JP6164658B2 - 光−スピン流変換素子及びその製造方法 - Google Patents
光−スピン流変換素子及びその製造方法 Download PDFInfo
- Publication number
- JP6164658B2 JP6164658B2 JP2014522583A JP2014522583A JP6164658B2 JP 6164658 B2 JP6164658 B2 JP 6164658B2 JP 2014522583 A JP2014522583 A JP 2014522583A JP 2014522583 A JP2014522583 A JP 2014522583A JP 6164658 B2 JP6164658 B2 JP 6164658B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- spin
- layer
- conversion element
- spin current
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000006243 chemical reaction Methods 0.000 title claims description 58
- 238000004519 manufacturing process Methods 0.000 title description 10
- 239000010931 gold Substances 0.000 claims description 89
- 230000005291 magnetic effect Effects 0.000 claims description 85
- 239000010419 fine particle Substances 0.000 claims description 54
- 230000005355 Hall effect Effects 0.000 claims description 52
- 239000010408 film Substances 0.000 claims description 37
- 238000002198 surface plasmon resonance spectroscopy Methods 0.000 claims description 33
- 229910001111 Fine metal Inorganic materials 0.000 claims description 24
- 239000000758 substrate Substances 0.000 claims description 21
- 229910052751 metal Inorganic materials 0.000 claims description 20
- 239000002184 metal Substances 0.000 claims description 20
- 230000005418 spin wave Effects 0.000 claims description 18
- 239000000463 material Substances 0.000 claims description 12
- 238000000151 deposition Methods 0.000 claims description 7
- 229910045601 alloy Inorganic materials 0.000 claims description 6
- 239000000956 alloy Substances 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 6
- 230000005415 magnetization Effects 0.000 claims description 6
- 229910052709 silver Inorganic materials 0.000 claims description 6
- 229910052737 gold Inorganic materials 0.000 claims description 5
- 229910052697 platinum Inorganic materials 0.000 claims description 5
- 239000010409 thin film Substances 0.000 claims description 5
- 230000008018 melting Effects 0.000 claims description 4
- 238000002844 melting Methods 0.000 claims description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- 229910052797 bismuth Inorganic materials 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000010946 fine silver Substances 0.000 claims description 3
- 229910052763 palladium Inorganic materials 0.000 claims description 3
- KDLHZDBZIXYQEI-UHFFFAOYSA-N palladium Substances [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Substances [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 3
- 239000010944 silver (metal) Substances 0.000 claims description 3
- 229910052723 transition metal Inorganic materials 0.000 claims description 3
- 150000003624 transition metals Chemical class 0.000 claims description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 113
- 238000000034 method Methods 0.000 description 18
- 238000010586 diagram Methods 0.000 description 15
- 230000031700 light absorption Effects 0.000 description 15
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 12
- 230000003287 optical effect Effects 0.000 description 10
- 239000000243 solution Substances 0.000 description 10
- 238000002834 transmittance Methods 0.000 description 9
- 238000005259 measurement Methods 0.000 description 8
- 230000005678 Seebeck effect Effects 0.000 description 7
- 239000013078 crystal Substances 0.000 description 7
- 230000000694 effects Effects 0.000 description 7
- 239000002223 garnet Substances 0.000 description 6
- 238000005086 pumping Methods 0.000 description 6
- 229910000859 α-Fe Inorganic materials 0.000 description 6
- 239000006185 dispersion Substances 0.000 description 5
- 230000007246 mechanism Effects 0.000 description 5
- 238000003917 TEM image Methods 0.000 description 4
