JP6153579B2 - 真空ポンプの為のローターディスク又はステーターディスクの製造方法及び真空ポンプの為のローターディスク又はステーターディスク - Google Patents

真空ポンプの為のローターディスク又はステーターディスクの製造方法及び真空ポンプの為のローターディスク又はステーターディスク Download PDF

Info

Publication number
JP6153579B2
JP6153579B2 JP2015195776A JP2015195776A JP6153579B2 JP 6153579 B2 JP6153579 B2 JP 6153579B2 JP 2015195776 A JP2015195776 A JP 2015195776A JP 2015195776 A JP2015195776 A JP 2015195776A JP 6153579 B2 JP6153579 B2 JP 6153579B2
Authority
JP
Japan
Prior art keywords
disk
disc
stator
rotor
outer diameter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2015195776A
Other languages
English (en)
Japanese (ja)
Other versions
JP2016075276A (ja
Inventor
マティアス・アンケル
ミルコ・メコタ
Original Assignee
プファイファー・ヴァキューム・ゲーエムベーハー
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by プファイファー・ヴァキューム・ゲーエムベーハー filed Critical プファイファー・ヴァキューム・ゲーエムベーハー
Publication of JP2016075276A publication Critical patent/JP2016075276A/ja
Application granted granted Critical
Publication of JP6153579B2 publication Critical patent/JP6153579B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F04D29/322—Blade mountings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2230/00—Manufacture
    • F05D2230/10—Manufacture by removing material
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2250/00—Geometry
    • F05D2250/70—Shape
    • F05D2250/71—Shape curved

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP2015195776A 2014-10-02 2015-10-01 真空ポンプの為のローターディスク又はステーターディスクの製造方法及び真空ポンプの為のローターディスク又はステーターディスク Active JP6153579B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102014114326.4 2014-10-02
DE102014114326.4A DE102014114326A1 (de) 2014-10-02 2014-10-02 Verfahren zur Herstellung einer Rotor- oder Statorscheibe für eine Vakuumpumpe sowie Rotor- oder Statorscheibe für eine Vakuumpumpe

Publications (2)

Publication Number Publication Date
JP2016075276A JP2016075276A (ja) 2016-05-12
JP6153579B2 true JP6153579B2 (ja) 2017-06-28

Family

ID=54145658

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015195776A Active JP6153579B2 (ja) 2014-10-02 2015-10-01 真空ポンプの為のローターディスク又はステーターディスクの製造方法及び真空ポンプの為のローターディスク又はステーターディスク

Country Status (3)

Country Link
EP (1) EP3002459B1 (de)
JP (1) JP6153579B2 (de)
DE (1) DE102014114326A1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3462036B1 (de) * 2017-10-02 2024-04-03 Pfeiffer Vacuum Gmbh Turbomolekularvakuumpumpe
EP4390145A3 (de) * 2022-12-22 2024-09-18 Pfeiffer Vacuum Technology AG Vakuumpumpe

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2923632A1 (de) * 1979-06-11 1980-12-18 Leybold Heraeus Gmbh & Co Kg Verfahren zur herstellung eines schaufelkranzes fuer den rotor einer tubomolekularpumpe und mit schaufelkraenzen dieser art ausgeruesteter rotor
JPS60188892U (ja) * 1984-05-25 1985-12-14 三菱重工業株式会社 分子ポンプ
DE3507274A1 (de) * 1985-03-01 1986-09-04 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar Scheiben mit schaufeln hoher stabilitaet fuer turbomolekularpumpen
JPS62203721A (ja) * 1986-03-03 1987-09-08 Inoue Japax Res Inc タ−ボポンプ
JPH0412197A (ja) * 1990-05-01 1992-01-16 Daikin Ind Ltd 真空ポンプ
DE29715035U1 (de) 1997-08-22 1997-10-30 Leybold Vakuum GmbH, 50968 Köln Reibungsvakuumpumpe
JP3092063B2 (ja) * 1998-06-17 2000-09-25 セイコー精機株式会社 ターボ分子ポンプ
DE10052637B4 (de) 2000-10-24 2021-03-11 Pfeiffer Vacuum Gmbh 16.02.2001 Scheiben für eine Turbomolekularpumpe
DE102004012713A1 (de) * 2004-03-16 2005-10-06 Pfeiffer Vacuum Gmbh Turbomolekularpumpe

Also Published As

Publication number Publication date
DE102014114326A1 (de) 2016-04-07
EP3002459A1 (de) 2016-04-06
JP2016075276A (ja) 2016-05-12
EP3002459B1 (de) 2019-05-15

Similar Documents

Publication Publication Date Title
JP6354105B2 (ja) 気体輸送式真空ポンプ
JP4935527B2 (ja) 固定翼の製造方法、およびその固定翼を備えたターボ分子ポンプ
JP5931708B2 (ja) シール装置及び回転機械
FR2605703A1 (fr) Dispositif d'etancheite vis-a-vis de gaz pour un arbre
US10662957B2 (en) Vacuum exhaust mechanism, compound type vacuum pump, and rotating body part
US20130272865A1 (en) Scroll structure of centrifugal compressor
CN101166890B (zh) 涡轮
CN111197595A (zh) 风扇的扇轮
KR20160005679A (ko) 고정 원판 및 진공 펌프
WO2012114996A1 (ja) インペラ及びこれを備えたロータ並びにインペラの製造方法
JP2016075276A (ja) 真空ポンプの為のローターディスク又はステーターディスクの製造方法及び真空ポンプの為のローターディスク又はステーターディスク
WO2019172422A1 (ja) ディフューザベーン及び遠心圧縮機
JP2014141964A (ja) 回転真空ポンプ
CN105275883B (zh) 压缩机和压缩机的制造方法
JP2005265010A (ja) 動圧気体軸受
GB2052317A (en) Improvements in rotors for turbo- molecular pumps
US9316105B2 (en) Turbine blade
JP6148717B2 (ja) ローターディスク
JP5120552B2 (ja) 軸流圧縮機のケーシングトリートメント
RU2387883C1 (ru) Рабочее колесо центробежного компрессора
JP6594602B2 (ja) ロータ、真空ポンプ、及び、真空ポンプの組立方法
JP4047837B2 (ja) 非対称ハンマーヘッド接続を有するブレードの保持容量の改善
JP6351654B2 (ja) 真空ポンプのローター
CN107002701A (zh) 径流式涡轮流体能量机的叶轮、级
CN205078723U (zh) 无背隙滚子凸轮精密减速机

Legal Events

Date Code Title Description
A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20160805

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20160810

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20161108

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20170105

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20170524

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20170530

R150 Certificate of patent or registration of utility model

Ref document number: 6153579

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250