JP6138739B2 - 有機電界発光素子及びその製造方法 - Google Patents
有機電界発光素子及びその製造方法 Download PDFInfo
- Publication number
- JP6138739B2 JP6138739B2 JP2014211832A JP2014211832A JP6138739B2 JP 6138739 B2 JP6138739 B2 JP 6138739B2 JP 2014211832 A JP2014211832 A JP 2014211832A JP 2014211832 A JP2014211832 A JP 2014211832A JP 6138739 B2 JP6138739 B2 JP 6138739B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- layer
- hydrogen
- metal
- thin metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 36
- 239000010410 layer Substances 0.000 claims description 203
- 239000000758 substrate Substances 0.000 claims description 202
- 229910052751 metal Inorganic materials 0.000 claims description 193
- 239000002184 metal Substances 0.000 claims description 193
- 229910052739 hydrogen Inorganic materials 0.000 claims description 164
- 239000001257 hydrogen Substances 0.000 claims description 164
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 151
- 239000010409 thin film Substances 0.000 claims description 77
- 229910001092 metal group alloy Inorganic materials 0.000 claims description 68
- 238000002161 passivation Methods 0.000 claims description 67
- 239000012790 adhesive layer Substances 0.000 claims description 56
- 229910052802 copper Inorganic materials 0.000 claims description 18
- 229910052759 nickel Inorganic materials 0.000 claims description 16
- 229910052697 platinum Inorganic materials 0.000 claims description 15
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 14
- 239000000463 material Substances 0.000 claims description 14
- 229910052719 titanium Inorganic materials 0.000 claims description 14
- 238000005401 electroluminescence Methods 0.000 claims description 13
- 229910052763 palladium Inorganic materials 0.000 claims description 13
- 229910052749 magnesium Inorganic materials 0.000 claims description 12
- 229910052715 tantalum Inorganic materials 0.000 claims description 12
- 229910052782 aluminium Inorganic materials 0.000 claims description 11
- 229910052791 calcium Inorganic materials 0.000 claims description 11
- 229910052804 chromium Inorganic materials 0.000 claims description 10
- 229910052742 iron Inorganic materials 0.000 claims description 10
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 9
- 239000006104 solid solution Substances 0.000 claims description 9
- 238000001179 sorption measurement Methods 0.000 claims description 9
- 229910052788 barium Inorganic materials 0.000 claims description 8
- 229910052735 hafnium Inorganic materials 0.000 claims description 8
- 229910052746 lanthanum Inorganic materials 0.000 claims description 8
- 229910052758 niobium Inorganic materials 0.000 claims description 8
- 229910052720 vanadium Inorganic materials 0.000 claims description 8
- 229910052737 gold Inorganic materials 0.000 claims description 7
- 229910052744 lithium Inorganic materials 0.000 claims description 7
- 150000002739 metals Chemical class 0.000 claims description 7
- 229910052721 tungsten Inorganic materials 0.000 claims description 7
- 239000011787 zinc oxide Substances 0.000 claims description 7
- 229910052750 molybdenum Inorganic materials 0.000 claims description 6
- KYKLWYKWCAYAJY-UHFFFAOYSA-N oxotin;zinc Chemical compound [Zn].[Sn]=O KYKLWYKWCAYAJY-UHFFFAOYSA-N 0.000 claims description 6
- 229910052709 silver Inorganic materials 0.000 claims description 6
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 claims description 6
