JP6090035B2 - 液処理装置 - Google Patents
液処理装置 Download PDFInfo
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- JP6090035B2 JP6090035B2 JP2013154703A JP2013154703A JP6090035B2 JP 6090035 B2 JP6090035 B2 JP 6090035B2 JP 2013154703 A JP2013154703 A JP 2013154703A JP 2013154703 A JP2013154703 A JP 2013154703A JP 6090035 B2 JP6090035 B2 JP 6090035B2
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Images
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013154703A JP6090035B2 (ja) | 2013-07-25 | 2013-07-25 | 液処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013154703A JP6090035B2 (ja) | 2013-07-25 | 2013-07-25 | 液処理装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015026688A JP2015026688A (ja) | 2015-02-05 |
| JP2015026688A5 JP2015026688A5 (enExample) | 2015-12-24 |
| JP6090035B2 true JP6090035B2 (ja) | 2017-03-08 |
Family
ID=52491127
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013154703A Active JP6090035B2 (ja) | 2013-07-25 | 2013-07-25 | 液処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6090035B2 (enExample) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7021877B2 (ja) * | 2017-08-08 | 2022-02-17 | 株式会社Ｓｃｒｅｅｎホールディングス | 基板処理装置、位置合わせ装置および位置合わせ方法 |
| JP6908474B2 (ja) * | 2017-09-06 | 2021-07-28 | 株式会社ディスコ | ウエーハ洗浄装置 |
| KR102685189B1 (ko) * | 2022-08-23 | 2024-07-16 | 엘에스이 주식회사 | 기판 세정 장치 |
| KR102798182B1 (ko) * | 2023-05-23 | 2025-04-22 | 엘에스이 주식회사 | 기판 세정 장치 |
| KR102821310B1 (ko) * | 2023-10-26 | 2025-06-17 | 엘에스이 주식회사 | 기판 세정 장치 |
| KR102819139B1 (ko) * | 2023-11-10 | 2025-06-11 | 엘에스이 주식회사 | 기판 세정 장치 |
| KR102836608B1 (ko) * | 2024-02-01 | 2025-07-22 | 엘에스이 주식회사 | 기판 세정 장치 |
| KR102836609B1 (ko) * | 2024-02-07 | 2025-07-22 | 엘에스이 주식회사 | 기판 세정 장치 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3544747B2 (ja) * | 1995-05-15 | 2004-07-21 | 大日本スクリーン製造株式会社 | 回転式基板処理装置 |
| US5853483A (en) * | 1995-05-02 | 1998-12-29 | Dainippon Screen Mfg. Co., Ltd. | Substrate spin treating method and apparatus |
| JP3640373B2 (ja) * | 1999-08-27 | 2005-04-20 | 大日本スクリーン製造株式会社 | 基板載置台 |
| JP2002319563A (ja) * | 2001-04-20 | 2002-10-31 | Tokyo Electron Ltd | 基板処理装置及び基板処理方法 |
| JP4439464B2 (ja) * | 2005-12-06 | 2010-03-24 | 東京エレクトロン株式会社 | 基板搬送方法及び基板搬送装置 |
| JP2009200063A (ja) * | 2006-05-22 | 2009-09-03 | Tokyo Electron Ltd | 基板の変形検出機構，処理システム，基板の変形検出方法及び記録媒体 |
| JP5009254B2 (ja) * | 2008-08-14 | 2012-08-22 | 株式会社ディスコ | 樹脂被覆装置 |
| US9082802B2 (en) * | 2011-11-28 | 2015-07-14 | Macronix International Co., Ltd. | Wafer centering hardware design and process |
-
2013
- 2013-07-25 JP JP2013154703A patent/JP6090035B2/ja active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP2015026688A (ja) | 2015-02-05 |
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