JP6116843B2 - サブリメーションポンプおよび方法 - Google Patents

サブリメーションポンプおよび方法 Download PDF

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Publication number
JP6116843B2
JP6116843B2 JP2012212420A JP2012212420A JP6116843B2 JP 6116843 B2 JP6116843 B2 JP 6116843B2 JP 2012212420 A JP2012212420 A JP 2012212420A JP 2012212420 A JP2012212420 A JP 2012212420A JP 6116843 B2 JP6116843 B2 JP 6116843B2
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JP
Japan
Prior art keywords
sublimation
lattice
gas molecules
vacuum chamber
grid
Prior art date
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Active
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JP2012212420A
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English (en)
Japanese (ja)
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JP2013072435A5 (enExample
JP2013072435A (ja
Inventor
カール アール． マックィーバ，
カール アール． マックィーバ，
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Boeing Co
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Boeing Co
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Publication date
Application filed by Boeing Co filed Critical Boeing Co
Publication of JP2013072435A publication Critical patent/JP2013072435A/ja
Publication of JP2013072435A5 publication Critical patent/JP2013072435A5/ja
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J37/00—Processes, in general, for preparing catalysts; Processes, in general, for activation of catalysts
    • B01J37/02—Impregnation, coating or precipitation
    • B01J37/0238—Impregnation, coating or precipitation via the gaseous phase-sublimation

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Combustion & Propulsion (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
JP2012212420A 2011-09-28 2012-09-26 サブリメーションポンプおよび方法 Active JP6116843B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/247,831 US9057362B2 (en) 2011-09-28 2011-09-28 Sublimation pump and method
US13/247,831 2011-09-28

Publications (3)

Publication Number Publication Date
JP2013072435A JP2013072435A (ja) 2013-04-22
JP2013072435A5 JP2013072435A5 (enExample) 2015-11-12
JP6116843B2 true JP6116843B2 (ja) 2017-04-19

Family

ID=46963573

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012212420A Active JP6116843B2 (ja) 2011-09-28 2012-09-26 サブリメーションポンプおよび方法

Country Status (4)

Country Link
US (1) US9057362B2 (enExample)
EP (1) EP2574785B1 (enExample)
JP (1) JP6116843B2 (enExample)
CA (1) CA2783058C (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9843237B2 (en) 2012-03-26 2017-12-12 Rotonix Hong Kong Limited Electromechanical flywheel with evacuation system
WO2013148527A1 (en) * 2012-03-26 2013-10-03 Rotonix Usa, Inc. Electromechanical flywheel with evacuation features
GB201217782D0 (en) * 2012-10-04 2012-11-14 Tesla Engineering Ltd Magnet apparatus
CN106930923B (zh) * 2015-12-30 2018-11-30 核工业西南物理研究院 一种大型直板式钛升华泵结构
DE102016123146A1 (de) * 2016-06-03 2017-12-07 Movatec Gmbh Vakuumgerät und Verfahren zur Beschichtung von Bauteilen
NL2021471B1 (en) * 2018-08-15 2020-02-24 Johannis Boerman Barend Kinetic energy storage system
GB2576968B (en) 2019-05-24 2021-12-08 Edwards Ltd A vacuum pumping system having multiple pumps
CN111621844B (zh) * 2020-06-22 2022-02-25 哈尔滨化兴软控科技有限公司 一种旋转式双温区pvt法高质量单晶制备装置及方法

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL163054C (nl) * 1968-08-10 1980-07-15 Getters Spa Niet-verdampende getterinrichting.
US3694691A (en) * 1970-11-23 1972-09-26 Gen Electric Sublimation getter pump with cathode trigger means
GB1386251A (en) * 1971-03-24 1975-03-05 British Oxygen Co Ltd Source of sublimable material
US3811974A (en) * 1971-07-19 1974-05-21 North American Rockwell Silicon nitride-silicon oxide etchant
US3811794A (en) * 1972-11-22 1974-05-21 Bell Telephone Labor Inc Ultrahigh vacuum sublimation pump
DD125057A1 (enExample) * 1975-07-17 1977-03-30
US4137012A (en) 1976-11-03 1979-01-30 S.A.E.S. Getters S.P.A. Modular getter pumps
JPH03168372A (ja) * 1989-11-24 1991-07-22 Isao Takahashi フライホイール装置及びこの運転方法
JP2774399B2 (ja) * 1991-09-30 1998-07-09 勲 高橋 フライホイール装置及びその運転方法
US5462402A (en) 1994-02-22 1995-10-31 Rosen Motors, L.P. Flywheel energy storage system with integral molecular pump
US5614777A (en) 1995-02-06 1997-03-25 U.S. Flywheel Systems Flywheel based energy storage system
US6182531B1 (en) 1998-06-12 2001-02-06 The Boeing Company Containment ring for flywheel failure
US6347925B1 (en) * 2000-06-29 2002-02-19 Beacon Power Corporation Flywheel system with parallel pumping arrangement
US7053589B2 (en) 2000-08-10 2006-05-30 Gabrys Christopher W Long-life vacuum system for energy storage flywheels
US6585490B1 (en) * 2000-12-19 2003-07-01 Indigo Energy, Inc. Vacuum regeneration method for a flywheel system
WO2007013882A2 (en) 2004-09-30 2007-02-01 The Government Of The United States Of America, As Represented By The Secretary, Department Of Health And Human Services In vitro model for hepatitis c virion production
US8020673B2 (en) 2007-07-30 2011-09-20 The Boeing Company Braking system for high speed and power rotating machinery

Also Published As

Publication number Publication date
EP2574785A2 (en) 2013-04-03
EP2574785B1 (en) 2020-11-25
CA2783058C (en) 2015-05-26
EP2574785A3 (en) 2016-11-23
US20130078112A1 (en) 2013-03-28
CA2783058A1 (en) 2013-03-28
JP2013072435A (ja) 2013-04-22
US9057362B2 (en) 2015-06-16

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