- 229910052726 zirconium Inorganic materials 0.000 claims description 6
- 229910052738 indium Inorganic materials 0.000 claims description 5
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 5
- 230000009467 reduction Effects 0.000 claims description 5
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims description 4
- 229910052733 gallium Inorganic materials 0.000 claims description 4
- 229910001566 austenite Inorganic materials 0.000 claims description 3
- 229910052745 lead Inorganic materials 0.000 claims description 3
- 229910052987 metal hydride Inorganic materials 0.000 claims description 3
- 150000004681 metal hydrides Chemical class 0.000 claims description 3
- 229910052708 sodium Inorganic materials 0.000 claims description 3
- 229910000859 α-Fe Inorganic materials 0.000 claims description 3
- 239000011368 organic material Substances 0.000 claims 2
- 238000000034 method Methods 0.000 description 64
- 239000010408 film Substances 0.000 description 31
- 230000008569 process Effects 0.000 description 26
- 229910052814 silicon oxide Inorganic materials 0.000 description 23
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 21
- 239000012044 organic layer Substances 0.000 description 21
- 238000010521 absorption reaction Methods 0.000 description 19
- 238000005229 chemical vapour deposition Methods 0.000 description 18
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 15
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 15
- 229910052581 Si3N4 Inorganic materials 0.000 description 13
- 239000011521 glass Substances 0.000 description 13
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 13
- -1 Polyethylen terephthalate Polymers 0.000 description 12
- 239000010949 copper Substances 0.000 description 12
- 150000002431 hydrogen Chemical class 0.000 description 12
- 239000000126 substance Substances 0.000 description 12
- 239000011651 chromium Substances 0.000 description 10
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 10
- 230000015572 biosynthetic process Effects 0.000 description 9
- 238000000151 deposition Methods 0.000 description 9
- 238000009792 diffusion process Methods 0.000 description 9
- 238000002347 injection Methods 0.000 description 9
- 239000007924 injection Substances 0.000 description 9
- 238000007789 sealing Methods 0.000 description 9
- 239000002356 single layer Substances 0.000 description 9
- 229910045601 alloy Inorganic materials 0.000 description 8
- 239000000956 alloy Substances 0.000 description 8
- 230000008859 change Effects 0.000 description 8
- 239000011810 insulating material Substances 0.000 description 8
- 238000005240 physical vapour deposition Methods 0.000 description 8
- 239000004642 Polyimide Substances 0.000 description 7
- 229920001721 polyimide Polymers 0.000 description 7
- 229910004205 SiNX Inorganic materials 0.000 description 6
- 239000000853 adhesive Substances 0.000 description 6
- 230000001070 adhesive effect Effects 0.000 description 6
- 125000004429 atom Chemical group 0.000 description 6
- 230000008901 benefit Effects 0.000 description 6
- 239000000470 constituent Substances 0.000 description 6
- 150000004678 hydrides Chemical class 0.000 description 6
- 238000000206 photolithography Methods 0.000 description 6
- UMIVXZPTRXBADB-UHFFFAOYSA-N benzocyclobutene Chemical compound C1=CC=C2CCC2=C1 UMIVXZPTRXBADB-UHFFFAOYSA-N 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 5
- 238000005530 etching Methods 0.000 description 5