- 239000002885 antiferromagnetic material Substances 0.000 description 4
- 238000000609 electron-beam lithography Methods 0.000 description 4
- 238000003306 harvesting Methods 0.000 description 4
- 230000020169 heat generation Effects 0.000 description 4
- 238000004528 spin coating Methods 0.000 description 4
- 239000000443 aerosol Substances 0.000 description 3
- 230000003993 interaction Effects 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 238000010248 power generation Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 101100167360 Drosophila melanogaster chb gene Proteins 0.000 description 2
- 239000002772 conduction electron Substances 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 239000002070 nanowire Substances 0.000 description 2
- 239000013307 optical fiber Substances 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000000992 sputter etching Methods 0.000 description 2
- 239000011800 void material Substances 0.000 description 2
- 239000002918 waste heat Substances 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- 229910000676 Si alloy Inorganic materials 0.000 description 1
- 230000005290 antiferromagnetic effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- 230000005307 ferromagnetism Effects 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- JSUIEZRQVIVAMP-UHFFFAOYSA-N gallium iron Chemical compound [Fe].[Ga] JSUIEZRQVIVAMP-UHFFFAOYSA-N 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- MTRJKZUDDJZTLA-UHFFFAOYSA-N iron yttrium Chemical compound [Fe].[Y] MTRJKZUDDJZTLA-UHFFFAOYSA-N 0.000 description 1
- 238000004943 liquid phase epitaxy Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000021715 photosynthesis, light harvesting Effects 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000000197 pyrolysis Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000002094 self assembled monolayer Substances 0.000 description 1
- 239000013545 self-assembled monolayer Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
- 229910052596 spinel Inorganic materials 0.000 description 1
- 239000011029 spinel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- -1 that is Substances 0.000 description 1
- 238000000427 thin-film deposition Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/008—Surface plasmon devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/08—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers
- H01F10/10—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition
- H01F10/18—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being compounds
- H01F10/20—Ferrites
- H01F10/24—Garnets
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Hall/Mr Elements (AREA)
- Thin Magnetic Films (AREA)
Description
Js=2αkB(T* m,T−T* e,T)
ここで、αは、有効温度差−スピン流変換係数であり、kBはボルツマン定数である(例えば、非特許文献6参照)。
EISHE∝jS×σ
を満たす方向に発生するため、逆スピンホール効果部材層13において磁場Hと直交する方向に電流Jcが発生する。
11 基板
12 磁性体層
13 逆スピンホール効果部材層
141〜143 表面プラズモン共鳴発生部材
151,152 電極
16 磁場印加手段
20 光−スピン流変換素子
21 GGG基板
22 Au膜
23 Au微粒子
24 MOD溶液
25 酸化物層
26 Au含有Bi:YIG層
27 Pt膜
281,282:電極
29 磁場印加手段
30 IrMn層
31 Bi:YIG層
32 光学マイクロプリズム
33 回折格子
34 回折格子
35 逆スピンホール効果部材層
41 光ファイバ
42 デジタル光プロセッサ
43 光源
44 分光光学系
Claims (12)
- 磁性体層と、
前記磁性体層に接合する逆スピンホール効果部材層と、
照射光による表面プラズモン共鳴により前記磁性体層のマグノン有効温度或いは逆スピンホール効果部材層の電子有効温度の少なくとも一方を高める表面プラズモン共鳴発生部材と
を有する光−スピン流変換素子。 - 前記表面プラズモン共鳴発生部材が、前記磁性体層に含まれる微細金属であることを特徴とする請求項1に記載の光−スピン流変換素子。
- 前記微細金属が、金微粒子或いは銀微粒子である請求項2に記載の光−スピン流変換素子。
- 前記表面プラズモン共鳴発生部材が、前記逆スピンホール効果部材層の表面に設けられたプリズムである請求項1に記載の光−スピン流変換素子。
- 前記表面プラズモン共鳴発生部材が、前記逆スピンホール効果部材層の表面に設けられた回折格子である請求項1に記載の光−スピン流変換素子。
- 前記回折格子が、前記逆スピンホール効果部材層と同じ材料で一体に形成されている請求項5に記載の光−スピン流変換素子。
- 前記磁性体層の磁化方向を規制する磁場印加手段を有する請求項1に記載の光−スピン流変換素子。
- 前記逆スピンホール効果部材層が、逆スピンホール効果により電圧を取り出すための一対の電極を有している請求項7に記載の光−スピン流変換素子。
- 前記磁性体層が、Y3Fe5-xGaxO12(但し、0≦x<5)またはBiドープのY3Fe5-xGaxO12(但し、0≦x<5)からなる請求項1に記載の光−スピン流変換素子。
