JP6052434B2 - 圧電センサの製造方法 - Google Patents

圧電センサの製造方法 Download PDF

Info

Publication number
JP6052434B2
JP6052434B2 JP2015554818A JP2015554818A JP6052434B2 JP 6052434 B2 JP6052434 B2 JP 6052434B2 JP 2015554818 A JP2015554818 A JP 2015554818A JP 2015554818 A JP2015554818 A JP 2015554818A JP 6052434 B2 JP6052434 B2 JP 6052434B2
Authority
JP
Japan
Prior art keywords
detection electrode
piezoelectric
piezoelectric film
manufacturing
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2015554818A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2015098723A1 (ja
Inventor
河村　秀樹
秀樹 河村
博行 中路
博行 中路
山口　喜弘
喜弘 山口
遠藤　潤
潤 遠藤
斉藤　誠人
誠人 斉藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Application granted granted Critical
Publication of JP6052434B2 publication Critical patent/JP6052434B2/ja
Publication of JPWO2015098723A1 publication Critical patent/JPWO2015098723A1/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H10N30/302—Sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/875—Further connection or lead arrangements, e.g. flexible wiring boards, terminal pins
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04105—Pressure sensors for measuring the pressure or force exerted on the touch surface without providing the touch position
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/857—Macromolecular compositions

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
JP2015554818A 2013-12-24 2014-12-19 圧電センサの製造方法 Active JP6052434B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2013265457 2013-12-24
JP2013265457 2013-12-24
PCT/JP2014/083653 WO2015098723A1 (fr) 2013-12-24 2014-12-19 Procédé de production de capteur piézoélectrique

Publications (2)

Publication Number Publication Date
JP6052434B2 true JP6052434B2 (ja) 2016-12-27
JPWO2015098723A1 JPWO2015098723A1 (ja) 2017-03-23

Family

ID=53478581

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015554818A Active JP6052434B2 (ja) 2013-12-24 2014-12-19 圧電センサの製造方法

Country Status (2)

Country Link
JP (1) JP6052434B2 (fr)
WO (1) WO2015098723A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6776806B2 (ja) * 2016-10-25 2020-10-28 株式会社リコー センサ及び把持装置及びロボット及びセンサ初期化方法
CN111699563B (zh) * 2019-01-11 2024-02-13 株式会社村田制作所 压电器件、振动构造体以及压电传感器
CN113432763B (zh) * 2021-06-17 2023-07-21 中北大学 夹芯式pvdf压力计真空环境压制装置及方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0280930A (ja) * 1988-09-19 1990-03-22 Agency Of Ind Science & Technol 分布型圧覚センサの製造方法
US20020036446A1 (en) * 2000-03-28 2002-03-28 Minoru Toda Piezeoelectric transducer having protuberances for transmitting acoustic energy and method of making the same
JP2008122215A (ja) * 2006-11-13 2008-05-29 Aisin Seiki Co Ltd 圧電センサ及びその製造方法
JP2009053109A (ja) * 2007-08-28 2009-03-12 Aisin Seiki Co Ltd 圧電フィルムセンサ
JP2009080090A (ja) * 2007-09-05 2009-04-16 Erumekku Denshi Kogyo Kk 圧電センサ
WO2011138903A1 (fr) * 2010-05-06 2011-11-10 株式会社村田製作所 Écran tactile, appareil de saisie dactylographique et procédé de commande pour celui-ci

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0280930A (ja) * 1988-09-19 1990-03-22 Agency Of Ind Science & Technol 分布型圧覚センサの製造方法
US20020036446A1 (en) * 2000-03-28 2002-03-28 Minoru Toda Piezeoelectric transducer having protuberances for transmitting acoustic energy and method of making the same
JP2008122215A (ja) * 2006-11-13 2008-05-29 Aisin Seiki Co Ltd 圧電センサ及びその製造方法
JP2009053109A (ja) * 2007-08-28 2009-03-12 Aisin Seiki Co Ltd 圧電フィルムセンサ
JP2009080090A (ja) * 2007-09-05 2009-04-16 Erumekku Denshi Kogyo Kk 圧電センサ
WO2011138903A1 (fr) * 2010-05-06 2011-11-10 株式会社村田製作所 Écran tactile, appareil de saisie dactylographique et procédé de commande pour celui-ci

Also Published As

Publication number Publication date
JPWO2015098723A1 (ja) 2017-03-23
WO2015098723A1 (fr) 2015-07-02

Similar Documents

Publication Publication Date Title
JP6004123B2 (ja) 圧電センサの製造方法
JP5605433B2 (ja) 圧電振動装置
KR101603957B1 (ko) 압전 액추에이터, 압전 진동 장치 및 휴대 단말
CN105190224B (zh) 位移传感器、按压量检测传感器以及触摸式输入装置
CN105917202B (zh) 压电传感器
JP6287166B2 (ja) 圧電センサの検査方法
JP6252678B2 (ja) 圧電センサおよび圧電素子
KR20140099564A (ko) 압전 액추에이터, 압전 진동 장치 및 휴대 단말
JP5950053B2 (ja) 押圧検出センサ
JP6079931B2 (ja) 押圧センサ
JP6052434B2 (ja) 圧電センサの製造方法
JP4822769B2 (ja) 加速度センサ
JP6795097B2 (ja) 押圧センサ及び電子機器
WO2015093356A1 (fr) Procédé de fabrication de capteur piézoélectrique
JP6741609B2 (ja) 圧電アクチュエータ、圧電振動装置および電子機器
KR101579121B1 (ko) 압전 액추에이터, 압전 진동 장치 및 휴대 단말
JP6197962B2 (ja) タッチ式入力装置及びタッチ入力検出方法
WO2015093357A1 (fr) Appareil d'entrée d'actionnements
JP6052431B2 (ja) 圧電センサ
JP5994949B2 (ja) 操作入力装置
JP2017041501A (ja) センサ検査方法およびセンサ検査装置

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20161006

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20161101

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20161114

R150 Certificate of patent or registration of utility model

Ref document number: 6052434

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150