JP6229456B2 - Vibrating piece, vibrator, oscillator, electronic device and moving object - Google Patents

Description

  The present invention relates to a resonator element, a vibrator including the resonator element, an oscillator, an electronic device, and a moving object.

Conventionally, as a vibrating piece, a vibrating part that vibrates in thickness shear, and an outer edge of the vibrating part that is integrated along at least the outer edge that intersects with the displacement direction of the thickness sliding vibration, and is thinner and thinner around the vibrating part There is known a resonator element that includes a base plate including a convex portion provided on a portion, and an excitation electrode provided on the vibration portion, and the length of the convex portion is adjusted to the short side dimension of the vibration portion. (For example, refer to Patent Document 1).
The vibrator element is excellent in productivity, and it is said that the CI value does not deteriorate even if the step between the vibrating part and the peripheral part (the amount of excavation of the mesa part) is increased.

JP 2011-97183 A

Since the vibration piece has a configuration in which the length of the convex portion provided in the peripheral portion is matched to the short side dimension of the vibration portion, the bending vibration component that is spurious (unnecessary vibration) due to the rigidity of the convex portion or the like. Although effective in suppression, there is a possibility that the damping action in the peripheral portion of the thickness shear vibration which is the main vibration is hindered by the long convex portion.
As a result, the vibration piece may be insufficiently confined in vibration energy of the thickness shear vibration.
For this reason, there is a possibility that the CI value increases (deteriorates) and the vibration characteristics deteriorate due to leakage of the vibration energy of the thickness shear vibration to the outside.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.

  [Application Example 1] A resonator element according to this application example includes a vibrating plate that vibrates in thickness and slide, a base plate that includes a peripheral portion having a thickness smaller than that of the vibrating portion, and an excitation electrode provided at least in the vibrating portion. When the vibration direction of the thickness-shear vibration is the first direction and the direction intersecting the first direction is the second direction, the base plate and the vibration in the first direction A first step portion between the peripheral portion and the vibration portion in the second direction, and a second step portion between the peripheral portion and the vibration portion in the second direction. The first region and the second region are arranged so as to sandwich the vibrating portion, and project in the thickness direction of the peripheral portion in at least one of the first region and the second region, and then in the second direction. A length extending along the second direction of the convex portion Characterized in that the shorter than the length along the second direction of the vibration part, and viewed from the first direction is in the range of width of the vibrating portion.

According to this, the resonator element has the first step portion between the peripheral portion and the vibrating portion in the first direction, the second step portion between the peripheral portion and the vibrating portion in the second direction, And at least one of the first region and the second region of the peripheral portion has a convex portion protruding in the thickness direction of the peripheral portion and extending along the second direction, and along the second direction of the convex portion. The length is shorter than the length along the second direction of the vibration part, and is within the range of the width of the vibration part when viewed from the first direction.
As a result, the vibration piece attenuates the thickness shear vibration in the peripheral portion while suppressing the flexural vibration component by the convex portion and the second step portion shorter than the conventional one (for example, the configuration of Patent Document 1), and the thickness shear vibration. The vibration energy can be confined efficiently.
As a result, the CI value of the resonator element decreases (becomes better), and the vibration characteristics can be improved.

  Application Example 2 In the resonator element according to the application example described above, the length of the vibrating portion along the first direction is Mx, the length of the second step portion along the first direction is Nx, and the excitation is performed. The length of the electrode along the first direction is Ex, the length of the convex portion along the first direction is Dx, and the distance between the second stepped portion and the convex portion along the first direction is defined as Dx. Sx where Mx = (v + 1/2) × λ ± 0.1λ (where v is a positive integer), Nx = λ / 2 × p ± 0, where λ is the wavelength of the bending vibration generated in the base plate .1λ (where p is a positive integer), Ex = (w + 1/2) × λ ± 0.1λ (where w is a positive integer), Dx = λ / 2 × m ± 0.1λ (where m Is a positive integer), and preferably satisfies the relationship of Sx = λ / 2 × n ± 0.1λ (where n is a positive integer).

  According to this, the vibration piece is Mx = (v + 1/2) × λ ± 0.1λ, Nx = λ / 2 × p ± 0.1λ, Ex = (w + 1/2) × λ ± 0.1λ, Dx = Λ / 2 × m ± 0.1λ, Sx = λ / 2 × n ± 0.1λ, satisfying the relationship, further suppressing the bending vibration component and further damping the thickness shear vibration in the peripheral part, It is possible to more efficiently confine the vibration energy of the thickness shear vibration.

  Application Example 3 In the resonator element according to the application example, when the length of the base plate along the first direction is Lx and the thickness of the vibration part is t, 10 ≦ Lx / t ≦ 40, It is preferable to satisfy the relationship.

  According to this, since the resonator element satisfies the relationship of 10 ≦ Lx / t ≦ 40, the thickness shear vibration in the peripheral portion is attenuated while suppressing the flexural vibration component, and the vibration energy of the thickness shear vibration is confined. Can be performed more remarkably.

  Application Example 4 In the resonator element according to the application example described above, when the length of the convex portion along the second direction is Dz and the length of the vibration portion along the second direction is Mz, It is preferable to satisfy the relationship of 0 <Dz / Mz ≦ 0.7.