- 239000011888 foil Substances 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- 239000012535 impurity Substances 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 5
- 239000000243 solution Substances 0.000 description 5
- 229910052779 Neodymium Inorganic materials 0.000 description 4
- 239000011575 calcium Substances 0.000 description 4
- 238000000354 decomposition reaction Methods 0.000 description 4
- 230000005525 hole transport Effects 0.000 description 4
- 229910052741 iridium Inorganic materials 0.000 description 4
- 239000004033 plastic Substances 0.000 description 4
- 229920003023 plastic Polymers 0.000 description 4
- 238000007740 vapor deposition Methods 0.000 description 4
- 239000004925 Acrylic resin Substances 0.000 description 3
- 229920000178 Acrylic resin Polymers 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 238000005137 deposition process Methods 0.000 description 3
- 150000002894 organic compounds Chemical class 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 239000002861 polymer material Substances 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 3
- 239000012780 transparent material Substances 0.000 description 3
- QENGPZGAWFQWCZ-UHFFFAOYSA-N 3-Methylthiophene Chemical compound CC=1C=CSC=1 QENGPZGAWFQWCZ-UHFFFAOYSA-N 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910001111 Fine metal Inorganic materials 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- YTPLMLYBLZKORZ-UHFFFAOYSA-N Thiophene Chemical compound C=1C=CSC=1 YTPLMLYBLZKORZ-UHFFFAOYSA-N 0.000 description 2
- 229910010413 TiO 2 Inorganic materials 0.000 description 2
- 239000011358 absorbing material Substances 0.000 description 2
- 230000003139 buffering effect Effects 0.000 description 2
- 239000003054 catalyst Substances 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000011049 filling Methods 0.000 description 2
- 238000007327 hydrogenolysis reaction Methods 0.000 description 2
- 238000003475 lamination Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 238000009832 plasma treatment Methods 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 239000003870 refractory metal Substances 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 2
- 238000001931 thermography Methods 0.000 description 2
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 238000005019 vapor deposition process Methods 0.000 description 2
- 229910002593 Fe-Ti Inorganic materials 0.000 description 1
- 241001101998 Galium Species 0.000 description 1
- 229910019083 Mg-Ni Inorganic materials 0.000 description 1
- 229910019403 Mg—Ni Inorganic materials 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000002042 Silver nanowire Substances 0.000 description 1
- 239000002313 adhesive film Substances 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 229910021393 carbon nanotube Inorganic materials 0.000 description 1
- 239000002041 carbon nanotube Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010494 dissociation reaction Methods 0.000 description 1
- 230000005593 dissociations Effects 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000005281 excited state Effects 0.000 description 1
- 229910021389 graphene Inorganic materials 0.000 description 1
- 230000005283 ground state Effects 0.000 description 1
- 230000002209 hydrophobic effect Effects 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000005416 organic matter Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 238000000053 physical method Methods 0.000 description 1
