JP6072253B2 - 気密のキャビティを製造するための装置および方法 - Google Patents
気密のキャビティを製造するための装置および方法 Download PDFInfo
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- JP6072253B2 JP6072253B2 JP2015526915A JP2015526915A JP6072253B2 JP 6072253 B2 JP6072253 B2 JP 6072253B2 JP 2015526915 A JP2015526915 A JP 2015526915A JP 2015526915 A JP2015526915 A JP 2015526915A JP 6072253 B2 JP6072253 B2 JP 6072253B2
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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Description
本願は、2013年7月18日に出願されたPCT出願No.:PCT/EP2013/065220の米国特許法第371に従った国際段階での出願であり、2012年8月14日付けで出願されたドイツ国出願No.:10 2012 214 411.0からの優先権を主張するものであり、かつその開示内容は、参照のために本明細書に援用される。
技術分野
さまざまな実施態様は、気密のキャビティを製造する装置およびこの装置を製造するための方法に関する。
平面状有機素子、例えば有機発光ダイオードまたは有機光電素子は、有害物質の侵入から、例えば酸素および水の侵入から保護(カプセル化)されるべきであった。さもないと、有機層の有機物質または有機物質混合物の無制御の老化または崩壊をまねきうるからである。
さまざまな実施態様において、例えば、水および酸素に敏感な物質、物質混合物またはバリアフィルムを有する素子を、従来の接着剤なしに気密にカプセル化しうる、水および酸素に対して気密のキャビティを製造するための装置および方法が提供される。
図中、同じ参照符号は、一般に異なる視点から見た同じ部分に適用する。図は、必ずしも一定の縮尺で記載されておらず、代わりに、一般に、開示された実施態様の原理が強調されて説明されている。以下の図には、さまざまな実施態様が記載されている。
例えば約1nm〜約50nm、
例えば約50nm〜約200nm、
例えば約200nm〜約100μm
の層厚を有することができる。カプセル化層108、114のための物質として、例えば酸化アルミニウム、酸化亜鉛、酸化ジルコニウム、酸化チタン、酸化ハフニウム、酸化タンタル、酸化ランタニウム、酸化ケイ素、窒化ケイ素、オキシ窒化ケイ素、インジウム錫オキシド、インジウム亜鉛オキシド、アルミニウムをドープした酸化亜鉛、ならびにこれらの混合物および合金が適当でありうる。
開示された実施態様は、特別な実施態様に関連して、特に提示されかつ記載されたものであるが、当業者であれば、形式上の詳細なさまざまな変更が、係属された特許請求の範囲によって規定されたように、開示された実施態様の精神および範囲から逸脱することなく可能であることは、理解されるべきである。したがって、開示された実施態様の範囲は、係属された特許請求の範囲によって示されており、それゆえに、請求の範囲が意味する等価の範囲内での全ての変更は、本明細書中に包含される。
Claims (14)
- ・ 少なくとも1つのALDプリカーサ(302)および/または少なくとも1つのMLDプリカーサ(302)で被覆されている第1の担体(102)と
・ 前記第1の担体(102)のALDプリカーサ(302)および/またはMLDプリカーサ(302)に対して相補的である、少なくとも1つのALDプリカーサ(304)および/または少なくとも1つのMLDプリカーサ(304)で被覆されている第2の担体(104)
を有する、気密に密閉された有機素子を有する装置であって、
・ 前記第1の担体(102)と前記第2の担体(104)とは、少なくとも部分的に、前記第1の担体(102)のALDプリカーサ(302)と前記第2の担体(104)のALDプリカーサ(304)との間の原子接合部(118)により、ALD層(118)が形成されるように接合されており、または前記第1の担体(102)のMLDプリカーサ(302)と前記第2の担体(104)のMLDプリカーサ(304)との間の原子接合部(118)により、MLD層(118)が形成されるように接合されており、
・ 第1の担体(102)のALDプリカーサ(302)および/またはMLDプリカーサ(302)と第2の担体(104)のALDプリカーサ(304)および/またはMLDプリカーサ(304)との接合によるALD層(118)および/またはMLD層(118)には、前記ALD層(118)および/またはMLD層(118)が第1の担体(102)と第2の担体(104)との間でキャビティ(100)を囲むように、第2の担体(104)につながって隙間なしに第1の担体(102)が接合されており、且つ
・ キャビティ(100)中で有機素子(402)がカプセル化されており、前記有機素子(402)は、素子担体(406)と機械的保護部(408)との間に有機機能性膜構造体(404)を有し、
・ 前記素子担体(406)は、前記第1の担体(102)上に置かれているかまたは固定されており、且つ
・ 前記第2の担体(104)は前記機械的保護部(408)上に置かれているかまたは固定されている
、前記装置。 - 前記第1の担体(102)および前記第2の担体(104)が、水および/または酸素に対して拡散バリアを有する、請求項1記載の装置。
