JP6209122B2 - 孔形成方法及び測定装置 - Google Patents

孔形成方法及び測定装置 Download PDF

Info

Publication number
JP6209122B2
JP6209122B2 JP2014075880A JP2014075880A JP6209122B2 JP 6209122 B2 JP6209122 B2 JP 6209122B2 JP 2014075880 A JP2014075880 A JP 2014075880A JP 2014075880 A JP2014075880 A JP 2014075880A JP 6209122 B2 JP6209122 B2 JP 6209122B2
Authority
JP
Japan
Prior art keywords
voltage
electrode
applying
hole
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2014075880A
Other languages
English (en)
Japanese (ja)
Other versions
JP2015197385A (ja
JP2015197385A5 (enExample
Inventor
板橋　直志
直志 板橋
園子 右高
園子 右高
至 柳
至 柳
玲奈 赤堀
玲奈 赤堀
武田　健一
健一 武田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi High Technologies Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP2014075880A priority Critical patent/JP6209122B2/ja
Application filed by Hitachi High Technologies Corp filed Critical Hitachi High Technologies Corp
Priority to GB1616120.0A priority patent/GB2538482B/en
Priority to DE112015001642.2T priority patent/DE112015001642B4/de
Priority to PCT/JP2015/059424 priority patent/WO2015152003A1/ja
Priority to CN201580015959.5A priority patent/CN106133507B/zh
Priority to US15/129,854 priority patent/US11181502B2/en
Publication of JP2015197385A publication Critical patent/JP2015197385A/ja
Publication of JP2015197385A5 publication Critical patent/JP2015197385A5/ja
Application granted granted Critical
Publication of JP6209122B2 publication Critical patent/JP6209122B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/416—Systems
    • G01N27/447—Systems using electrophoresis
    • G01N27/44704—Details; Accessories
    • G01N27/44717—Arrangements for investigating the separated zones, e.g. localising zones
    • G01N27/44721—Arrangements for investigating the separated zones, e.g. localising zones by optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/645—Specially adapted constructive features of fluorimeters
    • G01N21/648—Specially adapted constructive features of fluorimeters using evanescent coupling or surface plasmon coupling for the excitation of fluorescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/6486—Measuring fluorescence of biological material, e.g. DNA, RNA, cells
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65—Raman scattering
    • G01N21/658—Raman scattering enhancement Raman, e.g. surface plasmons
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/416—Systems
    • G01N27/447—Systems using electrophoresis
    • G01N27/44756—Apparatus specially adapted therefor
    • G01N27/44791—Microapparatus
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/483—Physical analysis of biological material
    • G01N33/487—Physical analysis of biological material of liquid biological material
    • G01N33/48707—Physical analysis of biological material of liquid biological material by electrical means
    • G01N33/48721—Investigating individual macromolecules, e.g. by translocation through nanopores
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures

Landscapes

  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Immunology (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Pathology (AREA)
  • Biomedical Technology (AREA)
  • Molecular Biology (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Electrochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Nanotechnology (AREA)
  • Hematology (AREA)
  • Urology & Nephrology (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Biophysics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Dispersion Chemistry (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
JP2014075880A 2014-04-02 2014-04-02 孔形成方法及び測定装置 Active JP6209122B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2014075880A JP6209122B2 (ja) 2014-04-02 2014-04-02 孔形成方法及び測定装置
DE112015001642.2T DE112015001642B4 (de) 2014-04-02 2015-03-26 Verfahren zur Lochbildung und Messvorrichtung
PCT/JP2015/059424 WO2015152003A1 (ja) 2014-04-02 2015-03-26 孔形成方法及び測定装置
CN201580015959.5A CN106133507B (zh) 2014-04-02 2015-03-26 孔形成方法以及测量装置
GB1616120.0A GB2538482B (en) 2014-04-02 2015-03-26 Hole formation method and measurement device
US15/129,854 US11181502B2 (en) 2014-04-02 2015-03-26 Hole formation method and measurement device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014075880A JP6209122B2 (ja) 2014-04-02 2014-04-02 孔形成方法及び測定装置

Publications (3)

Publication Number Publication Date
JP2015197385A JP2015197385A (ja) 2015-11-09
JP2015197385A5 JP2015197385A5 (enExample) 2017-02-23
JP6209122B2 true JP6209122B2 (ja) 2017-10-04

Family

ID=54240329

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014075880A Active JP6209122B2 (ja) 2014-04-02 2014-04-02 孔形成方法及び測定装置

Country Status (6)

