JP6174260B2 - マルチダイに対する精細な粒度の集積型電圧調整 - Google Patents
マルチダイに対する精細な粒度の集積型電圧調整 Download PDFInfo
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- JP6174260B2 JP6174260B2 JP2016533324A JP2016533324A JP6174260B2 JP 6174260 B2 JP6174260 B2 JP 6174260B2 JP 2016533324 A JP2016533324 A JP 2016533324A JP 2016533324 A JP2016533324 A JP 2016533324A JP 6174260 B2 JP6174260 B2 JP 6174260B2
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- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
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Description
それぞれの個々のIPブロックは、独自の一意の電力供給要件、及び電力送達に関する課題を有し得る。例えば、1つのIPブロックは、現在使用可能な他の電源電圧と異なる電源電圧を使用して動作し得る。異なる電源電圧は、現在の電源電圧とわずかに異なる(例えば、約100mVのみの違い)だけであり得るが、異なる電源電圧は著しい量の電流を引き込み得る。高電流の引き込み及びエネルギー効率の重要性により、2つの電源電圧のうちの高い方を切断する単純なLDO(low-dropout;低ドロップアウト)線形調整器は、低電力設計に適した解決方法とはならない場合がある。電力効率に対する要求及びSOCデバイスに関する多くの電源電圧要件の存在が組み合わさると、SOCデバイスと電力管理ユニット(power management unit;PMU)との間の接続の設計は、かなり複雑になる場合がある。
Claims (20)
- 半導体デバイスであって、
半導体基板と、
前記半導体基板の表面上にアレイ内に形成された複数の受動構造であって、前記受動構造は前記半導体基板上に形成された1つ以上の受動素子を含み、前記受動素子のうちの少なくとも1つはコンデンサであり、前記アレイは前記半導体基板の前記表面上のx及びy方向の規則的なアレイを含み、前記x及びy方向の規則的なアレイは、前記x方向に配列された少なくとも2つのコンデンサ及び前記y方向に配列された少なくとも2つのコンデンサを含む、受動構造と、
前記受動構造のアレイを少なくとも1つの追加の半導体デバイスに結合するための、前記半導体基板の前記表面上の複数の端子と、
を備え、
前記アレイは前記受動構造のタイル化されたパターンを備え、各タイルは当該タイル内の前記受動素子に別個に関連付けられた前記半導体基板の前記表面上の前記複数の端子のうちの少なくとも2つを含み、当該タイル内の前記受動素子に別個に関連付けられた第1の端子は当該タイル内の前記受動素子のためのアノードを含み、当該タイル内の前記受動素子に個別に関連付けられた第2の端子は前記受動素子のためのカソードを含む、デバイス。 - 前記アレイ内の前記受動構造のうちの2つ以上は互いに結合される、請求項1に記載のデバイス。
- 前記半導体基板上に形成された1つ以上のスイッチを更に備える、請求項1に記載のデバイス。
- 前記端子は、前記受動素子間の短絡を防止するための最小距離で離間される、請求項1に記載のデバイス。
- 前記複数の端子のうちの少なくとも1つはシリコン貫通電極(TSV)を含む、請求項1に記載のデバイス。
- 前記半導体基板上に形成されたメモリデバイスを更に備える、請求項1に記載のデバイス。
- 前記複数の端子は、前記受動構造を少なくとも2つの追加の半導体デバイスに結合することを可能にする、請求項1に記載のデバイス。
- 前記端子のうちの少なくともいくつかは、ビルドアップパッケージを含む追加の半導体基板に結合されるように構成される、請求項1に記載のデバイス。
- 前記受動素子のための前記アノード及び前記カソードは前記タイルの対抗する角部に位置する、請求項1に記載のデバイス。
- 第1の半導体デバイスであって、
第1の半導体基板、
前記半導体基板の表面上にアレイ内に形成された複数の受動構造であって、前記受動構造は前記第1の半導体基板上に形成された1つ以上の受動素子を含み、前記受動素子のうちの少なくとも1つはコンデンサであり、前記アレイは前記半導体基板の前記表面上のx及びy方向の規則的なアレイを含み、前記x及びy方向の規則的なアレイは、前記x方向に配列された少なくとも2つのコンデンサ及び前記y方向に配列された少なくとも2つのコンデンサとを含む、複数の受動構造、
前記第1の半導体基板の第1の側の1つ以上の第1の端子、及び
前記第1の半導体基板の第2の側の1つ以上の第2の端子、
を含む、第1の半導体デバイスであって、前記アレイは前記受動構造のタイル化されたパターンを備え、各タイルは当該タイル内の前記受動素子に別個に関連付けられた前記半導体基板の前記第1の側の前記第1の端子のうちの少なくとも2つを含み、当該タイル内の前記受動素子に別個に関連付けられた第1の端子は当該タイル内の前記受動素子のためのアノードを含み、当該タイル内の前記受動素子に個別に関連付けられた第2の端子は前記受動素子のためのカソードを含む、第1の半導体デバイスと、
