JP6049277B2 - Vibration type driving device - Google Patents

Vibration type driving device Download PDF

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JP6049277B2
JP6049277B2 JP2012062262A JP2012062262A JP6049277B2 JP 6049277 B2 JP6049277 B2 JP 6049277B2 JP 2012062262 A JP2012062262 A JP 2012062262A JP 2012062262 A JP2012062262 A JP 2012062262A JP 6049277 B2 JP6049277 B2 JP 6049277B2
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vibrator
vibration type
holding member
driving device
type driving
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小島　信行
信行 小島
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Canon Inc
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Description

本発明は振動型駆動装置に関する。特に、異なる振動モードの振動を組み合わせることにより超音波振動子と被駆動体を相対移動させる振動型駆動装置に関する。   The present invention relates to a vibration type driving device. In particular, the present invention relates to a vibration type driving device that relatively moves an ultrasonic vibrator and a driven body by combining vibrations of different vibration modes.

超音波振動子に異なる振動モードの振動を発生させてこれらの振動を組み合わせることにより超音波振動子と被駆動体を相対移動させる振動型駆動装置が提案されている。
この振動型駆動装置には超音波振動子と被駆動体との間に摩擦力を発生させるための加圧構造が備えられる。また、発生する出力を増やすために同形状の超音波振動子を二つ用いる振動型駆動装置が、例えば特許文献１等において提案されている。
特許文献１に開示されているような振動型駆動装置では、超音波振動子と被駆動体に押圧力を与えるための一つの加圧ばねと、二つの超音波振動子を保持固定するための４つの支持ばねを備えている。
また、これらのばねが弾性力を発生できるように略箱形状のケース部品でばねや超音波振動子を囲んでいる。
一対の支持ばねで一つの超音波振動子の長手方向両端、即ち相対運動方向に加圧、支持が行われている。二つの超音波振動子それぞれが同様に加圧、支持されている。
このような構成により、振動波駆動装置が出力を発生させるときに生じる反力による超音波振動子のずれやガタつきを抑制している。 There has been proposed a vibration type driving device that generates vibrations of different vibration modes in an ultrasonic vibrator and combines these vibrations to move the ultrasonic vibrator and a driven body relative to each other.
This vibration type driving device is provided with a pressurizing structure for generating a frictional force between the ultrasonic transducer and the driven body. Further, for example, Patent Document 1 proposes a vibration type driving device that uses two ultrasonic vibrators having the same shape in order to increase the generated output.
In the vibration type driving device as disclosed in Patent Document 1, one ultrasonic spring for applying a pressing force to the ultrasonic transducer and the driven body, and two ultrasonic transducers for holding and fixing the ultrasonic transducer Four support springs are provided.
In addition, the spring and the ultrasonic vibrator are surrounded by a substantially box-shaped case component so that these springs can generate elastic force.
A pair of support springs pressurize and support both ends of one ultrasonic transducer in the longitudinal direction, that is, the relative motion direction. Each of the two ultrasonic transducers is similarly pressurized and supported.
With such a configuration, the displacement and backlash of the ultrasonic transducer due to the reaction force generated when the vibration wave driving device generates an output is suppressed.

以上のほか超音波振動子を２つ用いる振動型駆動装置として、例えば図１５、図１６に示す形態を採るものが知られている。
図１５は従来例における振動型駆動装置の斜視図、図１６は同振動型駆動装置の分解斜視図である。
振動型駆動装置１は略各棒状の被駆動体２０を備える。被駆動体２０は超音波振動子と摩擦接触するので例えばステンレス材等の耐摩耗性に優れる材料で形成される。
被駆動体２０に対して図中−Ｚ側に超音波振動子を備える第一の振動子ユニット３−１が配される。
第一の振動子ユニット３−１は振動子ユニット固定部材２４に固定される。被駆動体２０の図中＋Ｚ側に超音波振動子を備える第二の振動子ユニット３−２が配される。第二の振動子ユニット３−２は振動子ユニット固定部材２５に固定される。
振動子ユニット固定部材２４には、略図中Ｚ方向に向けて丸穴形状に形成される二つのガイド穴２４ｂが形成される。
振動子ユニット固定部材２４には、後述する弾性部材２７と組み合わされる二つの突起部２４ｃが形成されている。
同様に振動子ユニット固定部材２５には、略図中Ｚ方向に向けて丸穴形状に形成される二つのガイド穴２５ｂが形成される。振動子ユニット固定部材２５には、後述する弾性部材２７と組み合わされる二つの突起部２５ｃが形成されている。 In addition to the above, as a vibration type driving apparatus using two ultrasonic vibrators, for example, those taking the form shown in FIGS. 15 and 16 are known.
FIG. 15 is a perspective view of a vibration type driving apparatus in a conventional example, and FIG. 16 is an exploded perspective view of the vibration type driving apparatus.
The vibration type driving device 1 includes substantially rod-like driven bodies 20. Since the driven body 20 is in frictional contact with the ultrasonic vibrator, the driven body 20 is formed of a material having excellent wear resistance such as a stainless steel material.
A first transducer unit 3-1 having an ultrasonic transducer is arranged on the −Z side in the drawing with respect to the driven body 20.
The first vibrator unit 3-1 is fixed to the vibrator unit fixing member 24. A second transducer unit 3-2 including an ultrasonic transducer is disposed on the + Z side of the driven body 20 in the drawing. The second vibrator unit 3-2 is fixed to the vibrator unit fixing member 25.
The vibrator unit fixing member 24 is formed with two guide holes 24b formed in a round hole shape in the Z direction in the drawing.
The vibrator unit fixing member 24 is formed with two protrusions 24c combined with an elastic member 27 described later.
Similarly, the vibrator unit fixing member 25 is formed with two guide holes 25b formed in a round hole shape in the Z direction in the drawing. The transducer unit fixing member 25 is formed with two protrusions 25c combined with an elastic member 27 described later.