Country Link
US (1) US11181502B2 (enExample)
JP (1) JP6209122B2 (enExample)
CN (1) CN106133507B (enExample)
DE (1) DE112015001642B4 (enExample)
GB (1) GB2538482B (enExample)
WO (1) WO2015152003A1 (enExample)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES2804175T3 (es) * 2015-02-24 2021-02-04 Univ Ottawa Localizar fabricación de nanoporo sobre una membrana por iluminación láser durante descomposición controlada
GB201508669D0 (en) 2015-05-20 2015-07-01 Oxford Nanopore Tech Ltd Methods and apparatus for forming apertures in a solid state membrane using dielectric breakdown
US20180313756A1 (en) * 2015-11-13 2018-11-01 Konica Minolta, Inc. Method for surface plasmon resonance fluorescence analysis and device for surface plasmon resonance fluorescence analysis
US10908121B2 (en) 2016-04-28 2021-02-02 Hitachi, Ltd. Membrane device, measurement device, and method for producing membrane device
DE102016222613B3 (de) * 2016-11-17 2018-05-03 Universität Ulm Messzelle für die Raman-Spektroskopie an einer Fest-Flüssig-Grenzfläche und Verwendungen hiervon
JP6730171B2 (ja) * 2016-12-07 2020-07-29 株式会社日立製作所 液槽形成方法，測定装置及び分析デバイス
GB2570849B (en) * 2016-12-09 2022-03-16 Hitachi High Tech Corp Nanopore-forming method, nanopore-forming device and biomolecule measurement device
US10443146B2 (en) * 2017-03-30 2019-10-15 Lam Research Corporation Monitoring surface oxide on seed layers during electroplating
JP6846309B2 (ja) * 2017-08-09 2021-03-24 株式会社日立製作所 溶液槽デバイス
US20190094179A1 (en) * 2017-09-22 2019-03-28 Applied Materials, Inc. Method for simple fluidic addressing of a nanopore
JP6959121B2 (ja) * 2017-12-05 2021-11-02 株式会社日立ハイテク 孔形成方法及び孔形成装置
JP7440375B2 (ja) * 2020-08-19 2024-02-28 株式会社日立製作所 孔形成方法及び孔形成装置
WO2022251314A1 (en) * 2021-05-25 2022-12-01 Arizona Board Of Regents On Behalf Of Arizona State University Systems and methods for non-destructive isolation, concentration, and detection for unbiased characterization of nano- and bio-particles
JP1732280S (ja) * 2022-01-07 2022-12-15 ラマン顕微鏡
CN114705743A (zh) * 2022-04-01 2022-07-05 南京师范大学 一种基于纳米孔的实验装置及实验方法
CN120418650A (zh) * 2022-10-26 2025-08-01 莫拉里蒂公司 用于处理样品的设备、系统和方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7258838B2 (en) * 1999-06-22 2007-08-21 President And Fellows Of Harvard College Solid state molecular probe device
WO2004077503A2 (en) * 2003-02-03 2004-09-10 President And Fellows Of Harvard College Controlled fabrication of gaps in electrically conducting structures
AU2005260719B2 (en) * 2004-06-30 2010-07-22 Mustang Sampling, Llc Gas sample conditioning system
JP2009063402A (ja) * 2007-09-06 2009-03-26 Canon Inc センサ素子の作製装置、センサ素子の作製方法、及びセンサ素子を備えたセンシング装置
EP2196796A1 (en) 2008-12-09 2010-06-16 Imec Single molecule optical spectroscopy in solid-state nanopores in a transmission-based approach
EP2623960B1 (en) * 2010-09-29 2020-11-11 Hitachi High-Tech Corporation Biopolymer optical analysis device and method
JP5819183B2 (ja) * 2011-02-03 2015-11-18 アークレイ株式会社 分析装置、センサの検査装置、検査方法、及び検査プログラム
JP2013090576A (ja) * 2011-10-24 2013-05-16 Hitachi Ltd 核酸分析デバイス及びそれを用いた核酸分析装置
JP6298450B2 (ja) * 2012-05-07 2018-03-20 ジ ユニバーシティ オブ オタワ 固体ナノポアの大きさを制御するための方法
WO2014153047A1 (en) * 2013-03-14 2014-09-25 The Trustees Of Boston University Optoelectronic control of solid-state nanopores
EP3730205B1 (en) * 2013-03-15 2024-05-01 President and Fellows of Harvard College Method of surface wetting

Also Published As

Publication number Publication date
JP2015197385A (ja) 2015-11-09
CN106133507B (zh) 2018-06-15
DE112015001642B4 (de) 2021-12-09
GB2538482A (en) 2016-11-16
US20170138899A1 (en) 2017-05-18
GB2538482B (en) 2020-08-26
GB201616120D0 (en) 2016-11-09
WO2015152003A1 (ja) 2015-10-08
DE112015001642T5 (de) 2016-12-29
CN106133507A (zh) 2016-11-16
US11181502B2 (en) 2021-11-23

Similar Documents

Publication Publication Date Title
JP6209122B2 (ja) 孔形成方法及び測定装置
US10753009B2 (en) Localizing nanopore fabrication on a membrane by laser illumination during controlled breakdown
JP5925854B2 (ja) 生体ポリマーの光学的解析装置及び方法
JPWO2012165400A1 (ja) 生体ポリマーの光学的解析装置及び方法
JP6228613B2 (ja) ナノポア形成方法、ナノポア形成装置及びセット
Liu et al. Single-molecule photoelectron tunnelling spectroscopy
WO2018105123A1 (ja) ナノポア形成方法、ナノポア形成装置及び生体分子計測装置
JP6379212B2 (ja) 定位置制御装置、及び方法
KR101758114B1 (ko) 에너지 전이에 따른 형광 수명을 측정하는 방법
EP3722794B1 (en) Hole forming method and hole forming device
US7148478B2 (en) Electrical measurements in samples
JP4528278B2 (ja) 分析装置及び分析方法
EP4235166A1 (en) Method for determining a charge of a molecule in solution or for determining an ionic strength of a solution
JP2014157097A (ja) 分光法および分光装置
FI20175623A1 (en) A method and devices for adaptive measuring of electrochemiluminescence
JP2008261729A (ja) プラズマ内励起種測定方法、およびプラズマ内励起種測定装置
Chen et al. Plasmonic nanoslit for fluidic SERS: a strategy towards genome sequencing
JP2011141190A (ja) 蛍光測定装置及び蛍光測定方法
PL236148B1 (pl) Sposób nakładania analitu w polu elektrycznym z roztworu na podłoże do powierzchniowo wzmocnionej spektroskopii

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20170120

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20170120

RD03 Notification of appointment of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7423

Effective date: 20170120

RD04 Notification of resignation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7424

Effective date: 20170126

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20170905

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20170908

R150 Certificate of patent or registration of utility model

Ref document number: 6209122

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

S533 Written request for registration of change of name

Free format text: JAPANESE INTERMEDIATE CODE: R313533

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350