JP6198536B2 - 弾性波素子とこれを用いた電子機器 - Google Patents

弾性波素子とこれを用いた電子機器 Download PDF

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JP6198536B2
JP6198536B2 JP2013187919A JP2013187919A JP6198536B2 JP 6198536 B2 JP6198536 B2 JP 6198536B2 JP 2013187919 A JP2013187919 A JP 2013187919A JP 2013187919 A JP2013187919 A JP 2013187919A JP 6198536 B2 JP6198536 B2 JP 6198536B2
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dielectric film
electrode fingers
piezoelectric substrate
acoustic wave
electrode
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Japanese (ja)
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JP2015056712A (ja
JP2015056712A5 (enExample
Inventor
岩崎　智弘
智弘 岩崎
中村　弘幸
弘幸 中村
徹 山路
徹 山路
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スカイワークスフィルターソリューションズジャパン株式会社
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Priority to JP2013187919A priority Critical patent/JP6198536B2/ja
Priority to US14/176,149 priority patent/US9496846B2/en
Publication of JP2015056712A publication Critical patent/JP2015056712A/ja
Priority to US15/332,279 priority patent/US10439585B2/en
Publication of JP2015056712A5 publication Critical patent/JP2015056712A5/ja
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Priority to US16/545,037 priority patent/US11863156B2/en
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JP2013187919A 2013-02-15 2013-09-11 弾性波素子とこれを用いた電子機器 Active JP6198536B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2013187919A JP6198536B2 (ja) 2013-09-11 2013-09-11 弾性波素子とこれを用いた電子機器
US14/176,149 US9496846B2 (en) 2013-02-15 2014-02-10 Acoustic wave device and electronic apparatus including same
US15/332,279 US10439585B2 (en) 2013-02-15 2016-10-24 Acoustic wave device including multiple dielectric films
US16/545,037 US11863156B2 (en) 2013-02-15 2019-08-20 Acoustic wave device including multi-layer interdigital transducer electrodes

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JP2013187919A JP6198536B2 (ja) 2013-09-11 2013-09-11 弾性波素子とこれを用いた電子機器

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JP2015056712A JP2015056712A (ja) 2015-03-23
JP2015056712A5 JP2015056712A5 (enExample) 2016-10-27
JP6198536B2 true JP6198536B2 (ja) 2017-09-20

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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6993400B2 (ja) 2017-02-22 2022-01-13 株式会社村田製作所 弾性表面波素子
JP6957306B2 (ja) * 2017-10-17 2021-11-02 太陽誘電株式会社 弾性波デバイスおよびその製造方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS513183A (en) * 1974-06-24 1976-01-12 Matsushita Electric Industrial Co Ltd Atsudenseisoshi
JPS51101445A (en) * 1975-03-04 1976-09-07 Murata Manufacturing Co Danseihyomenhatoransujuusaa
JPS529389A (en) * 1975-07-14 1977-01-24 Toshiba Corp Surface acoustic wave device
DE19548051A1 (de) * 1995-12-21 1997-06-26 Siemens Matsushita Components Elektronisches Bauelement insbesondere mit akustischen Oberflächenwellen arbeitendes Bauelement - OFW-Bauelement -
JP3858312B2 (ja) * 1996-11-11 2006-12-13 松下電器産業株式会社 表面弾性波素子およびその製造方法
JP2008067289A (ja) * 2006-09-11 2008-03-21 Fujitsu Media Device Kk 弾性波デバイスおよびフィルタ
JP2008109413A (ja) * 2006-10-25 2008-05-08 Fujitsu Media Device Kk 弾性波デバイスおよびフィルタ
JP2011135245A (ja) * 2009-12-24 2011-07-07 Panasonic Corp 弾性波デバイスとこれを用いた電子機器、及び弾性波デバイスの製造方法
KR101516653B1 (ko) * 2011-01-18 2015-05-04 가부시키가이샤 무라타 세이사쿠쇼 탄성 표면파 필터장치
JP5671713B2 (ja) * 2011-03-04 2015-02-18 スカイワークス・パナソニック フィルターソリューションズ ジャパン株式会社 弾性波デバイス
JP5751887B2 (ja) * 2011-03-30 2015-07-22 京セラ株式会社 弾性波素子およびそれを用いた弾性波装置
JP5859355B2 (ja) * 2012-03-23 2016-02-10 京セラ株式会社 弾性波素子およびそれを用いた弾性波装置

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JP2015056712A (ja) 2015-03-23

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