JP4645229B2 - Drive device - Google Patents

Description

  The present invention relates to a drive device that uses vibration of a vibrating body.

  There is a drive device that vibrates a vibrating body by applying an AC voltage to a piezoelectric element or the like, and drives the driven body with a frictional force by repeating contact and separation with the vibrating body. As a technique related to such a driving apparatus, there is a technique described in Patent Document 1, for example.

JP-A-9-289785

  In the above technique, the driven body driven by the ultrasonic vibrator (vibrating body) is configured in a state where the sliding plate and the sliding plate holding member are joined. In other words, a sliding plate holding member that functions as a damping material is provided on the back side of the sliding plate driven by the vibrating body. According to such a configuration, the sliding plate holding member functions as a damping material, and a certain damping effect is exhibited.

  However, in the above technique, there is a sliding plate holding member at a position corresponding to the vibrating body on the back side of the sliding plate, and the pressing force applied from the vibrating body to the sliding plate is the sliding plate holding member (damping member). Since the material is absorbed by the elastic force of the material, there is a problem that the driving force is reduced.

  SUMMARY OF THE INVENTION An object of the present invention is to provide a drive device having high drive efficiency while suppressing adverse effects caused by vibration of a vibrating body.

In order to solve the above-mentioned problem, the invention of claim 1 is a driving device, comprising: a vibrating body that vibrates based on a high-frequency signal; and a driven body that is driven in response to vibration by the vibrating body, The driven body includes a contact member driven by a frictional force generated between the vibrating body and the contact with the vibrating body while repeating the contact with the vibrating body and the separation from the vibrating body according to the vibration operation of the vibrating body, and the contact A damping member that suppresses vibration of the member, and the damping member excludes both the contact region of the contact member with the vibrating body and the region opposite to the contact region of the contact member. in portions, said being connected to the contact member, further, the damping member, the side of the contact surface between the vibration member in the contact member, and wherein Rukoto connected to said contact member To do.

According to a second aspect of the present invention, in the driving device according to the first aspect of the present invention, a support member provided on the opposite side of the driven body with respect to the driven body and supporting a force applied from the vibrating body, Is further provided.
According to a third aspect of the present invention, in the drive device according to the first or second aspect of the present invention, the contact member has a cylindrical shape, and the center of the cylindrical shape according to the frictional contact with the vibrating body. It is provided so as to rotate about an axis, the vibration damping member is provided so as to form the cylindrical end surface, and the vibrating body is provided at a position surrounded by the cylindrical surface of the contact member. It is characterized by that.

According to a fourth aspect of the present invention , there is provided a driving apparatus comprising: a vibrating body that vibrates based on a high-frequency signal; and a driven body that is driven in response to vibration by the vibrating body, wherein the driven body includes the vibration A contact member that is driven by a frictional force generated between the vibrating body and the contact member while repeating contact with and separating from the vibrating body in accordance with a vibration operation of the body, and a control that suppresses vibration of the contact member. A vibration member, and the vibration damping member is a portion excluding both the contact region of the contact member with the vibrating body and the region opposite to the contact region of the contact member. Further, the vibration damping member is connected to the contact member at a side in a longitudinal direction of the contact member.

A fifth aspect of the present invention, in the driving device according to any one of claims 1 to invention of claim 4, wherein the damping member may be formed of different types of material and the contact member.

According to a sixth aspect of the present invention, in the drive device according to any one of the first to fifth aspects of the present invention, the damping member further includes a transmission means for transmitting the driving force of the vibrating body to a predetermined separate member. It is characterized by that.

According to the first to sixth aspects of the present invention, the vibration damping member is connected to the contact member at a portion excluding both the contact region with the vibrating body and the opposite surface region of the contact member. Therefore, it is possible to realize a high vibration damping function and high driving efficiency.

In particular, according to the second aspect of the present invention, since the force applied from the vibrating body is supported by the support member, a larger driving force can be obtained.

  According to the invention described in claim 4, since the damping member is connected to the contact member at the side in the longitudinal direction of the contact member, a higher damping effect can be obtained.

Furthermore, according to the invention described in claim 3 , since the vibrating body is provided at a position surrounded by the cylindrical surface of the contact member, the size can be reduced.

According to the sixth aspect of the present invention, the vibration damping member further includes a transmission means for transmitting the driving force generated by the vibrating body to a predetermined separate member, so that the transmission means is separate from the driven body. The size can be reduced as compared with the case of providing.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

<1. First Embodiment>
1 and 2 are views showing a vibration actuator 1A (drive device) according to the first embodiment of the present invention. FIG. 1 is a front view of the vibration actuator 1A, and FIG. 2 is a side view of the vibration actuator 1A. FIG. 3 is a front view showing the vibrating body 10 used in the vibration actuator 1A. 4 is a top view showing a driven body 30A used in the vibration actuator 1A, and FIG. 5 is a cross-sectional view (in the II cross section of FIG. 4) of the driven body 30A. In each drawing, for the sake of convenience, directions are indicated using a common orthogonal XYZ coordinate system.

  As shown in FIGS. 1 and 2, the vibration actuator 1 </ b> A includes a vibrating body 10 as a driving source, a driven body 30 </ b> A driven by the vibrating body 10, a pressure member 40, and the driven body from the vibrating body 10. A support member (load support member) 50 that supports a force (load) applied to 30A and a base plate 60 are provided. The vibrating body 10, the driven body 30A, and the support member 50 are arranged in this order in the Z direction of FIG.

  The vibrating body 10 is configured as a truss-type vibration generator using two piezoelectric elements. Specifically, as illustrated in FIG. 3, the vibrating body 10 includes two piezoelectric elements 11 and 12, a chip member 13, and a base member 14. The vibrating body 10 vibrates in response to application of a high frequency voltage (high frequency signal).

  The two piezoelectric elements 11 and 12 are arranged so as to intersect at right angles, and the end portions on the intersecting side of the piezoelectric elements 11 and 12 are joined to the chip member 13. The other ends of the piezoelectric elements 11 and 12 are joined to the base member 14. The tip member 13 is preferably formed of a material (for example, a metal material such as a cemented carbide) that can stably obtain a high coefficient of friction and obtain high wear resistance. The base member 14 is preferably formed of a material that is easy to manufacture and has high strength (for example, a metal material such as stainless steel). The piezoelectric elements 11 and 12 and the members 13 and 14 are bonded using an adhesive. As the adhesive, it is preferable to use an epoxy resin adhesive excellent in adhesive strength.

  The piezoelectric element 11 is a laminated piezoelectric element, and has a structure in which a plurality of ceramic thin plates having piezoelectric characteristics and electrodes are alternately laminated. The piezoelectric element 11 is a displacement element that expands and contracts in the stacking direction according to a change in applied voltage. The piezoelectric element 12 has the same configuration as that of the piezoelectric element 11, and expands and contracts in the stacking direction in accordance with the change in applied voltage. Specifically, when a voltage with a predetermined sign is applied to the piezoelectric element 11, the piezoelectric element 11 expands, and when a voltage with an opposite sign is applied to the piezoelectric element 11, the piezoelectric element 11 contracts. And if an alternating voltage is applied, the piezoelectric element 11 will repeat an expansion-contraction according to the period of the said alternating voltage. The same applies to the piezoelectric element 12. By applying such an alternating voltage, the vibrating body 10 can be vibrated.

  FIG. 6 is a diagram illustrating a driving operation by the vibrating body 10. As shown in FIG. 6, the chip member 13 of the vibrating body 10 can be elliptically moved by driving the piezoelectric elements 11 and 12 of the vibrating body 10 with an alternating voltage having a phase difference. The driven body 30A is driven using the driving force generated by the elliptical motion. In addition, the shape of the elliptical orbit can be controlled by changing the phase difference to various angles. For example, by setting the phase difference to 90 degrees (deg) (see FIG. 6B) for the two piezoelectric elements 11 and 12, and applying a high-frequency AC voltage of the same frequency, the shape of the elliptical orbit The elliptical orbit can be made elongated by changing the phase difference to 60 degrees (see FIG. 6A) or 120 degrees (see FIG. 6C). Is possible.

  The vibrating body 10 drives the driven body 30A using a vibrating operation on a plane including such an elliptical orbit (also referred to as a vibrating plane).

  As shown in FIGS. 4 and 5, the driven body 30A has a thin plate-like elliptical shape, and is formed as a rocking body that rocks around a predetermined rotation axis Az. Specifically, a through hole H is provided in the center of the driven body 30A, and a shaft member 29 (FIG. 2) fixed to the main body side of the vibration actuator 1A passes through the through hole H. The driven body 30 </ b> A can rotate around the shaft member 29.

  The driven body 30 </ b> A includes a contact member 31 and a vibration damping member 32.

  The contact member 31 is a member that contacts the vibrating body 10, and the driving force from the vibrating body 10 is directly transmitted to the contact member 31. Specifically, the contact member 31 is driven by a frictional force generated between the contact member 31 and the vibration body 10 while repeating contact (collision) with the vibration body 10 and separation from the vibration body 10 according to the vibration operation of the vibration body 10. Is done. In other words, the vibrating body 10 drives the contact member 31 by repeating a minute movement operation with frictional contact on the surface of the contact member 31. The damping member 32 is bonded to the contact member 31 and has a function of suppressing vibration of the contact member 31.

  The contact member 31 is made of, for example, metal (stainless steel or aluminum). In order to prevent wear due to contact with the tip member 13, the surface of the contact member 31 is preferably subjected to surface hardening treatment. For example, as the contact member 31, a material obtained by subjecting an iron-based material such as stainless steel to quenching treatment or nitriding treatment is used. Alternatively, the contact member 31 may be made of alumite-treated aluminum or a metal surface subjected to wear-resistant coating treatment with ceramic or the like. The contact member 31 may be made of a material other than metal, for example, ceramic (alumina ceramic or zirconia ceramic). If ceramic is used, the weight can be reduced, and high rigidity and high wear resistance can be obtained.

  The damping member 32 is preferably formed of a material different from the contact member 31. By using a material having a vibration propagation speed different from that of the contact member 31 as the vibration damping member 32, vibration transmission can be suppressed, and the vibration damping member 32 can be prevented from vibrating in synchronization with the contact member 31. Specifically, as the vibration damping member 32, a metal or ceramic of a different type from the contact member 31 is used. Alternatively, a polymer material such as PC (polycarbonate) and ABS (acrylonitrile butadiene styrene resin) may be used as the damping member 32. In addition, damping materials (such as Mn—Cu (manganese-copper) alloy, Fe—Cr (iron-chromium) alloy, Zn—Al (zinc-aluminum) alloy) having damping properties on the material itself are controlled. It may be used as the vibration member 32.

  As shown in FIG. 2, the damping member 32 is connected to the contact member 31 on the side of the contact surface of the contact member 31 with the vibrating body 10. Further, as shown in FIG. 4, the damping member 32 has a contact member at an edge including the side in the longitudinal direction of the contact member 31 (here, the portion excluding the side on the outer peripheral side) (the broken line portion in FIG. 4). It is fixed in a state in contact with 31. By virtue of this edge portion of the contact member 31 being brought into contact with the vibration damping member 32 and restrained, vibration (particularly resonance) of the contact member 31 can be suppressed. When the vibration mode of the contact member 31 (whether the mode is the primary mode or the secondary mode, etc.) is known, the contact member 31 is controlled only by the “belly” portion in the vibration mode. A high vibration suppressing effect can also be obtained by fixing to 32.

  Here, the material of the contact member 31 is metal (specifically, stainless steel), and the material of the damping member 32 is resin (specifically, PC (polycarbonate)). 32 is assumed to be formed as an integrally molded part. Further, by providing a meshing portion (stepped portion) BP (FIG. 5) at the joint between the contact member 31 and the damping member 32, the contact member 31 and the damping member 32 are firmly fixed so as not to be separated. ing. Moreover, in order to fix both more firmly, as shown in FIG. 4, it is preferable to make the junction part of the contact member 31 into the shape which entered the comb-tooth shape in the top view. According to this, the total length of the joint portion can be increased, and the contact member 31 can be more firmly restrained by the vibration damping member 32, so that a high vibration damping effect can be obtained.

  The contact member 31 is provided at a position away from the rotation center of the driven body 30A, that is, at the outer peripheral portion. The contact member 31 is covered and fixed by the damping member 32 at the comb-like outer edge portion 31a, and the surface of the contact member 31 is exposed to the space at the exposed portion 31b. When the exposed portion 31b of the contact member 31 and the tip member 13 of the vibrating body 10 are in frictional contact, the driving force from the vibrating body 10 is transmitted to the driven body 30A. The radial width Wr of the exposed portion 31b has a size obtained by adding a slight amount of width ΔW to the contact width Wt (FIG. 2) with the chip member 13 (Wr = Wt + ΔW). The circumferential length Lc has a size obtained by adding a slight amount of length ΔL to the arc length Lt corresponding to a predetermined driving range (angle) θ in the swing motion (Lc = Lt + ΔL). . FIG. 4 illustrates a case where the drive range (angle) θ is about 60 degrees.

  Again referring to FIG. 1 and FIG. As shown in these drawings, a pressing member 40 is provided on the opposite side (−Z side) from the driven body 30 </ b> A with respect to the vibrating body 10. The pressure member 40 is made of an elastic member such as a coil spring, for example, and one end thereof is fixed to the base member 14 of the vibrating body 10 and the other end is fixed to the base plate 60. The vibrating body 10 is lightly pressed against the driven body 30A by the urging force of the pressing member 40. The biasing force by the pressure member 40 is a relatively small force, and the vibration cycle of the vibrating body 10 is so short that the expansion and contraction operation of the pressure member 40 cannot follow (that is, a very high frequency). The tip member 13 of the vibrating body 10 can repeat contact and separation against the driven body 30 </ b> A against the urging force of the pressing member 40. Therefore, it is possible to perform a driving operation as will be described later.

  Further, the support member 50 is provided on the opposite side (+ Z side) to the driven body 30A so as to sandwich the driven body 30A with the tip member 13 of the vibrating body 10. Yes. The support member 50 has a roller 51. The roller 51 is rotatably supported by an elongated cylindrical shaft member 61 (FIG. 2) extending from the base plate 60 in the −Y direction. The roller 51 is restricted from moving in the axis Ay direction (Y direction) by a pressing member (not shown) and is configured not to drop off from the shaft member 61.

  As shown in FIGS. 1 and 2, the support member 50 (roller 51) includes a contact surface (lower surface in the drawing) with the chip member 13 out of both main surfaces of the thin plate-like driven body 30A (contact member 31). Is in contact with the driven body 30A at a position immediately above the contact position between the chip member 13 and the driven body 30A on the opposite surface (upper surface in the figure). As described above, by providing the support member 50 at a position immediately above the chip member 13 (in other words, a position facing the chip member 13 with the driven body 30A interposed therebetween), the Z-direction generated by the vibration of the vibrating body 10 is provided. Power can be reliably supported. As a result, a large driving force can be obtained.

  The roller 51 is preferably made of a material that reduces friction with the driven body 30A. Specifically, among resin materials (for example, POM (polyacetal)), it is preferable to use a material having high sliding performance (smoothly speaking). For example, it is preferable to use a material in which an additive such as fluorine is blended to improve the sliding performance. Further, the roller 51 is preferably made of a material that is small in deformation due to the load so that the load can be firmly supported even when receiving a large force. The roller 51 only needs to be configured to exhibit a function of supporting the load applied by the vibrating body 10, and may be formed of a metal material instead of a resin material.

  7 to 9 are conceptual diagrams illustrating driving states of the driven body 30 </ b> A by the vibrating body 10. FIG. 7 shows an ideal driving state, and FIGS. 8 and 9 each show a driving state when a sufficient driving force cannot be obtained.

  As shown in FIG. 7, in the ideal state, first, when the tip member 13 exists above the elliptical orbit PB, the contact starts when the tip member 13 of the vibrating body 10 is in frictional contact with the driven body 30A. By moving from the position to the contact end position, the driving force in the predetermined direction (X direction in FIG. 2) DX is transmitted (FIG. 7A). When the tip member 13 exists below the elliptical orbit PB, the tip member 13 returns to the contact start position side with the tip member 13 being away from the driven body 30A (FIG. 7B). Thereafter, by repeating the same operation, the driven body 30A is driven in the predetermined direction DX (X direction) by the frictional force generated between the tip member 13 and the contact member 31. That is, the contact member 31 is driven by a frictional force generated between the contact member 31 and the vibration body 10 while repeating contact with and separation from the vibration body 10 according to the vibration operation of the vibration body 10.

  Ideally, it is preferable that the relative displacement between the tip member 13 and the driven body 30A does not occur during the period in which the tip member 13 and the driven body 30A are in contact with each other. At least one of them may cause a relative displacement (that is, a sliding operation or a sliding operation). As described above, the contact member 31 (and 33, 35, 37, etc., which will be described later) slides between the vibrating body 10, and therefore the contact member 31 is also referred to as a “sliding member”.

  FIG. 8 shows a virtual state in which the driving frequency of the vibrating body 10 and the natural frequency of the driven body 30A match and both resonate. In this case, the driven body 30A vibrates in synchronization with the tip member 13 and deforms in the vertical direction (Z direction). Therefore, as shown in FIG. 8B, even when the tip member 13 exists below the elliptical orbit PB, the tip member 13 cannot be separated from the driven body 30A, and this time, the force in the opposite direction Is transmitted from the tip member 13 to the driven body 30A. In short, the brakes are applied.

  FIG. 9 shows a virtual case where the driven body 30 </ b> A vibrates at a frequency lower than the driving frequency of the vibrating body 10. In this case, in the driven body 30A, both (vibrating body 10 and driven body 30A) vibrate at different periods, and therefore the timing of contact and separation between the two becomes irregular. For this reason, a state (see FIG. 9C) in which the tip member 13 cannot contact the driven body 30A occurs at the timing when the chip member 13 should contact the driven body 30A (see FIG. 9C), and the driving force is not sufficiently transmitted. Will occur.

  In the actual driven body 30A, the generation of the driving state as shown in FIGS. 8 and 9 is suppressed, and a driving state close to the ideal driving state as shown in FIG. 7 can be realized.

  10 and 11 are diagrams showing measurement results such as drive performance of the vibration actuator 1A according to the first embodiment. FIG. 10 is a diagram illustrating a vibration state of the driven body 30A. In FIG. 10, the measurement result (lower side) of the vibration (displacement) in the Z direction of the contact member 31 in the vicinity of the tip member 13 when a driving voltage of a predetermined period is applied to the vibrating body 10 is measured. Curve). In FIG. 10, the driving voltage (upper curve) of the vibrating body 10 is also shown. FIG. 11 is a diagram showing measurement results regarding the relationship between the thrust (driving force) transmitted to the driven body 30A and the moving speed of the driven body 30A. In FIG. 11, the speed when the thrust is zero, that is, the driving speed in the no-load state (no-load speed), and the thrust (driving force) when the speed is zero, that is, the starting thrust are shown.

  12 and 13 are diagrams showing measurement results such as drive performance of a vibration actuator 900A (described below) according to a comparative example (also referred to as a first comparative example). Further, FIGS. 14 and 15 are diagrams showing measurement results such as drive performance of a vibration actuator 900B (described below) according to a comparative example (also referred to as a second comparative example). Specifically, FIG. 12 and FIG. 14 are diagrams showing the vibration state of the driven body as in FIG. 10, and FIG. 13 and FIG. 15 are the no-load speed and the starting thrust, respectively, as in FIG. FIG.

  The vibration actuator 900A according to the first comparative example has the same configuration as that of the vibration actuator 1A according to the first embodiment, but is replaced with a driven body 30A (see FIGS. 4 and 5). It is different from the vibration actuator 1A in that the drive body 930A is provided. 16 and 17 are a top view and a cross-sectional view, respectively, showing the configuration of the driven body 930A. As shown in these drawings, the driven body 930A is composed of a single stainless steel plate.

  In the first comparative example, as shown in FIG. 12, a large vibration having a frequency lower than the drive frequency is generated. That is, the state described with reference to FIG. 9 has occurred, the timing of contact and separation between the tip member 13 and the driven body (in this case, 930A) becomes irregular, and the driving state becomes unstable. It has become. Comparing FIG. 13 and FIG. 11, it can be seen that only a relatively small thrust is obtained. In the first comparative example, abnormal noise is also large.

  The vibration actuator 900B according to the second comparative example has the same configuration as that of the vibration actuator 1A according to the first embodiment, but is replaced with a driven body 30A (see FIGS. 4 and 5). It differs from the vibration actuator 1A in that it includes a drive body 930B. FIG. 18 is a cross-sectional view showing the configuration of the driven body 930B. The top view of the driven body 930B is the same as FIG. As shown in FIGS. 16 and 18, the driven body 930 </ b> B is configured in a state in which a viscoelastic resin member 93 is sandwiched between one stainless steel plate 91 and one aluminum member 92. ing. Such a sandwich structure provides a damping function.

  In such a second comparative example, compared with the first comparative example, large vibrations at a low frequency are suppressed, but the amplitude in the driving cycle of the driven body 30A is sufficiently suppressed. I can't say that. Further, comparing FIG. 15 with FIG. 11, it can be seen that only a relatively small thrust is obtained.

  On the other hand, as shown in FIG. 10, in the vibration actuator 1 </ b> A according to the first embodiment, the low-frequency vibration is suppressed as compared with the first and second comparative examples (see FIGS. 12 and 14). In addition, the amplitude of the driven body 30A in the driving cycle (high frequency) is suppressed. Further, referring to FIG. 11 while comparing with FIGS. 13 and 15, it can be seen that a larger thrust can be obtained as compared with the first and second comparative examples.

  Compared to the first comparative example, an aluminum member 92 and a resin member 93 are provided in the second comparative example. It can be considered that a large vibration at a low frequency can be suppressed because the vibration control effect by the aluminum member 92 and the resin member 93 is obtained.

  However, also in the second comparative example, the amplitude in the driving cycle is not sufficiently suppressed. This is presumably because the elasticity of the driven body 930 </ b> B itself (specifically, the elasticity resulting from the aluminum member 92 and the resin member 93) is interposed between the support member 50 and the vibrating body 10. That is, it is considered that the driving efficiency is lowered due to the fact that the pressing force from the vibrating body 10 is absorbed by the elastic force of the driven body 930B itself that functions as a vibration damping member.

  On the other hand, in the vibration actuator 1A according to the first embodiment, no vibration damping member (elastic member) is interposed between the support member 50 and the vibrating body 10 (chip member 13). Specifically, as shown in FIG. 1 and FIG. 2, the damping member 32 includes both regions of a contact region CR of the contact member 31 with the vibrating body 10 and a region RR opposite to the contact region of the contact member 31 ( The portion excluding (CR, RR) is connected to the contact member 31. For this reason, it is possible to eliminate an extra vibration component due to the elasticity of the damping member. Therefore, it is possible to suppress the amplitude in the driving cycle as compared with the first and second comparative examples, and it is possible to realize a high vibration damping function. In addition, it is possible to improve driving efficiency and obtain a relatively large driving force as compared with the second comparative example.

  As described above, according to the vibration actuator 1A according to the first embodiment, the vibration damping member 32 of the driven body 30A is also expressed as the vibration direction by the vibration body 10 (the “pressure direction by the pressure member 40”). ), It is possible to obtain a high driving force by suppressing vibration and transmission loss caused by the vibration. That is, high driving efficiency can be realized in the vibration actuator 1A. Note that the pressing member 40 can only follow a displacement with a very low period compared to the high-frequency voltage (high-frequency signal) applied to the piezoelectric element 11, and thus does not have a function of suppressing vibrations. It does not function as such a damping member.

  In the vibration actuator 1A according to this embodiment, the driven body 30A itself is provided with a portion for transmitting the driving force from the vibrating body 10 to another member. Specifically, as shown in FIG. 4, cam grooves G1 and G2 are provided in the vibration damping member 32 of the driven body 30A. Cam pins (not shown) fixed to another member (for example, a lens holding member in the imaging apparatus) are engaged with the cam grooves G1 and G2. According to such a mechanism, the vibrating body 10 can move the separate member (the lens holding member or the like) via the driven body 30A, the cam grooves G1 and G2, and the cam pin engaged with the cam groove. it can. In particular, since the cam grooves G1 and G2 are provided in the vibration damping member 32 itself, a compact configuration can be achieved as compared with the case where the driving force transmitting portion is provided separately from the driven body 30A. Further, since the vibration is attenuated by the damping member 32, the vibration transmitted to another member can be suppressed.

  In addition, in the said embodiment, although the case where the shape (top view) of the junction part of the contact member 31 was comb-tooth shape was illustrated, this invention is not limited to this. For example, as indicated by a curve CL in FIG. 26, the joint portion (with the vibration damping member 32) of the contact member 31 may be formed as a smooth curve (or a straight line) in a top view.

  Moreover, in the said embodiment, although the case where the level | step-difference part BP (FIG. 5) was provided in the junction part of the contact member 31 and the damping member 32 was illustrated, it is not limited to this. For example, as shown in FIG. 27, the plate-like contact member 31 may be joined in a state of being sandwiched in the plate thickness direction by the damping member 32 having a concave cross section. Alternatively, as shown in FIG. 28, a contact member 31 having a convex cross section may be joined with a vibration damping member 32 having a concave cross section matching the convex portion in a state of being sandwiched in the plate thickness direction. . According to the latter configuration, it is possible to form a flat joint portion without providing a raised portion in the thickness direction in the joint portion.

  Furthermore, in the said embodiment, although the case where the contact member 31 and the damping member 32 were integrally molded (refer FIG. 4 and FIG. 5) was illustrated, the fixation method of the contact member 31 and the damping member 32 is as follows. It is not limited to this. For example, you may make it fix the contact member 31 and the damping member 32 using an adhesive agent. In order to reliably restrain the contact member 31 by the damping member 32, it is preferable to use an adhesive made of a highly rigid material.

  Moreover, in the said embodiment, although the damping member 32 is being fixed in the state contacted with the contact member 31 in a part of circumference | surroundings of the contact member 31, it is not limited to this. For example, as shown in FIG. 29 (top view) and FIG. 30 (cross-sectional view taken along the line III-III in FIG. 29), the contact member 31 and the damping member 32 are joined around the entire contact member 31 (in other words, The damping member 32 may be disposed so as to surround the contact member 31). According to this, since the contact member 31 can be restrained more firmly by the vibration damping member 32, a higher vibration suppression effect can be obtained.

  Furthermore, in the said embodiment, although the case where the supporting member 50 was provided in the position just above the chip member 13 was illustrated (refer FIG. 1, FIG. 2), it is not limited to this. The support member 50 (roller 51) only needs to be present at a position where the force from the vibrating body 10 can be supported. For example, the position facing the chip member 13 across the driven body 30A is slightly shifted from the position immediately above. May be present. Further, a plurality (two) of rollers may be provided as support members at positions slightly shifted on both sides of the position immediately above (for example, a position similar to a roller 52 in FIG. 19 described later).

<2. Second Embodiment>
In the first embodiment, the case where the driven body 30A rotates around a predetermined rotation axis (that is, the case where the driven body 30A rotates) is illustrated, but in the second embodiment, the driven body 30B is a straight line. The case of exercising is illustrated.

  19 and 20 are a front view and a side view, respectively, showing a vibration actuator 1B according to the second embodiment. FIG. 21 is a top view showing a driven body 30B used in the vibration actuator 1B.

  The vibration actuator 1B according to the second embodiment is a modification of the vibration actuator 1A according to the first embodiment, and has the same configuration as the vibration actuator 1A. In order to avoid duplication of explanation, the following description will focus on differences from the vibration actuator 1A. In addition, in each figure, the same code | symbol as 1st Embodiment is attached | subjected and shown to the component similar to 1st Embodiment.

  The vibration actuator 1B is different from the vibration actuator 1A in that a driven body 30B is provided instead of the driven body 30A.

  As shown in FIGS. 20 and 21, the driven body 30 </ b> B has a thin and long rectangular shape, and is guided by guide rollers 53 and 54 on both sides thereof, and is movable in the X direction. . The driven body 30 </ b> B includes a contact member 33 and a vibration damping member 34. The contact member 33 is the same member as the contact member 31, and the vibration damping member 34 is the same member as the vibration damping member 32. However, the shapes of the contact member 33 and the damping member 34 are different from the shapes of the contact member 31 and the damping member 32, respectively.

  The contact member 33 has an elongated rectangular shape that is slightly smaller than the vibration damping member 34. When the exposed portion 33b of the contact member 33 and the tip member 13 of the vibrating body 10 are in frictional contact, the driving force from the vibrating body 10 is transmitted to the driven body 30B. The width Ww in the Y direction of the exposed portion 33b has a size obtained by adding a slight amount of width ΔW to the contact width Wt (see FIG. 2) with the chip member 13 (Ww = Wt + ΔW), and the exposed portion 33b. The length Ld in the X direction has a size obtained by adding a certain amount of length ΔL to the length Lx of the predetermined driving range in the linear motion (Ld = Lx + ΔL).

  The damping member 34 is fixed in contact with one long side and two short sides of the elongated rectangular contact member 33. The damping member 34 can restrain the vibration (particularly resonance) of the contact member 33 by restraining the contact member 33 by sandwiching the outer edge portion 33 a of the contact member 33.

  As shown in FIGS. 19 and 20, in the vibration actuator 1B according to the second embodiment, the vibration damping member 34 of the driven body 30B does not exist in the vibration direction by the vibration body 10 (here, the Z direction). . More specifically, the damping member 34 is a portion excluding both regions (CR, RR) of the contact region CR of the contact member 33 with the vibrating body 10 and the region RR opposite to the contact region of the contact member 33. The contact member 33 is connected. Specifically, the vibration damping member 34 is connected to the contact member 33 at the side of the contact region (contact surface) CR with the vibrating body 10 in the contact member 33 (on the left side (+ Y side in the drawing)). . For this reason, it is possible to realize a high vibration damping function and a high driving efficiency. In particular, since no damping member is interposed between the support member 50 and the vibrating body 10, it is possible to eliminate an extra vibration component due to the elasticity of the damping member.

  Further, the roller 51 of the support member 50 is opposite to the driven body 30B from the driven body 30B so as to sandwich the driven body 30B (contact member 33) with the tip member 13 of the vibrating body 10 ( + Z side). The roller 51 of the support member 50 has a chip member 13 on a surface (upper surface) opposite to the contact surface (lower surface) with the chip member 13 out of both main surfaces of the thin plate-like driven body 30B (contact member 33). In contact with the driven body 30B at a position immediately above the contact position between the driven body 30B and the driven body 30B. Thus, by providing the support member 50 at a position immediately above the chip member 13 (in other words, a position facing the chip member 13 with the driven body 30B interposed therebetween), the Z-direction generated by the vibration of the vibration body 10 is provided. Power can be reliably supported. As a result, a large driving force can be obtained. In addition, in this 2nd Embodiment, the case where the supporting member 50 is comprised not only with the one roller 51 but with the some roller also including the roller 52 is illustrated.

<3. Third Embodiment>
In the third embodiment, a case where the driven body 30C rotates in a plane parallel to the vibration surface (a surface including the elliptical trajectory PB (FIG. 7)) by the vibration body 10 is illustrated. As will be described later, the driven body 30C is configured as a rotor, and the vibrating body 10 is disposed inside the rotor. For this reason, it can be set as a compact structure.

  FIG. 22 is a top view (partially sectional view) showing the internal configuration of the vibration actuator 1C according to the third embodiment. FIG. 23 is a side view (partially sectional view) showing the internal configuration of the vibration actuator 1C. Hereinafter, the description will focus on the differences from the vibration actuator 1A. For convenience, the vibration damping member 36 is not shown in FIG. 22, and a part of the cylindrical wall of the base plate 70 is omitted in FIG.

  A vibration actuator 1 </ b> C according to the third embodiment includes a vibrating body 10, a driven body 30 </ b> C, a pressing member 40, and a base plate 70.

  The base plate 70 has a cylindrical shape with a bottom surface. Specifically, the base plate 70 includes a circular bottom surface portion 71 and a cylindrical wall 72 protruding in the Z direction at the outermost peripheral portion of the bottom surface portion 71. In the recess surrounded by the cylindrical wall (cylindrical surface) 72, the vibrating body 10 is arranged. Since the vibrating body 10 is provided at a position surrounded by the cylindrical surface of the contact member 35, the size can be reduced.

  Further, the pressing member 40 is fixed to the protruding portion 73 protruding from the bottom surface portion 71. By this pressing member 40, the tip member 13 of the vibrating body 10 is pressed against the contact member 35 with a predetermined urging force. Thereby, driving force is transmitted more reliably.

  The driven body 30 </ b> C includes a contact member 35 and a vibration damping member 36. The contact member 35 is configured as a member having a cylindrical shape, and the damping member 36 is a circular thin plate-shaped member, and is an end surface member that covers one end surface of the circular cavity portion of the cylindrical contact member 35. It is formed. At the outermost periphery of the circular vibration damping member 36, the end of the cylindrical contact member 35 is sandwiched and fixed. As will be described later, the contact member 35 and the vibration damping member 36 are integrally rotated. To do. In addition, since the contact member 35 is formed in the cylindrical shape, higher strength can be obtained by the arch effect. Therefore, a higher vibration damping effect can be obtained.

  The contact member 35 and the base plate 70 are arranged concentrically with a predetermined gap between the outside of the contact member 35 and the inside of the cylindrical wall 72 of the base plate 70. Further, in the gap, a plurality of balls 55 are disposed between a groove provided on the inner peripheral surface of the base plate 70 and a groove provided on the outer peripheral surface of the contact member 35. 55 functions as a ball bearing.

  As shown in FIG. 23, the tip of the tip member 13 of the vibrating body 10 is in contact with the inner peripheral side of the contact member 35. The vibrating body 10 vibrates so as to draw an elliptical orbit in a plane parallel to the XY plane, thereby generating a driving force in a tangential direction at the contact point between the tip member 13 and the contact member 35. Specifically, the vibrating body 10 drives the contact member 35 by generating frictional force with the contact member 35 while repeating contact with the contact member 35 and separation from the contact member 35.

  The contact member 35 supported by the ball bearing with respect to the base plate 70 rotates around the central axis Ab of the cylindrical contact member 31 by this driving force and moves relative to the base plate 70. .

  In the vibration actuator 1C according to the third embodiment, the damping member 36 of the driven body 30C does not exist in the vibration direction (here, the X direction) of the vibration body 10. More specifically, the damping member 36 excludes both regions (CR, RR) of the contact region CR of the contact member 35 with the vibrating body 10 and the region RR opposite to the contact region of the contact member 35 (CR, RR) ( Specifically, the contact member 35 is connected to the contact member 35 at the side of the contact region (contact surface) CR with the vibrating body 10 (upper side (+ Z side in the drawing)). For this reason, it is possible to realize a high vibration damping function and a high driving efficiency.

  In the vibration actuator 1 </ b> C, a vibration damping member 36, which is a separate member, is connected to the contact member 35. Further, the damping member 36 is formed of a material different from that of the contact member 35. Therefore, it is possible to suppress vibration compared to the case where the contact member 35 and the vibration damping member 36 are formed of the same material as an integral structural component. Particularly, the damping member 36 is firmly fixed by sandwiching the circular end portion on one end side of the cylindrical contact member 35 over the entire circumference. For this reason, it is possible to restrain the contact member 35 to further suppress the vibration (including resonance) of the contact member 35.

  Further, as shown in FIGS. 22 and 23, the driven body 30 </ b> C is configured such that the ball 55 (support member) sandwiches the driven body 30 </ b> C (contact member 35) with the chip member 13 of the vibrating body 10. The contact member 35 is provided on the opposite side of the vibrating body 10. According to this, the radial force generated by the vibration of the vibrating body 10 can be reliably supported, and a large driving force can be obtained.

<4. Fourth Embodiment>
The fourth embodiment is a modification of the third embodiment.

  FIG. 24 is a top view (partially sectional view) showing the internal configuration of the vibration actuator 1D according to the fourth embodiment. FIG. 25 is a side view (partially sectional view) showing the internal configuration of the vibration actuator 1D. Hereinafter, a description will be given focusing on differences from the vibration actuator 1C. For the sake of convenience, the vibration damping member 38 is not shown in FIG.

  A vibration actuator 1D according to the fourth embodiment includes a vibrating body 10, a driven body 30D, a pressure member 40, and a base plate 80.

  The base plate 80 has a thin plate-like circular shape. A cylindrical projection 82 is provided at the center of the base plate 80. The protrusion 82 functions as a bearing that supports a rotating shaft of a driven body 30D described later. In addition, a protrusion 81 is provided at a part of the outermost peripheral portion of the base plate 80, and the pressing member 40 fixed to the vibrating body 10 is fixed to the protrusion 81.

  The driven body 30 </ b> D includes a contact member 37 and a vibration damping member 38. The contact member 37 is configured as a member having a cylindrical shape, and the vibration damping member 38 is configured as a circular thin plate member. At the outermost peripheral portion of the circular vibration damping member 38, the end of the cylindrical contact member 37 is fixed. In addition, a rotating shaft 39 is fixed to the damping member 38 at the center of the damping member 38 by “caulking” or press fitting, and the contact member 37, the damping member 38, and the rotating shaft 39 are integrated. Rotate. In addition, it is preferable that the rotating shaft 39 is comprised with a metal etc. in consideration of abrasion resistance. Here, the rotating shaft 39 is formed separately from the vibration damping member 38, but may be integrally formed as a part of the vibration damping member 38. For example, the damping member 38 that also has a rotating shaft may be formed of a different type of metal from the contact member 37.

  As shown in FIG. 25, the tip of the tip member 13 of the vibrating body 10 is in contact with the inner peripheral side of the contact member 35. Therefore, as in the third embodiment, a driving force in the tangential direction is generated at the contact point between the tip member 13 and the contact member 37, and the contact member 37 rotates with respect to the base plate 70 by this driving force.

  Here, the damping member 38 fixes a circular end portion on one end side of the cylindrical contact member 37 over the entire circumference. For this reason, it is possible to restrain the contact member 37 and restrain vibration (particularly resonance) of the contact member 37.

  Further, in the vibration actuator 1D according to the fourth embodiment, the vibration damping member of the driven body 30D does not exist in the vibration direction of the vibration body 10. Therefore, it is possible to obtain a high driving force while suppressing transmission loss caused by a resonance operation or the like. That is, high drive efficiency can be realized in the vibration actuator 1D.

  Further, in the fourth embodiment, the rotating shaft 39 is provided inside the contact member 37, and the driving force by the vibrating body 10 is supported by the rotating shaft 39. According to such a configuration, since the support member (the ball 55 or the like) is not provided outside the cylindrical contact member 37, the size can be further reduced as compared with the vibration actuator 1C of the third embodiment. it can.

<5. Modified example>
Although the embodiments of the present invention have been described above, the present invention is not limited to the contents described above.

  For example, in the first embodiment, the case where the driven body 30A swings is illustrated, but the present invention is not limited to this. For example, the driven body is configured to rotate one rotation (360 degrees) or more. May be. FIG. 31 (top view) and FIG. 32 (cross-sectional view) are modified examples in which a disk-like driven body is provided instead of the driven body 30A of the first embodiment. In this modification, the annular contact member 31 is joined around the entire damping member 32 so as to surround the damping member 32 in the center. Further, the contact member 31 (specifically, the exposed portion 31b) is driven by frictional contact with the chip member 13, and can perform one or more rotations. FIG. 33 is a diagram showing a further modification. As shown in FIG. 33, a joint portion (shown by a broken line) between the contact member 31 and the vibration damping member 32 may be formed in a comb-teeth shape in a top view. According to this, the bonding strength can be increased.

  In the first embodiment, the case where the cam grooves G1 and G2 are provided in the driven body 30A as the driving force transmission means is illustrated, but the present invention is not limited to this, and other transmission means (for example, gears). May be provided on the driven body itself.

  FIG. 34 is a top view showing a driven body according to such a modification. As shown in FIG. 34, the tooth TH of the gear may be provided on a part of the outer periphery of the damping member 32 of the driven body (specifically, on the opposite side of the contact member 31 via the central axis AZ). Good. According to this, compared with the case where the transmission means of a driving force is provided separately from the driven body 30A, a compact configuration can be achieved. Moreover, you may make it provide the slit part SL of an encoder in the damping member 32. FIG. Further, by providing the light projecting part and the light receiving part at a position sandwiching the slit part SL, a transmission type optical encoder can be configured. In this case, since the slit portion SL is formed integrally with the driven body 30A, the size reduction can be achieved.

  FIG. 35 is a diagram showing another modification similar to FIG. The modification of FIG. 35 is different from the modification of FIG. 34 in that an encoder plate EB is provided instead of the slit portion SL. This encoder plate EB is used for a reflection type optical encoder, and has a reflection part and an absorption part. In this way, a reflective optical encoder may be configured. Or you may make it comprise the magnetic encoder in the same site | part using the resin which can be worn | mixed which mixed magnetic iron powder.

  Moreover, FIG. 36 and FIG. 37 is a figure which shows another modification. In this modification, the damping member 32 has a two-stage structure of an upper portion UP and a lower portion LP (see FIG. 37), and the upper portion UP that is a part of the damping member 32 is a gear TW. It is configured as. You may make it transmit a driving force to another member using such a gearwheel.

  Furthermore, in the driven body 30A of the first embodiment, a stopper pin that restricts the rotation range may be provided. 38 to 41 are diagrams showing such modifications. As shown in FIG. 38 (top view) and FIG. 39 (cross-sectional view taken along the line VV in FIG. 38), a stopper pin PN protruding in the Z direction is provided on the damping member 32. On the other hand, a stopper member SB is fixed to the main body side of the vibration actuator 1A. Further, the stopper member SB is disposed with a predetermined gap at a portion immediately above the outer edge portion of the vibration damping member 32 so as not to contact the vibration damping member 32. When the driven body 30A rotates in the direction of the arrow AR and the rotation angle reaches a predetermined angle, the stopper pin PN comes into contact with the stopper member SB as shown in FIG. When the driven body 30A rotates in the direction opposite to the arrow AR and the rotation angle reaches a predetermined angle, the stopper member SB comes into contact with the stopper pin PN as shown in FIG. Thus, the rotation operation of the driven body 30A is restricted.

  Further, in the driven body of the embodiment other than the first embodiment, a driving force transmitting means may be provided.

  For example, gear teeth may be provided on the outer periphery of the damping member 36 in the driven body 30C (FIG. 23) of the third embodiment. 42 and 43 are respectively a top view and a cross-sectional view of a driven body according to such a modification.

  Or you may make it use the damping member 36 as a cam by employ | adopting a specific shape as the shape of the damping member 36 in the to-be-driven body 30C of 3rd Embodiment. FIG. 44 (top view) and FIG. 45 (cross-sectional view) are diagrams showing such modifications. In this modification, the upper surface (end surface) of the damping member 36 is inclined. Further, the cam follower pin FP fixed to a specific separate member is urged against the upper surface of the vibration damping member 36. Since the height of the upper surface of the vibration damping member 36 differs depending on the position in the circumferential direction, the cam follower pin FP that contacts the upper surface of the vibration damping member 36 is guided by the guide portion GD as the vibration damping member 36 rotates. To move linearly in the vertical direction (Z direction).

