JP5188061B2 - Vibration wave drive - Google Patents

Vibration wave drive Download PDF

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JP5188061B2
JP5188061B2 JP2006332404A JP2006332404A JP5188061B2 JP 5188061 B2 JP5188061 B2 JP 5188061B2 JP 2006332404 A JP2006332404 A JP 2006332404A JP 2006332404 A JP2006332404 A JP 2006332404A JP 5188061 B2 JP5188061 B2 JP 5188061B2
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vibration
vibration wave
linear slider
linear
drive device
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JP2008148438A (en
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一郎 奥村
信行 小島
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Canon Inc
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Canon Inc
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Description

本発明は、振動部材に所定の振動波を発生させて、接触する部材との間の摩擦力により駆動力を得る振動波駆動装置および該振動波駆動装置を備えるレンズ鏡筒に関する。   The present invention relates to a vibration wave driving device that generates a predetermined vibration wave in a vibration member and obtains a driving force by a frictional force with a contacting member, and a lens barrel including the vibration wave driving device.

従来のこの種の振動波駆動装置としては、例えば、図4に示すリニア駆動装置がある(特許文献1)。   As a conventional vibration wave driving device of this type, for example, there is a linear driving device shown in FIG. 4 (Patent Document 1).

このリニア駆動装置は、図4に示すように、振動波を発生する振動部材101と、該振動部材101の振動波が伝達されることで振動部材101に対して相対的に長手方向(X方向)に沿って直線的にスライド駆動される長尺なリニアスライダ102とを備える。   As shown in FIG. 4, the linear drive device includes a vibration member 101 that generates a vibration wave and a longitudinal direction (X direction) relative to the vibration member 101 by transmitting the vibration wave of the vibration member 101. And a long linear slider 102 that is linearly slid and driven.

なお、図4では、振動部材101に対してリニアスライダ102がX方向に移動するようになっているが、これとは逆にリニアスライダ102に対して振動部材101がX方向に移動するようにすることも可能である。そして、振動部材101およびリニアスライダ102のうちの移動側の部材に、駆動対象部材が取り付けられる。   In FIG. 4, the linear slider 102 moves in the X direction with respect to the vibrating member 101. On the contrary, the vibrating member 101 moves in the X direction with respect to the linear slider 102. It is also possible to do. Then, the drive target member is attached to the moving member of the vibration member 101 and the linear slider 102.

また、リニアスライダ102を磁石で形成したものが提案されている(特許文献2)。この提案では、振動部材101とリニアスライダ102とが引き合って、振動部材101の突起部103a,103bの先端104a,104bとリニアスライダ102とが接触し、その摩擦力でX方向の駆動力を得るようにしている。   Further, a linear slider 102 formed of a magnet has been proposed (Patent Document 2). In this proposal, the vibration member 101 and the linear slider 102 attract each other, the tips 104a and 104b of the projections 103a and 103b of the vibration member 101 come into contact with the linear slider 102, and the driving force in the X direction is obtained by the friction force. I am doing so.

しかし、振動部材101とリニアスライダ102との接触は2点、あるいは線か平面で接触するため、図4のY方向への移動を規制しないと、同方向に位置が変動する。また、振動部材101とリニアスライダ102との接触部分が摩耗により変形するとZ方向の位置も変動する。   However, since the contact between the vibration member 101 and the linear slider 102 is a contact at two points, a line or a plane, the position fluctuates in the same direction unless the movement in the Y direction in FIG. 4 is regulated. Further, when the contact portion between the vibration member 101 and the linear slider 102 is deformed due to wear, the position in the Z direction also changes.

したがって、この種のリニア駆動装置を用いて精密な直線駆動を制御しようとすると、振動部材101とリニアスライダ102との接触部とは別に、駆動対象部材の移動を案内するとともに、駆動対象部材の姿勢を安定させるための案内部材が必要となる。   Therefore, when trying to control precise linear drive using this type of linear drive device, the movement of the drive target member is guided separately from the contact portion between the vibration member 101 and the linear slider 102, and the drive target member A guide member for stabilizing the posture is required.

