JP6253719B2 - スプリットフロー真空ポンプ及びスプリットフロー真空ポンプを有する真空システム - Google Patents
スプリットフロー真空ポンプ及びスプリットフロー真空ポンプを有する真空システム Download PDFInfo
- Publication number
- JP6253719B2 JP6253719B2 JP2016128671A JP2016128671A JP6253719B2 JP 6253719 B2 JP6253719 B2 JP 6253719B2 JP 2016128671 A JP2016128671 A JP 2016128671A JP 2016128671 A JP2016128671 A JP 2016128671A JP 6253719 B2 JP6253719 B2 JP 6253719B2
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- JP
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- Prior art keywords
- shaft
- rotor
- pump
- disk
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
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- 238000007789 sealing Methods 0.000 claims description 4
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- 229920001971 elastomer Polymers 0.000 description 5
- 239000000806 elastomer Substances 0.000 description 5
- 238000010079 rubber tapping Methods 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
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- 238000005452 bending Methods 0.000 description 3
- 239000011796 hollow space material Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
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- 238000000034 method Methods 0.000 description 3
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- 229920000049 Carbon (fiber) Polymers 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
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- 238000010586 diagram Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 230000003014 reinforcing effect Effects 0.000 description 2
- 239000011343 solid material Substances 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 239000007858 starting material Substances 0.000 description 2
- 229910001200 Ferrotitanium Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000004918 carbon fiber reinforced polymer Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
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- 230000000694 effects Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000004949 mass spectrometry Methods 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 208000004371 toothache Diseases 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
- F04D29/053—Shafts
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/58—Cooling; Heating; Diminishing heat transfer
- F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
- F04D29/5853—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps heat insulation or conduction
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP15174844.9A EP3112688B2 (de) | 2015-07-01 | 2015-07-01 | Splitflow-vakuumpumpe sowie vakuum-system mit einer splitflow-vakuumpumpe |
| EP15174844.9 | 2015-07-01 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2017020502A JP2017020502A (ja) | 2017-01-26 |
| JP6253719B2 true JP6253719B2 (ja) | 2017-12-27 |
Family
ID=53496581
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016128671A Active JP6253719B2 (ja) | 2015-07-01 | 2016-06-29 | スプリットフロー真空ポンプ及びスプリットフロー真空ポンプを有する真空システム |
Country Status (2)
| Country | Link |
|---|---|
| EP (1) | EP3112688B2 (de) |
| JP (1) | JP6253719B2 (de) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106678058A (zh) * | 2017-02-22 | 2017-05-17 | 上海优耐特斯压缩机有限公司 | 高速电机直驱透平机械的超高速转子结构 |
| EP3441617B1 (de) * | 2017-08-09 | 2019-12-25 | Pfeiffer Vacuum Gmbh | Verfahren zum erwärmen eines rotors einer vakuumpumpe |
| DE102018119747B3 (de) | 2018-08-14 | 2020-02-13 | Bruker Daltonik Gmbh | Turbomolekularpumpe für massenspektrometer |
| EP3767109B1 (de) * | 2019-07-15 | 2021-09-08 | Pfeiffer Vacuum Gmbh | Vakuumsystem |
| GB2604382A (en) * | 2021-03-04 | 2022-09-07 | Edwards S R O | Stator Assembly |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60116895A (ja) * | 1983-11-30 | 1985-06-24 | Hitachi Ltd | 真空ポンプ |
| DE4331589C2 (de) | 1992-12-24 | 2003-06-26 | Pfeiffer Vacuum Gmbh | Vakuumpumpsystem |
| JP2002303293A (ja) * | 2001-04-06 | 2002-10-18 | Boc Edwards Technologies Ltd | ターボ分子ポンプ |
| GB0409139D0 (en) * | 2003-09-30 | 2004-05-26 | Boc Group Plc | Vacuum pump |
| GB0424198D0 (en) * | 2004-11-01 | 2004-12-01 | Boc Group Plc | Pumping arrangement |
| JP4916655B2 (ja) * | 2004-11-17 | 2012-04-18 | 株式会社島津製作所 | 真空ポンプ |
| DE102007010068B4 (de) * | 2007-02-28 | 2024-06-13 | Thermo Fisher Scientific (Bremen) Gmbh | Vakuumpumpe oder Vakuumapparatur mit Vakuumpumpe |
| DE102007027352A1 (de) * | 2007-06-11 | 2008-12-18 | Oerlikon Leybold Vacuum Gmbh | Massenspektrometer-Anordnung |
| DE102007044945A1 (de) † | 2007-09-20 | 2009-04-09 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
| DE102009035332A1 (de) * | 2009-07-30 | 2011-02-03 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
| US8481923B1 (en) * | 2012-06-29 | 2013-07-09 | Agilent Technologies, Inc. | Atmospheric pressure plasma mass spectrometer |
| DE102013103650A1 (de) * | 2013-04-11 | 2014-10-16 | Pfeiffer Vacuum Gmbh | Vakuumsystem |
| DE202013003855U1 (de) * | 2013-04-25 | 2014-07-28 | Oerlikon Leybold Vacuum Gmbh | Untersuchungseinrichtung sowie Multi-Inlet-Vakuumpumpe |
| GB201314841D0 (en) † | 2013-08-20 | 2013-10-02 | Thermo Fisher Scient Bremen | Multiple port vacuum pump system |
| DE102013109637A1 (de) * | 2013-09-04 | 2015-03-05 | Pfeiffer Vacuum Gmbh | Vakuumpumpe sowie Anordnung mit einer Vakuumpumpe |
| JP6484919B2 (ja) * | 2013-09-24 | 2019-03-20 | 株式会社島津製作所 | ターボ分子ポンプ |
-
2015
- 2015-07-01 EP EP15174844.9A patent/EP3112688B2/de active Active
-
2016
- 2016-06-29 JP JP2016128671A patent/JP6253719B2/ja active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP2017020502A (ja) | 2017-01-26 |
| EP3112688A1 (de) | 2017-01-04 |
| EP3112688B1 (de) | 2019-06-12 |
| EP3112688B2 (de) | 2022-05-11 |
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