JP6148024B2 - 半導体装置 - Google Patents

半導体装置 Download PDF

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Publication number
JP6148024B2
JP6148024B2 JP2013016496A JP2013016496A JP6148024B2 JP 6148024 B2 JP6148024 B2 JP 6148024B2 JP 2013016496 A JP2013016496 A JP 2013016496A JP 2013016496 A JP2013016496 A JP 2013016496A JP 6148024 B2 JP6148024 B2 JP 6148024B2
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JP
Japan
Prior art keywords
film
oxide semiconductor
insulating film
oxide
region
Prior art date
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Expired - Fee Related
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JP2013016496A
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English (en)
Japanese (ja)
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JP2013179284A5 (https=
JP2013179284A (ja
Inventor
山崎　舜平
舜平 山崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
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Semiconductor Energy Laboratory Co Ltd
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Priority to JP2013016496A priority Critical patent/JP6148024B2/ja
Publication of JP2013179284A publication Critical patent/JP2013179284A/ja
Publication of JP2013179284A5 publication Critical patent/JP2013179284A5/ja
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Publication of JP6148024B2 publication Critical patent/JP6148024B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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  • Thin Film Transistor (AREA)
JP2013016496A 2012-02-09 2013-01-31 半導体装置 Expired - Fee Related JP6148024B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2013016496A JP6148024B2 (ja) 2012-02-09 2013-01-31 半導体装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2012026733 2012-02-09
JP2012026733 2012-02-09
JP2013016496A JP6148024B2 (ja) 2012-02-09 2013-01-31 半導体装置

Publications (3)

Publication Number Publication Date
JP2013179284A JP2013179284A (ja) 2013-09-09
JP2013179284A5 JP2013179284A5 (https=) 2016-03-17
JP6148024B2 true JP6148024B2 (ja) 2017-06-14

Family

ID=49270624

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013016496A Expired - Fee Related JP6148024B2 (ja) 2012-02-09 2013-01-31 半導体装置

Country Status (1)

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JP (1) JP6148024B2 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6506545B2 (ja) * 2013-12-27 2019-04-24 株式会社半導体エネルギー研究所 半導体装置
JP2015188062A (ja) 2014-02-07 2015-10-29 株式会社半導体エネルギー研究所 半導体装置
WO2017081579A1 (en) * 2015-11-13 2017-05-18 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
US10714633B2 (en) * 2015-12-15 2020-07-14 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and display device

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5128733A (en) * 1991-05-17 1992-07-07 United Technologies Corporation Silicon mesa transistor structure
JP5111867B2 (ja) * 2007-01-16 2013-01-09 株式会社ジャパンディスプレイイースト 表示装置
WO2011132529A1 (en) * 2010-04-23 2011-10-27 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device
WO2011132591A1 (en) * 2010-04-23 2011-10-27 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device
KR101938726B1 (ko) * 2010-06-11 2019-01-16 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 및 그 제조 방법

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Publication number Publication date
JP2013179284A (ja) 2013-09-09

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