しかし、このような案内部材を設けた場合、案内部材による駆動対象部材の案内方向および姿勢と、振動部材101とリニアスライダ102との接触部分と、を高精度に平行に配置することが困難となる。   However, when such a guide member is provided, it is difficult to arrange the guide direction and posture of the drive target member by the guide member and the contact portion between the vibration member 101 and the linear slider 102 in parallel with high accuracy. Become.

そこで、従来においては、この平行度の誤差を緩和、吸収するためのコンプライアンス機構を設けたリニア駆動装置が提案されている。   Therefore, conventionally, a linear drive device provided with a compliance mechanism for relaxing and absorbing this parallelism error has been proposed.

このリニア駆動装置は、図5に示すように、振動波を発生する振動部材203と、該振動部材203の振動波が伝達されることで振動部材203に対して相対的に長手方向に沿って直線的にスライド駆動される長尺なリニアスライダ202とを備える。   As shown in FIG. 5, the linear drive device has a vibration member 203 that generates a vibration wave, and the vibration wave of the vibration member 203 is transmitted along the longitudinal direction relative to the vibration member 203. And a long linear slider 202 that is linearly driven to slide.

振動部材203には、該振動部材203の一部品である弾性体が設けられており、弾性体の裏面には振動波を発生する不図示の圧電セラミックスが設けられている。また、振動部材203には、案内部材205による駆動対象部材の案内方向および姿勢と、振動部材203とリニアスライダ202との接触部分と、の平行度誤差を緩和、吸収するためのコンプライアンス機構である板ばね204が設けられている。
特開2004−304887号公報 特開2005−354787号公報
The vibration member 203 is provided with an elastic body that is a component of the vibration member 203, and a piezoelectric ceramic (not shown) that generates vibration waves is provided on the back surface of the elastic body. The vibration member 203 is a compliance mechanism for reducing and absorbing parallelism errors between the guide direction and posture of the drive target member by the guide member 205 and the contact portion between the vibration member 203 and the linear slider 202. A leaf spring 204 is provided.
Japanese Patent Laid-Open No. 2004-304877 JP 2005-354787 A

上記従来の技術では、案内部材による駆動対象部材の案内方向および姿勢と、振動部材203とリニアスライダ202との接触部分と、の平行度誤差を緩和、吸収するためのコンプライアンス機構が大きなスペース占有するので、装置の大型化を招く。   In the above conventional technique, the compliance mechanism for relaxing and absorbing the parallelism error between the guide direction and posture of the drive target member by the guide member and the contact portion between the vibration member 203 and the linear slider 202 occupies a large space. Therefore, the size of the apparatus is increased.

また、上記特許文献1および2では、振動部材101とリニアスライダ102との接触部分では振動の周期で接触と離間とが繰り返されている。そして、接触時には、長尺なリニアスライダ102の一面に振動部材101の突起部103a,103bの先端104a,104bが接触するので、リニアスライダ102は振動力を片側からのみ受けることになる。   In Patent Documents 1 and 2, contact and separation are repeated at a vibration cycle at a contact portion between the vibration member 101 and the linear slider 102. At the time of contact, since the tips 104a and 104b of the projections 103a and 103b of the vibration member 101 come into contact with one surface of the long linear slider 102, the linear slider 102 receives the vibration force only from one side.

従って、リニアスライダ102が曲げ振動を発生して音を発したり、振動部材101との接触/離間動作が乱れて駆動性能が低下したりすることがある。このため、従来では、リニアスライダ102の剛性を高めるために太い部材を使ったり、制振材を貼り付けたりしており、装置の小型化を妨げる原因になっている。   Accordingly, the linear slider 102 may generate a bending vibration and generate a sound, or a contact / separation operation with the vibration member 101 may be disturbed, resulting in a decrease in driving performance. For this reason, conventionally, in order to increase the rigidity of the linear slider 102, a thick member or a damping material has been attached, which hinders downsizing of the apparatus.

そこで、本発明は、コンプライアンス機構を不要にして小型化を実現することができる振動波駆動装置およびレンズ鏡筒を提供することを目的とする。   SUMMARY OF THE INVENTION An object of the present invention is to provide a vibration wave driving device and a lens barrel that can be downsized without using a compliance mechanism.