  According to this, since the resonator element satisfies the relationship of 0 <Dz / Mz ≦ 0.7, the thickness shear vibration in the peripheral portion is further attenuated while further suppressing the flexural vibration component, and the thickness shear vibration is reduced. The vibration energy can be confined more efficiently.

  Application Example 5 In the resonator element according to the application example, when the height of the convex portion from the peripheral portion is Dy and the height of the vibration portion from the peripheral portion is My, 0 <Dy / It is preferable to satisfy the relationship of My ≦ 1.

  According to this, since the resonator element satisfies the relationship of 0 <Dy / My ≦ 1, the height Dy from the peripheral portion of the convex portion is set to be equal to or lower than the height My from the peripheral portion of the vibrating portion. Thus, while suppressing the bending vibration component, the thickness shear vibration in the peripheral portion can be attenuated, and the vibration energy of the thickness shear vibration can be more efficiently confined.

  Application Example 6 In the resonator element according to the application example described above, the height of the convex portion from the peripheral portion is any one of the steps of the first step portion and the second step portion. The height from the peripheral portion is preferably the same.

According to this, the vibration piece has the same height from the periphery of the convex portion as the height from the periphery of any one of the steps of the first step portion and the second step portion. Thus, for example, the convex portion and one step of the first step portion and the second step portion can be collectively formed by etching.
As a result, the resonator element can improve productivity.

  Application Example 7 In the resonator element according to the application example, each wall surface extending along the second direction in the second step portion and the convex portion is an inclined surface, and the inclined surface is generated in the base plate. It is preferable to include a region having the maximum amplitude of bending vibration.

  According to this, in the resonator element, each wall surface extending along the second direction in the second step portion and the convex portion is an inclined surface, and the inclined surface includes a region having the maximum amplitude of the bending vibration generated in the base plate. Therefore, the bending vibration component can be further suppressed by this inclined surface.

  Application Example 8 A vibrator according to this application example includes the resonator element according to any one of the application examples described above and a container in which the resonator element is accommodated.

  According to this, since the vibrator of this configuration includes the resonator element according to any one of the above application examples and the container in which the resonator element is accommodated, any one example of the above application examples. It is possible to provide a vibrator having the effects described in (1).

  Application Example 9 An oscillator according to this application example includes the resonator element according to any one of the application examples described above and a circuit that drives the resonator element.

  According to this, since the oscillator of this configuration includes the resonator element described in any one of the application examples described above and a circuit that drives the resonator element, the oscillator described in any one of the application examples described above. An oscillator having an effect can be provided.

  Application Example 10 An electronic apparatus according to this application example includes the resonator element according to any one of the application examples described above.

  According to this, since the electronic device of this configuration includes the resonator element according to any one of the application examples, the electronic device having the effects described in any one of the application examples is provided. Can do.

  Application Example 11 A moving body according to this application example includes the resonator element according to any one of the application examples described above.

  According to this, since the movable body of this structure is provided with the vibration piece as described in any one example of the said application example, providing the movable body which has an effect as described in any one example of the said application example is provided. Can do.

1 is a schematic perspective view showing a schematic configuration of a crystal resonator element according to a first embodiment. 2A and 2B are schematic plan sectional views of the quartz crystal resonator element of FIG. 1, in which FIG. 1A is a plan view viewed from the Y′-axis direction, and FIG. FIG. 3 is a schematic cross-sectional view of a main part of a crystal vibrating piece. The graph which shows the relationship between the ratio (Dz / Mz) of length Dz along the Z'-axis direction of a convex part, and length Mz along the Z'-axis direction of a vibration part, and CI value. FIG. 6 is a schematic cross-sectional view of a main part showing a schematic configuration of a quartz crystal resonator element according to a modification of the first embodiment. It is a schematic diagram which shows schematic structure of the crystal oscillator of 2nd Embodiment, (a) is a top view seen from the lid (lid body) side, (b) is sectional drawing in the AA of (a). . It is a schematic diagram which shows schematic structure of the crystal oscillator of 3rd Embodiment, (a) is the top view seen from the lid side, (b) is sectional drawing in the AA of (a). The model perspective view which shows the mobile telephone of 4th Embodiment. The model perspective view which shows the motor vehicle of 5th Embodiment.

  DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, embodiments of the invention will be described with reference to the drawings.

(First embodiment)
First, a quartz crystal resonator element as an example of a resonator element will be described.
FIG. 1 is a schematic perspective view illustrating a schematic configuration of the quartz crystal resonator element according to the first embodiment. 2 is a schematic plan sectional view of the quartz crystal vibrating piece of FIG. 1, FIG. 2 (a) is a plan view seen from the Y′-axis direction, and FIG. 2 (b) is an A- It is sectional drawing in A line. In addition, in order to make it intelligible, the dimension ratio of each component differs from actual.