- 229920000767 polyaniline Polymers 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920000128 polypyrrole Polymers 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 239000005871 repellent Substances 0.000 description 1
- 230000027756 respiratory electron transport chain Effects 0.000 description 1
- 239000000565 sealant Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000002207 thermal evaporation Methods 0.000 description 1
- 230000003685 thermal hair damage Effects 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 238000007736 thin film deposition technique Methods 0.000 description 1
- 238000000427 thin-film deposition Methods 0.000 description 1
- 229930192474 thiophene Natural products 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
- H10K50/844—Encapsulations
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/127—Active-matrix OLED [AMOLED] displays comprising two substrates, e.g. display comprising OLED array and TFT driving circuitry on different substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1218—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition or structure of the substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1222—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or crystalline structure of the active layer
- H01L27/1225—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or crystalline structure of the active layer with semiconductor materials not belonging to the group IV of the periodic table, e.g. InGaZnO
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/7869—Thin film transistors, i.e. transistors with a channel being at least partly a thin film having a semiconductor body comprising an oxide semiconductor material, e.g. zinc oxide, copper aluminium oxide, cadmium stannate
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
- H10K50/846—Passivation; Containers; Encapsulations comprising getter material or desiccants
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/121—Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements
- H10K59/1213—Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements the pixel elements being TFTs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/124—Insulating layers formed between TFT elements and OLED elements
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/80—Constructional details
- H10K59/87—Passivation; Containers; Encapsulations
- H10K59/874—Passivation; Containers; Encapsulations including getter material or desiccant
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K77/00—Constructional details of devices covered by this subclass and not covered by groups H10K10/80, H10K30/80, H10K50/80 or H10K59/80
- H10K77/10—Substrates, e.g. flexible substrates
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/80—Constructional details
- H10K59/87—Passivation; Containers; Encapsulations
- H10K59/873—Encapsulations
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/549—Organic PV cells
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Ceramic Engineering (AREA)
- Optics & Photonics (AREA)
- Manufacturing & Machinery (AREA)
- Geometry (AREA)
- Electroluminescent Light Sources (AREA)
- Thin Film Transistor (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Description
SiH4+2NH3→SiN2+5H2
2Me+xH2→2MeHx
(Me:薄型金属または薄型金属合金)
2Me+H2→2MeHads
MeHads→MeHabs
