JP6176789B2 - 電子部品検査装置 - Google Patents

電子部品検査装置 Download PDF

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Publication number
JP6176789B2
JP6176789B2 JP2014016477A JP2014016477A JP6176789B2 JP 6176789 B2 JP6176789 B2 JP 6176789B2 JP 2014016477 A JP2014016477 A JP 2014016477A JP 2014016477 A JP2014016477 A JP 2014016477A JP 6176789 B2 JP6176789 B2 JP 6176789B2
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JP
Japan
Prior art keywords
imaging
focal length
inspection
optimum focal
microscope
Prior art date
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Expired - Fee Related
Application number
JP2014016477A
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English (en)
Japanese (ja)
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JP2015143628A (ja
Inventor
仁彦 津田
仁彦 津田
春生 張
春生 張
衛紅 郭
衛紅 郭
飛 成
飛 成
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KYODO DESIGN & PLANNING CORP.
Original Assignee
KYODO DESIGN & PLANNING CORP.
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Filing date
Publication date
Application filed by KYODO DESIGN & PLANNING CORP. filed Critical KYODO DESIGN & PLANNING CORP.
Priority to JP2014016477A priority Critical patent/JP6176789B2/ja
Priority to CN201510024613.3A priority patent/CN104820299A/zh
Priority to TW104102635A priority patent/TW201530124A/zh
Publication of JP2015143628A publication Critical patent/JP2015143628A/ja
Application granted granted Critical
Publication of JP6176789B2 publication Critical patent/JP6176789B2/ja
Expired - Fee Related legal-status Critical Current
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Nonlinear Science (AREA)
  • Signal Processing (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Optics & Photonics (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2014016477A 2014-01-31 2014-01-31 電子部品検査装置 Expired - Fee Related JP6176789B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2014016477A JP6176789B2 (ja) 2014-01-31 2014-01-31 電子部品検査装置
CN201510024613.3A CN104820299A (zh) 2014-01-31 2015-01-16 电子部件检查装置
TW104102635A TW201530124A (zh) 2014-01-31 2015-01-27 電子構件檢查裝置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014016477A JP6176789B2 (ja) 2014-01-31 2014-01-31 電子部品検査装置

Publications (2)

Publication Number Publication Date
JP2015143628A JP2015143628A (ja) 2015-08-06
JP6176789B2 true JP6176789B2 (ja) 2017-08-09

Family

ID=53730634

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014016477A Expired - Fee Related JP6176789B2 (ja) 2014-01-31 2014-01-31 電子部品検査装置

Country Status (3)

Country Link
JP (1) JP6176789B2 (zh)
CN (1) CN104820299A (zh)
TW (1) TW201530124A (zh)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20170108685A1 (en) * 2015-10-16 2017-04-20 Mikroscan Technologies, Inc. Systems, media, methods, and apparatus for enhanced digital microscopy
CN105259178B (zh) * 2015-11-20 2019-03-15 云南卡索实业有限公司 一种剪切类线性痕迹激光检测系统
TWI588469B (zh) * 2016-04-26 2017-06-21 住華科技股份有限公司 自動檢測系統及應用其自動檢測方法
CN108872251A (zh) * 2018-08-02 2018-11-23 北京兆维科技开发有限公司 一种显示屏的图像采集机构和系统
CN108897153A (zh) * 2018-08-10 2018-11-27 宁波舜宇仪器有限公司 液晶面板导电粒子自动视觉检测装置
CN110445964A (zh) * 2019-07-22 2019-11-12 广州供电局有限公司 摄像装置及电缆故障解剖系统
KR20210116777A (ko) * 2020-03-13 2021-09-28 (주)테크윙 전자부품 처리장비용 촬영장치
CN114324360A (zh) * 2021-12-31 2022-04-12 深圳鼎晶科技有限公司 一种aoi压痕检测系统及方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63259521A (ja) * 1987-04-16 1988-10-26 Olympus Optical Co Ltd 複合型合焦検出装置
JP2000100883A (ja) * 1998-09-21 2000-04-07 Seiko Epson Corp 半導体検査装置
JP2002277729A (ja) * 2001-03-21 2002-09-25 Olympus Optical Co Ltd 顕微鏡用オートフォーカス装置および方法
US20040086166A1 (en) * 2002-11-01 2004-05-06 Photon Dynamics, Inc. Method and apparatus for flat patterned media inspection
JP5038191B2 (ja) * 2008-03-04 2012-10-03 有限会社共同設計企画 電子部品検査方法およびそれに用いられる装置
KR20090131000A (ko) * 2008-06-17 2009-12-28 아주하이텍(주) 플렉시블 인쇄회로기판의 통합 검사 시스템 및 그 방법
JP4716148B1 (ja) * 2010-03-30 2011-07-06 レーザーテック株式会社 検査装置並びに欠陥分類方法及び欠陥検出方法
CN102338755A (zh) * 2010-07-15 2012-02-01 鸿富锦精密工业（深圳）有限公司 电子元件接触点失效分析方法
KR20120015172A (ko) * 2010-08-11 2012-02-21 엘지디스플레이 주식회사 표시장치의 검사장치 및 그의 검사방법
KR20130051796A (ko) * 2011-11-10 2013-05-21 (주)쎄미시스코 기판 검사장치
JP2013145123A (ja) * 2012-01-13 2013-07-25 Seiwa Optical Co Ltd 広角反射同軸照明付光学系

Also Published As

Publication number Publication date
TWI560440B (zh) 2016-12-01
CN104820299A (zh) 2015-08-05
TW201530124A (zh) 2015-08-01
JP2015143628A (ja) 2015-08-06

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