振動型駆動装置１は伝達部材１６を備える。伝達部材１６は振動型駆動装置１の発生する出力を外部へ伝達する伝達部１６ａ、及び略図中Ｚ方向へ延出する四つの伝達ピン１６ｂを備える。
伝達部材１６の二つの伝達ピン１６ｂは振動子ユニット固定部材２４の二つのガイド穴２４ｂと嵌合されてガイド機構を形成する。
同様に伝達ピン１６ｂと振動子ユニット固定部材２５の二つのガイド穴２５ｂとが嵌合されてガイド機構を形成する。
このように組み合わされることで伝達部材１６に対して振動子ユニット固定部材２４及び２５は図中Ｚ方向にのみ移動可能となる。
振動子ユニット３−１、３−２で被駆動体２０を挟むように対向して配置しており、また、振動子ユニット３−１、３−２は被駆動体２０に対して図中Ｚ方向即ち接触部の押圧方向に相対移動可能である。
振動子ユニット固定部材２４と２５がＺ方向に互いに引っ張り合うように二つの弾性部材２７により弾性的な力が作用している。
このように、前述したガイド機構により二つの超音波振動子とスライダの摺動面とに所望の押圧力を与えることを阻害せず、Ｘ方向への発生力の伝達を行う作用が得られる。
ただし、ここで示したガイド機構は丸棒と丸穴が滑るように嵌合させているために図中Ｘ方向に数〜１０マイクロメートル程度の隙間が生じることは避けられない。 The vibration type driving device 1 includes a transmission member 16. The transmission member 16 includes a transmission portion 16a that transmits the output generated by the vibration type driving device 1 to the outside, and four transmission pins 16b that extend in the schematic Z direction.
The two transmission pins 16b of the transmission member 16 are fitted into the two guide holes 24b of the vibrator unit fixing member 24 to form a guide mechanism.
Similarly, the transmission pin 16b and the two guide holes 25b of the vibrator unit fixing member 25 are fitted to form a guide mechanism.
By being combined in this way, the vibrator unit fixing members 24 and 25 can move only in the Z direction in the figure with respect to the transmission member 16.
The vibrator units 3-1 and 3-2 are disposed so as to sandwich the driven body 20, and the vibrator units 3-1 and 3-2 are Z with respect to the driven body 20 in the drawing. Relative movement is possible in the direction, that is, the pressing direction of the contact portion.
An elastic force is applied by the two elastic members 27 so that the vibrator unit fixing members 24 and 25 are pulled in the Z direction.
As described above, the above-described guide mechanism can transmit the generated force in the X direction without inhibiting the application of a desired pressing force to the two ultrasonic transducers and the sliding surface of the slider.
However, since the guide mechanism shown here is fitted so that the round bar and the round hole slide, it is inevitable that a gap of about several tens of micrometers in the X direction in the figure is generated.

特開２００１−８６７７７号公報（［００１３］等、図１）JP 2001-86777 A ([0013] etc., FIG. 1)

特許文献１により開示されている振動型駆動装置における超音波振動子の支持構造の場合、超音波振動子と被駆動体との間に押圧力を発生させるための加圧ばね、及び超音波振動子を保持固定するための４つの支持ばねの計５つのばね部品を備えている。
加えて、上記振動型駆動装置は略箱形状のケース部品を要している。
このように上記振動型駆動装置では、超音波振動子を支持固定するために複数の部品とスペースが必要となるという課題を有する。
また、図１５及び図１６で説明した振動型駆動装置においては、部品点数や小型化に関しては有効な構成であるが、前述したガイド機構に内在する隙間によるガタつきが生じるために高精度の位置決めや応答性能が得られないという課題を有する。 In the case of the support structure of the ultrasonic vibrator in the vibration type driving device disclosed in Patent Document 1, a pressure spring for generating a pressing force between the ultrasonic vibrator and the driven body, and the ultrasonic vibration A total of five spring parts including four support springs for holding and fixing the child are provided.
In addition, the vibration type driving device requires a substantially box-shaped case part.
As described above, the vibration type driving device has a problem that a plurality of parts and a space are required to support and fix the ultrasonic transducer.
In addition, the vibration type driving apparatus described with reference to FIGS. 15 and 16 is effective in terms of the number of parts and downsizing. However, since the rattling caused by the gaps in the guide mechanism described above occurs, high-accuracy positioning is possible. And the response performance cannot be obtained.

本発明は、上記課題に鑑み、部品点数を増加させず小型化することができ、位置決め精度や応答性能の向上を図ることが可能となる振動型駆動装置の提供を目的とする。   In view of the above problems, an object of the present invention is to provide a vibration type driving device that can be miniaturized without increasing the number of components and that can improve positioning accuracy and response performance.

本発明の振動型駆動装置は、電気−機械エネルギー変換素子と、前記電気−機械エネルギー変換素子が接合された振動板とを有する振動子と、
前記振動子の接触部と加圧接触する摩擦面を備えており該振動子に対して前記摩擦面に沿う相対移動方向に相対駆動する被駆動体と、を有する振動型駆動装置であって、
前記振動子を保持する保持部材と、
前記保持部材を前記摩擦面の法線方向に沿って移動可能にガイドするガイド機構と、
前記摩擦面に対する前記法線方向に沿う押圧力と共に前記相対移動方向に沿う押圧力を、前記保持部材に発生させる加圧手段と、
を有することを特徴とする。 Vibration type driving device of the present invention, electrical - a vibrator to have a vibration plate which mechanical energy conversion element is joined, - a mechanical energy conversion element, the electric
A vibration type driving device comprising: a friction surface that is in pressure contact with a contact portion of the vibrator; and a driven body that relatively drives the vibrator in a relative movement direction along the friction surface .
A holding member for holding the vibrator;
A guide mechanism for guiding the holding member so as to be movable along a normal direction of the friction surface;
A pressing force along the relative movement direction with the pressing force along the normal direction against the friction surface, and pressurizing means for generating the holding member,
It is characterized by having.

本発明によれば、部品点数を増加させず小型化することができ、位置決め精度や応答性能の向上を図ることが可能となる振動型駆動装置を実現することができる。   According to the present invention, it is possible to reduce the size without increasing the number of components, and it is possible to realize a vibration type driving device that can improve positioning accuracy and response performance.