以後、平坦化層329をパターニングしてドレイン電極327を露出させるビアホール328を形成する。
320 酸化物トランジスタ
321 ゲート電極
323 ゲート絶縁膜
325 アクティブ層
326 エッチストッパー
327 ソース/ドレイン電極
328 ビアホール
329 平坦化層
330 有機発光ダイオード
331 第1電極
333 バンク
335 有機層
337 第2電極
340 パッシベーション層
350 接着層
360 第2基板
Claims (14)
- 第1基板と、
前記第1基板上の酸化物薄膜トランジスタと、
前記酸化物薄膜トランジスタ上の平坦化層と、
前記平坦化層上の有機発光ダイオードと、
前記有機発光ダイオード上のパッシベーション層と、
前記パッシベーション層上の接着層と、
前記接着層上の第2基板と、
から構成され、
前記パッシベーション層及び前記接着層は、水素吸着金属を含む薄型金属又は薄型金属合金を含有し、且つ前記第2基板は、該水素吸着金属を含む該薄型金属又は該薄型金属合金から構成され、該水素吸着金属は、前記酸化物薄膜トランジスタを構成する物質の還元を防ぐために、水素分子を水素原子に解離させることを特徴とする、有機電界発光素子。 - 前記酸化物薄膜トランジスタは、インジウムガリウム酸化亜鉛(IGZO)、亜鉛スズ酸化物(ZTO)、および亜鉛酸化インジウム(ZIO)グループから選択された酸化物層を含むことを特徴とする、請求項1に記載の有機電界発光素子。
- 前記第2基板を構成する前記薄型金属は、Li、Na、Cr、α-Fe、Mo、W、またはKのグループから選択された物質を含むことを特徴とする、請求項1に記載の有機電界発光素子。
- 前記第2基板を構成する前記薄型金属は、Pt、Pb、Ni、γ-Fe、Cu、Al、Au、またはAgのグループから選択された物質を含むことを特徴とする、請求項1に記載の有機電界発光素子。
- 前記水素吸着金属は、水素分子を水素原子へと解離させて、侵入型固溶体または金属水素化物を形成することが可能である、請求項1に記載の有機電界発光素子。
- 前記接着層はBa、Ca、Cu、Fe、Hf、La、Mg、Nb、Pd、Pt、Se、Sr、Ta、Ti、V、またはZrのうち、少なくとも1つの金属を含むビッドを更に含むことを特徴とする、請求項1に記載の有機電界発光素子。
- 前記水素吸着金属は、Ba、Ca、Cu、Fe、Hf、La、Mg、Nb、Ni、Pd、Pt、Se、Sr、Ta、Ti、V、またはZrのグループから選択された元素を含むことを特徴とする、請求項1に記載の有機電界発光素子。
- 第1基板を準備するステップと、
前記第1基板上に酸化物薄膜トランジスタを形成するステップと、
前記酸化物薄膜トランジスタ上に平坦化層を形成するステップと、
前記平坦化層上に有機発光ダイオードを形成するステップと、
前記有機発光ダイオード上にパッシベーション層を形成するステップと、
前記パッシベーション層上に接着層を形成するステップと、
前記接着層上に第2基板を位置させるステップと、
を含み、
前記パッシベーション層及び前記接着層は、水素吸着金属を含む薄型金属又は薄型金属合金を含有し、且つ前記第2基板は、該水素吸着金属を含む該薄型金属又は該薄型金属合金から構成され、該水素吸着金属は、前記酸化物薄膜トランジスタを構成する物質の還元を防ぐために、水素分子を水素原子に解離させることを特徴とする、有機電界発光素子の製造方法。 - 前記酸化物薄膜トランジスタは、インジウムガリウム酸化亜鉛(IGZO)、亜鉛スズ酸化物(ZTO)、および亜鉛酸化インジウム(ZIO)グループから選択された酸化物層を含むことを特徴とする、請求項8に記載の有機電界発光素子の製造方法。
- 前記第2基板を構成する前記薄型金属は、Li、Na、Cr、α-Fe、Mo、W、またはKのグループから選択された物質を含むことを特徴とする、請求項8に記載の有機電界発光素子の製造方法。
- 前記第2基板を構成する前記薄型金属は、Pt、Pb、Ni、γ-Fe、Cu、Al、Au、またはAgのグループから選択された物質を含むことを特徴とする、請求項8に記載の有機電界発光素子の製造方法。
- 前記水素吸着金属は、水素分子を水素原子へと解離させて、侵入型固溶体または金属水素化物を形成することが可能である、請求項8に記載の有機電界発光素子の製造方法。
- 前記接着層はBa、Ca、Cu、Fe、Hf、La、Mg、Nb、Pd、Pt、Se、Sr、Ta、Ti、V、またはZrのうち、少なくとも1つの金属を含むビッドを更に含むことを特徴とする、請求項8に記載の有機電界発光素子の製造方法。
- 前記水素吸着金属はBa、Ca、Cu、Fe、Hf、La、Mg、Nb、Ni、Pd、Pt、Se、Sr、Ta、Ti、V、またはZrのグループから選択された元素を含むことを特徴とする、請求項8に記載の有機電界発光素子の製造方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2013-0123631 | 2013-10-16 | ||
KR1020130123631A KR102062353B1 (ko) | 2013-10-16 | 2013-10-16 | 유기전계발광소자 및 그 제조방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2015079755A JP2015079755A (ja) | 2015-04-23 |
JP6138739B2 true JP6138739B2 (ja) | 2017-05-31 |
Family
ID=51690972
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014211832A Active JP6138739B2 (ja) | 2013-10-16 | 2014-10-16 | 有機電界発光素子及びその製造方法 |
Country Status (6)
Country | Link |
---|---|
US (2) | US9583546B2 (ja) |
EP (2) | EP2863447B1 (ja) |
JP (1) | JP6138739B2 (ja) |
KR (1) | KR102062353B1 (ja) |
CN (1) | CN104576689B (ja) |
TW (1) | TWI587489B (ja) |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102484903B1 (ko) * | 2015-05-22 | 2023-01-06 | 엘지디스플레이 주식회사 | 유기발광소자 및 그 제조방법 |
CN105098099A (zh) | 2015-06-16 | 2015-11-25 | 京东方科技集团股份有限公司 | 有机发光二极管封装方法和封装结构及具有该结构的器件 |
KR102391453B1 (ko) * | 2015-06-30 | 2022-04-27 | 엘지디스플레이 주식회사 | 구조물 및 이의 제조 방법 |
KR102416347B1 (ko) * | 2015-09-11 | 2022-07-01 | 엘지디스플레이 주식회사 | 유기발광 표시장치 |
CN106558620B (zh) | 2015-09-29 | 2021-09-07 | 联华电子股份有限公司 | 半导体元件及其形成方法 |
KR102415108B1 (ko) * | 2015-10-29 | 2022-06-30 | 엘지디스플레이 주식회사 | 유기발광 표시장치 |
CN108352411B (zh) * | 2015-10-29 | 2020-11-27 | 三菱电机株式会社 | 薄膜晶体管基板 |
KR20170080459A (ko) * | 2015-12-30 | 2017-07-10 | 엘지디스플레이 주식회사 | 유기발광다이오드표시장치 |