上記目的を達成するために、本発明の振動波駆動装置は、振動波を発生する振動部材と、該振動部材の振動波が伝達される長尺部材と、前記振動部材にキャリアを介して取り付けられている駆動対象部材と、前記キャリアを移動方向に沿って案内する案内部材と、を備える振動波駆動装置であって、前記振動部材と前記駆動対象部材とは、前記長尺部材に対して移動し、前記長尺部材の曲げ剛性およびねじり剛性、前記案内部材の曲げ剛性およびねじり剛性より小さことを特徴とする。 To achieve the above object, the vibration wave driving apparatus of the present invention, through a vibration member for generating a vibration wave length and long member vibration wave that is transmitted in the vibration member, the carrier to the vibration member attached And a guide member that guides the carrier along a moving direction, wherein the vibration member and the drive target member are in relation to the long member. moving, bending rigidity and torsional rigidity of the elongate member, characterized in that not less than the flexural rigidity and torsional rigidity of the guide member.

本発明によれば、長尺部材の曲げ剛性およびねじり剛性を案内部材の曲げ剛性およびねじり剛性より小さくしている。これにより、コンプライアンス機構がなくても、案内部材による駆動対象部材の案内方向および姿勢と、振動部材と長尺部材との接触部分と、の平行度誤差を緩和、吸収することができ、装置の小型化を実現することができる。   According to the present invention, the bending rigidity and torsional rigidity of the long member are made smaller than the bending rigidity and torsional rigidity of the guide member. Thus, even without a compliance mechanism, the parallelism error between the guide direction and posture of the driven object by the guide member and the contact portion between the vibration member and the long member can be reduced and absorbed. Miniaturization can be realized.

以下、本発明の実施の形態の一例を図を参照して説明する。   Hereinafter, an example of an embodiment of the present invention will be described with reference to the drawings.

図1は本発明の実施の形態の一例であるリニア駆動装置を説明するための斜視図、図2は図1に示すリニア駆動装置の振動部材とリニアスライドとが接触した状態を示す図である。   FIG. 1 is a perspective view for explaining a linear drive device which is an example of an embodiment of the present invention, and FIG. 2 is a diagram showing a state in which a vibrating member and a linear slide of the linear drive device shown in FIG. .

本発明の実施の形態の一例であるリニア駆動装置(振動波駆動装置)は、図1に示すように、振動波を発生する振動部材1と、該振動部材1の振動波が伝達される長尺な薄板状のリニアスライダ(長尺部材)6とを備える。   As shown in FIG. 1, a linear drive device (vibration wave drive device) that is an example of an embodiment of the present invention has a vibration member 1 that generates a vibration wave and a length to which the vibration wave of the vibration member 1 is transmitted. And a thin plate-like linear slider (long member) 6.

振動部材1は、リニアスライダ6側を向く部位に金属等の弾性体2が設けられている。弾性体2には、2つの突起3がリニアスライダ6の長手方向に互いに離間して設けられており、各突起3の先端がリニアスライダ6に接触する(図2参照)。また、弾性体2の裏面側には、振動波を発生する圧電セラミックス等の電気−機械エネルギ変換素子5が設けられている。   The vibrating member 1 is provided with an elastic body 2 such as metal at a portion facing the linear slider 6 side. Two protrusions 3 are provided on the elastic body 2 so as to be separated from each other in the longitudinal direction of the linear slider 6, and the tip of each protrusion 3 contacts the linear slider 6 (see FIG. 2). Further, an electro-mechanical energy conversion element 5 such as a piezoelectric ceramic that generates a vibration wave is provided on the back side of the elastic body 2.

