JP6238389B2 - 有機tftアレイ検査装置及びその方法 - Google Patents
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- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
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Description
これは、高変調周波数の方が低周波数の揺らぎの影響を受けにくく、画像の撮影回数を増やして積算回数を上げることが可能となるからである。
図9に示すように、検査装置としてのCMSイメージング装置40は、ハロゲン光源15と、光ファイバ16と、色ガラスフィルタ17と、光学レンズ系18と、CCDカメラ(モノクロ)20と、CCDカメラの撮影画像を一時保存するバッファメモリ21と、制御用PC22と、ファンクションジェネレータ30とから構成される。光学系の切り替えにより、反射イメージと透過イメージの両方の撮影が可能である。
次の手順でCMSイメージング測定を行った。すなわち、図9に示すように、TFTアレイ1、又は、有機TFT素子10(断りのない限り、便宜的に、単に「有機TFT素子10」と称する。)を光学レンズ系18の手前に配置し、光学レンズ系18を調節して有機TFT素子10の有機半導体薄膜10aにピントを合わせ、有機TFT素子10の背面からハロゲン光源15からの光を照射した。このとき、図6に示したように、P3HTは620nmを境に−ΔT/Tの符合が逆転するため、色ガラスフィルタ17を用いて630nm以上の近赤外光のみを照射し、−ΔT/Tを相殺させないようにした。
10 有機TFT素子
10a 有機半導体薄膜
12a ソース・ドレイン電極
12b ゲート電極
13 ゲート絶縁膜
15 光源
16 光ファイバ
17 色ガラスフィルタ
18 光学レンズ系
20 カメラ
21 バッファメモリ
22 コンピュータ
30 ファンクションジェネレータ
Claims (10)
- 有機半導体薄膜トランジスタ(TFT)アレイを光学的に撮像して検査する方法であって、各有機TFTにおいてソースとドレインを短絡させ、短絡させた前記ソース及び前記ドレインのうちの少なくとも一方とゲートとの間に所定周期で電圧をオン・オフさせるとともに、単色光を照射しながら前記所定周期に同期させて電圧の印加前後の撮像を行ってこの差イメージを得ることを特徴とする有機TFTアレイの検査方法。
- 前記差イメージの複数を積算処理するステップを含むことを特徴とする請求項1記載の有機TFTアレイの検査方法。
- 前記有機TFTに対応する部分毎の前記差イメージのコントラスト差から各有機TFTの個体差を検査するステップを含むことを特徴とする請求項2記載の有機TFTアレイの検査方法。
- 前記所定周期を変化させて前記差イメージを得て、各有機TFTの応答速度差を検査するステップを含むことを特徴とする請求項3記載の有機TFTアレイの検査方法。
- 前記撮像は前記電圧のオン及びオフのそれぞれと所定時間だけ経過後に開始させるとともに、前記所定時間を変化させて前記差イメージを得て、各有機TFTの応答速度差を検査するステップを含むことを特徴とする請求項3記載の有機TFTアレイの検査方法。
- 有機半導体薄膜トランジスタ(TFT)アレイを光学的に撮像して検査する検査装置であって、
各有機TFTにおいてソースとドレインを短絡させ、短絡させた前記ソース及び前記ドレインのうちの少なくとも一方とゲートとの間に所定周期で電圧をオン・オフさせるファンクションジェネレータと、
単色光を照射する光源と、
前記所定周期に同期させて電圧の印加前後の撮像を行う撮像装置と、
前記電圧の印加前後の差イメージを得る画像解析装置と、を含むことを特徴とする有機TFTアレイの検査装置。 - 前記画像解析装置は、前記差イメージの複数を積算処理する積算処理手段を含むことを特徴とする請求項6記載の有機TFTアレイの検査装置。
- 前記画像解析装置は、前記有機TFTに対応する部分毎の前記差イメージのコントラスト差から各有機TFTの個体差を検査する個体差検査手段を含むことを特徴とする請求項7記載の有機TFTアレイの検査装置。
- 前記ファンクションジェネレータにより前記所定周期を変化させて前記差イメージを与える制御手段をさらに含み、前記画像解析装置は、各有機TFTの応答速度差を検査する応答速度差検査手段を含むことを特徴とする請求項8記載の有機TFTアレイの検査装置。
- 前記電圧のオン及びオフのそれぞれと所定時間だけ経過後に前記撮像を開始させて前記差イメージを与える制御手段をさらに含み、前記画像解析装置は、各有機TFTの応答速度差を検査する応答速度差検査手段を含むことを特徴とする請求項8記載の有機TFTアレイの検査装置。
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PCT/JP2015/072738 WO2016024585A1 (ja) | 2014-08-14 | 2015-08-11 | 有機tftアレイ検査装置及びその方法 |
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EP (1) | EP3182441B1 (ja) |
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