本発明の実施形態１における振動型駆動装置の構成例を示す斜視図。The perspective view which shows the structural example of the vibration type drive device in Embodiment 1 of this invention. 本発明の実施形態１における振動型駆動装置の構成例を示す平面図。The top view which shows the structural example of the vibration type drive device in Embodiment 1 of this invention. 本発明の実施形態１における振動型駆動装置の構成例を示す分解斜視図。1 is an exploded perspective view showing a configuration example of a vibration type driving device in Embodiment 1 of the present invention. 本発明の実施形態１における振動型駆動装置の構成例を示す断面図。Sectional drawing which shows the structural example of the vibration type drive device in Embodiment 1 of this invention. 本発明の実施形態１における振動型駆動装置を用いた駆動機構の斜視図。The perspective view of the drive mechanism using the vibration type drive device in Embodiment 1 of this invention. 本発明の実施形態１における超音波振動子の斜視図。The perspective view of the ultrasonic transducer | vibrator in Embodiment 1 of this invention. 本発明の実施形態１における超音波振動子の振動モードを表わす図。The figure showing the vibration mode of the ultrasonic transducer | vibrator in Embodiment 1 of this invention. 本発明の実施形態１における振動子ユニットを示す斜視図。FIG. 3 is a perspective view showing a vibrator unit according to the first embodiment of the present invention. 本発明の実施形態１における振動型駆動装置の他の形態を示す斜視図。The perspective view which shows the other form of the vibration type drive device in Embodiment 1 of this invention. 本発明の実施形態２における振動型駆動装置の構成例を示す分解斜視図。The disassembled perspective view which shows the structural example of the vibration type drive device in Embodiment 2 of this invention. 本発明の実施形態２における振動型駆動装置の構成例を示す斜視図。The perspective view which shows the structural example of the vibration type drive device in Embodiment 2 of this invention. 本発明の実施形態３における振動型駆動装置の構成例を示す斜視図。The perspective view which shows the structural example of the vibration type drive device in Embodiment 3 of this invention. 本発明の実施形態３における振動型駆動装置の構成例を示す分解斜視図。The disassembled perspective view which shows the structural example of the vibration type drive device in Embodiment 3 of this invention. 本発明の実施形態３における振動型駆動装置の構成例を示す断面図。Sectional drawing which shows the structural example of the vibration type drive device in Embodiment 3 of this invention. 従来例における振動型駆動装置の構成を示す斜視図。The perspective view which shows the structure of the vibration type drive device in a prior art example. 従来例における振動型駆動装置の構成を示す分解斜視図。The disassembled perspective view which shows the structure of the vibration type drive device in a prior art example.

以下、本発明の実施形態について図面を参照しながら詳述する。
（実施形態１）
実施形態１として、振動型駆動装置の構成例について、図１を用いて説明する。
先ず、本実施形態における振動型駆動装置の概要について説明する。
図１に示すように、振動型駆動装置１は略角棒状の被駆動体２０を備える。
被駆動体２０は超音波振動子２と摩擦接触するので、例えばステンレス材等の耐摩耗性に優れる材料で形成される。
被駆動体２０に対して、図中−Ｚ側に第一の振動子ユニット３−１が配される。振動子ユニット３−１は、後述する超音波振動子２の突起部１１ｂが被駆動体２０と当接するように向きが決められている。
第一の振動子ユニット３−１は、振動子ユニット固定部材（第一保持部材）１４に固定される。
また、被駆動体２０の図中＋Ｚ側に、第二の振動子ユニット３−２が配される。振動子ユニット３−２は、後述する超音波振動子２の突起部が被駆動体２０と当接するように向きが決められている。
第二の振動子ユニット３−２は、振動子ユニット固定部材（第二保持部材）１５に固定される。 Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
(Embodiment 1)
As a first embodiment, a configuration example of a vibration type driving device will be described with reference to FIG.
First, the outline | summary of the vibration type drive device in this embodiment is demonstrated.
As shown in FIG. 1, the vibration type driving apparatus 1 includes a driven body 20 having a substantially square bar shape.
Since the driven body 20 is in frictional contact with the ultrasonic vibrator 2, it is formed of a material having excellent wear resistance such as a stainless steel material.
The first vibrator unit 3-1 is arranged on the −Z side in the drawing with respect to the driven body 20. The direction of the transducer unit 3-1 is determined so that a projection 11 b of the ultrasonic transducer 2 described later comes into contact with the driven body 20.
The first vibrator unit 3-1 is fixed to a vibrator unit fixing member (first holding member) 14.
Further, the second vibrator unit 3-2 is arranged on the + Z side of the driven body 20 in the drawing. The orientation of the transducer unit 3-2 is determined so that a projection of the ultrasonic transducer 2 described later comes into contact with the driven body 20.
The second vibrator unit 3-2 is fixed to the vibrator unit fixing member (second holding member) 15.

振動型駆動装置１は伝達部材１６を備える。
伝達部材１６は振動子ユニット固定部材１４及び１５を保持すると共に振動型駆動装置１の発生する出力を外部へ伝達する作用を成す。
さらに、振動子ユニット固定部材１４と１５とに保持される、二つの弾性部材（加圧手段）１７が配される。
本実施形態においては弾性部材１７としてコイルばねを用いている。コイルばねであればサイズに対して発生力が得られるので結果として振動型駆動装置１の小型化を達成し易い。
ただし、弾性部材１７としては板バネ等、他の形態を用いても良い。 The vibration type driving device 1 includes a transmission member 16.
The transmission member 16 holds the vibrator unit fixing members 14 and 15 and transmits the output generated by the vibration type driving device 1 to the outside.
Furthermore, two elastic members (pressurizing means) 17 held by the vibrator unit fixing members 14 and 15 are arranged.
In the present embodiment, a coil spring is used as the elastic member 17. Since the generated force can be obtained with respect to the size if it is a coil spring, it is easy to achieve downsizing of the vibration type driving device 1 as a result.
However, other forms such as a leaf spring may be used as the elastic member 17.

つぎに、本発明の実施形態１における超音波振動子２の構成について、更に説明する。
図６に、実施形態１で用いる超音波振動子２の斜視図を示す。
超音波振動子２は金属材料により略板状に形成される振動板１１、及び電気−機械エネルギー変換素子である圧電素子材料により略矩形形状に形成される圧電素子板１２を接着等により接合され一体化して形成される。
超音波振動子２には圧電素子板１２と外部との電気的な接続を行う不図示のフレキシブル基板等が備えられる。
振動板１１は略中央に位置する矩形状の振動部１１ａ、振動部１１ａの上面における図中Ｘ方向２箇所に形成される突起部１１ｂ、及び振動部１１ａのＸ方向両側に形成される固定部１１ｃを備えている。
振動板１１はＸ方向及びＹ方向に略対称形状である。二つの突起部１１ｂの上端は不図示の被駆動体の摩擦面と加圧接触する箇所である。 Next, the configuration of the ultrasonic transducer 2 according to Embodiment 1 of the present invention will be further described.
FIG. 6 is a perspective view of the ultrasonic transducer 2 used in the first embodiment.
The ultrasonic vibrator 2 is formed by bonding a vibration plate 11 formed in a substantially plate shape with a metal material and a piezoelectric element plate 12 formed in a substantially rectangular shape with a piezoelectric element material which is an electro-mechanical energy conversion element. It is formed integrally.
The ultrasonic transducer 2 is provided with a flexible substrate (not shown) for electrical connection between the piezoelectric element plate 12 and the outside.
The diaphragm 11 includes a rectangular vibrating portion 11a located substantially at the center, protrusions 11b formed at two positions in the X direction on the upper surface of the vibrating portion 11a, and fixed portions formed on both sides in the X direction of the vibrating portion 11a. 11c.
The diaphragm 11 has a substantially symmetrical shape in the X direction and the Y direction. The upper ends of the two protrusions 11b are places where they come into pressure contact with a friction surface of a driven body (not shown).