As shown in FIGS. 1 and 2, the quartz crystal vibrating piece 1 has an X axis among the X axis as an electric axis, the Y axis as a mechanical axis, and the Z axis as an optical axis, which are crystal axes of quartz. As the rotation axis, the axis obtained by rotating the + (plus) side of the Z axis in the − (minus) direction of the Y axis is defined as the Z ′ axis, and the axis obtained by rotating the + side of the Y axis in the + direction of the Z axis is defined as Y. It is cut out from a rough quartz crystal (Lambert) etc., with the 'axis, the plane parallel to the X and Z' axes as the principal surfaces 11 and 12, and the direction along the Y 'axis (Y' axis direction) as the thickness direction. A quartz substrate 10 as a base plate is provided.
The quartz substrate 10 surrounds the substantially rectangular vibrating portion 13 that vibrates in thickness and the vibrating portion 13 in plan view (viewed from the Y′-axis direction), and has a thickness dimension (dimension in the Y′-axis direction) from the vibrating portion 13. Includes a thin peripheral portion 14.
The vibrating portion 13 protrudes on both the + Y ′ side and the −Y ′ side of the peripheral portion 14.

The quartz crystal resonator element 1 includes a quartz crystal substrate 10 and excitation electrodes 15 and 16 provided at least on the vibrating portion 13 (here, provided from the vibrating portion 13 to a part of the peripheral portion 14). ing.
The quartz substrate 10 has a first step portion 17 in which one step is provided between the peripheral portion 14 and the vibration portion 13 in the X-axis direction as the first direction, and intersects the X-axis direction (here, In the Z′-axis direction as the second direction orthogonal to each other, a second step portion having two steps is provided between the peripheral portion 14 and the vibration portion 13.
The first step portion 17 and the second step portion 18 are provided on both the + Y ′ side and the −Y ′ side of the vibrating portion 13 (peripheral portion 14).

In the quartz substrate 10, the first region (here, the region on the −X side) and the second region (here, the region on the + X side) of the peripheral portion 14 sandwich the vibration unit 13 along the X-axis direction. Are projected in the Y′-axis direction as the thickness direction of the peripheral portion 14 and extend along the Z′-axis direction in at least one of the first region and the second region (here, both) It has a part 19. The convex portion 19 protrudes on both the + Y ′ side and the −Y ′ side of the peripheral portion 14.
Here, the length of the convex portion 19 along the Z′-axis direction is shorter than the length of the vibrating portion 13 along the Z′-axis direction, and is within the range of the width of the vibrating portion 13 when viewed from the X-axis direction (vibrating portion). 13 is within the range in which it is formed. (Details will be described later).

  One of the first region and the second region (here, the first region) of the peripheral portion 14 of the quartz substrate 10 is provided with mount electrodes 15a and 16a led out from the excitation electrodes 15 and 16, respectively. It is a fixed end, and the other region (here, the second region) is a free end.

The mount electrode 15a extends from the excitation electrode 15 provided so as to cover the main surface 11 of the vibration part 13 and a part of the main surface 11a of the peripheral part 14 to -X of the peripheral part 14 along the X-axis direction. It is drawn out to the end portion on the side, extends around the main surface 12a of the peripheral portion 14 along the side surface of the end portion, and extends to the vicinity of the excitation electrode 16.
The mount electrode 16a covers the main surface 12 of the vibration portion 13 and the excitation electrode 16 provided so as to cover a part of the main surface 12a of the peripheral portion 14 from the -X of the peripheral portion 14 along the X-axis direction. It is pulled out to the end on the side, wraps around the main surface 11 a of the peripheral portion 14 along the side surface of the end, and extends to the vicinity of the excitation electrode 15.
The excitation electrodes 15 and 16 and the mount electrodes 15a and 16a are, for example, metal films having a structure in which Cr (chrome) is used as a base layer and Au (gold) is stacked thereon.

As shown in FIG. 2, the quartz crystal vibrating piece 1 has a length along the X-axis direction of the vibrating portion 13 as Mx, a length along the X-axis direction of the second stepped portion 18 as Nx, and the excitation electrodes 15 and 16. The length along the X-axis direction is Ex, the length along the X-axis direction of the convex portion 19 is Dx, the distance between the second stepped portion 18 and the convex portion 19 along the X-axis direction is Sx, and the quartz substrate When the wavelength of the bending vibration generated in 10 is λ,
Mx = (v + 1/2) × λ ± 0.1λ (where v is a positive integer),
Nx = λ / 2 × p ± 0.1λ (where p is a positive integer),
Ex = (w + 1/2) × λ ± 0.1λ (where w is a positive integer),
Dx = λ / 2 × m ± 0.1λ (where m is a positive integer),
Sx = λ / 2 × n ± 0.1λ (where n is a positive integer),
It is preferable that the relationship is satisfied. Here, ± 0.1λ, which is a variation in dimensions, indicates that the influence on the characteristics of the quartz crystal resonator element 1 is small within this range of manufacturing variation.

