JP2013072435A5 - - Google Patents

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Publication number
JP2013072435A5
JP2013072435A5 JP2012212420A JP2012212420A JP2013072435A5 JP 2013072435 A5 JP2013072435 A5 JP 2013072435A5 JP 2012212420 A JP2012212420 A JP 2012212420A JP 2012212420 A JP2012212420 A JP 2012212420A JP 2013072435 A5 JP2013072435 A5 JP 2013072435A5
Authority
JP
Japan
Prior art keywords
gas molecules
layer
sublimation
pressure
grating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2012212420A
Other languages
English (en)
Japanese (ja)
Other versions
JP6116843B2 (ja
JP2013072435A (ja
Filing date
Publication date
Priority claimed from US13/247,831 external-priority patent/US9057362B2/en
Application filed filed Critical
Publication of JP2013072435A publication Critical patent/JP2013072435A/ja
Publication of JP2013072435A5 publication Critical patent/JP2013072435A5/ja
Application granted granted Critical
Publication of JP6116843B2 publication Critical patent/JP6116843B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2012212420A 2011-09-28 2012-09-26 サブリメーションポンプおよび方法 Active JP6116843B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/247,831 US9057362B2 (en) 2011-09-28 2011-09-28 Sublimation pump and method
US13/247,831 2011-09-28

Publications (3)

Publication Number Publication Date
JP2013072435A JP2013072435A (ja) 2013-04-22
JP2013072435A5 true JP2013072435A5 (enExample) 2015-11-12
JP6116843B2 JP6116843B2 (ja) 2017-04-19

Family

ID=46963573

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012212420A Active JP6116843B2 (ja) 2011-09-28 2012-09-26 サブリメーションポンプおよび方法

Country Status (4)

Country Link
US (1) US9057362B2 (enExample)
EP (1) EP2574785B1 (enExample)
JP (1) JP6116843B2 (enExample)
CA (1) CA2783058C (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9843237B2 (en) 2012-03-26 2017-12-12 Rotonix Hong Kong Limited Electromechanical flywheel with evacuation system
WO2013148527A1 (en) * 2012-03-26 2013-10-03 Rotonix Usa, Inc. Electromechanical flywheel with evacuation features
GB201217782D0 (en) * 2012-10-04 2012-11-14 Tesla Engineering Ltd Magnet apparatus
CN106930923B (zh) * 2015-12-30 2018-11-30 核工业西南物理研究院 一种大型直板式钛升华泵结构
DE102016123146A1 (de) * 2016-06-03 2017-12-07 Movatec Gmbh Vakuumgerät und Verfahren zur Beschichtung von Bauteilen
NL2021471B1 (en) * 2018-08-15 2020-02-24 Johannis Boerman Barend Kinetic energy storage system
GB2576968B (en) 2019-05-24 2021-12-08 Edwards Ltd A vacuum pumping system having multiple pumps
CN111621844B (zh) * 2020-06-22 2022-02-25 哈尔滨化兴软控科技有限公司 一种旋转式双温区pvt法高质量单晶制备装置及方法

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL163054C (nl) * 1968-08-10 1980-07-15 Getters Spa Niet-verdampende getterinrichting.
US3694691A (en) * 1970-11-23 1972-09-26 Gen Electric Sublimation getter pump with cathode trigger means
GB1386251A (en) * 1971-03-24 1975-03-05 British Oxygen Co Ltd Source of sublimable material
US3811974A (en) * 1971-07-19 1974-05-21 North American Rockwell Silicon nitride-silicon oxide etchant
US3811794A (en) * 1972-11-22 1974-05-21 Bell Telephone Labor Inc Ultrahigh vacuum sublimation pump
DD125057A1 (enExample) * 1975-07-17 1977-03-30
US4137012A (en) 1976-11-03 1979-01-30 S.A.E.S. Getters S.P.A. Modular getter pumps
JPH03168372A (ja) * 1989-11-24 1991-07-22 Isao Takahashi フライホイール装置及びこの運転方法
JP2774399B2 (ja) * 1991-09-30 1998-07-09 勲 高橋 フライホイール装置及びその運転方法
US5462402A (en) 1994-02-22 1995-10-31 Rosen Motors, L.P. Flywheel energy storage system with integral molecular pump
US5614777A (en) 1995-02-06 1997-03-25 U.S. Flywheel Systems Flywheel based energy storage system
US6182531B1 (en) 1998-06-12 2001-02-06 The Boeing Company Containment ring for flywheel failure
US6347925B1 (en) * 2000-06-29 2002-02-19 Beacon Power Corporation Flywheel system with parallel pumping arrangement
US7053589B2 (en) 2000-08-10 2006-05-30 Gabrys Christopher W Long-life vacuum system for energy storage flywheels
US6585490B1 (en) * 2000-12-19 2003-07-01 Indigo Energy, Inc. Vacuum regeneration method for a flywheel system
WO2007013882A2 (en) 2004-09-30 2007-02-01 The Government Of The United States Of America, As Represented By The Secretary, Department Of Health And Human Services In vitro model for hepatitis c virion production
US8020673B2 (en) 2007-07-30 2011-09-20 The Boeing Company Braking system for high speed and power rotating machinery

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