GB2546002B (en) | 2015-12-30 | 2019-10-30 | Lg Display Co Ltd | Organic light emitting diode display device |
JP7418943B2 (ja) * | 2016-04-29 | 2024-01-22 | 三星ディスプレイ株式會社 | 表示装置 |
JP2017216323A (ja) * | 2016-05-31 | 2017-12-07 | 株式会社Joled | 電子デバイス、表示装置および電子機器 |
US10023540B2 (en) | 2016-09-29 | 2018-07-17 | Tokyo Ohka Kogyo Co., Ltd. | Hydrogen barrier agent, hydrogen barrier film forming composition, hydrogen barrier film, method for producing hydrogen barrier film, and electronic element |
JP6935287B2 (ja) | 2016-09-29 | 2021-09-15 | 東京応化工業株式会社 | 水素バリア剤、水素バリア膜形成用組成物、水素バリア膜、水素バリア膜の製造方法、及び電子素子 |
KR102598926B1 (ko) * | 2016-10-31 | 2023-11-03 | 엘지디스플레이 주식회사 | 유기발광소자를 이용한 조명장치 및 그 제조방법 |
KR102316563B1 (ko) * | 2017-05-22 | 2021-10-25 | 엘지디스플레이 주식회사 | 금속으로 형성된 상부 기판을 포함하는 유기 발광 표시 장치 및 이의 제조 방법 |
CN107579006B (zh) * | 2017-09-13 | 2019-08-06 | 京东方科技集团股份有限公司 | 一种薄膜晶体管、阵列基板及其制备方法 |
KR102641099B1 (ko) | 2017-09-29 | 2024-02-28 | 도쿄 오카 고교 가부시키가이샤 | 화합물, 에폭시 경화 촉매, 및 화합물의 제조방법 |
KR102437172B1 (ko) * | 2017-10-31 | 2022-08-26 | 엘지디스플레이 주식회사 | 투명한 상부 기판을 포함하는 디스플레이 장치 |
JP6999469B2 (ja) * | 2018-03-28 | 2022-01-18 | 東京応化工業株式会社 | 水素バリア剤、水素バリア膜形成用組成物、水素バリア膜、水素バリア膜の製造方法、及び電子素子 |
JP6660424B2 (ja) * | 2018-07-20 | 2020-03-11 | ミネベアミツミ株式会社 | 入力装置 |
CN109148477B (zh) | 2018-07-20 | 2020-10-30 | 深圳市华星光电半导体显示技术有限公司 | Tft阵列基板及显示面板 |
CN115939283A (zh) | 2018-08-28 | 2023-04-07 | 乐金显示有限公司 | 发光显示装置及其制造方法 |
KR102093735B1 (ko) * | 2018-08-28 | 2020-03-26 | 엘지디스플레이 주식회사 | 발광 표시 장치 및 발광 표시 장치 제조 방법 |
CN113130561A (zh) * | 2019-12-31 | 2021-07-16 | 乐金显示有限公司 | 发光显示装置 |
JP2020074238A (ja) * | 2020-02-07 | 2020-05-14 | ミネベアミツミ株式会社 | 入力装置 |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10321799A (ja) * | 1997-05-15 | 1998-12-04 | Fujitsu Ltd | 半導体装置及びその製造方法 |
US8138673B1 (en) * | 2002-05-21 | 2012-03-20 | Imaging Systems Technology | Radiation shielding |
KR100656192B1 (ko) * | 2004-11-24 | 2006-12-12 | 이병철 | 전면발광형 유기이엘 디스플레이 소자 |
JP2006252857A (ja) * | 2005-03-09 | 2006-09-21 | Canon Inc | 有機el素子及びその製造方法 |
KR100673765B1 (ko) | 2006-01-20 | 2007-01-24 | 삼성에스디아이 주식회사 | 유기전계발광 표시장치 및 그 제조방법 |
JP2007250519A (ja) * | 2006-03-14 | 2007-09-27 | Samsung Sdi Co Ltd | 有機電界発光表示装置 |
WO2009096250A1 (ja) * | 2008-02-01 | 2009-08-06 | Tokyo Electron Limited | 有機発光ダイオード、有機発光ダイオードの製造方法、有機発光ダイオードを製造する製造装置およびプラズマ処理装置 |
WO2010111125A1 (en) * | 2009-03-23 | 2010-09-30 | Dow Global Technologies Inc. | Optoelectronic device |
JP2010231955A (ja) * | 2009-03-26 | 2010-10-14 | Hitachi Displays Ltd | 有機el表示装置 |
KR101767035B1 (ko) * | 2009-10-01 | 2017-08-10 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 그 제작 방법 |
KR101108157B1 (ko) * | 2009-11-19 | 2012-01-31 | 삼성모바일디스플레이주식회사 | 유기 발광 디스플레이 장치 |
KR101844972B1 (ko) * | 2009-11-27 | 2018-04-03 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 반도체 장치의 제작방법 |
US9000442B2 (en) * | 2010-01-20 | 2015-04-07 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device, flexible light-emitting device, electronic device, and method for manufacturing light-emitting device and flexible-light emitting device |
US8642380B2 (en) * | 2010-07-02 | 2014-02-04 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
KR101271827B1 (ko) * | 2010-07-22 | 2013-06-07 | 포항공과대학교 산학협력단 | 탄소 박막 제조 방법 |
KR20120026970A (ko) * | 2010-09-10 | 2012-03-20 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 발광 장치 |
JP5907722B2 (ja) * | 2011-12-23 | 2016-04-26 | 株式会社半導体エネルギー研究所 | 発光装置の作製方法 |