前記第1の端子のうちの1つ以上を使用して前記第1の半導体デバイスに結合された第2の半導体デバイスであって、
第2の半導体基板、及び
前記第2の半導体基板上に形成された1つ以上の電流消費素子、
を含む、第2の半導体デバイスと、
前記第1の半導体デバイス及び前記第2の半導体デバイスに結合された第3の半導体基板であって、前記第3の半導体基板は前記第2の端子のうちの1つ以上を使用して前記第1の半導体デバイスに直接結合され、前記第3の半導体基板は1つ以上の第3の端子を使用して前記第2の半導体デバイスに直接結合される、第3の半導体基板と、
を備える半導体デバイスパッケージ。 - 前記受動素子のための前記アノード及び前記カソードは前記タイルの対抗する角部に位置する、請求項10に記載のパッケージ。
- 前記第2の半導体デバイスはシステムオンチップ(SOC)デバイス上のシステムを含む、請求項10に記載のパッケージ。
- 前記受動素子のうちの2つ以上は互いに結合される、請求項10に記載のパッケージ。
- 前記第2の半導体基板上に形成された1つ以上のスイッチを更に備える、請求項10に記載のパッケージ。
- 前記第1の半導体デバイスは、前記第1の半導体基板上の金属経路を含み、前記金属経路は、前記第1の半導体デバイスが前記第2の半導体デバイスに結合される場合に電力レールとして使用される、請求項10に記載のパッケージ。
- 前記第1の半導体デバイス及び前記第2の半導体デバイスは、前記第2の半導体デバイスが前記受動素子及び前記電流消費素子の1つ以上の動作特性を規定するように結合される、請求項10に記載のパッケージ。
- 前記第3の半導体基板はビルドアップパッケージを含み、前記第3の端子は前記ビルドアップパッケージと前記第2の半導体基板との間に配置される端子を含む、請求項10に記載のパッケージ。
- 前記第3の端子は、前記第1の半導体基板を通過する通過経路端子を含む、請求項10に記載のパッケージ。
- 第1の端子のセットは、前記第1の半導体基板上の受動素子のブロックを、前記受動素子のブロックに直接面する、前記第2の半導体基板上の電流消費素子のブロックに直接結合する、請求項10に記載のパッケージ。
- 前記受動素子のブロックと前記電流消費素子のブロックとの間の前記直接結合は、局所化された電圧調整器を形成する、請求項19に記載のパッケージ。
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US14/077,512 | 2013-11-12 | ||
US14/077,512 US9595526B2 (en) | 2013-08-09 | 2013-11-12 | Multi-die fine grain integrated voltage regulation |
PCT/US2014/048603 WO2015020836A2 (en) | 2013-08-09 | 2014-07-29 | Multi-die fine grain integrated voltage regulation |
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CN (1) | CN105474391B (ja) |
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US20170141116A1 (en) | 2017-05-18 |
EP4006972A3 (en) | 2022-12-28 |
CN105474391A (zh) | 2016-04-06 |
TWI529875B (zh) | 2016-04-11 |
KR101819838B1 (ko) | 2018-01-17 |
US20180366466A1 (en) | 2018-12-20 |
US10056384B2 (en) | 2018-08-21 |
US20210398980A1 (en) | 2021-12-23 |
US9595526B2 (en) | 2017-03-14 |
WO2015020836A3 (en) | 2015-04-09 |
US11063046B2 (en) | 2021-07-13 |
US10411012B2 (en) | 2019-09-10 |
EP4006972A2 (en) | 2022-06-01 |
US20150041955A1 (en) | 2015-02-12 |
EP3031081A2 (en) | 2016-06-15 |
JP2016529719A (ja) | 2016-09-23 |
DE202014011574U1 (de) | 2022-06-27 |
WO2015020836A2 (en) | 2015-02-12 |
TW201515165A (zh) | 2015-04-16 |
KR20160041969A (ko) | 2016-04-18 |
US20200027881A1 (en) | 2020-01-23 |
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