JP6148405B2 - 導電性透明酸化物膜を含む積重体で被覆された基材の製造方法 - Google Patents
導電性透明酸化物膜を含む積重体で被覆された基材の製造方法 Download PDFInfo
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Description
・前記積重体を被着させる工程であって、透明な導電性酸化物の前記薄層と少なくとも1つの均一化薄層とを被着させ、前記均一化薄層は金属層であるか、又は窒化アルミニウム以外の金属窒化物をベースとする層であるか、又は金属炭化物をベースとする層である、積重体被着工程、
・その後前記積重体を放射線に曝露する熱処理工程、
を含む方法である。
ガラス/SiNx/SiOx/ITO/SiNx/SiOx/Ti
ガラス/SiN/TiOx/SiOxNy/ITO/SiNx/Zr
ガラス/Si(O)Nx/ITO/Si(O)Nx/Ti
ガラス/SiNx/SiOx/ITO/SiOx/ITO/SiNx/SiOx/Ti
4mm厚のソーダ石灰シリカガラス基材上に、マグネトロン陰極スパッタリングにより3つの異なる積重体を被着させた。
1: ガラス/SiNx(19)/SiOx(24)/ITO(106)/SiNx(8)/SiOx(40)/Ti(6)
2: ガラス/SiNx(19)/SiOx(24)/ITO(106)/SiNx(8)/SiOx(40)/TiOx(11)
3: ガラス/SiNx(19)/SiOx(24)/ITO(106)/SiNx(8)/SiOx(40)/C(6)
4: ガラス/SiNx(10)/SiOx(30)/ITO(120)/SiNx(5)/SiOx(40)/Ti(4)
5: ガラス/SiNx(10)/SiOx(30)/ITO(60)/SiOx(20又は40)/ITO(60)/SiNx(5)/SiOx(40)/Ti(4)
この一連の例は、上記の例1と同じ積重体を使用し(例6)、比較例7ではチタンの均一化層のない同じ積重体を使用した。
本発明の態様としては、以下を挙げることができる:
《態様1》
面のうちの少なくとも一方の少なくとも一部分が、銀層を含まずに透明な導電性酸化物の薄層を少なくとも1つ含む薄層の積重体により被覆された、ガラス又はガラスセラミック製の基材を含む材料を得るための方法であって、
・前記積重体を被着させる工程であって、透明な導電性酸化物の前記薄層と少なくとも1つの均一化薄層とを被着させ、当該均一化薄層は金属層であるか、又は窒化アルミニウム以外の金属窒化物をベースとする層であるか、又は金属炭化物をベースとする層である、積重体被着工程、
・その後前記積重体を放射線に曝露する熱処理工程、
を含む、透明な導電性酸化物の薄層を含む積重体で被覆された基材を含む材料を得るための方法。
《態様2》
前記透明な導電性酸化物を、酸化インジウムスズ、酸化インジウム亜鉛、アンチモン又はフッ素をドープした酸化スズ、アルミニウム及び/又はガリウム及び/又はチタンをドープした酸化亜鉛、ニオブ及び/又はタンタルをドープした酸化チタン、スズ酸亜鉛、スズ酸カドミウムから選択する、態様1に記載の方法。
《態様3》
前記透明な導電性酸化物が酸化インジウムスズである、態様2に記載の方法。
《態様4》
透明な導電性酸化物の薄層の物理的厚さが少なくとも30nm、特に50nmである、態様1〜3のうちの1項に記載の方法。
《態様5》
透明な導電性酸化物の薄層の光吸収率の物理的厚さに対する比が、熱処理前において0.1〜0.9μm -1 、特に0.2〜0.7μm -1 の範囲に含まれる、態様の1〜4のうちの1項に記載の方法。
《態様6》
前記積重体が、透明な導電性酸化物の複数の層、特に2つ又は3つの層を含む、態様1〜5のうちの1項に記載の方法。
《態様7》
前記均一化薄層が透明な導電性酸化物の層の上に位置する、態様1〜6の1項に記載の方法。
《態様8》
前記均一化薄層が、チタン、スズ、ジルコニウム、亜鉛、アルミニウム、セリウムから選択される金属の、又はそれらの合金のうちのいずれか1種の、特にスズと亜鉛の合金の、層から選択される金属層である、態様の1〜7のうちの1項に記載の方法。
《態様9》
前記金属がチタンである、態様8に記載の方法。
《態様10》
前記均一化薄層が、窒化チタン、窒化ハフニウム、窒化ジルコニウム、又はそれらの固溶体のうちのいずれか1種から選択される金属窒化物をベースとする、態様1〜7のうちの1項に記載の方法。
《態様11》
前記均一化薄層が、炭化チタン、炭化タングステン、又はそれらの固溶体のうちのいずれか1種から選択される金属炭化物をベースとする、態様1〜7のうちの1項に記載の方法。
《態様12》
前記均一化薄層の物理的厚さが最大で15nm、特に8nmである、態様1〜11のうちの1項に記載の方法。
《態様13》
前記放射線を少なくとも1つのフラッシュランプ、特にキセノンフラッシュランプにより放射させる、態様1〜12のうちの1項に記載の方法。
《態様14》
前記放射線が、少なくとも1つのレーザーラインの形態で前記コーティングに集束させたレーザー光線である、態様1〜12のうちの1項に記載の方法。
《態様15》
前記レーザー光線の波長が500〜2000nm、特に700〜1100nmの範囲内に含まれる、態様14に記載の方法。
《態様16》
態様1〜15のいずれか1項に記載の方法により得られる材料。
《態様17》
態様16に記載の材料を少なくとも1つ含む、単一の複層又は積層グレージングユニット、ミラー、ガラス壁コーティング、オーブン扉又は暖炉インサート。
《態様18》
前記コーティングを電極として使用する、態様16に記載の材料を少なくとも1つ含む光電池、ディスプレイスクリーン又は能動グレージングユニット。
Claims (17)
- 面のうちの少なくとも一方の少なくとも一部分が、銀層を含まずに透明な導電性酸化物の薄層を少なくとも1つ含む薄層の積重体により被覆された、ガラス又はガラスセラミック製の基材を含む材料を得るための方法であって、