図７を用いて、以上で説明した超音波振動子２に励起される二つの振動モードについて説明する。
本実施形態では圧電素子板１２に交流電圧を印加して超音波振動子２に二つの面外曲げ振動モード（ＭＯＤＥ−ＡとＭＯＤＥ−Ｂ）を励振する。
ＭＯＤＥ−Ａは超音波振動子２の長手方向である図中Ｘ方向に略平行に二つの節が現れる一時の面外曲げ振動モードで、ＹＺ面に略対称な形状である。
ＭＯＤＥ−Ａの振動により二つの突起部１１ｂには被駆動体と接触する面と垂直な方向（Ｚ方向）に変位する振幅が励振される。ＭＯＤＥ−Ｂは超音波振動子２の図中Ｙ方向に略平行に三箇所の節が現れる支持の面外曲げ振動モードで、ＹＺ面に逆対称且つＸＺ面に略対称な形状である。
ＭＯＤＥ−Ｂの振動によって二つの突起部１１ｂには被駆動体と接触する面と平行な方向（Ｘ方向）に変位する振幅が励振される。
これら二つの振動モードを組み合わせることで接触部である二つの突起部１１ｂの上面に略ＸＺ面内の楕円運動成分が発生し、略Ｘ方向に被駆動体を駆動させる力が発生する。
このように生成可能とされた楕円運動による駆動力によって、超音波振動子２と被駆動体とは略Ｘ方向に相対移動する。 The two vibration modes excited by the ultrasonic transducer 2 described above will be described with reference to FIG.
In this embodiment, an AC voltage is applied to the piezoelectric element plate 12 to excite the ultrasonic transducer 2 in two out-of-plane bending vibration modes (MODE-A and MODE-B).
MODE-A is a temporary out-of-plane bending vibration mode in which two nodes appear approximately parallel to the X direction in the figure, which is the longitudinal direction of the ultrasonic transducer 2, and has a shape that is substantially symmetrical with respect to the YZ plane.
Due to the vibration of MODE-A, the two protrusions 11b are excited with an amplitude that is displaced in a direction perpendicular to the surface in contact with the driven body (Z direction). MODE-B is a supported out-of-plane bending vibration mode in which three nodes appear substantially parallel to the Y direction in the drawing of the ultrasonic transducer 2 and has a shape that is inversely symmetric with respect to the YZ plane and substantially symmetric with respect to the XZ plane.
The amplitude of displacement in the direction parallel to the surface in contact with the driven body (X direction) is excited by the vibration of MODE-B.
By combining these two vibration modes, an elliptical motion component in a substantially XZ plane is generated on the upper surface of the two protrusions 11b that are contact portions, and a force for driving the driven body in a substantially X direction is generated.
The ultrasonic transducer 2 and the driven body are relatively moved in the substantially X direction by the driving force by the elliptical motion that can be generated in this way.

図８に、超音波振動子２を用いた振動子ユニット３の斜視図を示す。
振動子ユニット３は図６等を用いて説明した超音波振動子２と、振動子保持部材１３とから形成される。
振動子保持部材１３は略板状に形成される基部１３ａ、一つの面に突出している二つの振動子固定部１３ｂが形成される。
振動子固定部１３ｂは超音波振動子２の固定部１１ｃと接着や溶接等の手段で接合される。 FIG. 8 is a perspective view of the transducer unit 3 using the ultrasonic transducer 2.
The vibrator unit 3 is formed of the ultrasonic vibrator 2 described with reference to FIG. 6 and the like, and the vibrator holding member 13.
The vibrator holding member 13 is formed with a base portion 13a formed in a substantially plate shape and two vibrator fixing portions 13b protruding on one surface.
The vibrator fixing portion 13b is joined to the fixing portion 11c of the ultrasonic vibrator 2 by means such as adhesion or welding.

図１に戻り、本実施形態における振動型駆動装置１について、更に詳細な説明をする。
図２に示す本実施形態の振動型駆動装置の平面図をＹ方向から見た分解斜視図を、図３に示す。
これら図１〜図３を用いて振動型駆動装置１を説明する。
振動子ユニット固定部材１４には、略図中Ｚ方向に向けて丸穴形状に形成される二つのガイド穴１４ｂが形成される。
振動子ユニット固定部材１４には、弾性部材１７と組み合わされる二つの突起部１４ｃが形成されている。
同様に振動子ユニット固定部材１５には、略図中Ｚ方向に向けて丸穴形状に形成される二つのガイド穴１５ｂが形成される。
振動子ユニット固定部材１５には、弾性部材１７と組み合わされる二つの突起部１５ｃが形成されている。 Returning to FIG. 1, the vibration type driving device 1 in the present embodiment will be described in more detail.
FIG. 3 is an exploded perspective view of the vibration type driving device of the present embodiment shown in FIG. 2 as seen from the Y direction.
The vibration type driving apparatus 1 will be described with reference to FIGS.
The vibrator unit fixing member 14 is formed with two guide holes 14b formed in a round hole shape in the Z direction in the drawing.
The transducer unit fixing member 14 is formed with two protrusions 14 c that are combined with the elastic member 17.
Similarly, the vibrator unit fixing member 15 is formed with two guide holes 15b formed in a round hole shape toward the Z direction in the schematic drawing.
The transducer unit fixing member 15 is formed with two protrusions 15 c that are combined with the elastic member 17.

伝達部材１６は振動型駆動装置１の発生する出力を外部へ伝達する伝達部１６ａ、及び略図中Ｚ方向へ延出する四つの伝達ピン（略円柱状の部材）１６ｂを備える。
伝達部材１６の二つの伝達ピン１６ｂは振動子ユニット固定部材１４の二つのガイド穴（略円筒状の穴）１４ｂと嵌合されてガイド機構を形成する。
同様に、伝達ピン１６ｂと振動子ユニット固定部材１５の二つのガイド穴１５ｂとが嵌合されてガイド機構を形成する。
このように組み合わされることで、伝達部材１６に対して振動子ユニット固定部材１４及び１５は図中Ｚ方向にのみ移動可能となる。
振動子ユニット３−１、３−２で被駆動体２０を挟むように対向して配置しており、また、振動子ユニット３−１、３−２は被駆動体２０に対して図中Ｚ方向、即ち接触部の押圧方向に相対移動することが可能である。
このことから、後述するように加圧力を与えた時にその力が押圧力として作用する。
ただし、ここで示したガイド機構は丸棒と丸穴が滑るように嵌合させているために図中Ｘ方向に数〜１０マイクロメートル程度の隙間が生じることは避けられない。
ガイド機構としてはここで説明した構成に限定されず、二つの振動子ユニット固定部材１４と１５とがＸ方向にガイドされる構成を選択すれば良い。
ただし、一般的な滑りを伴う位置規制機構においては同様の隙間が避けられない。
振動子ユニット固定部材１４の二つの突起部１４ｃと振動子ユニット固定部材１５の二つの突起部１５ｃとを繋ぐように二つの弾性部材１７が配される。
この弾性部材１７により生じる弾性力で二つの振動子ユニット固定部材１４、１５が互いに引張られることで被駆動体２０と二つの超音波振動子２の突起部１１ｂとに押圧力が生じる。 The transmission member 16 includes a transmission portion 16a that transmits the output generated by the vibration type driving device 1 to the outside, and four transmission pins (substantially cylindrical members) 16b that extend in the Z direction in the drawing.
Two transmission pins 16b of the transmission member 16 are fitted into two guide holes (substantially cylindrical holes) 14b of the vibrator unit fixing member 14 to form a guide mechanism.
Similarly, the transmission pin 16b and the two guide holes 15b of the vibrator unit fixing member 15 are fitted to form a guide mechanism.
By being combined in this way, the vibrator unit fixing members 14 and 15 can move only in the Z direction in the figure with respect to the transmission member 16.
The vibrator units 3-1 and 3-2 are disposed so as to sandwich the driven body 20, and the vibrator units 3-1 and 3-2 are Z with respect to the driven body 20 in the drawing. It is possible to move relative to the direction, that is, the pressing direction of the contact portion.
For this reason, as will be described later, when a pressing force is applied, the force acts as a pressing force.
However, since the guide mechanism shown here is fitted so that the round bar and the round hole slide, it is inevitable that a gap of about several tens of micrometers in the X direction in the figure is generated.
The guide mechanism is not limited to the configuration described here, and a configuration in which the two vibrator unit fixing members 14 and 15 are guided in the X direction may be selected.
However, the same gap is unavoidable in a position regulating mechanism with general slip.
Two elastic members 17 are arranged so as to connect the two protrusions 14 c of the vibrator unit fixing member 14 and the two protrusions 15 c of the vibrator unit fixing member 15.
The two vibrator unit fixing members 14 and 15 are pulled by the elastic force generated by the elastic member 17, thereby generating a pressing force on the driven body 20 and the protrusions 11 b of the two ultrasonic vibrators 2.

二つの弾性部材１７は図２に示すようにＺ方向に対してＸＺ面内で角度を持つように配され、弾性部材１７はＸ方向の引張り力を発生する。
図４は伝達部材１６の伝達ピン１６ｂを含むＸＺ面における振動型駆動装置の断面を模式的に表わしたものである。
二つの弾性部材１７により振動子ユニット固定部材１４は＋Ｚ方向の力と共に＋Ｘ方向の力を受ける。
この＋Ｘ方向の力は二つのガイド穴１４ｂと伝達ピン１６ｂとの接触面に作用して、伝達部材１６に対して振動子ユニット固定部材１４が＋Ｘ方向に規制される。
同様に、二つの弾性部材１７により振動子ユニット固定部材１５は−Ｚ方向の力と共に−Ｘ方向の力を受ける。
この−Ｘ方向の力は二つのガイド穴１５ｂと伝達ピン１６ｂとの接触面に作用して、伝達部材１６に対して振動子ユニット固定部材１５が−Ｘ方向に規制される。
このように、弾性部材（加圧手段）１７によって、Ｚ方向（法線方向）に弾性力を発生させることで被駆動体における振動子の接触部との摩擦面に押圧力を与えると共に、ガイド機構に対してＸ方向（相対移動方向）の押圧力を発生させることができる。
この結果、ガイド機構に内在する隙間に起因するガタつきを抑え、二つの振動子ユニット３の駆動力をダイレクトに伝達部材１６に伝えることが可能となり、高精度の位置決め、応答性の高い振動型駆動装置１を実現することができる。
また、本実施形態の振動型駆動装置１は二つの超音波振動子２の発生力が合成されることで高出力を得ることができる。 As shown in FIG. 2, the two elastic members 17 are arranged so as to have an angle in the XZ plane with respect to the Z direction, and the elastic members 17 generate a tensile force in the X direction.
FIG. 4 schematically shows a cross section of the vibration type driving device in the XZ plane including the transmission pin 16 b of the transmission member 16.
The two elastic members 17 cause the vibrator unit fixing member 14 to receive a force in the + X direction as well as a force in the + Z direction.
The force in the + X direction acts on the contact surface between the two guide holes 14b and the transmission pin 16b, and the transducer unit fixing member 14 is restricted in the + X direction with respect to the transmission member 16.
Similarly, the vibrator unit fixing member 15 receives the force in the −X direction together with the force in the −Z direction by the two elastic members 17.
The force in the −X direction acts on the contact surface between the two guide holes 15b and the transmission pin 16b, and the transducer unit fixing member 15 is restricted in the −X direction with respect to the transmission member 16.
In this way, the elastic member (pressurizing means) 17 generates an elastic force in the Z direction (normal direction), thereby applying a pressing force to the friction surface of the driven body with the contact portion of the vibrator and the guide. A pressing force in the X direction (relative movement direction) can be generated with respect to the mechanism.
As a result, it is possible to suppress the play due to the gaps inherent in the guide mechanism, and to directly transmit the driving force of the two vibrator units 3 to the transmission member 16, and the vibration type with high precision positioning and high responsiveness. The drive device 1 can be realized.
Further, the vibration type driving device 1 of the present embodiment can obtain a high output by combining the generated forces of the two ultrasonic transducers 2.