電気−機械エネルギ変換素子5にはフレキシブルプリント基板7から交流電圧が印加され、フレキシブルプリント基板7は不図示の駆動制御回路に接続されている。振動部材1の突起3からリニアスライダ6に振動波が伝達されることで、振動部材1がリニアスライダ6に対して相対的に、該リニアスライダ6の長手方向に沿って直線的にスライド駆動される。そして、この実施の形態では、振動部材1に駆動対象部材(不図示)が取り付けられ、該駆動対象部材は案内部材(不図示)によって移動方向に沿って案内される。   An AC voltage is applied to the electromechanical energy conversion element 5 from the flexible printed circuit board 7, and the flexible printed circuit board 7 is connected to a drive control circuit (not shown). By transmitting a vibration wave from the protrusion 3 of the vibration member 1 to the linear slider 6, the vibration member 1 is linearly driven to slide relative to the linear slider 6 along the longitudinal direction of the linear slider 6. The In this embodiment, a drive target member (not shown) is attached to the vibration member 1, and the drive target member is guided along the moving direction by a guide member (not shown).

ここで、この実施の形態では、振動部材1をリニアスライダ6の厚さ方向の両側にそれぞれ1つずつ、合計2つ配置している。2つの振動部材1は、共に振動モード、振動周波数、および振動位相が同一とされ、また、不図示のばねにより両側からリニアスライダ6に圧接されるようになっている。かかる圧接時には、2つの振動部材1の突起3はリニアスライダ6の両側の同じ位置で互いに対向するように配置される。   Here, in this embodiment, a total of two vibrating members 1 are arranged on each side of the linear slider 6 in the thickness direction. The two vibration members 1 have the same vibration mode, vibration frequency, and vibration phase, and are pressed against the linear slider 6 from both sides by a spring (not shown). At the time of such pressure contact, the protrusions 3 of the two vibrating members 1 are arranged to face each other at the same position on both sides of the linear slider 6.

また、リニアスライダ6は、曲げ剛性およびねじり剛性が案内部材の曲げ剛性およびねじり剛性より小さく設定されており、その両端が固定部材(不図示)に固定される。さらに、リニアスライダ6は、場合によっては適度な張力で伸張された状態でその両端が固定部材(不図示)に固定される。   Further, the linear slider 6 is set so that the bending rigidity and the torsional rigidity are smaller than the bending rigidity and the torsional rigidity of the guide member, and both ends thereof are fixed to a fixing member (not shown). Further, the linear slider 6 is fixed to a fixing member (not shown) at both ends thereof in a state where the linear slider 6 is extended with an appropriate tension.

なお、リニアスライダ6としては、例えば、ステンレス鋼などの金属テープ、金属薄板あるいはポリイミドなどの樹脂製テープを使用することができるが、特に限定されず、ワイヤ形状あるいは細棒状のものを用いてもよい。   As the linear slider 6, for example, a metal tape such as stainless steel, a metal thin plate, or a resin tape such as polyimide can be used. However, the linear slider 6 is not particularly limited, and may be a wire shape or a thin rod shape. Good.

以上説明したように、この実施の形態では、リニアスライダ6の曲げ剛性およびねじり剛性を案内部材の曲げ剛性およびねじり剛性より小さくしている。これにより、案内部材による駆動対象部材の案内方向および姿勢と、振動部材1とリニアスライダ6との接触部4と、の平行度が多少悪くても、平行度誤差をリニアスライダ6の撓み、あるいはねじれにより緩和、吸収することができる。この結果、コンプライアンス機構を不要にすることができ、装置の小型化を実現することができる。   As described above, in this embodiment, the bending rigidity and torsional rigidity of the linear slider 6 are made smaller than the bending rigidity and torsional rigidity of the guide member. As a result, even if the parallelism between the guide direction and posture of the member to be driven by the guide member and the contact portion 4 between the vibration member 1 and the linear slider 6 is somewhat poor, the parallelism error may be caused by bending of the linear slider 6 or Can be relaxed and absorbed by twisting. As a result, the compliance mechanism can be dispensed with and the apparatus can be downsized.