Thereby, as shown in the schematic cross-sectional view of the main part of the quartz crystal vibrating piece in FIG. 3, the quartz crystal vibrating piece 1 includes each wall surface (side surface) extending along the Z′-axis direction in the second step portion 18 and the convex portion 19 and The end surfaces of the excitation electrodes 15 and 16 can be provided so as to substantially coincide with the position of the maximum amplitude of bending vibration that is spurious (unnecessary vibration) generated in the quartz substrate 10.
Specifically, each of the wall surfaces (for example, the wall surface 19a) and the end surface pass through the apex (maximum amplitude point) P of the assumed bending vibration waveform B indicated by a two-dot chain line in FIG. It can be provided so as to substantially coincide with the parallel virtual straight line C.
Here, the wavelength λ of the bending vibration can be obtained from the resonance frequency f of the quartz crystal vibrating piece 1 by an equation such as λ / 2 = (1.332 / f) −0.0024.
In FIG. 3, hatching is omitted for convenience of explanation.

Returning to FIG. 2, when the crystal vibrating piece 1 has a length along the X-axis direction of the crystal substrate 10 as Lx and the thickness of the vibrating portion 13 as t,
10 ≦ Lx / t ≦ 40,
It is preferable that the relationship is satisfied.

Further, when the crystal vibrating piece 1 has a length along the Z′-axis direction of the convex portion 19 as Dz and a length along the Z′-axis direction of the vibration portion 13 as Mz,
0 <Dz / Mz ≦ 0.7,
It is preferable that the relationship is satisfied.

The quartz crystal resonator element 1 has a height from the peripheral portion 14 of the convex portion 19 as Dy, and a height from the peripheral portion 14 of the vibration portion 13 as My.
0 <Dy / My ≦ 1,
It is preferable that the relationship is satisfied.

  Further, in the quartz crystal resonator element 1, the height Dy from the peripheral portion 14 of the convex portion 19 is any one of the steps of the first stepped portion 17 and the second stepped portion 18 (here, the second stepped portion). It is preferable that the height is the same as the height Ny from the peripheral portion 14 (Dy = Ny).

As an example, the crystal resonator element 1 is assumed to have a length Lx along the X-axis direction of the crystal substrate 10 of about 1.0 mm and a length along the Z′-axis direction of about 0.6 mm. Yes.
In addition, each said numerical formula is based on the knowledge obtained by experiment, simulation analysis, etc. of inventors.

As described above, in the quartz crystal resonator element 1 of the present embodiment, the quartz substrate 10 has the first step portion 17 between the peripheral portion 14 and the vibrating portion 13 in the X-axis direction, and the peripheral portion 14 in the Z′-axis direction. And a second stepped portion 18 between the vibrating portion 13 and projecting in the thickness direction (Y′-axis direction) of the peripheral portion 14 in at least one of the first region and the second region of the peripheral portion 14. A convex portion 19 extending along the Z′-axis direction, the length of the convex portion 19 along the Z′-axis direction being shorter than the length of the vibrating portion 13 along the Z′-axis direction, and from the X-axis direction; As a result, it is within the range of the width of the vibrating portion 13.
As a result, the quartz crystal resonator element 1 attenuates the thickness shear vibration in the peripheral portion 14 while suppressing the bending vibration component by the convex portion 19 and the second step portion 18 which are shorter than the conventional (for example, the configuration of Patent Document 1). Thus, the vibration energy of the thickness shear vibration can be confined efficiently.
As a result, the crystal resonator element 1 has a reduced CI value (becomes good) and can improve the vibration characteristics.

The quartz crystal resonator element 1 has Mx = (v + 1/2) × λ ± 0.1λ, Nx = λ / 2 × p ± 0.1λ, Ex = (w + 1/2) × λ ± 0.1λ, Dx = Since the relationship of λ / 2 × m ± 0.1λ and Sx = λ / 2 × n ± 0.1λ is satisfied, each wall surface extending along the Z′-axis direction in the second step portion 18 and the convex portion 19 ( The side surfaces) and the end surfaces of the excitation electrodes 15 and 16 can be provided so as to substantially coincide with the position of the maximum amplitude of flexural vibration, which is spurious (unnecessary vibration) generated in the quartz substrate 10.
As a result, the quartz crystal resonator element 1 can further suppress the bending vibration component and further attenuate the thickness shear vibration in the peripheral portion 14 and more efficiently confine the vibration energy of the thickness shear vibration.

  Further, since the crystal vibrating piece 1 satisfies the relationship of 10 ≦ Lx / t ≦ 40, the thickness vibration at the peripheral portion 14 is attenuated while suppressing the bending vibration component, and the vibration energy of the thickness shear vibration is confined. Can be performed more remarkably.

Further, since the quartz crystal resonator element 1 satisfies the relationship 0 <Dz / Mz ≦ 0.7, the thickness vibration at the peripheral portion 14 is further attenuated while further suppressing the bending vibration component, and the thickness shear vibration is reduced. The vibration energy can be confined more efficiently.
Here, the above will be described in detail with reference to the drawings.
FIG. 4 is a graph showing the relationship between the ratio (Dz / Mz) between the length Dz along the Z′-axis direction of the convex portion and the length Mz along the Z′-axis direction of the vibration portion, and the CI value. It is. The horizontal axis in FIG. 4 represents Dz / Mz, and the vertical axis represents the CI value (Ω).
FIG. 4 shows the sample product of the present embodiment by the inventors (Lx of the quartz substrate 10 is about 1.0 mm, the length along the Z′-axis direction is about 0.6 mm, and the resonance frequency is about 26 MHz). It is a graph of the experimental results used.