図５に振動型駆動装置１を用いた駆動機構４を示す。
駆動機構４はベース部材３１、二つのガイド保持部材３２，３３、二つのガイド軸３６，３７、稼働部３５を備えている。
ガイド保持部材３２，３３はベース部材３１に固定される。二つのガイド軸３６，３７は各々の両端がガイド保持部材３２，３３に固定される。稼働部３５は二つのガイド軸３６，３７と組み合わされて図中Ｘ方向に移動可能に保持される。振動型駆動装置１の被駆動体２０はその両端をガイド保持部材３２，３３及び二つの被駆動体固定部材３４により固定される。振動型駆動装置１に備えられる伝達部材１６の固定部１６ａは稼働部３５に固定される。
超音波振動子２と被駆動体との相対移動力により稼働部３５が図中Ｘ方向に駆動される。
本発明は直動運動を発生する振動型駆動装置に限定しない。例えば、図９に示すように回転運動が得られる被駆動体２１を用いた回転運動を発生する振動型駆動装置にも適用できる。 FIG. 5 shows a drive mechanism 4 using the vibration type drive device 1.
The drive mechanism 4 includes a base member 31, two guide holding members 32 and 33, two guide shafts 36 and 37, and an operating unit 35.
The guide holding members 32 and 33 are fixed to the base member 31. The two guide shafts 36 and 37 are fixed to the guide holding members 32 and 33 at both ends. The operating unit 35 is combined with the two guide shafts 36 and 37 and is held so as to be movable in the X direction in the figure. Both ends of the driven body 20 of the vibration type driving device 1 are fixed by guide holding members 32 and 33 and two driven body fixing members 34. The fixed portion 16 a of the transmission member 16 provided in the vibration type driving device 1 is fixed to the operating portion 35.
The operating unit 35 is driven in the X direction in the figure by the relative moving force between the ultrasonic transducer 2 and the driven body.
The present invention is not limited to a vibration type driving device that generates a linear motion. For example, the present invention can also be applied to a vibration type driving device that generates a rotational motion using a driven body 21 that can obtain a rotational motion as shown in FIG.

（実施形態２）
実施形態２として、実施形態１のように超音波振動子を二つ用いる形態とは異なり、超音波振動子を一つ用いた振動型駆動装の構成例について、図１０、図１１を用いて説明する。
図１０は本実施形態における振動型駆動装置の分解斜視図であり、図１１は斜視図である。
本実施形態のように、必要な出力に応じて超音波振動子を１個としても、本発明は適用可能である。
なお、本実施形態において、超音波振動子１、振動子ユニット３は実施形態１で説明したものと同一である。
また、振動子ユニット固定部材（第一保持部材）１４、伝達部材１６、被駆動体２０も実施形態１で説明したものと同一である。よってこれらの構成品の説明は省略する。 (Embodiment 2)
As a second embodiment, unlike the first embodiment in which two ultrasonic transducers are used, a configuration example of a vibration type driving apparatus using one ultrasonic transducer will be described with reference to FIGS. 10 and 11. explain.
FIG. 10 is an exploded perspective view of the vibration type driving device in the present embodiment, and FIG. 11 is a perspective view.
As in this embodiment, the present invention can be applied even if only one ultrasonic transducer is used according to the required output.
In the present embodiment, the ultrasonic transducer 1 and the transducer unit 3 are the same as those described in the first embodiment.
The vibrator unit fixing member (first holding member) 14, the transmission member 16, and the driven body 20 are the same as those described in the first embodiment. Therefore, description of these components is omitted.

被駆動体２０を挟んで振動子ユニット３と対向する位置に、ガイドローラ（転動部材）１８が配される。
ガイドローラ１８はガイドローラ保持部材（第二保持部材）１９により自転可能に保持される。
ガイドローラ保持部材１９には、略図中Ｚ方向に向けた丸穴形状に形成される二つのガイド穴１９ｂが形成される。
ガイドローラ保持部材１９には、弾性部材１７と組み合わされる二つの突起部１９ｃが形成されている。
伝達部材１６の二つの伝達ピン１６ｂとガイドローラ保持部材１９の二つのガイド穴１９ｂとが嵌合されてガイド機構を形成する。
このように組み合わされることでガイドローラ１８及びガイドローラ保持部材１９は被駆動体２０に対して図中Ｚ方向に移動可能となる。 A guide roller (rolling member) 18 is disposed at a position facing the vibrator unit 3 with the driven body 20 interposed therebetween.
The guide roller 18 is held rotatably by a guide roller holding member (second holding member) 19.
The guide roller holding member 19 is formed with two guide holes 19b formed in a round hole shape in the Z direction in the schematic drawing.
The guide roller holding member 19 is formed with two protrusions 19 c that are combined with the elastic member 17.
The two transmission pins 16b of the transmission member 16 and the two guide holes 19b of the guide roller holding member 19 are fitted to form a guide mechanism.
By being combined in this way, the guide roller 18 and the guide roller holding member 19 can move in the Z direction in the figure with respect to the driven body 20.

振動子ユニット固定部材１４の二つの突起部１４ｃとガイドローラ保持部材１９の二つの突起部１９ｃとを繋ぐように二つの弾性部材１７が配される。
この弾性部材１７により生じる弾性力で振動子ユニット固定部材１４とガイドローラ保持部材１９が互いに引張られることで被駆動体２０と超音波振動子２の突起部１１ｂとに押圧力が生じる。
二つの弾性部材１７は図２に示すようにＺ方向に対してＸＺ面内で角度を持つように配され、弾性部材１７はＸ方向の引張り力を発生する。
実施形態１と同様に弾性部材１７の発生力を用いて、超音波振動子２と被駆動体２０との押圧力、及びガイド機構への図中Ｘ方向への位置関係を規制する力を発生させることができる。
この結果、振動子ユニット３の駆動力をダイレクトに伝達部材１６に伝えられるので、高精度の位置決め、応答性の高い振動型駆動装置１を実現できる。 Two elastic members 17 are arranged so as to connect the two protrusions 14 c of the vibrator unit fixing member 14 and the two protrusions 19 c of the guide roller holding member 19.
When the vibrator unit fixing member 14 and the guide roller holding member 19 are pulled with each other by the elastic force generated by the elastic member 17, a pressing force is generated between the driven body 20 and the protrusion 11 b of the ultrasonic vibrator 2.
As shown in FIG. 2, the two elastic members 17 are arranged so as to have an angle in the XZ plane with respect to the Z direction, and the elastic members 17 generate a tensile force in the X direction.
As in the first embodiment, the force generated by the elastic member 17 is used to generate a pressing force between the ultrasonic vibrator 2 and the driven body 20 and a force that regulates the positional relationship in the X direction in the drawing to the guide mechanism. Can be made.
As a result, since the driving force of the vibrator unit 3 can be directly transmitted to the transmission member 16, the vibration type driving device 1 with high accuracy positioning and high responsiveness can be realized.

（実施形態３）
実施形態３として、超音波振動子を一つ用いた振動型駆動装の上記実施形態２とは異なる形態の振動型駆動装置の構成例について、図１２、図１３を用いて説明する。
図１２は本実施形態における振動型駆動装置１の斜視図であり、図１３は分解斜視図である。
本実施形態において、超音波振動子１、振動子ユニット３及び被駆動体２０は実施形態１、２で説明したものと同じであるので説明を省略する。
また、振動子ユニット固定部材１５は実施形態１で説明したものと同じであるので説明を省略する。 (Embodiment 3)
As a third embodiment, a configuration example of a vibration-type driving device having a form different from that of the second embodiment of the vibration-type driving apparatus using one ultrasonic transducer will be described with reference to FIGS.
FIG. 12 is a perspective view of the vibration type driving apparatus 1 in the present embodiment, and FIG. 13 is an exploded perspective view.
In the present embodiment, since the ultrasonic transducer 1, the transducer unit 3, and the driven body 20 are the same as those described in the first and second embodiments, description thereof is omitted.
Further, since the vibrator unit fixing member 15 is the same as that described in the first embodiment, the description thereof is omitted.

振動型駆動装置１は振動子ユニット３−１を固定する振動子ユニット固定部材２２を備える。
振動子ユニット固定部材２２は振動子ユニット３−１を固定する固定部２２ａ、振動型駆動装置１の発生する出力を外部へ伝達する伝達部２２ｃ及び略図中Ｚ方向へ延出する二つの伝達ピン２２ｂを備える。
更に二つの突起部２２ｄを備える。
振動子ユニット３−１に備えられる超音波振動子２の発生力は、振動子ユニット固定部材２２を介して直接外部に伝達することができる。
振動子ユニット固定部材２２の二つの伝達ピン２２ｂは振動子ユニット固定部材１５のガイド穴１５ｂと嵌合されて互いにＺ方向に変位可能に組み合わされる。振動子ユニット固定部材１５の二つの突起部１５ｃと振動子ユニット固定部材２２の二つの突起部２２ｄとを繋ぐように二つの弾性部材１７が配される。
この弾性部材１７により生じる弾性力で二つの振動子ユニット固定部材１５、２２が互いに引っ張られることで被駆動体２０と二つの超音波振動子２の突起部１１ｂとに押圧力が生じる。
二つの弾性部材１７は図２に示すようにＺ方向に対してＸＺ面内で角度を持つように配され、弾性部材１７はＸ方向の引張り力を発生する。 The vibration type driving device 1 includes a vibrator unit fixing member 22 that fixes the vibrator unit 3-1.
The vibrator unit fixing member 22 includes a fixing part 22a for fixing the vibrator unit 3-1, a transmission part 22c for transmitting the output generated by the vibration type driving device 1 to the outside, and two transmission pins extending in the Z direction in the drawing. 22b.
Further, two protrusions 22d are provided.
The generated force of the ultrasonic vibrator 2 provided in the vibrator unit 3-1 can be directly transmitted to the outside through the vibrator unit fixing member 22.
The two transmission pins 22b of the vibrator unit fixing member 22 are fitted into the guide holes 15b of the vibrator unit fixing member 15 and are combined so as to be displaceable in the Z direction. Two elastic members 17 are arranged so as to connect the two protrusions 15 c of the vibrator unit fixing member 15 and the two protrusions 22 d of the vibrator unit fixing member 22.
When the two vibrator unit fixing members 15 and 22 are pulled with each other by the elastic force generated by the elastic member 17, a pressing force is generated between the driven body 20 and the protrusions 11 b of the two ultrasonic vibrators 2.
As shown in FIG. 2, the two elastic members 17 are arranged so as to have an angle in the XZ plane with respect to the Z direction, and the elastic members 17 generate a tensile force in the X direction.

図１４は、振動子ユニット固定部材２２の伝達ピン２２ｂを含むＸＺ面における振動型駆動装置の断面を模式的に表わしたものである。
二つの弾性部材１７により振動子ユニット固定部材２２は＋Ｚ方向の力と共に＋Ｘ方向の力を受け、振動子ユニット固定部材１５は−Ｚ方向の力と共に−Ｘ方向の力を受ける。
これらＸ方向の力は二つのガイド穴１５ｂと伝達ピン２２ｂとの接触面に作用して、振動子ユニット固定部材２２に対して振動子ユニット固定部材１５が−Ｘ方向に規制される。
この結果、振動子ユニット３−２の駆動力がダイレクトに振動子ユニット固定部材２２に伝えられる。
前述のように振動子ユニット３−１の駆動力はダイレクトに振動子ユニット固定部材２２に伝えられるので、二つの振動子ユニット３−、３−２の発生力をダイレクトに取り出すことができる。
この結果、高精度の位置決め、応答性の高い振動型駆動装置１を実現できる。
以上で説明した本発明の各実施形態の構成によれば、振動型駆動装置における超音波振動子の保持と出力伝達を行うガイド機構に内在する隙間に起因するガタつきを、部品点数を増加させることなく抑えることが可能となる。
これらにより、簡易で省スペースであると共に優れた位置決め精度や応答性能が得られる振動型駆動装置が実現できる。 FIG. 14 schematically shows a cross section of the vibration type driving device on the XZ plane including the transmission pin 22 b of the vibrator unit fixing member 22.
The two elastic members 17 cause the vibrator unit fixing member 22 to receive a force in the + X direction together with a force in the + Z direction, and the vibrator unit fixing member 15 receives a force in the −X direction together with a force in the −Z direction.
These forces in the X direction act on the contact surface between the two guide holes 15b and the transmission pin 22b, and the vibrator unit fixing member 15 is restricted in the -X direction with respect to the vibrator unit fixing member 22.
As a result, the driving force of the vibrator unit 3-2 is directly transmitted to the vibrator unit fixing member 22.
As described above, since the driving force of the vibrator unit 3-1 is directly transmitted to the vibrator unit fixing member 22, the generated force of the two vibrator units 3- and 3-2 can be directly taken out.
As a result, it is possible to realize the vibration type driving device 1 with high precision positioning and high responsiveness.
According to the configuration of each embodiment of the present invention described above, the backlash caused by the gap inherent in the guide mechanism for holding the ultrasonic transducer and transmitting the output in the vibration type driving device is increased. It becomes possible to suppress without it.
As a result, it is possible to realize a vibration type driving device that is simple and space-saving and that provides excellent positioning accuracy and response performance.