また、振動モード、振動周波数、および振動位相が同一の2つの振動部材1をリニアスライダ6の厚さ方向の両側に同一位置で接触させているので、リニアスライダ6に曲げの振動応力が加えられないようにすることができる。これにより、リニアスライダ6の剛性をさらに小さくすることができ、この結果、リニアスライダ6の剛性を高めるために太い部材を使ったり、制振材を貼り付けたりする必要がなくなり、さらに装置の小型化を図ることができる。   Further, since the two vibration members 1 having the same vibration mode, vibration frequency, and vibration phase are brought into contact at the same position on both sides in the thickness direction of the linear slider 6, bending vibration stress is applied to the linear slider 6. Can not be. As a result, the rigidity of the linear slider 6 can be further reduced. As a result, there is no need to use a thick member or affixing a damping material in order to increase the rigidity of the linear slider 6. Can be achieved.

図3に、本発明の実施の形態の一例であるリニア駆動装置をレンズ鏡筒に適用した例を示す。   FIG. 3 shows an example in which a linear drive device which is an example of an embodiment of the present invention is applied to a lens barrel.

カメラやビデオカメラ等の撮像装置に設けられるレンズ鏡筒はフォーカスやズームのように光学レンズを光軸に沿って駆動制御することが必要である。また、カメラやビデオカメラは携帯性も要求されるのでレンズ鏡筒の小型化が望まれる。   A lens barrel provided in an imaging apparatus such as a camera or a video camera needs to drive and control an optical lens along the optical axis like focus and zoom. Cameras and video cameras are also required to be portable, so it is desirable to reduce the size of the lens barrel.

そこで、本発明の実施の形態の一例であるリニア駆動装置をレンズ鏡筒に適用することで、レンズ鏡筒ひいては撮像装置の小型化を図ることができる。   Therefore, by applying a linear drive device, which is an example of an embodiment of the present invention, to a lens barrel, the lens barrel and thus the imaging device can be downsized.

図3では、上記実施の形態と同様にして、2つの振動部材1がリニアスライダ6を挟むように対称配置されている。2つの動部材には、キャリア9を介して光学レンズ(駆動対象部材)10が取り付けられている。光学レンズ10の光軸はリニアスライダ6と略平行に配置され、キャリア9は光学レンズ10と略平行に配置された2本のガイドバー(案内部材)8a,8bによって光学レンズ10と一体となって光軸方向に案内される。 In FIG. 3, the two vibrating members 1 are arranged symmetrically so as to sandwich the linear slider 6 in the same manner as in the above embodiment. The two vibration members 1, an optical lens (driven member) 10 is attached via a carrier 9. The optical axis of the optical lens 10 is disposed substantially parallel to the linear slider 6, and the carrier 9 is integrated with the optical lens 10 by two guide bars (guide members) 8 a and 8 b disposed substantially parallel to the optical lens 10. Are guided in the direction of the optical axis.

なお、本発明の振動部材、長尺部材、駆動対象部材、案内部材等の構成は上記実施の形態に例示したものに限定されるものではなく、本発明の要旨を逸脱しない範囲において適宜変更可能である。   The configurations of the vibration member, the long member, the drive target member, the guide member, and the like of the present invention are not limited to those illustrated in the above embodiment, and can be changed as appropriate without departing from the gist of the present invention. It is.

例えば、上記実施の形態では、リニアスライダ6に対して振動部材1が該リニアスライダ6の長手方向に沿って移動する場合を例示したが、振動部材1に対してリニアスライダ6が長手方向に沿って移動する場合にも本発明を適用してもよい。   For example, in the above-described embodiment, the case where the vibrating member 1 moves along the longitudinal direction of the linear slider 6 with respect to the linear slider 6 is illustrated. However, the linear slider 6 moves along the longitudinal direction with respect to the vibrating member 1. The present invention may also be applied to a case where the user moves.

この場合、リニアスライダ6に駆動対象部材が取り付けられ、該駆動対象部材が案内部材によって案内されることになる。   In this case, a drive target member is attached to the linear slider 6, and the drive target member is guided by the guide member.