As shown in FIG. 4, the crystal resonator element 1 is found to have a CI value suppressed to less than 70Ω by satisfying the relationship of 0 <Dz / Mz ≦ 0.7. In addition, it can be seen that the crystal resonator element 1 is suppressed to a lower CI value of less than 65Ω by satisfying the relationship of 0.1 ≦ Dz / Mz ≦ 0.6.
Furthermore, it can be seen that the crystal resonator element 1 is suppressed to a lower CI value of 60Ω or less by satisfying the relationship of 0.2 ≦ Dz / Mz ≦ 0.5. In addition, it can be seen that the crystal resonator element 1 has the most suppressed CI value by satisfying the relationship of 0.3 ≦ Dz / Mz ≦ 0.4.
From FIG. 4, the quartz crystal resonator element 1 further attenuates the thickness shear vibration in the peripheral portion 14 while further suppressing the flexural vibration component by satisfying the relationship of 0 <Dz / Mz ≦ 0.7. It can be said that it was proved that the vibration energy can be confined more efficiently.

  Further, since the quartz crystal vibrating piece 1 satisfies the relationship 0 <Dy / My ≦ 1, the height Dy from the peripheral portion 14 of the convex portion 19 is equal to or less than the height My from the peripheral portion 14 of the vibrating portion 13. By suppressing the bending vibration component, the thickness shear vibration in the peripheral portion 14 can be attenuated, and the vibration energy of the thickness shear vibration can be more efficiently confined.

Further, in the crystal resonator element 1, the height Dy from the peripheral portion 14 of the convex portion 19 is the same as the height Ny from the peripheral portion 14 of the step 18 a of the second step portion 18 (Dy = Ny). For example, the convex portion 19 and the step 18a of the second step portion 18 can be collectively formed by etching.
As a result, the crystal vibrating piece 1 can improve productivity.

In the crystal vibrating piece 1, the first stepped portion 17 may have two or more steps, and the second stepped portion 18 may have three or more steps. According to this, the quartz crystal resonator element 1 can further constrain the vibration energy of the thickness shear vibration more significantly by increasing the level difference.
Further, the crystal vibrating piece 1 may have one step of the second step portion 18. According to this, the crystal resonator element 1 can form the shape of the second step portion 18 with high accuracy by reducing the number of times of processing for forming the step. In this case, Nx is 0.

In the crystal resonator element 1, the convex portion 19 may be provided only in either the −X side first region or the + X side second region of the peripheral portion 14. Even in this case, the quartz crystal resonator element 1 can attenuate the thickness shear vibration in the peripheral portion 14 while suppressing the bending vibration component, and obtain the effect of confining the vibration energy of the thickness shear vibration.
In the quartz crystal resonator element 1, the excitation electrodes 15 and 16 may be provided within the range of the main surfaces 11 and 12 of the vibration unit 13. According to this, in the crystal vibrating piece 1, the excitation electrodes 15 and 16 do not straddle the first step portion 17 and the second step portion 18, so that the excitation electrodes 15 and 16 can be formed uniformly. The excitation electrodes 15 and 16 preferably have a large area from the viewpoint of driving efficiency.

(Modification)
Next, a modification of the first embodiment will be described.
FIG. 5 is a schematic cross-sectional view of an essential part showing a schematic configuration of a quartz crystal resonator element according to a modification of the first embodiment. In FIG. 5, for convenience of explanation, electrodes and hatching are omitted. Also, common parts with the first embodiment are denoted by the same reference numerals, detailed description thereof will be omitted, and description will be made centering on parts different from the first embodiment.

As shown in FIG. 5, the quartz crystal resonator element 2 according to the modification is formed by using, for example, a wet etching method. Therefore, in the quartz crystal resonator element 2, each wall surface (side surface) extending along the Z′-axis direction in the second step portion 18 and the convex portion 19 is an inclined surface due to the etching anisotropy of quartz.
Here, each of the inclined surfaces (wall surfaces) includes a region having the maximum amplitude of bending vibration that is spurious (unnecessary vibration) generated in the quartz substrate 10. Specifically, each inclined surface (for example, the wall surface 19a) passes through the apex (maximum amplitude point) P of the assumed bending vibration waveform B indicated by the two-dot chain line in FIG. 5 and is parallel to the Y ′ axis. It is provided so as to intersect the virtual straight line C.

According to this, in the crystal resonator element 2, each wall surface extending along the Z′-axis direction in the second step portion 18 and the convex portion 19 is an inclined surface, and this inclined surface is the maximum of bending vibration generated in the crystal substrate 10. Since the region including the amplitude is included, the bending vibration component can be further suppressed by the inclined surface.
As a result, the crystal resonator element 2 has a reduced CI value and improved vibration characteristics.
In the crystal vibrating piece 2, the starting point and the ending point of Mx, Nx, Sx, and Dx are on each inclined surface.

(Second Embodiment)
Next, a crystal resonator as an example of a resonator including the above-described resonator element and a container that stores the resonator element will be described.