１：振動型駆動装置
２：超音波振動子
３：振動子ユニット
４：駆動機構
１１：振動板
１２：圧電素子板
１３：振動子保持部材
１４：振動子ユニット固定部材（第一保持部材）
１５：振動子ユニット固定部材（第二保持部材）
１６：伝達部材
１７：弾性部材
１８：ガイドローラ
１９：ガイドローラ保持部材
２０：被駆動体
２１：被駆動体
２２：振動子ユニット固定部材 1: Vibration type drive device 2: Ultrasonic vibrator 3: Vibrator unit 4: Drive mechanism 11: Vibration plate 12: Piezoelectric element plate 13: Vibrator holding member 14: Vibrator unit fixing member (first holding member)
15: Vibrator unit fixing member (second holding member)
16: transmission member 17: elastic member 18: guide roller 19: guide roller holding member 20: driven member 21: driven member 22: vibrator unit fixing member

Claims (5)

電気−機械エネルギー変換素子と、前記電気−機械エネルギー変換素子が接合された振動板とを有する振動子と、
前記振動子の接触部と加圧接触する摩擦面を備えており該振動子に対して前記摩擦面に沿う相対移動方向に相対駆動する被駆動体と、を有する振動型駆動装置であって、前記振動子を保持する保持部材と、
前記保持部材を前記摩擦面の法線方向に沿って移動可能にガイドするガイド機構と、前記摩擦面に対する前記法線方向に沿う押圧力と共に前記相対移動方向に沿う押圧力を、前記保持部材に発生させる加圧手段と、
を有することを特徴とする振動型駆動装置。 A vibrator having an electro-mechanical energy conversion element and a diaphragm to which the electro-mechanical energy conversion element is bonded;
A vibration type driving device comprising: a friction surface that is in pressure contact with a contact portion of the vibrator; and a driven body that relatively drives the vibrator in a relative movement direction along the friction surface. A holding member for holding the vibrator;
A guide mechanism that guides the holding member so as to be movable along a normal direction of the friction surface, and a pressing force along the relative movement direction together with a pressing force along the normal direction with respect to the friction surface. Pressurizing means to generate;
A vibration type driving device comprising: 前記振動型駆動装置は、前記被駆動体を挟んで対向するように配置された第一の振動子と第二の振動子を有し、
前記二つの振動子を保持する保持部材は、前記第一の振動子を保持する第一保持部材と、前記第二の振動子を保持する第二保持部材とによって構成され、
前記第一保持部材と前記第二保持部材とが、前記ガイド機構によって前記摩擦面の法線方向に移動可能にガイドされ、
前記加圧手段によって、弾性力を発生させることで前記被駆動体における前記振動子の接触部との前記摩擦面に前記法線方向に沿う押圧力を与えると共に、前記ガイド機構に対して前記相対移動方向に沿う押圧力を発生させることを特徴とする請求項１に記載の振動型駆動装置。 The vibration type driving device has a first vibrator and a second vibrator arranged to face each other with the driven body interposed therebetween,
The holding member that holds the two vibrators includes a first holding member that holds the first vibrator and a second holding member that holds the second vibrator.
The first holding member and the second holding member are guided by the guide mechanism so as to be movable in the normal direction of the friction surface,
The pressing means generates an elastic force to apply a pressing force along the normal direction to the friction surface of the driven body with the contact portion of the vibrator, and the relative force to the guide mechanism. 2. The vibration type driving device according to claim 1, wherein a pressing force along the moving direction is generated. 前記振動子は、前記被駆動体を挟んで対向するように配置された第一の振動子と転動部材によって構成されると共に、
前記振動子を保持する保持部材は、前記第一の振動子を保持する第一保持部材と、前記転動部材を保持する第二保持部材とによって構成され、
前記第一保持部材と前記第二保持部材とが、前記ガイド機構によって前記摩擦面の法線方向に移動可能にガイドされ、
前記加圧手段によって、弾性力を発生させることで前記被駆動体における前記振動子の接触部との前記摩擦面に前記法線方向に沿う押圧力を与えると共に、前記ガイド機構に対して前記相対移動方向に沿う押圧力を発生させることを特徴とする請求項１に記載の振動型駆動装置。 The vibrator is constituted by a first vibrator and a rolling member arranged to face each other with the driven body interposed therebetween,
The holding member that holds the vibrator includes a first holding member that holds the first vibrator and a second holding member that holds the rolling member,
The first holding member and the second holding member are guided by the guide mechanism so as to be movable in the normal direction of the friction surface,
The pressing means generates an elastic force to apply a pressing force along the normal direction to the friction surface of the driven body with the contact portion of the vibrator, and the relative force to the guide mechanism. 2. The vibration type driving device according to claim 1, wherein a pressing force along the moving direction is generated. 前記ガイド機構は、略円筒状の穴と略円柱状の部材とによる嵌め合いを含み構成されていることを特徴とする請求項１から３のいずれか１項に記載の振動型駆動装置。   4. The vibration type driving device according to claim 1, wherein the guide mechanism includes a fit between a substantially cylindrical hole and a substantially columnar member. 5. 前記加圧手段は、前記法線方向に対して傾斜して配置され引っ張り力を発生するコイルばねで構成されていることを特徴とする請求項１から４のいずれか１項に記載の振動型駆動装置。 5. The vibration type according to claim 1, wherein the pressurizing unit is configured by a coil spring that is inclined with respect to the normal direction and generates a tensile force. 6. Drive device.
JP2012062262A 2012-03-19 2012-03-19 Vibration type driving device Expired - Fee Related JP6049277B2 (en)

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