de)
WO (1) WO2014191326A1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3110628B1 (de) * 2014-02-28 2019-07-03 The Regents of the University of California Membran mit variabler dicke für einen breitbandigen robusten piezoelektrischen mikrogefertigten ultraschallwandler (pmut)
DE102015215833A1 (de) 2015-08-19 2017-02-23 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Multiaperturabbildungsvorrichtung mit Optiksubstrat
CN110770626B (zh) * 2017-06-21 2022-04-01 依视路国际公司 光学物品的制造方法和光学成形设备
JP7208728B2 (ja) * 2018-07-23 2023-01-19 キヤノン株式会社 露光装置、および物品の製造方法

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2981600B2 (ja) * 1996-01-17 1999-11-22 オムロン株式会社 光スキャナおよびそれを用いた光センサ装置
US5969465A (en) * 1997-04-01 1999-10-19 Xros, Inc. Adjusting operating characteristics of micromachined torsional oscillators
US6661637B2 (en) * 1998-03-10 2003-12-09 Mcintosh Robert B. Apparatus and method to angularly position micro-optical elements
US6327855B1 (en) * 2000-02-04 2001-12-11 Jds Uniphase Inc. Actuators including serpentine arrangements of alternating actuating and opposing segments and related methods
JP2001264647A (ja) * 2000-03-17 2001-09-26 Seiko Epson Corp 静電アクチュエータ、スイッチング素子、スイッチングデバイス、画像表示装置、画像表示デバイスおよびそれらの制御方法
JP3898438B2 (ja) * 2000-11-22 2007-03-28 株式会社リコー レンズのあおり装置
JP2002162506A (ja) * 2000-11-27 2002-06-07 Canon Inc 光学素子、光学装置および撮影装置
WO2002084335A2 (en) * 2000-12-19 2002-10-24 Coventor, Incorporated Light transmissive substrate for an optical mems device
JP2002321195A (ja) 2001-04-20 2002-11-05 Olympus Optical Co Ltd 振動体およびその製造方法
JP3687585B2 (ja) * 2001-10-05 2005-08-24 オムロン株式会社 焦点可変レンズ装置
FR2835981B1 (fr) * 2002-02-13 2005-04-29 Commissariat Energie Atomique Microresonateur mems a ondes acoustiques de volume accordable
CN1312449C (zh) * 2003-07-23 2007-04-25 张跃 一种吸收式空调系统
JP2005092175A (ja) * 2003-08-08 2005-04-07 Olympus Corp 光学特性可変光学素子
FR2864526B1 (fr) 2003-12-26 2006-10-13 Commissariat Energie Atomique Dispositif d'actionnement electrostatique
US20050162806A1 (en) * 2004-01-22 2005-07-28 Zyvex Corporation Thermal plastic deformation of RF MEMS devices
US7161730B2 (en) * 2004-09-27 2007-01-09 Idc, Llc System and method for providing thermal compensation for an interferometric modulator display
KR100864691B1 (ko) * 2005-01-28 2008-10-23 엘지전자 주식회사 가변 초점 미러 및 이를 응용한 카메라 모듈
WO2007124013A2 (en) * 2006-04-21 2007-11-01 Artromick International, Inc. Medical care administration system and method
US20070268950A1 (en) * 2006-05-16 2007-11-22 Spinelli Luis A Low power Q-switched solid-state lasers
JP5229899B2 (ja) * 2006-09-27 2013-07-03 独立行政法人産業技術総合研究所 光走査装置
US8149076B2 (en) * 2006-12-12 2012-04-03 Nxp B.V. MEMS device with controlled electrode off-state position
JP5158720B2 (ja) * 2009-03-11 2013-03-06 富士フイルム株式会社 光学モジュールおよびその製造方法、並びに撮像装置
US8139280B2 (en) * 2009-07-17 2012-03-20 Xingtao Wu MEMS hierarchically-dimensioned deformable mirror
DE102009055083B4 (de) * 2009-12-21 2013-12-05 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Optischer Schichtstapel und Verfahren zu dessen Herstellung
DE102009055080B4 (de) 2009-12-21 2019-11-14 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Vorrichtung zum Herstellen einer Struktur, Abformwerkzeug
US20130314587A1 (en) * 2011-02-07 2013-11-28 DigitalOptics Corporation MEMS Multi-State Electrostatic Actuator and Digital Camera Therewith

Also Published As

Publication number Publication date
KR20150096462A (ko) 2015-08-24
EP2920636B1 (de) 2018-04-25
CN104937473A (zh) 2015-09-23
KR20170059016A (ko) 2017-05-29
KR101805689B1 (ko) 2018-01-10
CN104937473B (zh) 2017-06-16
WO2014191326A1 (de) 2014-12-04
EP2920636A1 (de) 2015-09-23
JP2016508623A (ja) 2016-03-22
DE102013209823A1 (de) 2014-11-27
DE102013209823B4 (de) 2015-10-08
KR102001603B1 (ko) 2019-07-18
US20160187611A1 (en) 2016-06-30
US10359596B2 (en) 2019-07-23

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