- 前記キャビティ(100)が、水および酸素の拡散流に対して気密であるように密閉されている、請求項1記載の装置。
- 前記有機素子が、有機発光ダイオードである、請求項1記載の装置。
- 前記第1の担体(102)の表面または前記第2の担体(104)の表面は、カプセル化すべき素子(402)の素子担体(406)であるかまたはカプセル化すべき素子(402)を有する、請求項1記載の装置。
- カプセル化によるキャビティ内の前記有機素子(402)と電気的に接触するためのカプセル化された電気的接触部(410)をさらに含む、請求項1記載の装置。
- 前記電気的接触部(410)が、第1の担体(102)と第2の担体(104)との間に配置されている、請求項6記載の装置。
- ・ 少なくとも1つのALDプリカーサ(302)および/または少なくとも1つのMLDプリカーサ(302)を第1の担体(102)上に施与し;
・ 少なくとも1つのALDプリカーサ(304)および/または少なくとも1つのMLDプリカーサ(304)を、第2の担体(104)上に施与し、その際、前記第2の担体(104)上に施与されているALDプリカーサ(304)および/またはMLDプリカーサ(304)が前記第1の担体(102)上に施与されているALDプリカーサ(302)および/またはMLDプリカーサ(302)に対して相補的であり;および
・ 前記第1の担体(102)上に施与されている、少なくとも1つのALDプリカーサ(302)および/または少なくとも1つのMLDプリカーサ(302)と、前記第2の担体(104)上に施与されている、相補的な少なくとも1つのALDプリカーサ(304)および/または相補的な少なくとも1つのMLDプリカーサ(304)とを接合する、気密に密閉された有機素子を有する装置を製造する方法であって、
前記第1の担体(102)と前記第2の担体(104)とは、少なくとも部分的に、前記第1の担体(102)上に施与されているALDプリカーサ(302)と前記第2の担体(104)上に施与されているALDプリカーサ(304)との間の原子接合により、ALD層(118)が形成されるように接合されており、または前記第1の担体(102)上に施与されているMLDプリカーサ(302)と前記第2の担体(104)上に施与されているMLDプリカーサ(116)との間の原子接合により、MLD層(118)が形成されるように接合されており、
・ 第1の担体(102)のALDプリカーサ(302)および/またはMLDプリカーサ(302)と第2の担体(104)のALDプリカーサ(304)および/またはMLDプリカーサ(304)との接合によるALD層(118)および/またはMLD層(118)には、前記のALD層(118)および/またはMLD層(118)が第1の担体(102)と第2の担体(104)との間でキャビティ(100)を囲むように、第2の担体(104)につながって隙間なしに第1の担体(102)が接合されており、且つ、
・ 前記キャビティ(100)中で有機素子(402)がカプセル化されており、前記有機素子(402)は、素子担体(406)と機械的保護部(408)との間に有機機能性膜構造体(404)を有し、
・ 前記素子担体(406)は、前記第1の担体(102)上に置かれているかまたは固定されており、且つ
・ 前記第2の担体(104)は前記機械的保護部(408)上に置かれているかまたは固定されている、
前記の装置を製造する方法。 - 前記第1の担体(102)の表面および/または前記第2の担体(104)の表面を構造化する、請求項8記載の方法。
- 前記第1の担体(102)の表面および/または前記第2の担体(104)の表面を複数の互いに異なるALDプリカーサで被覆し、および/または複数の互いに異なるMLDプリカーサで被覆する、請求項8記載の方法。
- 前記第1の担体(102)の化学的に構造化された表面および/または微細構成的に構造化された表面は、前記第2の担体(104)の化学的に構造化された表面および/または微細構成的に構造化された表面に対して相補的である、請求項10記載の方法。
- 前記第1の担体の構造化および/または前記第2の担体の構造化は、ALDプリカーサまたはMLDプリカーサの局在的な加熱または接合プロセスの触媒反応により形成される、請求項9記載の方法。
- ALDプリカーサおよび/またはMLDプリカーサによる前記第1の担体(102)または前記第2の担体(104)の表面被覆が、反応性ALDプリカーサおよび/または反応性MLDプリカーサを、前記第1の担体(102)または前記第2の担体(104)の表面上で形成する、請求項8記載の方法。
- 前記有機素子が有機発光ダイオードである、請求項8記載の方法。
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US20150207101A1 (en) | 2015-07-23 |
CN104641485B (zh) | 2017-03-08 |
KR101635126B1 (ko) | 2016-06-30 |
CN104641485A (zh) | 2015-05-20 |
KR20150038131A (ko) | 2015-04-08 |
DE102012214411A1 (de) | 2014-02-20 |
DE102012214411B4 (de) | 2022-05-25 |
JP2015532765A (ja) | 2015-11-12 |
WO2014026823A1 (de) | 2014-02-20 |
US9692009B2 (en) | 2017-06-27 |
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