  FIG. 6 is a schematic diagram illustrating a schematic configuration of the crystal resonator according to the second embodiment. 6A is a plan view seen from the lid (lid) side, and FIG. 6B is a cross-sectional view taken along line AA of FIG. 6A. In the plan view, the lid is omitted. Also, common parts with the first embodiment will be denoted by the same reference numerals, detailed description thereof will be omitted, and different parts from the first embodiment will be mainly described.

As shown in FIG. 6, the crystal resonator 5 includes either the crystal vibrating piece 1 of the first embodiment or the crystal vibrating piece 2 of the modified example (here, the crystal vibrating piece 1) and the crystal vibrating piece. And a package 20 as a container in which 1 is accommodated.
The package 20 includes a package base 21 having a substantially rectangular planar shape and provided with a recess 22 and a flat lid 23 that covers the recess 22 of the package base 21 and is formed in a substantially rectangular parallelepiped shape.

The package base 21 includes an aluminum oxide sintered body, a mullite sintered body, an aluminum nitride sintered body, a silicon carbide sintered body, a glass ceramic sintered body, etc., which are formed by stacking and firing ceramic green sheets. Ceramic-based insulating materials such as quartz, glass, and silicon (high resistance silicon) are used.
The lid 23 is made of the same material as the package base 21 or a metal such as Kovar or 42 alloy.

Internal terminals 24 a and 24 b are provided at the stepped portion 22 a in the recess 22 of the package base 21 at positions facing the mount electrodes 15 a and 16 a of the crystal vibrating piece 1.
In the quartz crystal resonator element 1, the mount electrodes 15 a and 16 a are bonded to the internal terminals 24 a and 24 b via an epoxy, silicone, polyimide, or other conductive adhesive 30 mixed with a conductive material such as a metal filler. Has been.

Rectangular electrode terminals 26 a and 26 b are provided on the outer bottom surface 25 (outer bottom surface) of the package base 21 opposite to the recess 22.
The electrode terminals 26a and 26b are electrically connected to the internal terminals 24a and 24b by internal wiring (not shown). Specifically, the electrode terminal 26a is electrically connected to the internal terminal 24a, and the electrode terminal 26b is electrically connected to the internal terminal 24b.
The internal terminals 24a and 24b and the electrode terminals 26a and 26b are formed by, for example, laminating respective coatings such as Ni (nickel) and Au (gold) on a metallized layer such as W (tungsten) and Mo (molybdenum) by plating. It consists of a metal coating.

In the crystal resonator 5, the recess 22 of the package base 21 is covered with the lid 23 in a state where the crystal resonator element 1 is bonded to the internal terminals 24 a and 24 b of the package base 21, and the package base 21 and the lid 23 are seamed. The recess 22 of the package base 21 is hermetically sealed by bonding with a bonding member 27 such as low melting glass or adhesive.
Note that the hermetically sealed recess 22 of the package base 21 is in a vacuum state (a high degree of vacuum) or a state filled with an inert gas such as nitrogen, helium, or argon.

  The package 20 may be composed of a flat package base 21 and a lid 23 having a recess. The package 20 may have a recess in both the package base 21 and the lid 23.

  In the crystal resonator 5, for example, the crystal resonator element 1 is excited by the thickness-shear vibration by a drive signal applied via an electrode terminal 26a, 26b from an oscillation circuit integrated in an IC chip of an electronic device. And resonate (oscillate) at a predetermined frequency, and output a resonance signal (oscillation signal) from the electrode terminals 26a and 26b.

As described above, the crystal resonator 5 according to the second embodiment includes the crystal resonator element 1 and the package 20 in which the crystal resonator element 1 is accommodated, and thus the effects described in the first embodiment. It is possible to provide a crystal resonator in which Specifically, a crystal resonator having a low CI value and excellent vibration characteristics can be provided.
In addition, even if the crystal resonator 5 is replaced with the crystal resonator element 1 and the crystal resonator element 2 of the modified example is used, the crystal having the same effect as described above and the effect peculiar to the crystal resonator element 2 of the modified example is achieved. A vibrator can be provided.
In the crystal unit 5, the electrical connection between the mount electrodes 15a and 16a and the internal terminals 24a and 24b may be performed by wire bonding using metal wires or bumps instead of the conductive adhesive 30. Good.

(Third embodiment)
Next, a crystal oscillator as an example of an oscillator including the above-described resonator element and a circuit that drives the resonator element will be described.

  FIG. 7 is a schematic diagram showing a schematic configuration of the crystal oscillator of the third embodiment. FIG. 7A is a plan view seen from the lid side, and FIG. 7B is a cross-sectional view taken along the line AA of FIG. 7A. In the plan view, the lid is omitted. In addition, common portions with the first embodiment and the second embodiment are denoted by the same reference numerals, detailed description thereof is omitted, and description will be made focusing on portions different from the first embodiment and the second embodiment. .

  As shown in FIG. 7, the crystal oscillator 6 includes either the crystal vibrating piece 1 of the first embodiment or the crystal vibrating piece 2 of the modified example (here, the crystal vibrating piece 1) and the crystal vibrating piece 1. IC chip 40 as a circuit that drives (oscillates) and a package 20 in which crystal resonator element 1 and IC chip 40 are accommodated.

The IC chip 40 incorporating the oscillation circuit is fixed to the bottom surface 22b of the recess 22 of the package base 21 using an adhesive (not shown).
In the IC chip 40, a connection pad (not shown) is electrically connected to an internal connection terminal 22 c provided on the bottom surface 22 b of the recess 22 by a metal wire 41 such as Au (gold) or Al (aluminum).

The internal connection terminal 22c is made of a metal film in which a film such as Ni (nickel) or Au (gold) is laminated on a metallized layer such as W (tungsten) or Mo (molybdenum) by plating or the like, via an internal wiring (not shown). The electrode terminals 26a, 26b, 26c, and 26d provided at the four corners of the outer bottom surface 25 of the package 20 and the internal terminals 24a and 24b are electrically connected.
The connection between the connection pad of the IC chip 40 and the internal connection terminal 22c uses a connection method by flip chip mounting by inverting the IC chip 40 in addition to the connection method by wire bonding using the metal wire 41. May be.

The crystal oscillator 6 resonates at a predetermined frequency when the crystal resonator element 1 is excited by thickness shear vibration by a drive signal applied from the IC chip 40 via the internal connection terminal 22c, the internal terminals 24a and 24b, and the like ( Oscillate).
Then, the crystal oscillator 6 outputs an oscillation signal generated along with this oscillation to the outside via the IC chip 40, the electrode terminals 26a and 26d (26c and 26b), and the like.

As described above, the crystal oscillator 6 according to the third embodiment includes the crystal resonator element 1, the IC chip 40 that drives the crystal oscillator piece 1, the package 20 in which the crystal oscillator piece 1 and the IC chip 40 are accommodated, Therefore, it is possible to provide a crystal oscillator having the effects described in the first embodiment. Specifically, a crystal oscillator having a low CI value and excellent vibration characteristics can be provided.
Note that the crystal oscillator 6 can achieve the same effects as described above and the effects specific to the crystal resonator element 2 of the modified example even when the crystal resonator element 2 of the modified example is used instead of the crystal resonator element 1. Can be provided.
The crystal oscillator 6 has a module structure in which the IC chip 40 is not built in the package 20 but is externally attached (for example, a structure in which the crystal resonator 5 and the IC chip 40 are individually mounted on one substrate). It is good.

(Fourth embodiment)
Next, a mobile phone will be described as an example of an electronic device including the above-described resonator element.
FIG. 8 is a schematic perspective view showing the mobile phone according to the fourth embodiment.
A cellular phone 700 is a cellular phone provided with the quartz crystal vibrating piece 1 of the first embodiment or the quartz crystal vibrating piece 2 of a modification.
A cellular phone 700 shown in FIG. 8 uses the above-described quartz crystal resonator element (1 or 2) as a timing device such as a reference clock oscillation source, and further includes a liquid crystal display device 701, a plurality of operation buttons 702, an earpiece 703, And a mouthpiece 704.
According to this, since the cellular phone 700 includes the quartz crystal vibrating piece (1 or 2), the effects described in the first embodiment and the modified example are exhibited, and excellent performance can be exhibited. .
Note that the form of the mobile phone 700 is not limited to the illustrated type, and may be a so-called smartphone type.

  The above-mentioned vibrating piece is not limited to the mobile phone such as the mobile phone 700, but is an electronic book, personal computer, television, digital still camera, video camera, video recorder, navigation device, pager, electronic notebook, calculator, word processor, work It can be suitably used as a timing device such as a station, a videophone, a POS terminal, an electronic game device, a device equipped with a touch panel, etc., and in any case, the effects described in the first embodiment and the modified examples are achieved. An electronic device that exhibits excellent performance can be provided.

(Fifth embodiment)
Next, an automobile will be described as an example of the moving body including the above-described vibrating piece.
FIG. 9 is a schematic perspective view showing the automobile of the fifth embodiment.
The automobile 800 is an automobile provided with the crystal vibrating piece 1 of the first embodiment or the crystal vibrating piece 2 of a modified example.
The automobile 800 includes, for example, various electronically controlled devices (for example, an electronically controlled fuel injection device, an electronically controlled ABS device, an electronically controlled constant speed traveling device) on which the above-described quartz crystal resonator element (1 or 2) is mounted. Etc.) as a timing device for generating a reference clock.
According to this, since the automobile 800 includes the crystal vibrating piece (1 or 2), the effects described in the first embodiment and the modified example are exhibited, and excellent performance can be exhibited.

  The above-described vibrating element can be suitably used as a timing device for a mobile body including not only the automobile 800 but also a self-propelled robot, a self-propelled transport device, a train, a ship, an airplane, an artificial satellite, etc. Even in this case, the effects described in the first embodiment and the modified example can be obtained, and a moving body that exhibits excellent performance can be provided.