JP2013175285A (ja) * | 2012-02-23 | 2013-09-05 | Semiconductor Energy Lab Co Ltd | 発光装置の作製方法 |
JP2013251255A (ja) * | 2012-05-04 | 2013-12-12 | Semiconductor Energy Lab Co Ltd | 発光装置の作製方法 |
KR101966238B1 (ko) * | 2012-12-14 | 2019-04-05 | 엘지디스플레이 주식회사 | 유기발광다이오드 표시장치 및 그 제조방법 |
US8981359B2 (en) * | 2012-12-21 | 2015-03-17 | Lg Display Co., Ltd. | Organic light emitting diode display device and method of fabricating the same |
-
2013
- 2013-10-16 KR KR1020130123631A patent/KR102062353B1/ko active IP Right Grant
-
2014
- 2014-10-16 US US14/516,307 patent/US9583546B2/en active Active
- 2014-10-16 EP EP14189213.3A patent/EP2863447B1/en active Active
- 2014-10-16 JP JP2014211832A patent/JP6138739B2/ja active Active
- 2014-10-16 EP EP21189698.0A patent/EP3930021A1/en active Pending
- 2014-10-16 TW TW103135833A patent/TWI587489B/zh active
- 2014-10-16 CN CN201410548856.2A patent/CN104576689B/zh active Active
-
2017
- 2017-01-09 US US15/401,961 patent/US10069109B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
TWI587489B (zh) | 2017-06-11 |
TW201517253A (zh) | 2015-05-01 |
KR20150044522A (ko) | 2015-04-27 |
US9583546B2 (en) | 2017-02-28 |
EP2863447A2 (en) | 2015-04-22 |
JP2015079755A (ja) | 2015-04-23 |
EP3930021A1 (en) | 2021-12-29 |
CN104576689A (zh) | 2015-04-29 |
KR102062353B1 (ko) | 2020-01-06 |
CN104576689B (zh) | 2018-01-26 |
US20150102332A1 (en) | 2015-04-16 |
US20170162814A1 (en) | 2017-06-08 |
EP2863447A3 (en) | 2015-07-01 |
US10069109B2 (en) | 2018-09-04 |
EP2863447B1 (en) | 2024-04-24 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6138739B2 (ja) | 有機電界発光素子及びその製造方法 | |
US9548343B2 (en) | Flexible display | |
KR101149433B1 (ko) | 플렉서블 표시 장치 및 그 제조 방법 | |
US8247826B2 (en) | Light emitting display device | |
KR20160053001A (ko) | 투명 표시 기판, 투명 표시 장치 및 투명 표시 장치의 제조 방법 | |
US9159953B2 (en) | Organic light-emitting display device and manufacturing method thereof | |
KR20170074252A (ko) | 투명 표시 장치 | |
US20160372706A1 (en) | Organic light emitting display device and method of manufacturing the same | |
KR20170033965A (ko) | 투명 표시 장치 및 투명 표시 장치의 제조 방법 | |
KR20170043726A (ko) | 투명 표시 기판 및 투명 표시 장치 | |
KR20140081662A (ko) | 유기전계 발광소자 및 이의 제조 방법 | |
KR20150078389A (ko) | 유기전계발광표시장치 제조방법 | |
WO2020015176A1 (zh) | 有机发光显示面板 | |
KR102484903B1 (ko) | 유기발광소자 및 그 제조방법 | |
JP6322380B2 (ja) | 表示装置 | |
KR102286343B1 (ko) | 유기발광표시장치 | |
KR20170003298A (ko) | 유기 발광 디스플레이 장치 및 이의 제조 방법 | |
US9461270B2 (en) | Method for manufacturing organic light emitting diode display device | |
JP5049613B2 (ja) | 有機発光装置及びその製造方法 | |
US8288182B2 (en) | Method for manufacturing thin film transistor and display device | |
KR20100027902A (ko) | 유기전계발광표시장치와 이의 제조방법 | |
KR100756859B1 (ko) | 유기 발광 표시장치의 제조방법 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20150814 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20150818 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20151118 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20151218 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20160218 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20160705 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20161005 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20161205 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20170328 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20170426 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6138739 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |