JP6163968B2 - 蒸気発生装置 - Google Patents
蒸気発生装置 Download PDFInfo
- Publication number
- JP6163968B2 JP6163968B2 JP2013174478A JP2013174478A JP6163968B2 JP 6163968 B2 JP6163968 B2 JP 6163968B2 JP 2013174478 A JP2013174478 A JP 2013174478A JP 2013174478 A JP2013174478 A JP 2013174478A JP 6163968 B2 JP6163968 B2 JP 6163968B2
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- Japan
- Prior art keywords
- pipe
- rough surface
- steam
- cylindrical container
- steam generator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 45
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 10
- 230000003746 surface roughness Effects 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 4
- 230000000149 penetrating effect Effects 0.000 claims description 3
- 239000010453 quartz Substances 0.000 claims description 3
- 229910052736 halogen Inorganic materials 0.000 description 16
- 150000002367 halogens Chemical class 0.000 description 16
- 238000009835 boiling Methods 0.000 description 8
- 230000035515 penetration Effects 0.000 description 7
- 238000013021 overheating Methods 0.000 description 6
- 238000005422 blasting Methods 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 238000007599 discharging Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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- Cleaning Or Drying Semiconductors (AREA)
Description
まず、給水管3から円筒容器2の内部に純水Wが導入される。蒸気発生装置1は、円筒容器2の内部に所定量の純水Wが貯留された状態で使用される。蒸気発生装置1において、不図示の電源装置から貫通管5Aに挿入されたハロゲンヒータ16に電力を供給することにより、ハロゲンヒータ16から所定の波長の光(輻射線)が輻射される。
2 円筒容器
3 給水管
4 排水管
5 貫通管
7 粗面領域
16 ハロゲンヒータ(加熱装置)
W 純水
Claims (3)
- 円筒状に構成され内部に水が貯留される円筒容器と、
前記円筒容器の内部を長手方向に沿って貫通して配置されると共に、内部に加熱装置を挿入可能な石英素材により構成された貫通管と、
前記貫通管の外表面に設けられ、該外表面に凹凸加工が施されて形成された粗面領域と、を備え、
前記粗面領域は、前記貫通管の長手方向に沿って帯状に形成されると共に前記貫通管の周方向に離間して複数設けられる蒸気発生装置。 - 複数の前記貫通管を備え、
前記粗面領域は、複数の前記貫通管に設けられる請求項1に記載の蒸気発生装置。 - 前記粗面領域の表面粗さは、算術平均粗さ(Ra)が2〜15μmであり、十点平均粗さ(Rz)が20〜80μmである請求項1又は2に記載の蒸気発生装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013174478A JP6163968B2 (ja) | 2013-08-26 | 2013-08-26 | 蒸気発生装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013174478A JP6163968B2 (ja) | 2013-08-26 | 2013-08-26 | 蒸気発生装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2015042925A JP2015042925A (ja) | 2015-03-05 |
JP6163968B2 true JP6163968B2 (ja) | 2017-07-19 |
Family
ID=52696513
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2013174478A Active JP6163968B2 (ja) | 2013-08-26 | 2013-08-26 | 蒸気発生装置 |
Country Status (1)
Country | Link |
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JP (1) | JP6163968B2 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6712440B2 (ja) * | 2015-03-13 | 2020-06-24 | 株式会社堀場エステック | 液体材料気化装置、液体材料気化システム |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS574239A (en) * | 1980-06-09 | 1982-01-09 | Nec Corp | Liquid heating vessel |
JPH0723790B2 (ja) * | 1982-06-10 | 1995-03-15 | 三洋電機株式会社 | 蒸気発生装置 |
JPS60160925A (ja) * | 1984-01-31 | 1985-08-22 | 松下電器産業株式会社 | 電気液体加熱機器 |
JPH0621242U (ja) * | 1992-08-11 | 1994-03-18 | 株式会社金門製作所 | 超純水加温装置 |
IT246360Y1 (it) * | 1998-11-25 | 2002-04-08 | Andrea Gerosa | Dispositivo per produrre istantaneamente vapore |
JP2000356301A (ja) * | 1999-06-14 | 2000-12-26 | Miura Co Ltd | 蒸気発生装置およびその制御方法 |
EP2002194A2 (en) * | 2006-03-31 | 2008-12-17 | Vapro, Inc. | Low cost boiling coolers utilizing liquid boiling |
JP2012251717A (ja) * | 2011-06-02 | 2012-12-20 | Miura Co Ltd | 蒸気発生装置 |
JP2014214940A (ja) * | 2013-04-24 | 2014-11-17 | 三浦工業株式会社 | 蒸気発生装置 |
-
2013
- 2013-08-26 JP JP2013174478A patent/JP6163968B2/ja active Active
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JP2015042925A (ja) | 2015-03-05 |
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