  DESCRIPTION OF SYMBOLS 1, 2 ... Crystal resonator element as a resonator element, 5 ... Crystal oscillator as a vibrator, 6 ... Crystal oscillator as an oscillator, 10 ... Crystal substrate as a base plate, 11, 12, 11a, 12a ... Main surface, DESCRIPTION OF SYMBOLS 13 ... Vibrating part, 14 ... Peripheral part, 15, 16 ... Excitation electrode, 15a, 16a ... Mount electrode, 17 ... 1st step part, 18 ... 2nd step part, 18a ... Step, 19 ... Convex part, 19a ... Wall surface 20 ... Package as a container, 21 ... Package base, 22 ... Recess, 22a ... Stepped portion, 22b ... Bottom, 22c ... Internal connection terminal, 23 ... Lid (lid), 24a, 24b ... Internal terminal, 25 ... Outside Bottom surface, 26a, 26b, 26c, 26d ... electrode terminal, 27 ... bonding member, 30 ... conductive adhesive, 40 ... IC chip as circuit, 41 ... metal wire, 700 ... mobile phone as electronic equipment, 701 ... liquid Display device, 702 ... operation button, 703 ... earpiece, 704 ... mouthpiece, 800 ... motor vehicle as a mobile unit, B ... bending vibration waveform, C ... virtual line, P ... vertex (maximum amplitude point).

Claims (13)

Of the crystal axes of quartz, among the X, Y, and Z axes, the X axis is the rotation axis, the axis that is rotated on the positive side of the Z axis in the negative direction of the Y axis is the Z ′ axis, and the Y axis A crystal in which the + side of the axis is rotated in the + direction of the Z axis is the Y ′ axis, the plane parallel to the X and Z ′ axes is the main surface, and the direction along the Y ′ axis is the thickness direction Equipped with a substrate,
The quartz substrate is
A vibrating part that vibrates in thickness,
And the peripheral portion is thinner than the vibration portion,
Only including,
Before Symbol periphery,
A first region disposed on one side of the vibrating portion in the X-axis direction ;
A second region disposed on the other side in the X-axis direction of the vibrating portion ;
Including
At least one of the first region and the second region protrudes in the Y′- axis direction from the peripheral portion , and the length along the Z′-axis direction is the Z ′ of the vibration unit. shorter than the length along the axial direction, and the vibration piece, characterized in that it has a convex portion which is within the range of the Z 'width along the axial direction of the vibration part as viewed from the X-axis direction. The resonator element according to claim 1,
A vibrating piece comprising a step portion between the vibrating portion and the convex portion. The resonator element according to claim 2,
  The stepped portion has a height in the Y′-axis direction from the peripheral portion that is the same as that of the convex portion. The resonator element according to claim 2 or 3,
The resonator element according to claim 1, wherein the stepped portion is thinner than the vibrating portion. In the resonator element according to any one of claims 2 to 4 ,
Comprising an excitation electrode provided at least in the vibration part;
Mx a length along the X-axis direction of the vibrating portion, wherein the X-axis direction to the length along Nx before Kidan difference portion, the length along the X-axis direction of the excitation electrodes Ex, and Dx the X-axis direction to the length along the protrusion, Sx the spacing along the X-axis direction of the convex portion and the front Kidan difference portion, the wavelength of bending vibration generated in the quartz substrate λ When
Mx = (v + 1/2) × λ ± 0.1λ (where v is a positive integer),
Nx = λ / 2 × p ± 0.1λ (where p is a positive integer),
Ex = (w + 1/2) × λ ± 0.1λ (where w is a positive integer),
Dx = λ / 2 × m ± 0.1λ (where m is a positive integer),
Sx = λ / 2 × n ± 0.1λ (where n is a positive integer),
A vibrating piece characterized by satisfying the relationship The resonator element according to claim 5 ,
A length along the X-axis direction of the quartz substrate Lx, the thickness of the vibrating section when the t,
10 ≦ Lx / t ≦ 40,
A vibrating piece characterized by satisfying the relationship In the resonator element according to any one of claims 1 to 6 ,
'The length along the axial direction Dz, the Z of the vibration unit' the Z of the convex portion length along the axial direction is taken as Mz,
0 <Dz / Mz ≦ 0.7,
A vibrating piece characterized by satisfying the relationship In the resonator element according to any one of claims 1 to 7 ,
When the height in the Y′- axis direction from the peripheral portion of the convex portion is Dy, and the height in the Y′- axis direction from the peripheral portion of the vibrating portion is My,
0 <Dy / My ≦ 1,
A vibrating piece characterized by satisfying the relationship In the resonator element according to any one of claims 1 to 6,
The first wall surface that extends along the front Symbol Z 'axis direction and connects the main surface of the main surface and the peripheral portion of the front Kidan difference unit, and the main principal surface and the peripheral portion of the convex portion a second surface that extends along the front Symbol Z 'axis direction and connects the surface, an inclined surface,
The inclined surface includes a region having a maximum amplitude of bending vibration generated in the quartz substrate . A resonator element according to any one of claims 1 to 9 ,
And a container in which the vibrating piece is accommodated. A resonator element according to any one of claims 1 to 9 ,
And a circuit for driving the resonator element. An electronic apparatus characterized by comprising a resonator element according to any one of claims 1 to 9. Mobile, characterized in that it comprises a resonator element according to any one of claims 1 to 9.

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