JP6250525B2 - エンコーダ - Google Patents

エンコーダ Download PDF

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Publication number
JP6250525B2
JP6250525B2 JP2014236243A JP2014236243A JP6250525B2 JP 6250525 B2 JP6250525 B2 JP 6250525B2 JP 2014236243 A JP2014236243 A JP 2014236243A JP 2014236243 A JP2014236243 A JP 2014236243A JP 6250525 B2 JP6250525 B2 JP 6250525B2
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JP
Japan
Prior art keywords
diffraction grating
scanning
signal
scale
region
Prior art date
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JP2014236243A
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English (en)
Japanese (ja)
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JP2015105953A5 (enExample
JP2015105953A (ja
Inventor
ユルゲン・ショーザー
ヴォルフガング・ホルツアプフェル
ミヒャエル・ヘルマン
フォルカー・ヘーファー
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dr Johannes Heidenhain GmbH
Original Assignee
Dr Johannes Heidenhain GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Dr Johannes Heidenhain GmbH filed Critical Dr Johannes Heidenhain GmbH
Publication of JP2015105953A publication Critical patent/JP2015105953A/ja
Publication of JP2015105953A5 publication Critical patent/JP2015105953A5/ja
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Publication of JP6250525B2 publication Critical patent/JP6250525B2/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715—Scale reading or illumination devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2014236243A 2013-11-28 2014-11-21 エンコーダ Active JP6250525B2 (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE102013224405.3 2013-11-28
DE102013224405 2013-11-28
DE102014215633.5A DE102014215633A1 (de) 2013-11-28 2014-08-07 Positionsmesseinrichtung
DE102014215633.5 2014-08-07

Publications (3)

Publication Number Publication Date
JP2015105953A JP2015105953A (ja) 2015-06-08
JP2015105953A5 JP2015105953A5 (enExample) 2017-10-26
JP6250525B2 true JP6250525B2 (ja) 2017-12-20

Family

ID=51893895

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014236243A Active JP6250525B2 (ja) 2013-11-28 2014-11-21 エンコーダ

Country Status (5)

Country Link
US (1) US9303981B2 (enExample)
EP (1) EP2878930B1 (enExample)
JP (1) JP6250525B2 (enExample)
DE (1) DE102014215633A1 (enExample)
ES (1) ES2592209T3 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9871595B2 (en) 2016-04-27 2018-01-16 Industrial Technology Research Institute Decoding device and method for absolute positioning code
DE102017219125A1 (de) * 2017-10-25 2019-04-25 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
JP7258515B2 (ja) * 2018-10-26 2023-04-17 Dmg森精機株式会社 位置検出装置および搬送装置

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3334609C1 (de) 1983-09-24 1984-11-22 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Laengen- oder Winkelmesseinrichtung
DE3526206A1 (de) * 1985-07-23 1987-02-05 Heidenhain Gmbh Dr Johannes Wegmesseinrichtung
JPH0712897Y2 (ja) * 1988-04-06 1995-03-29 オムロン株式会社 リニアエンコーダ
AT395071B (de) 1989-02-09 1992-09-10 Rieder & Schwaiger Sentop Inkrementales messsystem
DE4111873C2 (de) 1991-04-11 1995-05-11 Boehringer Werkzeugmaschinen Meßeinrichtung an einer Werkzeugmaschine zum Bestimmen des jeweiligen Standorts eines beweglichen Bauteils
DE19941318A1 (de) * 1999-08-31 2001-03-15 Heidenhain Gmbh Dr Johannes Optische Positionsmeßeinrichtung
DE10132521A1 (de) * 2001-07-09 2003-01-30 Heidenhain Gmbh Dr Johannes Positionsmesseinrichtung
JP2006071535A (ja) * 2004-09-03 2006-03-16 Mitsutoyo Corp 変位検出装置
DE102005006247A1 (de) * 2005-02-11 2006-08-17 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
JP4869628B2 (ja) * 2005-05-26 2012-02-08 オリンパス株式会社 光学式エンコーダ
US7903336B2 (en) * 2005-10-11 2011-03-08 Gsi Group Corporation Optical metrological scale and laser-based manufacturing method therefor
DE102008044858A1 (de) 2008-08-28 2010-03-04 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
DE102011075286A1 (de) 2011-05-05 2012-11-08 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
DE102011076055A1 (de) 2011-05-18 2012-11-22 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung

Also Published As

Publication number Publication date
EP2878930B1 (de) 2016-08-31
US20150146217A1 (en) 2015-05-28
EP2878930A1 (de) 2015-06-03
ES2592209T3 (es) 2016-11-28
US9303981B2 (en) 2016-04-05
DE102014215633A1 (de) 2015-05-28
JP2015105953A (ja) 2015-06-08

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