本発明の実施の形態の一例であるリニア駆動装置を説明するための斜視図である。It is a perspective view for demonstrating the linear drive device which is an example of embodiment of this invention. 図1に示すリニア駆動装置の振動部材とリニアスライドとが接触した状態を示す図である。It is a figure which shows the state which the vibration member and linear slide of the linear drive device shown in FIG. 1 contacted. 本発明の実施の形態の一例であるリニア駆動装置をレンズ鏡筒に適用した例を示す斜視図である。It is a perspective view which shows the example which applied the linear drive device which is an example of embodiment of this invention to the lens-barrel. 従来のリニア駆動装置を説明するための斜視図である。It is a perspective view for demonstrating the conventional linear drive device. 従来の他のリニア駆動装置を説明するための斜視図である。It is a perspective view for demonstrating the other conventional linear drive device.

符号の説明Explanation of symbols

1 振動部材
2 弾性体
3 突起
4 接触部
5 電気−機械エネルギ変換素子
6 リニアスライダ(長尺部材)
7 フレキシブルプリント基板
8a,8b ガイドバー(案内部材)
9 キヤリア
10 光学レンズ(駆動対象部材)
DESCRIPTION OF SYMBOLS 1 Vibrating member 2 Elastic body 3 Protrusion 4 Contact part 5 Electromechanical energy conversion element 6 Linear slider (long member)
7 Flexible printed circuit boards 8a, 8b Guide bar (guide member)
9 Carrier 10 Optical lens (drive target member)

Claims (4)

振動波を発生する振動部材と、該振動部材の振動波が伝達される長尺部材と、前記振動部材にキャリアを介して取り付けられている駆動対象部材と、前記キャリアを移動方向に沿って案内する案内部材と、を備える振動波駆動装置であって、
前記振動部材と前記駆動対象部材とは、前記長尺部材に対して移動し、
前記長尺部材の曲げ剛性およびねじり剛性、前記案内部材の曲げ剛性およびねじり剛性より小さことを特徴とする振動波駆動装置。
A vibration member for generating a vibration wave length and long member vibration wave that is transmitted in the vibration member, along the movement direction and the driven member is attached via a carrier to the vibration member, the carrier guide A vibration wave driving device comprising:
The vibration member and the drive target member move relative to the long member,
Vibration wave driving apparatus flexural rigidity and torsional rigidity of the elongate member, characterized in that not less than the flexural rigidity and torsional rigidity of the guide member.
前記長尺部材の周囲に前記振動部材を複数配置し、複数の前記振動部材の振動モード、振動周波数、および振動位相を同一とした、ことを特徴とする請求項1に記載の振動波駆動装置。   2. The vibration wave drive device according to claim 1, wherein a plurality of the vibration members are arranged around the long member, and a plurality of vibration members have the same vibration mode, vibration frequency, and vibration phase. . 前記長尺部材は、金属テープ、金属薄板、樹脂製テープのいずれかであることを特徴とする請求項1又は2に記載の振動波駆動装置。 3. The vibration wave driving device according to claim 1 , wherein the elongate member is one of a metal tape, a metal thin plate, and a resin tape . 光学レンズを駆動対象部材とした振動波駆動装置を備えるレンズ鏡筒であって、A lens barrel including a vibration wave driving device having an optical lens as a driving target member,
前記振動波駆動装置として、請求項1乃至3のいずれか一項に記載の振動波駆動装置を用いる、ことを特徴とするレンズ鏡筒。A lens barrel using the vibration wave drive device according to claim 1 as the vibration wave drive device.
JP2006332404A 2006-12-08 2006-12-08 Vibration wave drive Expired - Fee Related JP5188061B2 (en)

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JP6128868B2 (en) * 2012-02-23 2017-05-17 キヤノン株式会社 Vibration type driving device and imaging device

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JPH06292374A (en) * 1993-04-05 1994-10-18 Rion Denshi Kk Piezoelectric actuator
JP2000125576A (en) * 1998-10-09 2000-04-28 Nikon Corp Carrying device using vibration actuator
JP2004304887A (en) * 2003-03-28 2004-10-28 Canon Inc Oscillatory drive unit
JP4072518B2 (en) * 2004-06-09 2008-04-09 キヤノン株式会社 Vibration wave drive
JP4689989B2 (en) * 2004-08-27 2011-06-01 オリンパス株式会社 Vibration wave linear motor and lens device using the same
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