- 前記逆スピンホール効果部材層が、Pt、Au、Pd、Ag、Bi、f軌道或いは3d軌道を有する遷移金属を有する元素、若しくはそれらの合金のいずれかを有する元素のいずれか、或いは、前記各材料とCu、Al、或いは、Siの合金のいずれかである請求項1に記載の光−スピン流変換素子。
- 前記逆スピンホール効果部材層が、PtまたはBiドープCuである請求項10に記載の光−スピン流変換素子。
- 基板上に金属薄膜を堆積する工程と、
熱処理により前記金属膜を溶融して表面張力により微細金属を形成する工程と、
前記微細金属を含む基板上に磁性体部材を堆積して微細金属を含有する磁性体層を形成する工程と、
前記磁性体層上に逆スピンホール効果部材層を形成する工程と
を有することを特徴とする光−スピン流変換素子の製造方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012147846 | 2012-06-29 | ||
JP2012147846 | 2012-06-29 | ||
PCT/JP2013/067042 WO2014002881A1 (ja) | 2012-06-29 | 2013-06-21 | 光-スピン流変換素子及びその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2014002881A1 JPWO2014002881A1 (ja) | 2016-05-30 |
JP6164658B2 true JP6164658B2 (ja) | 2017-07-19 |
Family
ID=49783038
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014522583A Expired - Fee Related JP6164658B2 (ja) | 2012-06-29 | 2013-06-21 | 光−スピン流変換素子及びその製造方法 |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP6164658B2 (ja) |
WO (1) | WO2014002881A1 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107192989B (zh) * | 2017-06-13 | 2019-09-10 | 电子科技大学 | 一种微波射频接收机 |
WO2019138055A1 (en) * | 2018-01-12 | 2019-07-18 | Philip Morris Products S.A. | An aerosol-generating device comprising a plasmonic heating element |
CN110176533B (zh) * | 2019-05-10 | 2021-03-26 | 电子科技大学 | 一种光响应的自旋电子器件及其制备方法 |
CN110579726A (zh) * | 2019-10-15 | 2019-12-17 | 哈尔滨理工大学 | 一种基于spr的高灵敏度磁场传感装置 |
WO2022239615A1 (ja) * | 2021-05-14 | 2022-11-17 | 国立大学法人東北大学 | 磁気メタマテリアル、スピン流制御装置及びスピン流制御方法 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2012169509A1 (ja) * | 2011-06-07 | 2012-12-13 | 日本電気株式会社 | 熱電変換素子 |
-
2013
- 2013-06-21 JP JP2014522583A patent/JP6164658B2/ja not_active Expired - Fee Related
- 2013-06-21 WO PCT/JP2013/067042 patent/WO2014002881A1/ja active Application Filing
Also Published As
Publication number | Publication date |
---|---|
WO2014002881A1 (ja) | 2014-01-03 |
JPWO2014002881A1 (ja) | 2016-05-30 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6164658B2 (ja) | 光−スピン流変換素子及びその製造方法 | |
JP5339272B2 (ja) | スピントロニクスデバイス及び情報伝達方法 | |
US8604571B2 (en) | Thermoelectric conversion device | |
JP5585314B2 (ja) | 熱電変換素子及び熱電変換装置 | |
JP6143051B2 (ja) | スピントロニクスデバイス | |
Ren et al. | Electric field-induced magnetic switching in Mn: ZnO film | |
KR20130105911A (ko) | 열전 변환 소자, 열전 변환 소자의 제조 방법 및 열전 변환 방법 | |
JP6233320B2 (ja) | 熱電変換素子及びその製造方法 | |
US9647193B2 (en) | Thermoelectric conversion element and thermoelectric conversion device | |
Hegde et al. | Tuning manganese dopant spin interactions in single GaN nanowires at room temperature | |
JPWO2013011971A1 (ja) | 磁性体素子用の積層体及びこの積層体を備えた熱電変換素子並びにその製造方法 | |
WO2012121230A1 (ja) | 音波-スピン流変換素子 | |
Kang et al. | Ferromagnetic Zn1-x Mn x O (x= 0.05, 0.1, and 0.2) Nanowires | |
JP6233311B2 (ja) | 熱電変換素子及びその製造方法 | |
JP7314958B2 (ja) | 熱電変換素子 | |
JP6349863B2 (ja) | スピン流熱電変換素子とその製造方法および熱電変換装置 | |
JP2014072250A (ja) | 熱電変換素子及びその製造方法 | |
CN108735806B (zh) | 一种产生可控极化率的自旋电流的结构与方法 | |
JP7505310B2 (ja) | 熱電変換材料 | |
Wang et al. | Analysis of the magnetic and optical properties of (Fe, V)-co-doped 3C–SiC using first-principles calculations | |
JP6172439B2 (ja) | スピン流熱電変換素子 | |
WO2015087408A1 (ja) | 熱電変換素子およびそれを用いた熱電変換モジュール | |
Kaleemullah et al. | Investigation on the structural and magnetic properties of M x Bi2–x Te3 (M= Gd, Fe, Cr)(x= 0, 1) using colloidal hot-injection method | |
JP2015179745A (ja) | 熱電変換素子及びその製造方法 | |
Zheng | Introduction to Dilute Magnetic Semiconductors |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20160318 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20170207 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20170613 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20170614 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6164658 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |