JP6914740B2 - Gripping device - Google Patents

Gripping device Download PDF

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JP6914740B2
JP6914740B2 JP2017112780A JP2017112780A JP6914740B2 JP 6914740 B2 JP6914740 B2 JP 6914740B2 JP 2017112780 A JP2017112780 A JP 2017112780A JP 2017112780 A JP2017112780 A JP 2017112780A JP 6914740 B2 JP6914740 B2 JP 6914740B2
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moving body
vibrating
gripping member
gripping
moving
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JP2018202571A (en
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啓 末藤
啓 末藤
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Canon Inc
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Canon Inc
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Description

本発明は、複数の把持部材で被把持物を把持する把持装置に関する。 The present invention relates to a gripping device that grips an object to be gripped by a plurality of gripping members.

製品の製造工程における部品（ワーク）の組み付け、搬送、検査等において、ワークを把持する電動ハンド装置（電動グリッパ）が知られている（例えば、特許文献１参照。）。この電動ハンド装置は、モータにて回転されるカム部材と、レールに沿って直線移動する一対のハンド部材とを備える。カム部材では、各ハンド部材が有するカムフォロアを嵌合させる一対のカム溝が螺旋状に形成され、カム部材の回転によって一対のハンド部材がカム駆動され、レールに沿って移動し、各カム部材が互いに近接する際、間にワークを把持する。この電動ハンド装置では、カム溝がアルキメデスの渦巻き線に沿う螺旋状に形成されているため、モータの回転トルクによって生じるハンド部材の推力が一定となる。 An electric hand device (electric gripper) that grips a work is known in assembling, transporting, inspecting, and the like in a part (work) in a product manufacturing process (see, for example, Patent Document 1). This electric hand device includes a cam member rotated by a motor and a pair of hand members that move linearly along a rail. In the cam member, a pair of cam grooves for fitting the cam followers of each hand member are spirally formed, and the pair of hand members are cam-driven by the rotation of the cam member and move along the rail, and each cam member moves. When they are close to each other, they hold the workpieces in between. In this electric hand device, since the cam groove is formed in a spiral shape along the spiral line of Archimedes, the thrust of the hand member generated by the rotational torque of the motor is constant.

また、モータとして超音波モータを用いた電動ハンド装置も知られている（例えば、特許文献２参照。）。この電動ハンド装置は１つの超音波モータを有し、超音波モータの回転軸に固定されたピニオンギアを一対の把持部材のそれぞれに固定されたラックギアに噛合させ、超音波モータの回転駆動力によって各把持部材を直線移動させる。 An electric hand device using an ultrasonic motor as a motor is also known (see, for example, Patent Document 2). This electric hand device has one ultrasonic motor, and the pinion gear fixed to the rotating shaft of the ultrasonic motor is meshed with the rack gear fixed to each of the pair of gripping members, and the rotational driving force of the ultrasonic motor is used. Each gripping member is linearly moved.

特開２００５−５９１１８号公報Japanese Unexamined Patent Publication No. 2005-59118 特開２００８−１４９４０２号公報Japanese Unexamined Patent Publication No. 2008-149402

しかしながら、特許文献１記載の電動ハンド装置では、カム部材の回転をカム溝によって各ハンド部材の直線移動に変換するため、各ハンド部材の移動量を確保するために、カム溝の長さを所定の長さ以上に設定する必要がある。その結果、カム部材が大きくなり、電動ハンド装置が大型化する。 However, in the electric hand device described in Patent Document 1, since the rotation of the cam member is converted into the linear movement of each hand member by the cam groove, the length of the cam groove is predetermined in order to secure the movement amount of each hand member. Must be set longer than the length of. As a result, the cam member becomes large and the electric hand device becomes large.

特許文献２記載の電動ハンド装置では、超音波モータの回転軸に固定されたピニオンギアを各把持部材に固定されたラックギアに噛合させるため、把持部材の移動方向に対して垂直に超音波モータの回転軸を配置する必要がある。その結果、超音波モータが各ラックギアから突出するように位置し、電動ハンド装置が大型化する。 In the electric hand device described in Patent Document 2, in order to engage the pinion gear fixed to the rotating shaft of the ultrasonic motor with the rack gear fixed to each grip member, the ultrasonic motor of the ultrasonic motor is perpendicular to the moving direction of the grip member. It is necessary to arrange the axis of rotation. As a result, the ultrasonic motor is positioned so as to protrude from each rack gear, and the electric hand device becomes large.

本発明の目的は、大型化を防止することができる把持装置を提供することにある。 An object of the present invention is to provide a gripping device capable of preventing an increase in size.

上記目的を達成するために、本発明の把持装置は、第１の把持部材と、前記第１の把持部材と第１の方向において対向する第２の把持部材と、前記第１の把持部材を前記第１の方向に沿って駆動する第１の振動型アクチュエータと、前記第２の把持部材を前記第１の方向に沿って駆動する第２の振動型アクチュエータと、を備え、前記第１の振動型アクチュエータは、前記第１の把持部材が取り付けられている第１の移動体と、前記第１の移動体に加圧接触し且つ励起された振動によって前記第１の移動体を駆動して前記第１の方向に沿って移動させる第１の振動体とを有し、前記第２の振動型アクチュエータは、前記第２の把持部材が取り付けられている第２の移動体と、前記第２の移動体に加圧接触し且つ励起された振動によって前記第２の移動体を駆動して前記第１の方向に沿って移動させる第２の振動体とを有し、前記第１の移動体と前記第２の移動体とは、前記第１の方向と直交する第２の方向において互いに異なる位置に配置されており、前記第１の把持部材と前記第２の把持部材とが最も接近した際、前記第２の方向において、前記第１の移動体と前記第２の移動体とが互いに重畳し、前記第１の振動体は、前記第２の方向、又は、前記第１の方向及び前記第２の方向のそれぞれと直交する第３の方向において前記第１の移動体と加圧接触し、前記第２の振動体は、前記第２の方向、又は、前記第３の方向において前記第２の移動体と加圧接触することを特徴とする。 In order to achieve the above object, the gripping device of the present invention comprises a first gripping member, a second gripping member facing the first gripping member in a first direction, and the first gripping member. The first vibrating actuator including a first vibrating actuator that drives the second gripping member along the first direction and a second vibrating actuator that drives the second gripping member along the first direction. The vibration type actuator drives the first moving body to which the first gripping member is attached and the first moving body by pressure contact and excited vibration with the first moving body. The second vibrating actuator has a first vibrating body that moves along the first direction, and the second vibrating actuator includes a second moving body to which the second gripping member is attached and the second vibrating body. It has a second vibrating body that drives the second moving body by pressure contact and excited vibration to move the second moving body along the first direction, and has the first moving body. And the second moving body are arranged at different positions in a second direction orthogonal to the first direction, and the first gripping member and the second gripping member are closest to each other. At that time, in the second direction, the first moving body and the second moving body are superimposed on each other, and the first vibrating body is in the second direction or in the first direction and Pressurized contact with the first moving body in a third direction orthogonal to each of the second directions, and the second vibrating body is said in the second direction or the third direction. It is characterized by being in pressure contact with a second moving body.

本発明によれば、把持装置の大型化を防止することができる。 According to the present invention, it is possible to prevent the gripping device from becoming large in size.

本発明の第１の実施の形態に係る把持装置としての電動ハンド装置の構成を概略的に示す図である。It is a figure which shows typically the structure of the electric hand device as the gripping device which concerns on 1st Embodiment of this invention. 図１における電動アクチュエータの構成を概略的に示す分解斜視図である。It is an exploded perspective view which shows schematic structure of the electric actuator in FIG. 図２における振動型アクチュエータの振動体において励起される各振動モードを説明するための斜視図である。It is a perspective view for demonstrating each vibration mode excited in the vibrating body of the vibrating type actuator in FIG. 各被駆動体ユニットが最も離間した場合の各移動体及び各被駆動体ユニットの位置関係を示す図である。It is a figure which shows the positional relationship of each moving body and each driven body unit when each driven body unit is the most separated. 各被駆動体ユニットが最も離間した状態から最も接近した状態へ移行する場合の各移動体及び各被駆動体ユニットの位置関係を示す図である。It is a figure which shows the positional relationship of each moving body and each driven body unit when each driven body unit shifts from the most separated state to the closest state. 各被駆動体ユニットが最も接近した場合の各移動体及び各被駆動体ユニットの位置関係を示す図である。It is a figure which shows the positional relationship of each moving body and each driven body unit when each driven body unit is the closest. 各移動体が重畳して配置されない電動ハンド装置（比較例）の構成を概略的に示す断面図である。It is sectional drawing which shows typically the structure of the electric hand device (comparative example) in which each moving body is not superposed and arranged. 本発明の第２の実施の形態に係る把持装置としての電動ハンド装置の構成を概略的に示す図である。It is a figure which shows roughly the structure of the electric hand device as the gripping device which concerns on 2nd Embodiment of this invention. 各被駆動体ユニットが移動する際の各移動体及び各被駆動体ユニットの位置関係を示す断面斜視図である。It is sectional drawing which shows the positional relationship of each moving body and each driven body unit when each driven body unit moves.

以下、本発明の実施の形態について図面を参照しながら詳細に説明する。しかしながら、以下の実施の形態に記載されている構成はあくまで例示に過ぎず、本発明の範囲は実施の形態に記載されている構成によって限定されることはない。まず、本発明の第１の実施の形態について説明する。 Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. However, the configurations described in the following embodiments are merely examples, and the scope of the present invention is not limited by the configurations described in the embodiments. First, the first embodiment of the present invention will be described.

図１は、本実施の形態に係る把持装置としての電動ハンド装置の構成を概略的に示す図である。特に、図１（Ａ）は電動ハンド装置の斜視図であり、図１（Ｂ）は電動ハンド装置の分解斜視図であり、図１（Ｃ）は電動ハンド装置の平面図（Ｚ方向に沿って眺めたときの図）である。図２は、図１における電動アクチュエータの構成を概略的に示す分解斜視図である。なお、各図において、Ｘ方向（第１の方向）、Ｙ方向（第２の方向）及びＺ方向（第３の方向）は互いに直交し、各Ｘ方向、各Ｙ方向及び各Ｚ方向のそれぞれは一致する。また、説明を容易にするために、図１（Ａ）以外の図では、把持部材としての第１のハンド部材１４０ａ及び第２のハンド部材１４０ｂの図示が省略される。電動ハンド装置１００は、直動型（リニア型）の第１の振動型アクチュエータ１０１ａ及び直動型の第２の振動型アクチュエータ１０１ｂを備える。さらに、電動ハンド装置１００は、第１の被駆動体ユニット１２０ａ、第２の被駆動体ユニット１２０ｂ、基台１３０、第１のハンド部材１４０ａ及び第２のハンド部材１４０ｂ（第１の把持部材、第２の把持部材）を備える。第１のハンド部材１４０ａ及び第２のハンド部材１４０ｂはそれぞれＹ方向から眺めた際にＬ字状を呈する板状部材を有し、対応する第１の被駆動体ユニット１２０ａ及び第２の被駆動体ユニット１２０ｂへ取り付けられる。第１の被駆動体ユニット１２０ａ及び第２の被駆動体ユニット１２０ｂはＸ方向において互いに対向するように配置されるため、第１のハンド部材１４０ａ及び第２のハンド部材１４０ｂもＸ方向において互いに対向するように配置される。また、第１の振動型アクチュエータ１０１ａ及び第２の振動型アクチュエータ１０１ｂは、対応する第１の被駆動体ユニット１２０ａ及び第２の被駆動体ユニット１２０ｂをＸ方向に沿って駆動する。これにより、第１の被駆動体ユニット１２０ａ及び第２の被駆動体ユニット１２０ｂに取り付けられた第１のハンド部材１４０ａ及び第２のハンド部材１４０ｂはＸ方向において接近、離間する。電動ハンド装置１００では、第１のハンド部材１４０ａ及び第２のハンド部材１４０ｂが互いに接近する際、間に被把持物としてのワーク（図示しない）を把持する。 FIG. 1 is a diagram schematically showing a configuration of an electric hand device as a gripping device according to the present embodiment. In particular, FIG. 1A is a perspective view of the electric hand device, FIG. 1B is an exploded perspective view of the electric hand device, and FIG. 1C is a plan view of the electric hand device (along the Z direction). It is a figure when viewed from the outside. FIG. 2 is an exploded perspective view schematically showing the configuration of the electric actuator in FIG. 1. In each figure, the X direction (first direction), the Y direction (second direction), and the Z direction (third direction) are orthogonal to each other, and each of the X direction, each Y direction, and each Z direction. Match. Further, for ease of explanation, in the drawings other than FIG. 1A, the illustration of the first hand member 140a and the second hand member 140b as the gripping members is omitted. The electric hand device 100 includes a linear motion type (linear type) first vibration type actuator 101a and a linear motion type second vibration type actuator 101b. Further, the electric hand device 100 includes a first driven body unit 120a, a second driven body unit 120b, a base 130, a first hand member 140a, and a second hand member 140b (first gripping member, A second gripping member) is provided. The first hand member 140a and the second hand member 140b each have a plate-shaped member that exhibits an L shape when viewed from the Y direction, and correspond to the first driven body unit 120a and the second driven body unit 120a. It is attached to the body unit 120b. Since the first driven body unit 120a and the second driven body unit 120b are arranged so as to face each other in the X direction, the first hand member 140a and the second hand member 140b also face each other in the X direction. Arranged to do. Further, the first vibrating actuator 101a and the second vibrating actuator 101b drive the corresponding first driven body unit 120a and the second driven body unit 120b along the X direction. As a result, the first hand member 140a and the second hand member 140b attached to the first driven body unit 120a and the second driven body unit 120b approach and separate in the X direction. In the electric hand device 100, when the first hand member 140a and the second hand member 140b approach each other, a work (not shown) as an object to be gripped is gripped between them.

基台１３０は、Ｘ方向に沿って配置され、断面が上向きのコの字状を呈する直方体部材である。基台１３０はＸ方向に沿って形成された収容溝１３５、及び該収容溝１３５の底部を構成する連結部１３４を有し、収容溝１３５の各側壁には加圧ばね受け部１３１、２つのガイドピン１３２及びガイド溝部１３３が形成される。加圧ばね受け部１３１は円柱状の凹部を有し、各ガイドピン１３２はＹ方向に沿って突出する細円柱部材を有し、ガイド溝部１３３はＸ方向に沿って形成されたＶ字状の溝である。連結部１３４には不図示のロボットアームが連結される。収容溝１３５の各側壁に形成された各加圧ばね受け部１３１、各ガイドピン１３２及び各ガイド溝部１３３はそれぞれ対向する。 The base 130 is a rectangular parallelepiped member arranged along the X direction and having a U-shape with an upward cross section. The base 130 has an accommodating groove 135 formed along the X direction and a connecting portion 134 forming the bottom of the accommodating groove 135, and each side wall of the accommodating groove 135 has a pressure spring receiving portion 131 and two. The guide pin 132 and the guide groove portion 133 are formed. The pressure spring receiving portion 131 has a columnar recess, each guide pin 132 has a thin cylindrical member protruding along the Y direction, and the guide groove portion 133 has a V-shape formed along the X direction. It is a groove. A robot arm (not shown) is connected to the connecting portion 134. Each pressure spring receiving portion 131, each guide pin 132, and each guide groove portion 133 formed on each side wall of the accommodating groove 135 face each other.

第１の被駆動体ユニット１２０ａ及び第２の被駆動体ユニット１２０ｂはそれぞれ収容溝１３５に収容可能な方体状の本体１２１を有する。さらに第１の被駆動体ユニット１２０ａ及び第２の被駆動体ユニット１２０ｂはそれぞれ本体１２１の上面に形成された複数の取付穴１２２及び本体１２１の収容溝１３５の各側壁と対向する各側面に形成されたローラー１２３を有する。各取付穴１２２はねじ穴であり、不図示のねじを螺合させることにより、第１のハンド部材１４０ａ及び第２のハンド部材１４０ｂが各本体１２１へ締結される。なお、各取付穴１２２をねじ穴によって構成する必要は無く、例えば、一の取付穴１２２をピン穴とし、第１のハンド部材１４０ａ及び第２のハンド部材１４０ｂの底部に設けられたピンと嵌合させてもよい。ローラー１２３はＸ方向に配列された複数の円筒ころを有し、各円筒ころが各ガイド溝部１３３へ遊合することにより、クロスローラーガイドとして本体１２１をＸ方向に高精度に案内する。各ローラー１２３は本体１２１においてＹ方向において対向する２側面に設けられるため、各ローラー１２３が各ガイド溝部１３３に遊合することにより、本体１２１が安定的に支持される。なお、ローラー１２３はＸ方向に配列された複数のボールを有してもよい。この場合、ローラー１２３は、ボールガイドとして本体１２１をＸ方向に高精度に案内する。 The first driven body unit 120a and the second driven body unit 120b each have a square-shaped main body 121 that can be accommodated in the accommodating groove 135. Further, the first driven body unit 120a and the second driven body unit 120b are formed on a plurality of mounting holes 122 formed on the upper surface of the main body 121 and on each side surface facing each side wall of the accommodating groove 135 of the main body 121, respectively. It has a roller 123 that has been made. Each mounting hole 122 is a screw hole, and the first hand member 140a and the second hand member 140b are fastened to the main body 121 by screwing a screw (not shown). It is not necessary to configure each mounting hole 122 with a screw hole. For example, one mounting hole 122 is a pin hole and is fitted with a pin provided at the bottom of the first hand member 140a and the second hand member 140b. You may let me. The roller 123 has a plurality of cylindrical rollers arranged in the X direction, and each cylindrical roller engages with each guide groove portion 133 to guide the main body 121 in the X direction with high accuracy as a cross roller guide. Since the rollers 123 are provided on the two side surfaces of the main body 121 facing each other in the Y direction, the main body 121 is stably supported by the rollers 123 engaging with the guide groove portions 133. The roller 123 may have a plurality of balls arranged in the X direction. In this case, the roller 123 guides the main body 121 in the X direction with high accuracy as a ball guide.

第１の振動型アクチュエータ１０１ａ及び第２の振動型アクチュエータ１０１ｂは、収容溝１３５内にてＹ方向において互いに異なる位置に配置される。具体的には、第１の振動型アクチュエータ１０１ａ及び第２の振動型アクチュエータ１０１ｂは、収容溝１３５の各側壁へＹ方向において互いに対向するように配置される。また、電動ハンド装置１００では、電動ハンド装置１００のＸ方向の中心を通るＹ方向の中心線Ｌを挟み、且つＸ方向に沿って第１の被駆動体ユニット１２０ａ及び第２の被駆動体ユニット１２０ｂが配置される。ここで、第１の振動型アクチュエータ１０１ａは中心線Ｌよりも第１の被駆動体ユニット１２０ａ寄りに配置され、第２の振動型アクチュエータ１０１ｂは中心線Ｌよりも第２の被駆動体ユニット１２０ｂ寄りに配置される。第１の振動型アクチュエータ１０１ａは、後述する構成により、カムや減速機等を介することなく第１の被駆動体ユニット１２０ａを直接駆動する。また、第２の振動型アクチュエータ１０１ｂも、カムや減速機等を介することなく第２の被駆動体ユニット１２０ｂを直接駆動する。 The first vibrating actuator 101a and the second vibrating actuator 101b are arranged at different positions in the accommodation groove 135 in the Y direction. Specifically, the first vibrating actuator 101a and the second vibrating actuator 101b are arranged so as to face each side wall of the accommodating groove 135 in the Y direction. Further, in the electric hand device 100, the first driven body unit 120a and the second driven body unit 120a and the second driven body unit are sandwiched between the center line L in the Y direction passing through the center of the electric hand device 100 in the X direction and along the X direction. 120b is arranged. Here, the first vibrating actuator 101a is arranged closer to the first driven body unit 120a than the center line L, and the second vibrating actuator 101b is arranged closer to the second driven body unit 120b than the center line L. It is placed closer. The first vibration type actuator 101a directly drives the first driven body unit 120a without using a cam, a speed reducer, or the like, according to a configuration described later. Further, the second vibration type actuator 101b also directly drives the second driven body unit 120b without using a cam, a speed reducer, or the like.

第１の振動型アクチュエータ１０１ａは、第１の振動体１０２ａ、第１の移動体１１０ａ、第１の支持部材１０４ａ、フェルト１０５、イコライズプレート１０６及び加圧ばね１０７を有する。第１の振動型アクチュエータ１０１ａでは、第１の移動体１１０ａ、第１の振動体１０２ａ、第１の支持部材１０４ａ、フェルト１０５、イコライズプレート１０６及び加圧ばね１０７がこの順でＹ方向において重畳されるように配置される。第１の振動体１０２ａは、弾性体１０２２、弾性体１０２２の一方の面（以下、「接触面」という。）に設けられた２つの突起部１０２３、接触面とは反対側の面に設けられた圧電素子１０２１及び固定部１０２４を有する。本実施の形態では、第１の振動体１０２ａとして、２つの突起部１０２３を有する構成について説明するが、少なくとも１つの突起部１０２３が接触面に設けられればよい。弾性体１０２２は、例えば、マルテンサイト系のステンレス等の金属材料である長方形状の板状部材によって構成される。固定部１０２４は第１の振動体１０２ａを第１の支持部材１０４ａに固定するために用いられ、弾性体１０２２の長手方向（Ｘ方向）に関する両端に設けられる。突起部１０２３は、ばね性を有する形状で形成され、例えば、弾性体１０２２を構成する板状部材とプレス加工等によって一体的に形成される。なお、突起部１０２３は弾性体１０２２と一体的に形成に形成される必要は無く、例えば、各突起部１０２３が別部材として構成され、溶接等によって弾性体１０２２に固定されていてもよい。突起部１０２３の先端部は、後述するように、第１の移動体１１０ａの摺動面１１１と摩擦摺動する。したがって、突起部１０２３の先端部には、耐摩耗性を高めるための焼入処理等の硬化処理が施されることが好ましい。 The first vibrating actuator 101a includes a first vibrating body 102a, a first moving body 110a, a first support member 104a, a felt 105, an equalize plate 106, and a pressure spring 107. In the first vibrating actuator 101a, the first moving body 110a, the first vibrating body 102a, the first support member 104a, the felt 105, the equalize plate 106, and the pressure spring 107 are superposed in this order in the Y direction. Arranged so as to. The first vibrating body 102a is provided on the elastic body 1022, the two protrusions 1023 provided on one surface of the elastic body 1022 (hereinafter, referred to as "contact surface"), and the surface opposite to the contact surface. It has a piezoelectric element 1021 and a fixing portion 1024. In the present embodiment, the configuration having two protrusions 1023 as the first vibrating body 102a will be described, but at least one protrusion 1023 may be provided on the contact surface. The elastic body 1022 is composed of, for example, a rectangular plate-shaped member which is a metal material such as martensitic stainless steel. The fixing portions 1024 are used for fixing the first vibrating body 102a to the first supporting member 104a, and are provided at both ends of the elastic body 1022 in the longitudinal direction (X direction). The protrusion 1023 is formed in a shape having a spring property, and is integrally formed with, for example, a plate-shaped member constituting the elastic body 1022 by press working or the like. The protrusion 1023 does not have to be formed integrally with the elastic body 1022. For example, each protrusion 1023 may be configured as a separate member and fixed to the elastic body 1022 by welding or the like. The tip of the protrusion 1023 frictionally slides with the sliding surface 111 of the first moving body 110a, as will be described later. Therefore, it is preferable that the tip end portion of the protrusion 1023 is subjected to a hardening treatment such as a quenching treatment for enhancing wear resistance.

圧電素子１０２１は電気−機械エネルギー変換素子であり、接着剤を用いて弾性体１０２２に接合される。圧電素子１０２１は、長方形状の圧電セラミックスの両面に所定形状の電極が形成された構造を有する。圧電素子１０２１の電極には、不図示のフレキシブル配線板等を介して、所定の周波数の駆動電圧（交流電圧）が印加される。これにより、第１の振動体１０２ａに後述する第１の振動モードと第２の振動モードの振動が励起される。励起された振動は弾性体１０２２へ伝達され、２つの突起部１０２３を結ぶ方向（Ｘ方向）と突起部１０２３の突出方向（Ｙ方向）で規定される面内において、突起部１０２３の先端部に楕円運動を行わせることができる。後述するように、突起部１０２３は第１の移動体１１０ａに加圧接触するため、突起部１０２３が行う楕円運動によって第１の移動体１１０ａは摩擦駆動され、第１の移動体１１０ａを第１の振動体１０２ａに対して相対的にＸ方向に移動させる。なお、本実施の形態では、後述するように、第１の振動体１０２ａは、第１の支持部材１０４ａに支持されてＸ方向に移動することがないため、第１の移動体１１０ａが絶対的にＸ方向に移動する。 The piezoelectric element 1021 is an electric-mechanical energy conversion element, and is bonded to the elastic body 1022 using an adhesive. The piezoelectric element 1021 has a structure in which electrodes having a predetermined shape are formed on both sides of a rectangular piezoelectric ceramic. A drive voltage (AC voltage) having a predetermined frequency is applied to the electrodes of the piezoelectric element 1021 via a flexible wiring board (not shown) or the like. As a result, the first vibrating body 102a is excited by the vibrations of the first vibration mode and the second vibration mode, which will be described later. The excited vibration is transmitted to the elastic body 1022, and in the plane defined by the direction connecting the two protrusions 1023 (X direction) and the protrusion direction (Y direction) of the protrusions 1023, the tip of the protrusions 1023 Elliptical movement can be performed. As will be described later, since the protrusion 1023 is in pressure contact with the first moving body 110a, the first moving body 110a is frictionally driven by the elliptical movement performed by the protrusion 1023, and the first moving body 110a is first. It is moved in the X direction relative to the vibrating body 102a of. In the present embodiment, as will be described later, since the first vibrating body 102a is supported by the first supporting member 104a and does not move in the X direction, the first moving body 110a is absolute. Move in the X direction.

第１の移動体１１０ａはステンレス等の金属材料である長尺状（長方形状）の板状部材によって構成される。第１の移動体１１０ａは、第１の移動体１１０ａの第２のハンド部材１４０ｂ側の端部（以下、「内側端部」という。）１１５が、第１のハンド部材１４０ａの内側端部よりも第２のハンド部材１４０ｂ寄りになるように、Ｘ方向に沿って配置される。すなわち、Ｘ方向に関し、第１の移動体１１０ａの内側端部１１５が、第１のハンド部材１４０ａの内側端部よりも第２の被駆動体ユニット１２０ｂへ向けて突出する。第１の移動体１１０ａは、各突起部１０２３と接触する側面である摺動面１１１、第１の被駆動体ユニット１２０ａが取り付けられる取付部１１２、及び逃げ部１１３を有する。取付部１１２及び逃げ部１１３は第１の移動体１１０ａにおけるＺ方向に関する同じ端部に設けられる。取付部１１２には、接着剤や溶接等によって第１の被駆動体ユニット１２０ａが接合される。なお、第１の被駆動体ユニット１２０ａへの振動伝達を抑制するために、ブチルゴムやシリコーンゴム等のゴム材料である振動減衰部材（図示しない）を間に介して取付部１１２及び第１の被駆動体ユニット１２０ａが接合されてもよい。また、振動減衰部材として第１の移動体１１０ａや本体１２１よりも剛性の低い樹脂材料を用いてもよい。これにより、第１の被駆動体ユニット１２０ａに取り付けられる第１のハンド部材１４０ａへの第１の振動体１０２ａからの振動伝達が抑制される。また、第１のハンド部材１４０ａからの外力が第１の移動体１１０ａを通じて各突起部１０２３に伝わるのを緩和することができる。逃げ部１１３は、本体１２１の内側端部よりも第２のハンド部材１４０ｂ寄りに設けられ、Ｚ方向において取付部１１２よりも一段低く形成される。これにより、第１の被駆動体ユニット１２０ａ及び第２の被駆動体ユニット１２０ｂが最も接近した際、第２の被駆動体ユニット１２０ｂの本体１２１は、第１の移動体１１０ａの上方へ進入しても第１の移動体１１０ａと接触することがない。なお、本実施の形態では、取付部１１２のＸ方向の長さ、及び逃げ部１１３のＸ方向の長さは、本体１２１のＸ方向の長さと等しい。摺動面１１１は、第１の移動体１１０ａの側面をプレス加工や切削加工等によって平面状に加工し、さらに、ラップ加工等の平滑化加工を施すことによって形成される。また、摺動面１１１には、窒化処理等の硬化処理が施されて耐摩耗性が向上される。第１の移動体１１０ａは、摺動面１１１において、後述する加圧ばね１０７により、Ｙ方向に沿う所定の加圧力で第１の振動体１０２ａ（突起部１０２３）と加圧接触する。 The first moving body 110a is composed of a long (rectangular) plate-shaped member which is a metal material such as stainless steel. In the first moving body 110a, the end portion (hereinafter, referred to as “inner end portion”) 115 of the first moving body 110a on the second hand member 140b side is from the inner end portion of the first hand member 140a. Is also arranged along the X direction so as to be closer to the second hand member 140b. That is, in the X direction, the inner end portion 115 of the first moving body 110a protrudes from the inner end portion of the first hand member 140a toward the second driven body unit 120b. The first moving body 110a has a sliding surface 111 which is a side surface in contact with each protrusion 1023, a mounting portion 112 to which the first driven body unit 120a is mounted, and a relief portion 113. The attachment portion 112 and the relief portion 113 are provided at the same end portion of the first moving body 110a in the Z direction. The first driven body unit 120a is joined to the mounting portion 112 by an adhesive, welding, or the like. In addition, in order to suppress vibration transmission to the first driven body unit 120a, the mounting portion 112 and the first covering are interposed with a vibration damping member (not shown) which is a rubber material such as butyl rubber or silicone rubber. The drive unit 120a may be joined. Further, as the vibration damping member, a resin material having a lower rigidity than the first moving body 110a or the main body 121 may be used. As a result, vibration transmission from the first vibrating body 102a to the first hand member 140a attached to the first driven body unit 120a is suppressed. Further, it is possible to alleviate the external force from the first hand member 140a being transmitted to each protrusion 1023 through the first moving body 110a. The relief portion 113 is provided closer to the second hand member 140b than the inner end portion of the main body 121, and is formed one step lower than the mounting portion 112 in the Z direction. As a result, when the first driven body unit 120a and the second driven body unit 120b are closest to each other, the main body 121 of the second driven body unit 120b enters above the first moving body 110a. However, it does not come into contact with the first moving body 110a. In the present embodiment, the length of the mounting portion 112 in the X direction and the length of the relief portion 113 in the X direction are equal to the length of the main body 121 in the X direction. The sliding surface 111 is formed by processing the side surface of the first moving body 110a into a flat surface by press working, cutting, or the like, and further performing smoothing processing such as lapping. Further, the sliding surface 111 is subjected to a hardening treatment such as a nitriding treatment to improve wear resistance. The first moving body 110a comes into pressure contact with the first vibrating body 102a (projection portion 1023) on the sliding surface 111 by a pressure spring 107 described later with a predetermined pressure along the Y direction.

第１の支持部材１０４ａは、長尺状の板状部材によって構成され、２つのガイド穴部１０４１及び２つの支持部１０４２を有する。支持部１０４２は第１の支持部材１０４ａの第１の移動体１１０ａ側の面からＹ方向に突出する受け部である。第１の振動体１０２ａの固定部１０２４が支持部１０４２に対して溶接や接着等によって接合される。固定部１０２４は弾性体１０２２の両端に設けられるため、振動が励起された際でも振幅が小さい。したがって、第１の支持部材１０４ａを介して基台１３０へ大きな振動が伝達されることが無い。また、固定部１０２４を支持部１０４２に固定しても、弾性体１０２２の振動を阻害することが無い。各ガイド穴部１０４１は、Ｙ方向に沿って眺めたとき、各突起部１０２３及び各固定部１０２４の間に設けられる。また、一のガイド穴部１０４１は丸穴形状を呈し、他のガイド穴部１０４１はＸ方向に略平行に伸びた長穴形状を有する。各ガイド穴部１０４１には各ガイドピン１３２が挿通される。ガイドピン１３２の外径及びガイド穴部１０４１の外径の差は、ガイドピン１３２に対して第１の支持部材１０４ａがＸ方向では移動不可となる寸法公差（はめあい公差）に設定される。したがって、ガイドピン１３２によって第１の支持部材１０４ａのＸ方向の移動は規制され、第１の支持部材１０４ａに接合された第１の振動体１０２ａもＸ方向の移動が規制される。一方で、第１の支持部材１０４ａや第１の振動体１０２ａのＹ方向の移動は規制されないため、第１の移動体１１０ａの平面度の公差や傾きを吸収し、Ｙ方向に関する安定した接触を保つことができる。第１の振動体１０２ａは、加圧ばね１０７、イコライズプレート１０６及びフェルト１０５を介して加圧ばね受け部１３１によって支持される。加圧ばね１０７は円錐コイルばねであり、加圧ばね１０７、イコライズプレート１０６及びフェルト１０５は、第１の振動体１０２ａ及び第１の移動体１１０ａをＹ方向において加圧接触させる加圧手段として機能する。なお、加圧ばね１０７は、コイルばねや板ばね等、弾性力を利用したばねを用いる構造であればよい。 The first support member 104a is composed of an elongated plate-shaped member, and has two guide hole portions 1041 and two support portions 1042. The support portion 1042 is a receiving portion that protrudes in the Y direction from the surface of the first support member 104a on the side of the first moving body 110a. The fixed portion 1024 of the first vibrating body 102a is joined to the support portion 1042 by welding, adhesion, or the like. Since the fixing portions 1024 are provided at both ends of the elastic body 1022, the amplitude is small even when vibration is excited. Therefore, a large vibration is not transmitted to the base 130 via the first support member 104a. Further, even if the fixing portion 1024 is fixed to the support portion 1042, the vibration of the elastic body 1022 is not hindered. Each guide hole portion 1041 is provided between each protrusion portion 1023 and each fixing portion 1024 when viewed along the Y direction. Further, one guide hole portion 1041 has a round hole shape, and the other guide hole portion 1041 has an elongated hole shape extending substantially parallel to the X direction. Each guide pin 132 is inserted into each guide hole portion 1041. The difference between the outer diameter of the guide pin 132 and the outer diameter of the guide hole portion 1041 is set to a dimensional tolerance (fitting tolerance) at which the first support member 104a cannot move in the X direction with respect to the guide pin 132. Therefore, the movement of the first support member 104a in the X direction is restricted by the guide pin 132, and the movement of the first vibrating body 102a joined to the first support member 104a is also restricted in the X direction. On the other hand, since the movement of the first support member 104a and the first vibrating body 102a in the Y direction is not regulated, the tolerance and inclination of the flatness of the first moving body 110a are absorbed, and stable contact with respect to the Y direction is achieved. Can be kept. The first vibrating body 102a is supported by the pressure spring receiving portion 131 via the pressure spring 107, the equalize plate 106 and the felt 105. The pressurizing spring 107 is a conical coil spring, and the pressurizing spring 107, the equalize plate 106, and the felt 105 function as a pressurizing means for pressurizing and contacting the first vibrating body 102a and the first moving body 110a in the Y direction. do. The pressure spring 107 may have a structure that uses a spring that utilizes elastic force, such as a coil spring or a leaf spring.

次に、第１の振動型アクチュエータ１０１ａの駆動（第１の移動体１１０ａのＸ方向の移動）に用いられる固有振動モードについて説明する。図３は、図２における振動型アクチュエータの振動体において励起される各振動モードを説明するための斜視図であり、図３（Ａ）は第１の振動モードを示し、図３（Ｂ）は第２の振動モードを示す。なお、図３（Ａ）及び図３（Ｂ）では、理解を容易にするために、変位量が強調して表示される。また、図３（Ａ）及び図３（Ｂ）におけるＸ方向、Ｙ方向及びＺ方向のそれぞれは、図１（Ａ）〜図１（Ｃ）におけるＸ方向、Ｙ方向及びＺ方向のそれぞれと一致する。 Next, the natural vibration mode used for driving the first vibration type actuator 101a (movement of the first moving body 110a in the X direction) will be described. 3A and 3B are perspective views for explaining each vibration mode excited in the vibrating body of the vibration type actuator in FIG. 2, FIG. 3A shows a first vibration mode, and FIG. 3B shows a first vibration mode. The second vibration mode is shown. In addition, in FIG. 3A and FIG. 3B, the displacement amount is emphasized and displayed for easy understanding. Further, the X direction, the Y direction, and the Z direction in FIGS. 3 (A) and 3 (B) coincide with the X direction, the Y direction, and the Z direction in FIGS. 1 (A) to 1 (C), respectively. do.

まず、第１の振動モードは、Ｘ方向において２次の屈曲振動を生じるモードであり、Ｚ方向と略平行な３本の節を有し、各突起部１０２３は、第１の振動モードの振動によってＸ方向において往復運動を行う。このとき、各突起部１０２３を第１の振動モードの振動で節となる位置の近傍に設けることにより、各突起部１０２３のＸ方向に関する変位を大きくすることができる。また、第２の振動モードは、Ｚ方向において１次の屈曲振動を生じるモードであり、Ｘ方向と略平行な２本の節を有し、各突起部１０２３は、第２の振動モードの振動によってＹ方向において往復運動を行う。このとき、各突起部１０２３を第２の振動モードの振動で腹となる位置の近傍に設けることにより、各突起部１０２３のＹ方向に関する変位を大きくすることができる。なお、第１の振動体１０２ａの固定部１０２４は、第１の振動モードの振動振幅が小さくなる節の近傍で、且つ、第２の振動モードの振動振幅が小さくなる節の近傍で、支持部１０４２に固定される。第１の振動モード及び第２の振動モードを組み合わせることにより、突起部１０２３の先端部に略ＸＹ面内において楕円運動を行わせ、これにより、略Ｘ方向に第１の移動体１１０ａを摩擦駆動する駆動力を発生させることができる。このとき、２つの突起部１０２３がそれぞれ、第１の振動モードの節の位置、且つ、第２の振動モードの腹の位置に設けられることで、突起部１０２３の振動変位を最も大きくすることができるため、高い駆動力を得ることができる。 First, the first vibration mode is a mode in which a secondary bending vibration is generated in the X direction, has three nodes substantially parallel to the Z direction, and each protrusion 1023 vibrates in the first vibration mode. Reciprocates in the X direction. At this time, by providing each protrusion 1023 in the vicinity of the position where the vibration of the first vibration mode becomes a node, the displacement of each protrusion 1023 in the X direction can be increased. Further, the second vibration mode is a mode in which a primary bending vibration is generated in the Z direction, has two nodes substantially parallel to the X direction, and each protrusion 1023 vibrates in the second vibration mode. Reciprocates in the Y direction. At this time, by providing each protrusion 1023 in the vicinity of the position that becomes an antinode due to the vibration of the second vibration mode, the displacement of each protrusion 1023 in the Y direction can be increased. The fixed portion 1024 of the first vibrating body 102a is a support portion in the vicinity of the node where the vibration amplitude of the first vibration mode is small and in the vicinity of the node where the vibration amplitude of the second vibration mode is small. It is fixed to 1042. By combining the first vibration mode and the second vibration mode, the tip of the protrusion 1023 is made to perform an elliptical motion in a substantially XY plane, whereby the first moving body 110a is frictionally driven in the substantially X direction. It is possible to generate a driving force. At this time, the two protrusions 1023 are provided at the node position of the first vibration mode and the antinode position of the second vibration mode, respectively, so that the vibration displacement of the protrusion 1023 can be maximized. Therefore, a high driving force can be obtained.

なお、電動ハンド装置１００では、第２の振動型アクチュエータ１０１ｂも、第２の移動体１１０ｂ、第２の振動体１０２ｂ及び第２の支持部材１０４ｂを除いて第１の振動型アクチュエータ１０１ａと同様の構成を有する。したがって、第２の振動型アクチュエータ１０１ｂの構成、作用については説明を省略する。第２の移動体１１０ｂはステンレス等の金属材料である長尺状の板状部材によって構成される。第２の移動体１１０ｂは、第２の移動体１１０ｂの第１のハンド部材１４０ａ側の端部（以下、「内側端部」という。）１１５が、第２のハンド部材１４０ｂの内側端部よりも第１のハンド部材１４０ａ寄りになるように、Ｘ方向に沿って配置される。すなわち、Ｘ方向に関し、第２の移動体１１０ｂの内側端部１１５が、第２のハンド部材１４０ｂの内側端部よりも第１の被駆動体ユニット１２０ａへ向けて突出する。なお、第２の振動体１０２ｂ及び第２の支持部材１０４ｂはそれぞれ、第１の振動体１０２ａ及び第１の支持部材１０４ａと同様の構成を有する。 In the electric hand device 100, the second vibrating actuator 101b is also the same as the first vibrating actuator 101a except for the second moving body 110b, the second vibrating body 102b, and the second support member 104b. Has a configuration. Therefore, the description of the configuration and operation of the second vibration type actuator 101b will be omitted. The second moving body 110b is composed of a long plate-shaped member which is a metal material such as stainless steel. In the second moving body 110b, the end portion (hereinafter, referred to as “inner end portion”) 115 of the second moving body 110b on the first hand member 140a side is from the inner end portion of the second hand member 140b. Is also arranged along the X direction so as to be closer to the first hand member 140a. That is, in the X direction, the inner end portion 115 of the second moving body 110b projects from the inner end portion of the second hand member 140b toward the first driven body unit 120a. The second vibrating body 102b and the second supporting member 104b have the same configurations as the first vibrating body 102a and the first supporting member 104a, respectively.

次に、電動ハンド装置１００における第１の移動体１１０ａ、第２の移動体１１０ｂ、第１の被駆動体ユニット１２０ａ及び第２の被駆動体ユニット１２０ｂの位置関係について説明する。図４は、各被駆動体ユニットが最も離間した場合の各移動体及び各被駆動体ユニットの位置関係を示す図である。図５は、各被駆動体ユニットが最も離間した状態から最も接近した状態へ移行する場合の各移動体及び各被駆動体ユニットの位置関係を示す図である。図６は、各被駆動体ユニットが最も接近した場合の各移動体及び各被駆動体ユニットの位置関係を示す図である。また、図４（Ａ）、図５（Ａ）及び図６（Ａ）は平面図であり、図４（Ｂ）、図５（Ｂ）及び図６（Ｂ）は、図４（Ａ）、図５（Ａ）及び図６（Ａ）における線Ａ−Ａに沿う断面図であり、図４（Ｃ）、図５（Ｃ）及び図６（Ｃ）は底面図である。 Next, the positional relationship between the first moving body 110a, the second moving body 110b, the first driven body unit 120a, and the second driven body unit 120b in the electric hand device 100 will be described. FIG. 4 is a diagram showing the positional relationship between each moving body and each driven body unit when the driven body units are most separated from each other. FIG. 5 is a diagram showing the positional relationship between each moving body and each driven body unit when each driven body unit shifts from the most distant state to the closest state. FIG. 6 is a diagram showing the positional relationship between each moving body and each driven body unit when the driven body units are closest to each other. 4 (A), 5 (A) and 6 (A) are plan views, and FIGS. 4 (B), 5 (B) and 6 (B) are shown in FIGS. 4 (A) and 6 (A). 5 (A) and 6 (A) are cross-sectional views taken along the line AA, and FIGS. 4 (C), 5 (C) and 6 (C) are bottom views.

まず、第１の被駆動体ユニット１２０ａ及び第２の被駆動体ユニット１２０ｂが最も離間した場合について説明する。この場合、Ｘ方向に関する第１の被駆動体ユニット１２０ａの本体１２１の第２のハンド部材１４０ｂとは反対側の端部（以下、「外側端部」という。）は、基台１３０のＸ方向に関する一の端部と一致する。また、Ｘ方向に関する第１の移動体１１０ａの外側端部１１４も、基台１３０のＸ方向に関する一の端部と一致する。さらに、Ｘ方向に関する第２の被駆動体ユニット１２０ｂの本体１２１の第１のハンド部材１４０ａとは反対側の端部（以下、「外側端部」という。）は、基台１３０のＸ方向に関する他の端部と一致する。また、Ｘ方向に関する第２の移動体１１０ｂの外側端部１１４も、基台１３０のＸ方向に関する他の端部と一致する。すなわち、第１の被駆動体ユニット１２０ａ及び第２の被駆動体ユニット１２０ｂが最も離間した場合であっても、基台１３０の各端部から第１の被駆動体ユニット１２０ａ及び第２の被駆動体ユニット１２０ｂが突出することがない。また、基台１３０の各端部から第１の移動体１１０ａ及び第２の移動体１１０ｂも突出することがない。このとき、Ｘ方向に関する第１の移動体１１０ａの内側端部１１５は中心線Ｌと一致する。また、Ｘ方向に関する第２の移動体１１０ｂの内側端部１１５も中心線Ｌと一致する。 First, a case where the first driven body unit 120a and the second driven body unit 120b are most separated from each other will be described. In this case, the end portion (hereinafter, referred to as "outer end portion") of the main body 121 of the first driven body unit 120a in the X direction opposite to the second hand member 140b is in the X direction of the base 130. Consistent with one end of. Further, the outer end 114 of the first moving body 110a in the X direction also coincides with one end of the base 130 in the X direction. Further, the end portion (hereinafter, referred to as "outer end portion") of the main body 121 of the second driven body unit 120b in the X direction opposite to the first hand member 140a relates to the X direction of the base 130. Match the other edges. Further, the outer end 114 of the second moving body 110b in the X direction also coincides with the other end of the base 130 in the X direction. That is, even when the first driven body unit 120a and the second driven body unit 120b are most separated from each other, the first driven body unit 120a and the second driven body unit 120a and the second driven body unit 120a are separated from each end of the base 130. The drive unit 120b does not protrude. Further, the first moving body 110a and the second moving body 110b do not protrude from each end of the base 130. At this time, the inner end portion 115 of the first moving body 110a in the X direction coincides with the center line L. Further, the inner end portion 115 of the second moving body 110b in the X direction also coincides with the center line L.

次に、第１の被駆動体ユニット１２０ａ及び第２の被駆動体ユニット１２０ｂが最も離間した状態から最も接近した状態へ移行し始めた場合について説明する。この場合、第１の移動体１１０ａの内側端部１１５は中心線Ｌよりも第２の被駆動体ユニット１２０ｂ側に移動する。また、第２の移動体１１０ｂの内側端部１１５は中心線Ｌよりも第１の被駆動体ユニット１２０ａ側へ移動する。このとき、Ｙ方向から第１の移動体１１０ａ及び第２の移動体１１０ｂを眺めると、第１の移動体１１０ａ及び第２の移動体１１０ｂは一部が互いに重畳する（図５（Ｂ））。ここで、図１（Ｃ）に示すように、第１の移動体１１０ａ及び第２の移動体１１０ｂはＹ方向において互いに異なる位置に配置される。したがって、第１の移動体１１０ａ及び第２の移動体１１０ｂがＸ方向に沿って互いに接近するように移動しても、第１の移動体１１０ａ及び第２の移動体１１０ｂは互いに干渉することがない。 Next, a case where the first driven body unit 120a and the second driven body unit 120b start to shift from the most distant state to the closest state will be described. In this case, the inner end portion 115 of the first moving body 110a moves to the second driven body unit 120b side with respect to the center line L. Further, the inner end portion 115 of the second moving body 110b moves toward the first driven body unit 120a with respect to the center line L. At this time, when the first moving body 110a and the second moving body 110b are viewed from the Y direction, a part of the first moving body 110a and the second moving body 110b overlap each other (FIG. 5 (B)). .. Here, as shown in FIG. 1C, the first moving body 110a and the second moving body 110b are arranged at different positions in the Y direction. Therefore, even if the first moving body 110a and the second moving body 110b move so as to approach each other along the X direction, the first moving body 110a and the second moving body 110b may interfere with each other. do not have.

さらに、第１の被駆動体ユニット１２０ａ及び第２の被駆動体ユニット１２０ｂが最も接近した場合について説明する。この場合、第１の被駆動体ユニット１２０ａ及び第２の被駆動体ユニット１２０ｂの本体１２１は中心線Ｌ上において互いに接触する。上述したように、第１の移動体１１０ａ及び第２の移動体１１０ｂには逃げ部１１３が設けられるため、第１の移動体１１０ａは第２の被駆動体ユニット１２０ｂと接触せず、第２の移動体１１０ｂは第１の被駆動体ユニット１２０ａと接触しない。また、このとき、Ｙ方向から第１の移動体１１０ａ及び第２の移動体１１０ｂを眺めると、第１の移動体１１０ａ及び第２の移動体１１０ｂは殆どの部分が互いに重畳する（図６（Ｂ））。 Further, a case where the first driven body unit 120a and the second driven body unit 120b are closest to each other will be described. In this case, the main body 121 of the first driven body unit 120a and the second driven body unit 120b come into contact with each other on the center line L. As described above, since the first moving body 110a and the second moving body 110b are provided with the relief portion 113, the first moving body 110a does not come into contact with the second driven body unit 120b, and the second moving body 110a does not come into contact with the second driven body unit 120b. The moving body 110b does not come into contact with the first driven body unit 120a. At this time, when the first moving body 110a and the second moving body 110b are viewed from the Y direction, most of the first moving body 110a and the second moving body 110b overlap each other (FIG. 6 (FIG. 6). B)).

電動ハンド装置１００によれば、第１の移動体１１０ａに加圧接触する第１の振動体１０２ａが、励起された振動により、第１のハンド部材１４０ａが取り付けられた第１の移動体１１０ａを直接駆動してＸ方向に沿って移動させる。また、第２の移動体１１０ｂに加圧接触する第２の振動体１０２ｂが、励起された振動により、第２のハンド部材１４０ｂが取り付けられた第２の移動体１１０ｂを直接駆動してＸ方向に沿って移動させる。これにより、間にワークを把持する第１のハンド部材１４０ａ及び第２のハンド部材１４０ｂのＸ方向の移動の実現にカム溝やカムフォロア、又はピニオンギアやラックギアを用いる必要を無くすことができる。その結果、カム溝を有するカム部材や、ピニオンギア等の減速機を用いること無く電動ハンド装置１００を構成することができ、もって、電動ハンド装置１００の軽量化及び小型化を実現することができる。また、電動ハンド装置１００では、カム溝やカムフォロア、又はピニオンギアやラックギアを用いる必要を無くすことができるため、バックラッシュが発生することがない。その結果、第１のハンド部材１４０ａ及び第２のハンド部材１４０ｂの位置決め精度を向上させ、さらに、第１のハンド部材１４０ａ及び第２のハンド部材１４０ｂの位置決めの応答性を向上することができる。また、減速機に起因するエネルギー損失が発生しなくなるため、電動ハンド装置１００を効率よく駆動することができる。さらに、電動ハンド装置１００では、ギア等の駆動音が発生しないため、把持作業において騒音が発生するのを防止することができる。また、電動ハンド装置１００では、Ｚ方向に突出して配置される回転型のモータを用いることなく、第１のハンド部材１４０ａ及び第２のハンド部材１４０ｂをＸ方向に沿って移動させることができる。これにより、特に、電動ハンド装置１００をＺ方向において顕著に小型化することができる。 According to the electric hand device 100, the first vibrating body 102a, which is in pressure contact with the first moving body 110a, causes the first moving body 110a to which the first hand member 140a is attached by the excited vibration. It is driven directly and moved along the X direction. Further, the second vibrating body 102b, which is in pressure contact with the second moving body 110b, directly drives the second moving body 110b to which the second hand member 140b is attached by the excited vibration in the X direction. Move along. As a result, it is possible to eliminate the need to use a cam groove, a cam follower, a pinion gear, or a rack gear to realize the movement of the first hand member 140a and the second hand member 140b that grip the workpiece in the X direction. As a result, the electric hand device 100 can be configured without using a cam member having a cam groove or a speed reducer such as a pinion gear, and thus the weight and size of the electric hand device 100 can be reduced. .. Further, in the electric hand device 100, it is possible to eliminate the need to use a cam groove, a cam follower, a pinion gear, or a rack gear, so that backlash does not occur. As a result, the positioning accuracy of the first hand member 140a and the second hand member 140b can be improved, and the positioning responsiveness of the first hand member 140a and the second hand member 140b can be improved. Further, since the energy loss caused by the speed reducer is not generated, the electric hand device 100 can be efficiently driven. Further, in the electric hand device 100, since the driving noise of the gear or the like is not generated, it is possible to prevent the noise from being generated in the gripping operation. Further, in the electric hand device 100, the first hand member 140a and the second hand member 140b can be moved along the X direction without using a rotary motor that is arranged so as to project in the Z direction. Thereby, in particular, the electric hand device 100 can be remarkably miniaturized in the Z direction.

また、電動ハンド装置１００では、加圧ばね１０７が第１の振動体１０２ａを第１の移動体１１０ａに加圧接触させる。また、加圧ばね１０７が第２の振動体１０２ｂを第２の移動体１１０ｂに加圧接触させる。これにより、第１の振動体１０２ａや第２の振動体１０２ｂの圧電素子１０２１へ電力が供給されなくても、第１のハンド部材１４０ａ及び第２のハンド部材１４０ｂが自由に移動するのを防止することができる。すなわち、電動ハンド装置１００では、第１の振動型アクチュエータ１０１ａ及び第２の振動型アクチュエータ１０１ｂへ電力が供給されなくてもワークを確実に保持することができる。これにより、ワークを把持するために常に通電が必要なＤＣモータやＡＣモータ等の電磁モータを駆動源とする従来の電動ハンド装置と比べて、電力消費や発熱を抑制することができる。また、第１のハンド部材１４０ａ及び第２のハンド部材１４０ｂのブレーキ等も不要となるため、従来の電動ハンド装置と比べて、小型化することができる。 Further, in the electric hand device 100, the pressure spring 107 brings the first vibrating body 102a into pressure contact with the first moving body 110a. Further, the pressure spring 107 brings the second vibrating body 102b into pressure contact with the second moving body 110b. This prevents the first hand member 140a and the second hand member 140b from freely moving even if power is not supplied to the piezoelectric element 1021 of the first vibrating body 102a and the second vibrating body 102b. can do. That is, in the electric hand device 100, the work can be reliably held even if power is not supplied to the first vibrating actuator 101a and the second vibrating actuator 101b. As a result, power consumption and heat generation can be suppressed as compared with a conventional electric hand device that uses an electromagnetic motor such as a DC motor or an AC motor that always needs to be energized to grip the work as a drive source. Further, since the brakes and the like of the first hand member 140a and the second hand member 140b are not required, the size can be reduced as compared with the conventional electric hand device.

さらに、電動ハンド装置１００では、第１の移動体１１０ａ及び第２の移動体１１０ｂには逃げ部１１３が設けられる。したがって、第１の移動体１１０ａは第２の被駆動体ユニット１２０ｂと接触せず、第２の移動体１１０ｂは第１の被駆動体ユニット１２０ａと接触しない。これにより、第１の移動体１１０ａや第２の移動体１１０ｂの移動量が第１の被駆動体ユニット１２０ａや第２の被駆動体ユニット１２０ｂによって規制されるのを防止することができる。その結果、第１のハンド部材１４０ａ及び第２のハンド部材１４０ｂの移動量を大きくすることができ、第１のハンド部材１４０ａ及び第２のハンド部材１４０ｂの間に把持されるワークの大きさに自由度を持たせることができる。 Further, in the electric hand device 100, the first moving body 110a and the second moving body 110b are provided with a relief portion 113. Therefore, the first moving body 110a does not come into contact with the second driven body unit 120b, and the second moving body 110b does not come into contact with the first driven body unit 120a. Thereby, it is possible to prevent the movement amount of the first moving body 110a and the second moving body 110b from being regulated by the first driven body unit 120a and the second driven body unit 120b. As a result, the amount of movement of the first hand member 140a and the second hand member 140b can be increased, and the size of the work gripped between the first hand member 140a and the second hand member 140b can be increased. You can have a degree of freedom.

また、電動ハンド装置１００では、第１のハンド部材１４０ａ及び第２のハンド部材１４０ｂが振動減衰部材を介して第１の移動体１１０ａ及び第２の移動体１１０ｂに取り付けられる。これにより、第１のハンド部材１４０ａ及び第２のハンド部材１４０ｂへの第１の振動体１０２ａ及び第２の振動体１０２ｂからの振動伝達が抑制される。その結果、第１のハンド部材１４０ａ及び第２のハンド部材１４０ｂによって把持されたワークが（振動によって）落下するのを防止することができる。 Further, in the electric hand device 100, the first hand member 140a and the second hand member 140b are attached to the first moving body 110a and the second moving body 110b via the vibration damping member. As a result, vibration transmission from the first vibrating body 102a and the second vibrating body 102b to the first hand member 140a and the second hand member 140b is suppressed. As a result, it is possible to prevent the work gripped by the first hand member 140a and the second hand member 140b from falling (due to vibration).

ところで、２つの被駆動体ユニットをＸ方向において互いに対向するよう配置する場合、例えば、各被駆動体ユニットが取り付けられる各移動体をＹ方向において同じ位置に配置することも考えられる。この場合、Ｙ方向から眺めたときに、各被駆動体ユニットが取り付けられる各移動体は、互いに重畳しないように配置される。図７は、各移動体が重畳して配置されない電動ハンド装置（比較例）の構成を概略的に示す断面図である。図７（Ａ）は比較例において各被駆動体ユニットが最も接近した場合を示し、図７（Ｂ）は比較例において各被駆動体ユニットが最も離間した場合を示す。なお、図７（Ａ），図７（Ｂ）では、比較例において電動ハンド装置１００の各構成要素と対応する各構成要素には同じ符号が付され、第１のハンド部材１４０ａ及び第２のハンド部材１４０ｂが省略される。 By the way, when two driven body units are arranged so as to face each other in the X direction, for example, it is conceivable to arrange each moving body to which each driven body unit is attached at the same position in the Y direction. In this case, when viewed from the Y direction, the moving bodies to which the driven body units are attached are arranged so as not to overlap each other. FIG. 7 is a cross-sectional view schematically showing the configuration of an electric hand device (comparative example) in which the moving bodies are not superposed and arranged. FIG. 7A shows the case where the driven body units are closest to each other in the comparative example, and FIG. 7B shows the case where the driven body units are closest to each other in the comparative example. In addition, in FIGS. 7A and 7B, the same reference numerals are given to the respective components of the electric hand device 100 and the corresponding components in the comparative example, and the first hand member 140a and the second hand member 140a and the second The hand member 140b is omitted.

例えば、比較例では、第１の移動体１１０ａ及び第２の移動体１１０ｂがＸ方向において直列的に配置されるとともに、第１の移動体１１０ａ及び第２の移動体１１０ｂのＹ方向に関する位置が一致する。このとき、第１の被駆動体ユニット１２０ａ及び第２の被駆動体ユニット１２０ｂが最も接近すると、第１の被駆動体ユニット１２０ａ及び第２の被駆動体ユニット１２０ｂの本体１２１は中心線Ｌ上で互いに接触する。また、同時に、第１の移動体１１０ａ及び第２の移動体１１０ｂの内側端部１１５も中心線Ｌ上で互いに接触する。その後、第１の被駆動体ユニット１２０ａ及び第２の被駆動体ユニット１２０ｂが最も離間すると、第１の被駆動体ユニット１２０ａの本体１２１の外側端部は、基台１３０のＸ方向に関する一の端部と一致する。また、第２の被駆動体ユニット１２０ｂの本体１２１の外側端部は、基台１３０のＸ方向に関する他の端部と一致する。しかしながら、第１の移動体１１０ａの外側端部１１４は、基台１３０のＸ方向に関する一の端部と一致せずに、基台１３０から突出する。また、第２の移動体１１０ｂの外側端部１１４も、基台１３０のＸ方向に関する他の端部と一致せずに、基台１３０から突出する。すなわち、比較例の電動ハンド装置はＸ方向において大型化する。一方、第１の移動体１１０ａ及び第２の移動体１１０ｂを短縮して基台１３０から突出するのを防止することが考えられる。しかしながら、第１のハンド部材１４０ａ及び第２のハンド部材１４０ｂのＸ方向に関する移動量は第１の移動体１１０ａ及び第２の移動体１１０ｂの（摺動面１１１の）長さに比例する。したがって、第１の移動体１１０ａ及び第２の移動体１１０ｂを短縮すると、第１のハンド部材１４０ａ及び第２のハンド部材１４０ｂの移動量が減少し、間に把持されるワークの大きさが制限される。これに対応して、本実施の形態における電動ハンド装置１００では、上述したように、第１の移動体１１０ａ及び第２の移動体１１０ｂはＹ方向において互いに異なる位置に配置される。また、Ｙ方向から第１の移動体１１０ａ及び第２の移動体１１０ｂを眺めたときに、第１の移動体１１０ａ及び第２の移動体１１０ｂの一部が重畳することがある。これを換言すれば、第１の移動体１１０ａ及び第２の移動体１１０ｂがＹ方向において互いに対向するように配置されることがある。これにより、第１の移動体１１０ａ及び第２の移動体１１０ｂをＸ方向において互いに接近するように移動させても、第１の移動体１１０ａ及び第２の移動体１１０ｂは中心線Ｌ上で互いに接触することが無い。したがって、第１の移動体１１０ａの内側端部１１５を、Ｘ方向に関し、第１のハンド部材１４０ａの内側端部よりも第２の被駆動体ユニット１２０ｂへ向けて突出させることができる。また、第２の移動体１１０ｂの内側端部１１５を、Ｘ方向に関し、第２のハンド部材１４０ｂの内側端部よりも第１の被駆動体ユニット１２０ａへ向けて突出させることができる。これにより、第１の移動体１１０ａ及び第２の移動体１１０ｂを接触させることなく、第１の移動体１１０ａ及び第２の移動体１１０ｂをＸ方向において延伸させることができる。その結果、第１のハンド部材１４０ａ及び第２のハンド部材１４０ｂの移動量を確保して把持されるワークの大きさに自由度を持たせることができる。さらに、第１の移動体１１０ａを長くしても、第１の被駆動体ユニット１２０ａの本体１２１の外側端部から第１の移動体１１０ａの外側端部１１４が突出する量を減らすことができる。また、第２の移動体１１０ｂを長くしても、第２の被駆動体ユニット１２０ｂの本体１２１の外側端部から第２の移動体１１０ｂの外側端部１１４が突出する量を減らすことができる。すなわち、第１の移動体１１０ａ及び第２の移動体１１０ｂの外側端部１１４が基台１３０から突出するのを防止することができる。これにより、電動ハンド装置１００がＸ方向において大型化するのを防止することができる。 For example, in the comparative example, the first moving body 110a and the second moving body 110b are arranged in series in the X direction, and the positions of the first moving body 110a and the second moving body 110b with respect to the Y direction are located. Match. At this time, when the first driven body unit 120a and the second driven body unit 120b are closest to each other, the main body 121 of the first driven body unit 120a and the second driven body unit 120b is on the center line L. Contact each other. At the same time, the inner end 115 of the first moving body 110a and the second moving body 110b also come into contact with each other on the center line L. After that, when the first driven body unit 120a and the second driven body unit 120b are most separated from each other, the outer end portion of the main body 121 of the first driven body unit 120a is one with respect to the X direction of the base 130. Match the edge. Further, the outer end portion of the main body 121 of the second driven body unit 120b coincides with the other end portion of the base 130 in the X direction. However, the outer end 114 of the first moving body 110a does not coincide with one end of the base 130 in the X direction and protrudes from the base 130. Also, the outer end 114 of the second moving body 110b also protrudes from the base 130 without matching the other ends of the base 130 in the X direction. That is, the electric hand device of the comparative example becomes larger in the X direction. On the other hand, it is conceivable to shorten the first moving body 110a and the second moving body 110b to prevent them from protruding from the base 130. However, the amount of movement of the first hand member 140a and the second hand member 140b in the X direction is proportional to the length (of the sliding surface 111) of the first moving body 110a and the second moving body 110b. Therefore, when the first moving body 110a and the second moving body 110b are shortened, the amount of movement of the first hand member 140a and the second hand member 140b is reduced, and the size of the work gripped between them is limited. Will be done. Correspondingly, in the electric hand device 100 of the present embodiment, as described above, the first moving body 110a and the second moving body 110b are arranged at different positions in the Y direction. Further, when the first moving body 110a and the second moving body 110b are viewed from the Y direction, a part of the first moving body 110a and the second moving body 110b may overlap. In other words, the first moving body 110a and the second moving body 110b may be arranged so as to face each other in the Y direction. As a result, even if the first moving body 110a and the second moving body 110b are moved so as to approach each other in the X direction, the first moving body 110a and the second moving body 110b are moved to each other on the center line L. There is no contact. Therefore, the inner end portion 115 of the first moving body 110a can be projected toward the second driven body unit 120b from the inner end portion of the first hand member 140a in the X direction. Further, the inner end portion 115 of the second moving body 110b can be projected toward the first driven body unit 120a from the inner end portion of the second hand member 140b in the X direction. As a result, the first moving body 110a and the second moving body 110b can be stretched in the X direction without bringing the first moving body 110a and the second moving body 110b into contact with each other. As a result, it is possible to secure the amount of movement of the first hand member 140a and the second hand member 140b and give a degree of freedom to the size of the workpiece to be gripped. Further, even if the first moving body 110a is lengthened, the amount of protrusion of the outer end portion 114 of the first moving body 110a from the outer end portion of the main body 121 of the first driven body unit 120a can be reduced. .. Further, even if the second moving body 110b is lengthened, the amount of protrusion of the outer end portion 114 of the second moving body 110b from the outer end portion of the main body 121 of the second driven body unit 120b can be reduced. .. That is, it is possible to prevent the outer end 114 of the first moving body 110a and the second moving body 110b from protruding from the base 130. As a result, it is possible to prevent the electric hand device 100 from becoming large in the X direction.

なお、電動ハンド装置１００では、第１の振動体１０２ａを第１の移動体１１０ａへ加圧接触させるために、加圧ばね１０７を用いた。また、第２の振動体１０２ｂを第２の移動体１１０ｂへ加圧接触させるために、加圧ばね１０７を用いた。しかしながら、第１の振動体１０２ａを第１の移動体１１０ａへ加圧接触させ、且つ第２の振動体１０２ｂを第２の移動体１１０ｂへ加圧接触させる手段は加圧ばね１０７に限られない。例えば、第１の振動型アクチュエータ１０１ａや第２の振動型アクチュエータ１０１ｂに永久磁石を配置し、磁力によって第１の振動体１０２ａを第１の移動体１１０ａへ、且つ第２の振動体１０２ｂを第２の移動体１１０ｂに加圧接触させてもよい。この場合、イコライズプレート１０６やフェルト１０５が不要となるため、電動ハンド装置１００の構造を簡素化できる。また、永久磁石は加圧ばね１０７の様に伸縮するためのスペースを確保する必要がないため、電動ハンド装置１００の大型化を確実に防止することができる。 In the electric hand device 100, a pressure spring 107 was used to bring the first vibrating body 102a into pressure contact with the first moving body 110a. Further, a pressure spring 107 was used to bring the second vibrating body 102b into pressure contact with the second moving body 110b. However, the means for bringing the first vibrating body 102a into pressure contact with the first moving body 110a and bringing the second vibrating body 102b into pressure contact with the second moving body 110b is not limited to the pressure spring 107. .. For example, a permanent magnet is arranged in the first vibrating actuator 101a or the second vibrating actuator 101b, and the first vibrating body 102a is moved to the first moving body 110a and the second vibrating body 102b is moved to the first moving body 102b by magnetic force. The moving body 110b of 2 may be brought into pressure contact with the moving body 110b. In this case, since the equalize plate 106 and the felt 105 are not required, the structure of the electric hand device 100 can be simplified. Further, since the permanent magnet does not need to secure a space for expansion and contraction unlike the pressure spring 107, it is possible to surely prevent the electric hand device 100 from becoming large in size.

次に、本発明の第２の実施の形態に係る把持装置としての電動ハンド装置について説明する。第２の実施の形態は、その構成、作用が上述した第１の実施の形態と基本的に同じであるので、重複した構成、作用については説明を省略し、以下に異なる構成、作用についての説明を行う。 Next, an electric hand device as a gripping device according to a second embodiment of the present invention will be described. Since the configuration and operation of the second embodiment are basically the same as those of the first embodiment described above, the description of the overlapping configuration and operation is omitted, and the different configurations and operations are described below. Give an explanation.

図８は、本実施の形態に係る把持装置としての電動ハンド装置の構成を概略的に示す図であり、図８（Ａ）は電動ハンド装置の斜視図であり、図８（Ｂ）は電動ハンド装置の正面図（Ｘ方向に沿って眺めたときの図）である。なお、各図において、Ｘ方向（第１の方向）、Ｙ方向（第２の方向）及びＺ方向（第３の方向）は互いに直交し、各Ｘ方向、各Ｙ方向及び各Ｚ方向のそれぞれは一致する。また、説明を容易にするために、把持部材としての第１のハンド部材１４０ａ及び第２のハンド部材１４０ｂの図示が省略される。電動ハンド装置２００は、直動型（リニア型）の第１の振動型アクチュエータ２０１ａ及び直動型の第２の振動型アクチュエータ２０１ｂを備える。さらに、電動ハンド装置２００は、第１の被駆動体ユニット１２０ａ、第２の被駆動体ユニット１２０ｂ、基台１３０、第１のハンド部材１４０ａ及び第２のハンド部材１４０ｂ（図示しない）を備える。第１の振動型アクチュエータ２０１ａ及び第２の振動型アクチュエータ２０１ｂは、対応する第１の被駆動体ユニット１２０ａ及び第２の被駆動体ユニット１２０ｂをＸ方向に沿って駆動する。 8A and 8B are views schematically showing the configuration of an electric hand device as a gripping device according to the present embodiment, FIG. 8A is a perspective view of the electric handset, and FIG. 8B is an electric handset. It is a front view (a figure when viewed along the X direction) of a hand device. In each figure, the X direction (first direction), the Y direction (second direction), and the Z direction (third direction) are orthogonal to each other, and each of the X direction, each Y direction, and each Z direction. Match. Further, for ease of explanation, the illustration of the first hand member 140a and the second hand member 140b as the gripping member is omitted. The electric hand device 200 includes a linear motion type (linear type) first vibration type actuator 201a and a linear motion type second vibration type actuator 201b. Further, the electric hand device 200 includes a first driven body unit 120a, a second driven body unit 120b, a base 130, a first hand member 140a, and a second hand member 140b (not shown). The first vibrating actuator 201a and the second vibrating actuator 201b drive the corresponding first driven body unit 120a and the second driven body unit 120b along the X direction.

第１の振動型アクチュエータ２０１ａ及び第２の振動型アクチュエータ２０１ｂは、収容溝１３５内にてＹ方向において互いに異なる位置に配置される。第１の振動型アクチュエータ２０１ａは、第１の振動型アクチュエータ１０１ａと同様に、カムや減速機等を介することなく第１の被駆動体ユニット１２０ａを直接駆動する。また、第２の振動型アクチュエータ２０１ｂも、第２の振動型アクチュエータ１０１ｂと同様に、カムや減速機等を介することなく第２の被駆動体ユニット１２０ｂを直接駆動する。なお、以下において第１の振動型アクチュエータ２０１ａの構成を詳述する。本実施の形態では、第２の振動型アクチュエータ２０１ｂが、第２の移動体１１０ｂを有すること以外、第１の振動型アクチュエータ２０１ａと同様の構成を有するため、第２の振動型アクチュエータ２０１ｂの構成については説明を省略する。 The first vibrating actuator 201a and the second vibrating actuator 201b are arranged at different positions in the accommodation groove 135 in the Y direction. Like the first vibrating actuator 101a, the first vibrating actuator 201a directly drives the first driven body unit 120a without using a cam, a speed reducer, or the like. Further, the second vibrating actuator 201b, like the second vibrating actuator 101b, directly drives the second driven body unit 120b without using a cam or a speed reducer or the like. The configuration of the first vibration type actuator 201a will be described in detail below. In the present embodiment, since the second vibrating actuator 201b has the same configuration as the first vibrating actuator 201a except that it has the second moving body 110b, the configuration of the second vibrating actuator 201b The description of the above will be omitted.

第１の振動型アクチュエータ２０１ａは、第１の振動体２０２ａ、第２の振動体２０２ｂ、第１の移動体１１０ａ、第１の支持部材２０４ａ、第２の支持部材２０４ｂ、２つのフェルト、２つのイコライズプレート及び２つの加圧ばねを有する。なお、各フェルト、各イコライズプレート及び各加圧ばねはそれぞれ、フェルト１０５、イコライズプレート１０６及び加圧ばね１０７と同様の構造を有するが図示は省略される。第１の振動型アクチュエータ２０１ａでは、長尺状の板状部材である第１の支持部材２０４ａが収容溝１３５の側壁部においてＸ方向に沿って配置される。第１の移動体１１０ａ、第１の振動体２０２ａ、第１の支持部材２０４ａ、フェルト、イコライズプレート及び加圧ばねがこの順でＹ方向において重畳されるように配置される。また、第１の振動型アクチュエータ２０１ａでは、長尺状の板状部材である第２の支持部材２０４ｂが収容溝１３５の底部においてＸ方向に沿って配置される。第１の移動体１１０ａ、第２の振動体２０２ｂ（第３の振動体、第４の振動体）、第２の支持部材２０４ｂ、フェルト、イコライズプレート及び加圧ばねがこの順でＺ方向において重畳されるように配置される。第１の振動体２０２ａ及び第２の振動体２０２ｂは、第１の振動体１０２ａと同様の構成を有し、それぞれが有する突起部の先端部に楕円運動を行わせることができる。また、第１の振動体２０２ａは、加圧ばねにより、Ｙ方向に沿う所定の加圧力で第１の移動体１１０ａと加圧接触し、第２の振動体２０２ｂは、加圧ばねにより、Ｚ方向に沿う所定の加圧力で第１の振動体２０２ａと加圧接触する。これにより、第１の移動体１１０ａは、第１の振動体２０２ａ及び第２の振動体２０２ｂの突起部によって摩擦駆動され、第１の振動体２０２ａ及び第２の振動体２０２ｂに対して相対的にＸ方向に移動する。また、第１の振動体２０２ａ及び第２の振動体２０２ｂはそれぞれ第１の支持部材２０４ａ及び第２の支持部材２０４ｂに接合され、第１の支持部材２０４ａ及び第２の支持部材２０４ｂはＸ方向に移動しないように構成される。したがって、第１の移動体１１０ａが絶対的にＸ方向に移動する。 The first vibrating actuator 201a includes a first vibrating body 202a, a second vibrating body 202b, a first moving body 110a, a first support member 204a, a second support member 204b, two felts, and two felts. It has an equalize plate and two pressure springs. The felt, the equalize plate, and the pressure spring have the same structure as the felt 105, the equalize plate 106, and the pressure spring 107, respectively, but the illustration is omitted. In the first vibration type actuator 201a, the first support member 204a, which is a long plate-shaped member, is arranged along the X direction in the side wall portion of the accommodating groove 135. The first moving body 110a, the first vibrating body 202a, the first support member 204a, the felt, the equalize plate, and the pressure spring are arranged so as to be overlapped in this order in the Y direction. Further, in the first vibration type actuator 201a, the second support member 204b, which is a long plate-shaped member, is arranged along the X direction at the bottom of the accommodating groove 135. The first moving body 110a, the second vibrating body 202b (third vibrating body, the fourth vibrating body), the second support member 204b, the felt, the equalize plate, and the pressure spring are superimposed in this order in the Z direction. Arranged to be. The first vibrating body 202a and the second vibrating body 202b have the same configuration as the first vibrating body 102a, and the tip portions of the protrusions of the first vibrating body 202a can be made to perform elliptical movement. Further, the first vibrating body 202a is in pressure contact with the first moving body 110a by a pressure spring at a predetermined pressure along the Y direction, and the second vibrating body 202b is Z by the pressure spring. Pressurized contact with the first vibrating body 202a with a predetermined pressing force along the direction. As a result, the first moving body 110a is frictionally driven by the protrusions of the first vibrating body 202a and the second vibrating body 202b, and is relative to the first vibrating body 202a and the second vibrating body 202b. Moves in the X direction. Further, the first vibrating body 202a and the second vibrating body 202b are joined to the first support member 204a and the second support member 204b, respectively, and the first support member 204a and the second support member 204b are in the X direction. It is configured not to move to. Therefore, the first moving body 110a absolutely moves in the X direction.

次に、電動ハンド装置２００における第１の移動体１１０ａ、第２の移動体１１０ｂ、第１の被駆動体ユニット１２０ａ及び第２の被駆動体ユニット１２０ｂの位置関係について説明する。図９は、各被駆動体ユニットが移動する際の各移動体及び各被駆動体ユニットの位置関係を示す断面斜視図である。図９（Ａ）は、各被駆動体ユニットが最も離間した場合の各移動体及び各被駆動体ユニットの位置関係を示し、図９（Ｂ）は、各被駆動体ユニットが最も接近した場合の各移動体及び各被駆動体ユニットの位置関係を示す。なお、図９（Ａ）及び図９（Ｂ）のいずれもＸ方向に沿う断面を示し、第１のハンド部材１４０ａ及び第２のハンド部材１４０ｂの図示を省略する。 Next, the positional relationship between the first moving body 110a, the second moving body 110b, the first driven body unit 120a, and the second driven body unit 120b in the electric hand device 200 will be described. FIG. 9 is a cross-sectional perspective view showing the positional relationship between each moving body and each driven body unit when each driven body unit moves. FIG. 9A shows the positional relationship between each moving body and each driven body unit when the driven body units are closest to each other, and FIG. 9B shows the case where the driven body units are closest to each other. The positional relationship between each moving body and each driven body unit is shown. In addition, both FIG. 9A and FIG. 9B show a cross section along the X direction, and the illustration of the first hand member 140a and the second hand member 140b is omitted.

第１の被駆動体ユニット１２０ａ及び第２の被駆動体ユニット１２０ｂが最も離間した場合、Ｘ方向に関する第１の被駆動体ユニット１２０ａの本体１２１の外側端部は、基台１３０のＸ方向に関する一の端部と一致する。また、Ｘ方向に関する第１の移動体１１０ａの外側端部１１４も、基台１３０のＸ方向に関する一の端部と一致する。さらに、Ｘ方向に関する第２の被駆動体ユニット１２０ｂの本体１２１の外側端部は、基台１３０のＸ方向に関する他の端部と一致する。また、Ｘ方向に関する第２の移動体１１０ｂの外側端部１１４も、基台１３０のＸ方向に関する他の端部と一致する。すなわち、第１の被駆動体ユニット１２０ａ及び第２の被駆動体ユニット１２０ｂが最も離間した場合であっても、基台１３０の各端部から第１の被駆動体ユニット１２０ａの第１の移動体１１０ａが突出することがない。また、基台１３０の各端部から第２の被駆動体ユニット１２０ｂの第２の移動体１１０ｂも突出することがない。このとき、Ｘ方向に関する第１の移動体１１０ａの内側端部１１５は基台１３０のＸ方向に関する中央（以下、「基台中央」という。）に位置し、Ｘ方向に関する第２の移動体１１０ｂの内側端部１１５も基台中央に位置する。 When the first driven body unit 120a and the second driven body unit 120b are most separated from each other, the outer end portion of the main body 121 of the first driven body unit 120a with respect to the X direction relates to the X direction of the base 130. Match one end. Further, the outer end 114 of the first moving body 110a in the X direction also coincides with one end of the base 130 in the X direction. Further, the outer end of the main body 121 of the second driven body unit 120b in the X direction coincides with the other end of the base 130 in the X direction. Further, the outer end 114 of the second moving body 110b in the X direction also coincides with the other end of the base 130 in the X direction. That is, even when the first driven body unit 120a and the second driven body unit 120b are most separated from each other, the first movement of the first driven body unit 120a from each end of the base 130. The body 110a does not protrude. Further, the second moving body 110b of the second driven body unit 120b does not protrude from each end of the base 130. At this time, the inner end portion 115 of the first moving body 110a in the X direction is located at the center of the base 130 in the X direction (hereinafter, referred to as “base center”), and the second moving body 110b in the X direction is located. The inner end 115 of the base is also located in the center of the base.

第１の被駆動体ユニット１２０ａ及び第２の被駆動体ユニット１２０ｂが最も接近した場合、第１の被駆動体ユニット１２０ａ及び第２の被駆動体ユニット１２０ｂの各本体１２１は基台中央において互いに接触する。ここで、電動ハンド装置２００でも、電動ハンド装置１００と同様に、第１の移動体１１０ａ及び第２の移動体１１０ｂはＹ方向において互いに異なる位置に配置される。したがって、第１の移動体１１０ａ及び第２の移動体１１０ｂがＸ方向に沿って互いに接近するように移動しても、第１の移動体１１０ａ及び第２の移動体１１０ｂは互いに干渉することがない。また、第１の移動体１１０ａ及び第２の移動体１１０ｂには逃げ部１１３が設けられるため、第１の移動体１１０ａは第２の被駆動体ユニット１２０ｂと接触せず、第２の移動体１１０ｂは第１の被駆動体ユニット１２０ａと接触しない。このとき、Ｙ方向から第１の移動体１１０ａ及び第２の移動体１１０ｂを眺めると、第１の移動体１１０ａ及び第２の移動体１１０ｂは殆どの部分が互いに重畳する。 When the first driven body unit 120a and the second driven body unit 120b are closest to each other, the main bodies 121 of the first driven body unit 120a and the second driven body unit 120b are connected to each other at the center of the base. Contact. Here, in the electric hand device 200, similarly to the electric hand device 100, the first moving body 110a and the second moving body 110b are arranged at different positions in the Y direction. Therefore, even if the first moving body 110a and the second moving body 110b move so as to approach each other along the X direction, the first moving body 110a and the second moving body 110b may interfere with each other. do not have. Further, since the first moving body 110a and the second moving body 110b are provided with the relief portion 113, the first moving body 110a does not come into contact with the second driven body unit 120b, and the second moving body 110a does not come into contact with the second moving body unit 120b. 110b does not come into contact with the first driven body unit 120a. At this time, when the first moving body 110a and the second moving body 110b are viewed from the Y direction, most of the first moving body 110a and the second moving body 110b overlap each other.

電動ハンド装置２００によれば、第１の移動体１１０ａに第１の振動体２０２ａ及び第２の振動体２０２ｂが加圧接触し、第２の移動体１１０ｂにも第１の振動体２０２ａ及び第２の振動体２０２ｂが加圧接触する。これにより、第１の移動体１１０ａ及び第２の移動体１１０ｂに作用する駆動力を高めることができ、第１のハンド部材１４０ａ及び第２のハンド部材１４０ｂの移動速度や把持力を高めることができる。また、電動ハンド装置２００が、電動ハンド装置１００と同様の効果を奏することができることは言うまでもない。 According to the electric hand device 200, the first vibrating body 202a and the second vibrating body 202b are in pressure contact with the first moving body 110a, and the first vibrating body 202a and the second vibrating body 202b are also brought into contact with the second moving body 110b. The vibrating body 202b of 2 comes into pressure contact. As a result, the driving force acting on the first moving body 110a and the second moving body 110b can be increased, and the moving speed and gripping force of the first hand member 140a and the second hand member 140b can be increased. can. Needless to say, the electric hand device 200 can exert the same effect as the electric hand device 100.

なお、電動ハンド装置２００では、第１の移動体１１０ａ及び第２の移動体１１０ｂのそれぞれに２つの第１の振動体２０２ａ及び第２の振動体２０２ｂが加圧接触したが、１つの移動体に加圧接触する振動体の数は２以下に限られない。例えば、第１の移動体１１０ａ及び第２の移動体１１０ｂのそれぞれに３つ以上の振動体が加圧接触してもよい。 In the electric hand device 200, the two first vibrating bodies 202a and the second vibrating body 202b are in pressure contact with each of the first moving body 110a and the second moving body 110b, but one moving body. The number of vibrating bodies that come into pressure contact with is not limited to two or less. For example, three or more vibrating bodies may come into pressure contact with each of the first moving body 110a and the second moving body 110b.

以上、本発明の各実施の形態について説明したが、本発明はこれらの実施の形態に限定されず、その要旨の範囲内で種々の変形及び変更が可能である。 Although each embodiment of the present invention has been described above, the present invention is not limited to these embodiments, and various modifications and modifications can be made within the scope of the gist thereof.

１００ 電動ハンド装置
１０１ａ 第１の振動型アクチュエータ
１０１ｂ 第２の振動型アクチュエータ
１０２ａ 第１の振動体
１０２ｂ 第２の振動体
１０２３ 突起部
１０４ａ 第１の支持部材
１０４ｂ 第２の支持部材
１０７ａ 加圧ばね
１１０ａ 第１の移動体
１１０ｂ 第２の移動体
１１２ 取付部
１１３ 逃げ部
１２０ａ 第１の被駆動体ユニット
１２０ｂ 第２の被駆動体ユニット
１４０ａ 第１のハンド部材
１４０ｂ 第２のハンド部材 100 Electric hand device 101a First vibrating actuator 101b Second vibrating actuator 102a First vibrating body 102b Second vibrating body 1023 Protrusion part 104a First support member 104b Second support member 107a Pressurizing spring 110a First moving body 110b Second moving body 112 Mounting part 113 Relief part 120a First driven body unit 120b Second driven body unit 140a First hand member
140b Second hand member

Claims (14)

第１の把持部材と、
前記第１の把持部材と第１の方向において対向する第２の把持部材と、
前記第１の把持部材を前記第１の方向に沿って駆動する第１の振動型アクチュエータと、
前記第２の把持部材を前記第１の方向に沿って駆動する第２の振動型アクチュエータと、を備え、
前記第１の振動型アクチュエータは、前記第１の把持部材が取り付けられている第１の移動体と、前記第１の移動体に加圧接触し且つ励起された振動によって前記第１の移動体を駆動して前記第１の方向に沿って移動させる第１の振動体とを有し、
前記第２の振動型アクチュエータは、前記第２の把持部材が取り付けられている第２の移動体と、前記第２の移動体に加圧接触し且つ励起された振動によって前記第２の移動体を駆動して前記第１の方向に沿って移動させる第２の振動体とを有し、
前記第１の移動体と前記第２の移動体とは、前記第１の方向と直交する第２の方向において互いに異なる位置に配置されており、
前記第１の把持部材と前記第２の把持部材とが最も接近した際、前記第２の方向において、前記第１の移動体と前記第２の移動体とが互いに重畳し、
前記第１の振動体は、前記第２の方向、又は、前記第１の方向及び前記第２の方向のそれぞれと直交する第３の方向において前記第１の移動体と加圧接触し、
前記第２の振動体は、前記第２の方向、又は、前記第３の方向において前記第２の移動体と加圧接触することを特徴とする把持装置。 The first gripping member and
A second gripping member facing the first gripping member in the first direction,
A first vibrating actuator that drives the first gripping member along the first direction,
A second vibrating actuator that drives the second gripping member along the first direction is provided.
In the first vibration type actuator, the first moving body to which the first gripping member is attached and the first moving body are subjected to pressure contact with the first moving body and are excited by vibration. With a first vibrating body that drives and moves along the first direction.
The second vibration type actuator has a second moving body to which the second gripping member is attached and the second moving body due to vibrations that are in pressure contact with and excited by the second moving body. Has a second vibrating body that drives and moves along the first direction.
The first moving body and the second moving body are arranged at different positions in a second direction orthogonal to the first direction .
When the first gripping member and the second gripping member are closest to each other, the first moving body and the second moving body overlap each other in the second direction.
The first vibrating body is in pressure contact with the first moving body in the second direction or in a third direction orthogonal to each of the first direction and the second direction.
The gripping device , wherein the second vibrating body is in pressure contact with the second moving body in the second direction or the third direction. 前記第１の移動体及び前記第２の移動体は、前記第１の方向に沿う長尺状を呈し、
前記第１の移動体の前記第２の把持部材の側の端部は、前記第１の移動体に取り付けられた前記第１の把持部材よりも前記第２の把持部材へ向けて突出し、
前記第２の移動体の前記第１の把持部材の側の端部は、前記第２の移動体に取り付けられた前記第２の把持部材よりも前記第１の把持部材へ向けて突出することを特徴とする請求項１記載の把持装置。 The first moving body and the second moving body have an elongated shape along the first direction.
The end of the first moving body on the side of the second gripping member protrudes toward the second gripping member from the first gripping member attached to the first moving body.
The end of the second moving body on the side of the first gripping member projects toward the first gripping member from the second gripping member attached to the second moving body. The gripping device according to claim 1. 前記第１の振動型アクチュエータは、前記第１の振動体と異なる第３の振動体を有し、前記第１の振動体は前記第２の方向に沿って前記第１の移動体と加圧接触し、前記第３の振動体は前記第１の方向及び前記第２の方向のそれぞれと直交する第３の方向に沿って前記第１の移動体と加圧接触し、
前記第２の振動型アクチュエータは、前記第２の振動体と異なる第４の振動体を有し、前記第２の振動体は前記第２の方向に沿って前記第２の移動体と加圧接触し、前記第４の振動体は前記第３の方向に沿って前記第２の移動体と加圧接触することを特徴とする請求項１又は２記載の把持装置。 The first vibrating actuator has a third vibrating body different from the first vibrating body, and the first vibrating body pressurizes with the first moving body along the second direction. Upon contact, the third vibrating body pressurizes and contacts the first moving body along a third direction orthogonal to each of the first direction and the second direction.
The second vibrating actuator has a fourth vibrating body different from the second vibrating body, and the second vibrating body pressurizes with the second moving body along the second direction. The gripping device according to claim 1 or 2 , wherein the fourth vibrating body comes into contact with the second moving body in pressure contact with the second moving body along the third direction. 前記第１の移動体は、前記第１の把持部材と前記第２の把持部材とが最も接近した際に、前記第２の把持部材から逃げるための逃げ部を有し、
前記第２の移動体は、前記第１の把持部材と前記第２の把持部材とが最も接近した際に、前記第１の把持部材から逃げるための他の逃げ部を有することを特徴とする請求項１乃至３のいずれか１項に記載の把持装置。 The first moving body has an escape portion for escaping from the second gripping member when the first gripping member and the second gripping member are closest to each other.
The second moving body is characterized by having another escape portion for escaping from the first grip member when the first grip member and the second grip member are closest to each other. The gripping device according to any one of claims 1 to 3. 前記第１の把持部材と前記第２の把持部材とが最も接近した際、前記逃げ部は前記第２の把持部材と接触せず、前記他の逃げ部は前記第１の把持部材と接触しないことを特徴とする請求項４記載の把持装置。 When the first gripping member and the second gripping member are closest to each other, the relief portion does not come into contact with the second gripping member, and the other relief portion does not come into contact with the first gripping member. 4. The gripping device according to claim 4. 前記第１の把持部材は、前記第１の移動体の取付部に取り付けられ、前記取付部の前記第１の方向に関する長さ、及び前記逃げ部の前記第１の方向に関する長さは、前記第１の把持部材の前記第１の方向に関する長さと等しく、
前記第２の把持部材は、前記第２の移動体の他の取付部に取り付けられ、前記他の取付部の前記第１の方向に関する長さ、及び前記他の逃げ部の前記第１の方向に関する長さは、前記第２の把持部材の前記第１の方向に関する長さと等しいことを特徴とする請求項４又は５記載の把持装置。 The first gripping member is attached to the attachment portion of the first moving body, and the length of the attachment portion in the first direction and the length of the relief portion in the first direction are the same. Equal to the length of the first grip member in the first direction,
The second gripping member is attached to another attachment portion of the second moving body, the length of the other attachment portion with respect to the first direction, and the first direction of the other relief portion. The gripping device according to claim 4 or 5 , wherein the length of the second gripping member is equal to the length of the second gripping member in the first direction. 前記第１の移動体及び前記第２の移動体は、前記第１の方向に沿う長尺状を呈し、
前記第１の把持部材と前記第２の把持部材とが最も離間した際、前記第１の移動体の前記第２の把持部材の側の端部及び前記第２の移動体の前記第１の把持部材の側の端部が、前記把持装置の前記第１の方向に関する中央に位置することを特徴とする請求項１乃至６のいずれか１項に記載の把持装置。 The first moving body and the second moving body have an elongated shape along the first direction.
When the first gripping member and the second gripping member are most separated from each other, the end of the first moving body on the side of the second gripping member and the first of the second moving body. The gripping device according to any one of claims 1 to 6 , wherein the end portion on the side of the gripping member is located at the center of the gripping device with respect to the first direction. 前記第１の振動型アクチュエータと前記第２の振動型アクチュエータとは加圧ばねをさらに有し、前記加圧ばねは、前記第１の振動体と前記第１の移動体とを加圧接触させ、且つ前記第２の振動体と前記第２の移動体とを加圧接触させることを特徴とする請求項１乃至７のいずれか１項に記載の把持装置。 The first vibrating actuator and the second vibrating actuator further have a pressure spring, and the pressure spring brings the first vibrating body and the first moving body into pressure contact with each other. The gripping device according to any one of claims 1 to 7 , wherein the second vibrating body and the second moving body are brought into pressure contact with each other. 前記第１の振動型アクチュエータと前記第２の振動型アクチュエータとは磁石をさらに有し、前記磁石は磁力によって前記第１の振動体と前記第１の移動体とを加圧接触させ、且つ前記第２の振動体と前記第２の移動体とを加圧接触させることを特徴とする請求項１乃至７のいずれか１項に記載の把持装置。 The first vibrating actuator and the second vibrating actuator further have a magnet, and the magnet brings the first vibrating body and the first moving body into pressure contact with each other by a magnetic force, and said that the first vibrating body and the first moving body are brought into pressure contact with each other. The gripping device according to any one of claims 1 to 7 , wherein the second vibrating body and the second moving body are brought into pressure contact with each other. 前記第１の振動体は前記第１の移動体に接触する突起部を有し、前記第２の振動体は前記第２の移動体に接触する突起部を有し、前記第１の振動体と前記第２の振動体とにおいて励起された振動が、前記第１の方向及び前記突起部の突出方向で規定される面内において、前記突起部の先端に楕円運動を行わせることを特徴とする請求項１乃至９のいずれか１項に記載の把持装置。 The first vibrating body has a protrusion in contact with the first moving body, the second vibrating body has a protrusion in contact with the second moving body, and the first vibrating body has a protrusion in contact with the second moving body. The vibration excited by the second vibrating body and the second vibrating body is characterized in that the tip of the protruding portion is subjected to an elliptical motion in a plane defined by the first direction and the protruding direction of the protrusion. The gripping device according to any one of claims 1 to 9. 前記第１の把持部材及び前記第２の把持部材はそれぞれ、振動減衰部材を介して前記第１の移動体及び前記第２の移動体に取り付けられることを特徴とする請求項１乃至１０のいずれか１項に記載の把持装置。 Any of claims 1 to 10 , wherein the first gripping member and the second gripping member are attached to the first moving body and the second moving body, respectively, via a vibration damping member. The gripping device according to item 1. 前記振動減衰部材はゴム材料によって形成されることを特徴とする請求項１１記載の把持装置。 The gripping device according to claim 11, wherein the vibration damping member is made of a rubber material. 前記振動減衰部材は、前記第１の移動体、前記第２の移動体、前記第１の把持部材及び前記第２の把持部材よりも剛性が低い樹脂材料によって形成されることを特徴とする請求項１１記載の把持装置。 A claim characterized in that the vibration damping member is formed of a resin material having a lower rigidity than the first moving body, the second moving body, the first gripping member, and the second gripping member. Item 11. The gripping device according to item 11. 電動グリッパであることを特徴とする請求項１乃至１３のいずれか１項に記載の把持装置。 The gripping device according to any one of claims 1 to 13, wherein the gripper is an electric gripper.
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