  FIG. 46 (top view) and FIG. 47 (cross-sectional view) are diagrams showing another modification. In this modification, the damping member 36 has a two-stage structure of an upper portion UP and a lower portion LP, and the upper portion UP that is a part of the damping member 36 is configured as a cam CM. . The cam follower pin FP is urged toward the center by a predetermined urging force with respect to the cam CM. The cam follower pin FP is guided by the guide portion GD and can slide in the left-right direction in the figure. Since the distance from the central axis Ab to the outer circumferential surface of the cam CM varies depending on the circumferential position of the vibration damping member 36 (cam CM), the cam follower pin FP that contacts the cam CM rotates the vibration damping member 36. As a result, it moves linearly in the radial direction (left-right direction).

  In each said embodiment, although the case where the vibrating body 10 carried out elliptical vibration was illustrated, it is not limited to this. For example, the vibration by the vibrating body 10 may be simple vibration.

It is a front view of a vibration actuator (drive device) concerning a 1st embodiment. It is a side view of a vibration actuator. It is a front view of a vibrating body. It is a top view of a to-be-driven body. It is sectional drawing of a to-be-driven body. It is a figure which shows the drive operation by a vibrating body. It is a conceptual diagram which shows the drive state (ideal state) of a to-be-driven body. It is a conceptual diagram which shows the drive state of a to-be-driven body. It is a conceptual diagram which shows the drive state of a to-be-driven body. It is a figure which shows the measurement result regarding the vibration state of a vibration actuator (1st Embodiment). It is a figure which shows the measurement result regarding the driving force of a vibration actuator (1st Embodiment). It is a figure which shows the measurement result regarding the vibration state of a vibration actuator (1st comparative example). It is a figure which shows the measurement result regarding the driving force of a vibration actuator (1st comparative example). It is a figure which shows the measurement result regarding the vibration state of a vibration actuator (2nd comparative example). It is a figure which shows the measurement result regarding the driving force of a vibration actuator (2nd comparative example). It is a top view which shows the structure of the to-be-driven body which concerns on a 1st comparative example. It is sectional drawing which shows the structure of the to-be-driven body which concerns on a 1st comparative example. It is sectional drawing which shows the structure of the to-be-driven body which concerns on a 2nd comparative example. It is a front view of the vibration actuator (drive device) concerning a 2nd embodiment. It is a side view of the vibration actuator which concerns on 2nd Embodiment. It is a top view of the to-be-driven body which concerns on 2nd Embodiment. It is a top view of the vibration actuator which concerns on 3rd Embodiment. It is a side view of the to-be-driven body which concerns on 3rd Embodiment. It is a top view of the vibration actuator which concerns on 4th Embodiment. It is a side view of the to-be-driven body which concerns on 4th Embodiment. It is a top view which shows the to-be-driven body which concerns on a modification. It is sectional drawing which shows the modification regarding the joining state of a contact member and a damping member. It is sectional drawing which shows another modification regarding the joining state of a contact member and a damping member. It is a top view which shows another modification regarding a to-be-driven body. It is sectional drawing which shows the to-be-driven body of FIG. It is a top view which shows the modification (1 rotation or more can be rotated) regarding a to-be-driven body. It is sectional drawing which shows the to-be-driven body of FIG. It is a top view which shows the to-be-driven body which concerns on the further modification. It is a top view which shows the modification (thing which has a gearwheel) regarding a to-be-driven body. It is a top view which shows another modification regarding a to-be-driven body. It is a top view which shows another modification regarding a to-be-driven body. It is sectional drawing which shows the to-be-driven body of FIG. It is a top view which shows the modification (what has a rotation control mechanism) regarding a to-be-driven body. It is a side view which shows the to-be-driven body of FIG. It is a top view explaining rotation control operation. It is a top view explaining rotation control operation. It is a top view which shows another modification regarding a to-be-driven body. It is sectional drawing which shows the to-be-driven body of FIG. It is a top view which shows another modification regarding a to-be-driven body. It is sectional drawing which shows the to-be-driven body of FIG. It is a top view which shows another modification regarding a to-be-driven body. It is sectional drawing which shows the to-be-driven body of FIG.

Explanation of symbols

1A-1D Vibration actuator (drive device)
DESCRIPTION OF SYMBOLS 10 Vibrating body 11,12 Piezoelectric element 13 Chip member 14 Base member 30A-30D Driven body 31,33,35,37 Contact member (sliding member)
32, 34, 36, 38 Damping member 40 Pressure member 50 Support member 51, 52 Roller 60, 70, 80 Base plate G1, G2 Cam groove TH (Gear) tooth

Claims (6)

A vibrating body that vibrates based on a high-frequency signal;
A driven body driven in response to vibration by the vibrating body;
With
The driven body is a contact member that is driven by a frictional force generated between the vibrating body and the contact with the vibrating body while repeating the contact with the vibrating body and the separation from the vibrating body according to the vibration operation of the vibrating body; A damping member that suppresses vibration of the contact member,
The vibration damping member is connected to the contact member at a portion excluding both the contact region of the contact member with the vibrating body and the region opposite to the contact region of the contact member ;
Further, the damping member, the side of the contact surface between the vibration member in the contact member, the driving device according to claim Rukoto connected to said contact member. The drive device according to claim 1,
A support member provided on the opposite side of the driven body from the driven body and supporting a force applied from the vibrating body;
Further comprising driving apparatus according to claim Rukoto a. The drive device according to claim 1 or 2,
The contact member has a cylindrical shape, and is provided so as to rotate around a central axis of the cylindrical shape according to frictional contact with the vibrating body,
The damping member is provided so as to form the cylindrical end surface,
The vibrating body is driven and wherein that you have provided at a position surrounded by the cylindrical surface of the contact member. A vibrating body that vibrates based on a high-frequency signal;
A driven body driven in response to vibration by the vibrating body;
With
The driven body is a contact member that is driven by a frictional force generated between the vibrating body and the contact with the vibrating body while repeating the contact with the vibrating body and the separation from the vibrating body according to the vibration operation of the vibrating body; A damping member that suppresses vibration of the contact member,
The vibration damping member is connected to the contact member at a portion excluding both the contact region of the contact member with the vibrating body and the region opposite to the contact region of the contact member;
Furthermore, the said damping member is connected with the said contact member in the edge | side in the longitudinal direction of the said contact member, The drive device characterized by the above-mentioned. The drive device according to any one of claims 1 to 4 ,
The damping member is driving apparatus according to claim Rukoto formed of different kinds of material and the contact member. The drive device according to any one of claims 1 to 5,
The damping member is driven and wherein that you have a further transmission means for transmitting a drive force by the vibrating member to a predetermined separate member.

Images