JP6200962B2 - 空気流量測定装置 - Google Patents
空気流量測定装置 Download PDFInfo
- Publication number
- JP6200962B2 JP6200962B2 JP2015544852A JP2015544852A JP6200962B2 JP 6200962 B2 JP6200962 B2 JP 6200962B2 JP 2015544852 A JP2015544852 A JP 2015544852A JP 2015544852 A JP2015544852 A JP 2015544852A JP 6200962 B2 JP6200962 B2 JP 6200962B2
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- flow rate
- detection element
- physical quantity
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- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000005259 measurement Methods 0.000 title claims description 6
- 238000001514 detection method Methods 0.000 claims description 118
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- 238000011144 upstream manufacturing Methods 0.000 claims description 3
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- 238000009833 condensation Methods 0.000 description 6
- 230000005494 condensation Effects 0.000 description 6
- 229920005989 resin Polymers 0.000 description 5
- 239000011347 resin Substances 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 239000003990 capacitor Substances 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 239000000428 dust Substances 0.000 description 3
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 238000002485 combustion reaction Methods 0.000 description 2
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- 239000000356 contaminant Substances 0.000 description 1
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- 239000003822 epoxy resin Substances 0.000 description 1
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Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6842—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/696—Circuits therefor, e.g. constant-current flow meters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
- G01F15/02—Compensating or correcting for variations in pressure, density or temperature
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
- G01F15/006—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus characterised by the use of a particular material, e.g. anti-corrosive material
Landscapes
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Volume Flow (AREA)
Description
Claims (8)
- 空気の流量を検出する流量検出素子と、湿度あるいは圧力の少なくとも1つの物理量を検出する物理量検出素子と、前記流量検出素子あるいは前記物理量検出素子の出力信号を処理する回路を内部に有する回路パッケージと、を有する空気流量測定装置であって、
前記流量検出素子と前記物理量検出素子とは、前記流量検出素子がベアチップの状態で、前記物理量検出素子がプラスチックパッケージ部品の状態で、かつ前記流量検出素子の検出部と前記物理量検出素子の検出部とが空気中に露出した状態で、同一の前記回路パッケージ内に配置されることを特徴とする空気流量測定装置。 - 前記流量検出素子と前記物理量検出素子とは、主通路を流れる空気の流れ方向に対し垂直方向となるように前記回路パッケージ内に配置されていることを特徴とする請求項1に記載の空気流量測定装置。
- 前記物理量検出素子は、前記流量検出素子よりコネクタ側に配置されていることを特徴とする請求項1に記載の空気流量測定装置。
- 前記物理量検出素子は、前記流量検出素子と同一線上にならぶように配置されていることを特徴とする請求項2に記載の空気流量測定装置。
- 前記回路パッケージは、前記物理量検出素子の近傍にヒーター素子が配置されていることを特徴とする請求項1に記載の空気流量測定装置。
- 前記ヒーター素子は、チップ抵抗あるいはサーミスタからなることを特徴とする請求項5に記載の空気流量測定装置。
- 前記物理量検出素子と前記ヒーター素子との距離をL1、前記流量検出素子と前記ヒーター素子との距離をL2とすると、
L1<L2
の関係を満たしていることを特徴とする請求項5に記載の空気流量測定装置。 - 前記回路パッケージは、前記物理量検出素子の空気流れの上下流側の少なくとも一方側に突起あるいは溝を有することを特徴とする請求項1に記載の空気流量測定装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013226132 | 2013-10-31 | ||
JP2013226132 | 2013-10-31 | ||
PCT/JP2014/073427 WO2015064213A1 (ja) | 2013-10-31 | 2014-09-05 | 空気流量測定装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2015064213A1 JPWO2015064213A1 (ja) | 2017-03-09 |
JP6200962B2 true JP6200962B2 (ja) | 2017-09-20 |
Family
ID=53003826
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015544852A Expired - Fee Related JP6200962B2 (ja) | 2013-10-31 | 2014-09-05 | 空気流量測定装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20160252378A1 (ja) |
EP (1) | EP3064906A4 (ja) |
JP (1) | JP6200962B2 (ja) |
CN (1) | CN105683721A (ja) |
WO (1) | WO2015064213A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE112017004373T5 (de) * | 2016-11-30 | 2019-05-16 | Hitachi Automotive Systems, Ltd. | Messvorrichtung zur Bestimmung der Strömungsgeschwindigkeit von Luft |
WO2019225073A1 (ja) * | 2018-05-22 | 2019-11-28 | 日立オートモティブシステムズ株式会社 | 物理量検出装置 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02103263U (ja) * | 1989-02-01 | 1990-08-16 | ||
JP3335860B2 (ja) * | 1997-01-16 | 2002-10-21 | 株式会社日立製作所 | 熱式空気流量計用測定素子及び熱式空気流量計 |
JP4381630B2 (ja) * | 2001-06-06 | 2009-12-09 | 株式会社日立製作所 | 自動車制御用樹脂封止型モジュール装置 |
JP4797771B2 (ja) * | 2006-04-20 | 2011-10-19 | 株式会社デンソー | メンブレンを有するセンサ装置およびその製造方法 |
JP4882732B2 (ja) | 2006-12-22 | 2012-02-22 | 株式会社デンソー | 半導体装置 |
JP5279667B2 (ja) | 2008-11-28 | 2013-09-04 | 日立オートモティブシステムズ株式会社 | 熱式空気流量センサ |
JP4929333B2 (ja) * | 2009-09-30 | 2012-05-09 | 日立オートモティブシステムズ株式会社 | センサの構造 |
JP2012058044A (ja) * | 2010-09-08 | 2012-03-22 | Hitachi Automotive Systems Ltd | 熱式流体流量測定装置 |
JP5526065B2 (ja) * | 2011-03-25 | 2014-06-18 | 日立オートモティブシステムズ株式会社 | 熱式センサおよびその製造方法 |
US9772208B2 (en) * | 2012-01-18 | 2017-09-26 | Hitachi Automotive Systems, Ltd. | Thermal type flowmeter with particle guide member |
-
2014
- 2014-09-05 WO PCT/JP2014/073427 patent/WO2015064213A1/ja active Application Filing
- 2014-09-05 CN CN201480059113.7A patent/CN105683721A/zh active Pending
- 2014-09-05 US US15/029,773 patent/US20160252378A1/en not_active Abandoned
- 2014-09-05 EP EP14857200.1A patent/EP3064906A4/en not_active Withdrawn
- 2014-09-05 JP JP2015544852A patent/JP6200962B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP3064906A1 (en) | 2016-09-07 |
WO2015064213A1 (ja) | 2015-05-07 |
CN105683721A (zh) | 2016-06-15 |
EP3064906A4 (en) | 2017-03-08 |
JPWO2015064213A1 (ja) | 2017-03-09 |
US20160252378A1 (en) | 2016-09-01 |
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