・前記積重体を被着させる工程であって、透明な導電性酸化物の前記薄層と少なくとも1つの均一化薄層とを被着させ、当該均一化薄層は金属層であるか、又は窒化アルミニウム以外の金属窒化物をベースとする層であるか、又は金属炭化物をベースとする層である、積重体被着工程、
・その後前記積重体を放射線に曝露する熱処理工程、
を含み、
前記積重体は溶媒に可溶性の層を含まない、
透明な導電性酸化物の薄層を含む積重体で被覆された基材を含む材料を得るための方法。 - 前記透明な導電性酸化物を、酸化インジウムスズ、酸化インジウム亜鉛、アンチモン又はフッ素をドープした酸化スズ、アルミニウム及び/又はガリウム及び/又はチタンをドープした酸化亜鉛、ニオブ及び/又はタンタルをドープした酸化チタン、スズ酸亜鉛、スズ酸カドミウムから選択する、請求項1に記載の方法。
- 前記透明な導電性酸化物が酸化インジウムスズである、請求項2に記載の方法。
- 透明な導電性酸化物の薄層の物理的厚さが少なくとも30nmである、請求項1〜3のうちの1項に記載の方法。
- 透明な導電性酸化物の薄層の光吸収率の物理的厚さに対する比が、熱処理前において0.1〜0.9μm-1 の範囲に含まれる、請求項1〜4のうちの1項に記載の方法。
- 前記積重体が、透明な導電性酸化物の複数の層を含む、請求項1〜5のうちの1項に記載の方法。
- 前記均一化薄層が透明な導電性酸化物の層の上に位置する、請求項1〜6の1項に記載の方法。
- 前記均一化薄層が、チタン、スズ、ジルコニウム、亜鉛、アルミニウム、セリウムから選択される金属の、又はそれらの合金のうちのいずれか1種の合金の層から選択される金属層である、請求項1〜7のうちの1項に記載の方法。
- 前記金属がチタンである、請求項8に記載の方法。
- 前記合金がスズと亜鉛の合金である、請求項8に記載の方法。
- 前記均一化薄層が、窒化チタン、窒化ハフニウム、窒化ジルコニウム、又はそれらの固溶体のうちのいずれか1種から選択される金属窒化物をベースとする、請求項1〜7のうちの1項に記載の方法。
- 前記均一化薄層が、炭化チタン、炭化タングステン、又はそれらの固溶体のうちのいずれか1種から選択される金属炭化物をベースとする、請求項1〜7のうちの1項に記載の方法。
- 前記均一化薄層の物理的厚さが最大で15nmである、請求項1〜12のうちの1項に記載の方法。
- 前記放射線を少なくとも1つのフラッシュランプにより放射させる、請求項1〜13のうちの1項に記載の方法。
- 前記フラッシュランプがキセノンフラッシュランプである、請求項14に記載の方法。
- 前記放射線が、少なくとも1つのレーザーラインの形態で前記積重体に集束させたレーザー光線である、請求項1〜13のうちの1項に記載の方法。
- 前記レーザー光線の波長が500〜2000nmの範囲内に含まれる、請求項16に記載の方法。
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FR1453402A FR3012134B1 (fr) | 2013-10-17 | 2014-04-16 | Procede d'obtention d'un substrat revetu par un empilement comprenant une couche d'oxyde transparent conducteur |
PCT/FR2014/052615 WO2015055944A1 (fr) | 2013-10-17 | 2014-10-14 | Procede d'obtention d'un substrat revetu par un empilement comprenant une couche d'oxyde transparent conducteur |
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FR3012134B1 (fr) | 2021-04-02 |
US20160229741A1 (en) | 2016-08-11 |
BR112016006759B1 (pt) | 2021-10-26 |
KR101675252B1 (ko) | 2016-11-10 |
EA201690791A1 (ru) | 2016-08-31 |
US10457592B2 (en) | 2019-10-29 |
AU2014335974B2 (en) | 2018-03-01 |
FR3012133A1 (fr) | 2015-04-24 |
KR20160044599A (ko) | 2016-04-25 |
AU2014335974A1 (en) | 2016-06-02 |
FR3012133B1 (fr) | 2021-01-01 |
MY172449A (en) | 2019-11-26 |
CN105658592B (zh) | 2018-12-07 |
JP2016536246A (ja) | 2016-11-24 |
EA033122B1 (ru) | 2019-08-30 |
BR112016006759A2 (pt) | 2017-08-01 |
CN105658592A (zh) | 2016-06-08 |
EP3057914A1 (fr) | 2016-08-24 |
WO2015055944A1 (fr) | 2015-04-23 |
FR3012134A1 (fr) | 2015-04-24 |
CA2924811A1 (fr) | 2015-04-23 |
MX2016004846A (es) | 2016-07-06 |
MX355110B (es) | 2018-04-05 |
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