JP6191152B2 - 振動素子、振動子、電子デバイス、電子機器、及び移動体 - Google Patents

振動素子、振動子、電子デバイス、電子機器、及び移動体 Download PDF

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Publication number
JP6191152B2
JP6191152B2 JP2013027618A JP2013027618A JP6191152B2 JP 6191152 B2 JP6191152 B2 JP 6191152B2 JP 2013027618 A JP2013027618 A JP 2013027618A JP 2013027618 A JP2013027618 A JP 2013027618A JP 6191152 B2 JP6191152 B2 JP 6191152B2
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Prior art keywords
excitation electrode
substrate
vibration
vibration element
frequency
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JP2013027618A
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Japanese (ja)
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JP2014158149A (ja
JP2014158149A5 (enrdf_load_stackoverflow
Inventor
石井　修
修 石井
孝夫 森田
孝夫 森田
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Seiko Epson Corp
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Seiko Epson Corp
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Priority to JP2013027618A priority Critical patent/JP6191152B2/ja
Priority to TW102109355A priority patent/TWI578585B/zh
Priority to US13/849,896 priority patent/US9013243B2/en
Priority to CN201310098772.9A priority patent/CN103368518B/zh
Priority to CN2013201404412U priority patent/CN203233372U/zh
Publication of JP2014158149A publication Critical patent/JP2014158149A/ja
Priority to US14/663,888 priority patent/US20150194946A1/en
Publication of JP2014158149A5 publication Critical patent/JP2014158149A5/ja
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  • Oscillators With Electromechanical Resonators (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2013027618A 2012-03-27 2013-02-15 振動素子、振動子、電子デバイス、電子機器、及び移動体 Active JP6191152B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2013027618A JP6191152B2 (ja) 2013-02-15 2013-02-15 振動素子、振動子、電子デバイス、電子機器、及び移動体
TW102109355A TWI578585B (zh) 2012-03-27 2013-03-15 振動元件、振動器、電子裝置、電子機器及移動體
US13/849,896 US9013243B2 (en) 2012-03-27 2013-03-25 Resonator element, resonator, electronic device, electronic apparatus, and mobile object
CN2013201404412U CN203233372U (zh) 2012-03-27 2013-03-26 振动元件、振子、电子器件、电子设备以及移动体
CN201310098772.9A CN103368518B (zh) 2012-03-27 2013-03-26 振动元件、振子、电子器件、电子设备以及移动体
US14/663,888 US20150194946A1 (en) 2012-03-27 2015-03-20 Resonator element, resonator, electronic device, electronic apparatus, and mobile object

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013027618A JP6191152B2 (ja) 2013-02-15 2013-02-15 振動素子、振動子、電子デバイス、電子機器、及び移動体

Publications (3)

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JP2014158149A JP2014158149A (ja) 2014-08-28
JP2014158149A5 JP2014158149A5 (enrdf_load_stackoverflow) 2016-03-24
JP6191152B2 true JP6191152B2 (ja) 2017-09-06

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JP (1) JP6191152B2 (enrdf_load_stackoverflow)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6303372B2 (ja) 2013-10-01 2018-04-04 セイコーエプソン株式会社 振動素子、振動子、電子デバイス、電子機器、及び移動体
JP2016140023A (ja) * 2015-01-29 2016-08-04 セイコーエプソン株式会社 振動片、振動子、振動デバイス、発振器、電子機器、および移動体
JP2017079347A (ja) * 2015-10-19 2017-04-27 セイコーエプソン株式会社 圧電振動片、圧電振動子、圧電振動子の製造方法、電子機器、および移動体
JP7027841B2 (ja) * 2017-11-29 2022-03-02 セイコーエプソン株式会社 振動デバイス、電子機器および移動体
JP6813065B2 (ja) * 2019-09-03 2021-01-13 セイコーエプソン株式会社 振動デバイス、電子機器、および移動体
JP2022139556A (ja) * 2021-03-12 2022-09-26 セイコーエプソン株式会社 振動子及び発振器
WO2023286327A1 (ja) * 2021-07-12 2023-01-19 株式会社村田製作所 圧電振動子及び圧電振動子の製造方法
WO2023085348A1 (ja) * 2021-11-15 2023-05-19 京セラ株式会社 水晶素子及び水晶デバイス

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3881503B2 (ja) * 2000-09-29 2007-02-14 京セラ株式会社 圧電振動子及びそれを搭載した圧電デバイス
TWI401882B (zh) * 2005-09-15 2013-07-11 Daishinku Corp Crystal oscillator
JP5796355B2 (ja) * 2011-06-03 2015-10-21 セイコーエプソン株式会社 圧電振動素子、圧電振動子、電子デバイス、及び電子機器

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