JP7130727B2 - Vibration wave motor and device using the same - Google Patents

Description

The present invention relates to a vibration wave motor and an apparatus using the same.

Friction-driven ultrasonic motors (vibration wave motors), which use the deformation of piezoelectric elements due to the piezoelectric effect as a drive source, generate a larger force than electromagnetic motors, and can drive a driven part without providing a speed reduction mechanism. It is possible. In addition, since the driven part is driven using friction, it is possible to perform driving with a large holding force and excellent quietness. Japanese Patent Application Laid-Open No. 2002-200002 discloses a linear vibration motor having a vibrator including an elastic body having two pressure contact portions and a piezoelectric element, and a contact member that contacts the pressure contact portion that is pressed by a pressure spring. there is Further, Patent Document 2 discloses a vibration wave motor mechanism having a configuration different from that of Patent Document 1.

JP 2015-136205 A Japanese Unexamined Patent Application Publication No. 2011-72130

Friction-driven vibration wave motors can exhibit desired performance by maintaining the pressure applied to the pressure contact portion at a predetermined value. If the applied pressure is large, the generated force increases, but since the drive vibration of the vibrating body is suppressed, the power consumption for achieving the same speed increases and the electromechanical conversion efficiency decreases. Conversely, when the applied pressure is small, the generated force decreases. In particular, when two pressure contact portions are provided, the balance of pressure applied to both is important. If the pressing forces applied to both are unbalanced, the deformation of the pressure contact portion, which should be symmetrical with respect to the driving direction, becomes asymmetrical, resulting in a decrease in efficiency and a large difference in characteristics depending on the driving direction.

In Patent Literature 1, a pressure spring that presses the two pressure-contact portions against the contacted member is arranged directly above the vibrator, so that stable pressure is applied to the two pressure-contact portions. However, since the pressure spring is arranged directly above the vibrator, the thickness of the motor is increased.

In Patent Document 2, a plurality of extension coil springs arranged around a laminated piezoelectric element bring the sliding member and the friction member into pressure contact. However, since the extension coil spring pulls the sliding member and the case member, the amount of movement is limited, and it is difficult to stably maintain the pressurized state of the two friction members. In addition, no consideration is given to differences in the characteristics of a plurality of extension coil springs.

In view of such problems, it is an object of the present invention to provide a vibration wave motor that is thin and has stable performance.

A vibration wave motor as one aspect of the present invention includes: a first vibrator; a friction member that contacts the first vibrator ; a first pressing member that presses the first vibrator against the friction member by the biasing force ; and a second pressure member biased against a surface opposite to the surface in contact with the first vibrator, wherein the first vibrator and the friction member The first pressure member and the second pressure member are arranged to move relative to each other by vibration generated in one vibrator, and the first pressure member and the second pressure member are arranged to move relative to each other when the first vibrator moves. The first pressure member moves integrally with the vibrator, and the first pressure member moves in a direction in which the first vibrator and the friction member move relative to each other, and perpendicularly to the direction of movement, by the plurality of pressure means. When a direction orthogonal to the pressurizing direction is defined as a first direction, it is arranged to be tiltable about an axis along the first direction with respect to the first vibrator . vibration wave motor.

According to the present invention, it is possible to provide a vibration wave motor that is thin and has stable performance.

1 is a cross-sectional view of an imaging device provided with a vibration wave motor unit according to an embodiment of the present invention; FIG. 1A and 1B are a plan view and a side view of a vibrator of Example 1; FIG. 1 is a perspective view of a vibration wave motor unit of Example 1. FIG. 2 is an exploded perspective view of the vibration wave motor unit of Example 1. FIG. 1A and 1B are a plan view and a cross-sectional view of a vibration wave motor unit of Example 1; FIG. FIG. 4 is an explanatory diagram of the degree of freedom of motion of the vibrator of Example 1; 4A and 4B are diagrams for explaining the relationship between the pressure plate and the movable member of the first embodiment; FIG. FIG. 4 is a perspective view of the straight guiding portion of Example 1; FIG. 4 is an explanatory diagram of the straight guide part of the first embodiment; FIG. 4 is an explanatory diagram of assembly of the straight guide part of the first embodiment; 3 is a perspective view of the lens drive unit of Example 1. FIG. FIG. 11 is a perspective view of a vibration wave motor unit of Example 2; FIG. 11 is an exploded perspective view of the vibration wave motor unit of Example 2; 8A and 8B are a plan view and a cross-sectional view of a vibration wave motor unit according to a second embodiment; FIG. FIG. 10 is an explanatory diagram of the degree of freedom of movement of the vibrator of Example 2; FIG. 11 is a diagram for explaining the relationship between a pressure plate and a movable member in Example 2; FIG. 11 is a perspective view of a straight guiding portion of Example 2; FIG. 10 is an explanatory diagram of a connecting portion between the vibration wave motor unit and the lens unit of Example 2; FIG. 11 is a perspective view of a vibration wave motor unit of Example 3; FIG. 11 is an exploded perspective view of a vibration wave motor unit of Example 3; 8A and 8B are a plan view and a cross-sectional view of a vibration wave motor unit of Example 3; FIG. FIG. 11 is an explanatory diagram of the degree of freedom of movement of the vibrator of Example 3; FIG. 11 is a diagram illustrating the relationship between a first pressure plate and a second pressure plate in Example 3; FIG. 11 is a perspective view of a lens drive unit of Example 3;

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In each figure, the same reference numerals are given to the same members, and overlapping descriptions are omitted.

FIG. 1 is a cross-sectional view of an imaging apparatus (optical device) including a vibration wave motor unit (vibration wave motor or ultrasonic motor unit; hereinafter referred to as a motor unit) 1000 according to an embodiment of the present invention. The imaging apparatus of this embodiment includes an imaging lens section 2000 and a camera body 3000 . Inside the imaging lens section 2000, a motor unit 1000 and a focusing lens 4000 attached to the motor unit 1000 are arranged. An imaging element 5000 is arranged inside the camera body 3000 . The focusing lens 4000 is moved along the optical axis O by the motor unit 1000 during photographing. The subject image is formed at the position of the image sensor 5000, and the image sensor 5000 produces a focused image. Although the motor unit 1000 is mounted in the imaging device in this embodiment, the present invention is not limited to this. The motor unit 1000 may be mounted, for example, on another optical device such as a lens unit, or may be mounted on a device different from the optical device. Further, although the imaging lens unit 2000 and the camera body 3000 are configured integrally in this embodiment, the present invention is not limited to this. The imaging lens unit 2000 may be detachably attached to the camera body 3000 . In other words, the device in the present invention means a device having a vibration wave motor, which will be described later in each embodiment, and a member driven by the driving force from the vibration wave motor.

The vibrator 2 included in the motor unit 1000A of this embodiment will be described with reference to FIG. 2A and 2B are a plan view and a side view of the vibrator 2. FIG. FIG. 2(A) is a plan view of the vibrator 2, and FIG. 2(B) is a side view. The vibrator 2 includes drive protrusions 2a, 2b and fixed arms 2c, 2d. A vibration plate (elastic plate) 3 and a piezoelectric element 4 are fixed to the vibrator 2 with an adhesive or the like. When a two-phase high-frequency voltage is applied to the piezoelectric element 4, ultrasonic vibration is excited, and elliptical motion on the xy plane shown in FIG. 2(B) is excited at the tips of the drive protrusions 2a and 2b. In this state, frictional contact between the driving projections 2a and 2b causes the vibrator 2 and the frictional material to move relative to each other. In the present embodiment, a rectangular area A×B facing the friction member 7 and including the driving projections 2a and 2b is defined as a driving force generating area (opposing area). Further, a plane C that is orthogonal to the rectangular area A×B and the x-axis and divides the rectangular area A×B symmetrically is a front-rear symmetry plane (first surface), orthogonal to the rectangular area A×B and the z-axis, and A plane D that symmetrically divides A×B is defined as a symmetrical plane (second plane). The front-rear symmetry plane C is a plane including a direction orthogonal to the moving direction of the moving part and the pressing direction of the pressing means, as will be described later, and the pressing direction of the pressing means. Further, the plane of left-right symmetry D is a plane including the moving direction of the moving portion and the pressing direction of the pressing means.

The configuration of the motor unit 1000A will be described below with reference to FIGS. 3 to 5. FIG. FIG. 3 is a perspective view of the motor unit 1000A. FIG. 3A is a plan side perspective view, and FIG. 3B is a bottom side perspective view. FIG. 4 is an exploded perspective view of the motor unit 1000A. 5A and 5B are a plan view and a cross-sectional view of the motor unit 1000A. FIG. 5(A) is a plan view, and FIGS. 5(B) and 5(C) are xx cross-sectional views and zz cross-sectional views of FIG. 5(A), respectively.

The base member 5 is fixed to a fixing portion (not shown) with screws, and the friction member 7 is fixed with the screws. The friction member 7 is brought into frictional contact with the drive protrusions 2 a and 2 b of the vibrator 2 by the pressure applied by the tension coil spring 10 . The flexible substrate 6 is mechanically and electrically connected to the piezoelectric element 4 with an anisotropic conductive paste or the like, and applies a two-phase high-frequency voltage to the piezoelectric element 4 . The vibrator holding frame 8 is integrated with the vibrator 2 by fixing the fixed arm portions 2c and 2d of the vibrator 2 with an adhesive or the like. The pressurizing intermediate member 9 includes a felt 9a that contacts the vibrator 2 and a high-rigidity plate 9b made of metal or the like that receives the pressurizing force of the tension coil spring 10 . The felt 9 a transmits the pressure force of the tension coil spring 10 to the vibrator 2 without impeding the vibration excited in the vibrator 2 . Four extension coil springs (biasing means) 10 are arranged around the vibrator 2, and generate a pressure in the negative direction (pressure direction) of the y-axis as pressure means in this embodiment. A pressure plate (first pressure member) 11 is biased by an extension coil spring 10 . Further, the pressure plate 11 includes a spherical projection (pressure portion) 11a that abuts the pressure mediating member 9 on the line of intersection between the front-rear symmetry plane C and the left-right symmetry plane D of the vibrator 2 . The coupling sheet metal 12 is fixed to the vibrator holding frame 8 with screws. The guide member 13 is fixed to the base member 5 with screws through a fixing sheet metal 16 so as to be parallel to the contact surface of the friction member 7 with the driving protrusions 2a and 2b. A movable member (second pressure member) 14 is biased by an extension coil spring 10 . Rolling balls (rolling members) 19x, 19y, and 19z are sandwiched between the guide member 13 and the movable member 14, respectively, and receive pressure from the tension coil spring 10. As shown in FIG. The integration spring 15 is a tension coil spring, and biases the transducer holding frame 8 and the movable member 14 through the coupling sheet metal 12 so that they are integrated in the x-axis direction. In the present embodiment, the moving part composed of the vibrator 2, the vibrator holding frame 8, the pressure mediating member 9, the tension coil spring 10, the pressure plate 11, the connecting metal plate 12, and the movable member 14 is arranged along the x-axis. It moves relative to the friction member 7 .

Next, with reference to FIG. 6, the degree of freedom of movement of the vibrator 2 of this embodiment will be described. FIG. 6 is an explanatory diagram of the degrees of freedom of movement of the vibrator 2 . In FIG. 6, components of the motor unit 1000A that are unnecessary for explanation are omitted. FIG. 6A shows the vibrator holding frame 8 and the movable member 14 that are integrated via the coupling sheet metal 12 by the biasing force of the integrated spring 15 . The integrated spring 15 is hooked between a hook portion 8 a provided on the vibrator holding frame 8 and a hook portion 14 b provided on the movable member 14 . The reference ball 17 is sandwiched between a conical hole portion 12a formed in the coupling sheet metal 12 and a conical hole portion 14a formed in the movable member 14. As shown in FIG. The rolling ball 18 is sandwiched between the V-shaped groove 8b formed in the vibrator holding frame 8 and the flat portion 14c formed in the movable member 14. As shown in FIG. By sandwiching the rolling ball 18 between the V-shaped groove 8b and the flat portion 14c, the rotation of the vibrator holding frame 8 and the movable member 14 about the reference ball 17 around the y-axis (yaw direction) is prevented. Regulated.

FIG. 6(B) is a cross-sectional view of the motor unit 1000A cut along a plane at which the integrated spring 15, the reference ball 17, and the rolling ball 18 are set. Arrows A, B, and C represent forces acting on the vibrator holding frame 8, respectively. The force represented by the arrow A is the force with which the integrated spring 15 biases the vibrator holding frame 8 so that the vibrator holding frame 8 rotates about the reference ball 17 . The force represented by the arrow B is the force that the rolling ball 18 acts on the V-shaped groove 8b by the flat portion 14c. By sandwiching the rolling ball 18 between the V-shaped groove 8b and the flat portion 14c, the rotation of the vibrator holding frame 8 and the movable member 14 around the reference ball 17 is restricted. Rotation in the yaw direction is restricted. At this time, the moments of force A and force B about the reference ball 17 are balanced.

The force C is a force acting on the vibrator holding frame 8 via the connecting sheet metal 12, and is balanced with the resultant force of the forces A and B as shown in FIG. 6(C). Therefore, the freedom of movement of the vibrator holding frame 8 in the x-axis direction (x-axis translation direction) and z-axis direction (z-axis translation direction) is restricted. Further, since the reference ball 17 is sandwiched between the conical hole portion 12a and the conical hole portion 14a, the degree of freedom of movement of the vibrator holding frame 8 in the y-axis direction (y-axis translational direction) is also restricted.

As described above, in this embodiment, the movement of the vibrator holding frame 8 integrated with the vibrator 2 with respect to the movable member 14 is in the direction of rotation about the x-axis (roll direction) and in the direction of rotation about the z-axis (pitch direction). 2 degrees of freedom. In this embodiment, since the vibrator 2 has degrees of freedom of movement in the roll direction and the pitch direction, it is possible to bring the drive projections 2a and 2b of the vibrator 2 into contact with the friction member 7 reliably. In addition, since the forces AC that restrict the degree of freedom of movement of the vibrator 2 are balanced within one plane, unnecessary unbalanced forces do not occur with respect to the driving protrusions 2a and 2b.

6(D) and 6(E) are diagrams showing states in which the vibrator holding frame 8 rotates about the reference ball 17 in the roll direction and the pitch direction, respectively. As shown in FIGS. 6(D) and 6(E), rotation in the roll direction moves the driving projections 2a and 2b up and down in the y-axis direction, and rotation in the pitch direction moves the driving projections 2a and 2b upward and downward. It is possible to accommodate positional differences in the y-axis direction.

FIG. 7 is a diagram for explaining the relationship between the pressure plate 11 and the movable member 14. As shown in FIG. The four tension coil springs 10 are engaged with spring hooks of the pressure plate 11 and the movable member 14 . Since the space between the pressure plate 11 and the movable member 14 in the y-axis direction is determined by components of the motor unit 1000A (not shown), the four extension coil springs 10 bias the pressure plate 11 and the movable member 14 . The four extension coil springs 10 are springs of the same specification that are symmetrically arranged at equal intervals from the spherical projection 11a. However, the biasing force of each extension coil spring at a predetermined length is not always the same due to manufacturing variations, and the positions of the spring hooks of the pressure plate 11 and the movable member 14 are also dependent on the manufacturing accuracy of the single component and intervening factors. Errors are caused by manufacturing errors in the parts used. In this embodiment, the pressure plate 11 abuts against the pressure intermediate member 9 with the spherical projection 11a, and has a degree of freedom of movement (inclination) in the roll direction and the pitch direction with the spherical projection 11a as a fulcrum.

That is, the pressure plate 11 can be tilted about an axis in the plane of left-right symmetry D that is perpendicular to the plane of front-rear symmetry C and an axis that is perpendicular to the plane of left-right symmetry D in the plane of front-rear symmetry C. Strictly speaking, it is not necessary to be able to tilt around each axis, and even if it is deviated from each axis by several millimeters, it is considered possible to tilt around each axis. For example, it may deviate by about ±0.2 mm depending on the performance and application. Therefore, the pressing forces of the four extension coil springs 10 acting on the driving protrusions 2a and 2b from the spherical protrusion 11a via the pressure mediating member 9 are each optimally adjusted for the manufacturing variations described above.

The axis that is the center of the inclination of the pressure plate 11 may be defined as follows. That is, the first pressing member is arranged in the first direction (z-axis direction) when the direction orthogonal to the moving direction of the first vibrator and the pressing direction of the plurality of pressing means is defined as the first direction (z-axis direction). It may be possible to tilt around the direction. Such definitions are the same in each of the examples described later.

In addition, since the pressure plate 11 has a degree of freedom of movement in the roll direction and the pitch direction relative to the vibrator holding frame 8 including the pressure mediating member 9 , the tilt of the vibrator holding frame 8 and changes in the tilt are not affected. Regardless, the posture of the pressure plate 11 with respect to the movable member 14 is adjusted to the optimum state. Therefore, the pressing forces of the four extension coil springs 10 acting on the driving protrusions 2a and 2b from the spherical protrusion 11a via the pressure mediating member 9 are stabilized without variation. In addition, although the distance between the pressure plate 11 and the movable member 14 in the y-axis direction may change, the tension coil spring 10 can have a smaller spring constant than leaf springs and the like, so the pressure can be stabilized. Advantageous.

Moreover, since the protrusion 11b provided on the pressure plate 11 engages with the groove 8c formed in the vibrator holding frame 8 shown in FIG. The members 14 are integrated in the x-axis direction. Therefore, while the moving part moves along the x-axis, the positional relationship among the tension coil spring 10, pressure plate 11, and movable member 14 does not change, and the pressure applied by the tension coil spring 10 is stable.

FIG. 8 is a perspective view of a rectilinear guide portion composed of the guide member 13, the movable member 14, and rolling balls 19x, 19y, and 19z sandwiched between these members. FIG. 9 is an explanatory diagram of the straight guide section. Linear guide grooves 14x, 14y, and 14z that engage with rolling balls 19x, 19y, and 19z, respectively, are formed in the movable member 14 parallel to the x-axis direction (moving direction of the moving portion). The rectilinear guide grooves 14x and 14y are formed in series along the x-axis, that is, spaced apart on the same straight line parallel to the x-axis. The rectilinear guide groove 14z is separated from the rectilinear guide grooves 14x and 14y in the z-axis direction and formed along the x-axis. The movable member 14 smoothly moves along the x-axis with respect to the guide member 13 while receiving pressure from the tension coil spring 10 as the rolling balls 19x, 19y, and 19z roll.

FIG. 9(A) shows a state in which the guide member 13 and the movable member 14 are in contact with the rolling balls 19x, 19y, and 19z. FIG. 9B is a cross-sectional view at a position passing through the rolling balls 19y and 19z in the state of FIG. 9A. A part of the rectilinear guide grooves 14x, 14y, 14z is formed with a surface having an open angle of 60 degrees so as to be engageable with each rolling ball. The guide member 13 is provided with a guide wall 13x-y continuously formed along the x-axis facing the rectilinear guide grooves 14x and 14y and engaged with the rolling balls 19x and 19y. The guide wall 13xy is formed with an open angle of 120 degrees so that it can be engaged with each rolling ball. Further, the guide member 13 is provided with a guide flat portion 13z formed along the x-axis in parallel with the xz plane that faces the rectilinear guide groove 14z and engages with the rolling ball 19z. In this embodiment, a surface having an open angle of 60 degrees is formed in a part of each rectilinear guide groove, but the present invention is not limited to this. For example, a surface having a predetermined angle with respect to the xz plane may be formed along the x-axis in a part of each rectilinear guide groove, and the entire rectilinear guide groove is formed as a V-shaped groove having a predetermined angle. may be In this embodiment, the guide walls 13x-y are formed with an open angle of 120 degrees, but the present invention is not limited to this. For example, guide walls 13x-y may be formed at a predetermined angle to the xz plane along the x-axis so as to engage each rolling ball.

The guide member 13 is formed with planar portions 13v and 13w. The movable member 14 has four spring hooks (engagement portions) that engage with the tension coil springs 10, respectively, as described above. In the state of FIG. 9A, two of the four spring hooking portions are provided so that the restricting portion 14v, which is a part thereof, forms a gap a in the y-axis direction with the plane portion 13v. . Further, the movable member 14 is provided with two stopper portions 14w so as to form an interval a in the y-axis direction from the planar portion 13w in the state of FIG. 9A.

FIG. 9C shows a state in which the guide member 13 and the movable member 14 are in contact with each other in the y-axis direction, that is, the planar portion 13v and the two restricting portions 14v and the planar portion 13w and the two stopper portions 14w are in contact. represents the state. FIG. 9(D) is a sectional view at the position of the rolling ball 19z in the state of FIG. 9(C). In FIG. 9C, the rolling balls 19x, 19y, 19z are engaged with the linear guide grooves 14x, 14y, 14z, but are not in contact with the guide member 13. In FIG. Also, in FIG. 9D, the rolling balls 19x, 19y, and 19z are in contact with the guide member 13, but are not in contact with the movable member . As shown in FIG. 9(D), the rolling ball 19z, even at the position in contact with the guide member 13, hangs on the movable member 14 by the distance b with respect to the rectilinear guide groove 14z. never do. Further, since the rolling balls 19x and 19y are engaged with the movable member 14 by the distance b between the rectilinear guide grooves 14x and 14y, respectively, they do not drop out of the rectilinear guide grooves 14x and 14y.

As described above, in this embodiment, it is possible to prevent the rolling balls 19x, 19y, and 19z from falling off by providing a plurality of restricting portions 14v and stopper portions 14w that contact the flat portions 13v and 13w. . Specifically, the restricting portion 14v and the stopper portion 14w are provided so that the distance a is shorter than the distance c from the designed surface 14e of the movable member 14 to the position where each rolling member engages with the corresponding rectilinear guide groove. It is good if it is In this embodiment, the regulating portion 14v and the stopper portion 14w are arranged so that each rolling ball hangs on the movable member 14 by the interval b when the guide member 13 moves in the y-axis direction. A portion is provided so as to be positioned inside each rectilinear guide groove. Although the motor unit 1000A of this embodiment includes three rolling balls 19x, 19y, and 19z, the present invention is not limited to this. For example, three or more rolling balls may be provided, and the guide portion of the guide member 13 and the rectilinear guide groove of the movable member 14 may be formed accordingly. However, when three or more rolling balls are provided, there are rolling balls that do not engage with the guide portion or the straight guide groove due to manufacturing errors in the rolling balls or the straight guide groove, so the movable member 114 moves with high accuracy. difficult to do. Therefore, in order to move the movable member 114 with high accuracy, it is preferable to set the number of rolling balls to three.

Further, in this embodiment, as shown in FIG. 8B, the spring hooking portion of the movable member 14 is arranged within the projection plane of the guide member 13 in the y-axis direction. Specifically, the spring hooks are arranged so as to sandwich the rectilinear guide grooves 14x, 14y, 14z, the guide wall 13x-y, and the guide plane portion 13z. By arranging in this manner, the space on the positive side of the y-axis of the guide member 13 (the space on the side opposite to the surface on which the guide wall 13xy and the guide flat portion 13z are formed) can be effectively used. It is possible to A conical hole portion 14a that engages with the reference ball 17, a hook portion 14b that engages with the integrated spring 15, and an interlocking portion 14d, which will be described later, are also arranged within the projected plane of the guide member 13 in the y-axis direction. Specifically, each member is arranged so as to sandwich straight guide grooves 14x, 14y, 14z, guide wall 13x-y, and guide plane portion 13z. By utilizing the space on the positive side of the y-axis of the guide member 13, the size of the motor unit 1000A can be reduced.

In this embodiment, the above configuration makes it impossible to incorporate the guide member 13, the movable member 14 and the rolling balls 19x, 19y, 19z in the y-axis direction. Therefore, in this embodiment, as shown in FIG. 10, the rolling balls 19x, 19y, and 19z are put on the rectilinear guide grooves 14x, 14y, and 14z of the movable member 14, respectively, and slid in the arrow S direction to move the guide member 13. 8(A), the built-in state shown in FIG. 8A is obtained.

FIG. 11A is a perspective view of the lens driving unit with the motor unit 1000A attached. FIG. 11B is a perspective view of the lens drive unit without the motor unit 1000A attached. FIG. 11(C) is a diagram showing a connecting portion between the motor unit 1000A and the lens unit 300. FIG. FIG. 11D is a cross-sectional view of the connecting portion. Lens unit 300 is supported for movement along the optical axis (x-axis) in a bar-sleeve arrangement. The guide bars 301 and 302 are formed parallel to the x-axis and supported by members (not shown). The interlocking member 303 is integrated with the lens unit 300 in the optical axis direction via an interlocking biasing spring 304, and is applied with a rotational force in the arrow R direction. The interlocking portion 14d provided on the movable member 14 is formed with a groove shape having an open angle of 60 degrees as shown in FIG. 11(D). 11(B), the spherical interlocking portion 303a provided in the interlocking member 303 is engaged with the groove shape formed in the interlocking portion 14d, and the driving force of the motor unit 1000A is applied to the interlocking member. 303 to the lens unit 300 . Further, the rotational force of the interlocking member 303 in the arrow direction R is received by the guide member 13 via the rolling balls 19x, 19y, and 19z. Further, the position error in the y-axis direction between the motor unit 1000A and the lens unit 300 is absorbed by the rotation of the interlocking member 303 in the direction of the arrow R, and the position error in the z-axis direction is absorbed by the groove shape formed in the interlocking portion 14d and the spherical interlocking portion. It is absorbed by moving the engaging position of 303a in the z-axis direction. Therefore, even if there is a manufacturing error, the motor unit 1000A can drive the lens unit 300 smoothly and reliably along the optical axis.

The configuration of a vibration wave motor unit (ultrasonic motor unit, hereinafter referred to as a motor unit) 1000B of this embodiment will be described with reference to FIGS. 12 to 14. FIG. FIG. 12 is a perspective view of the motor unit 1000B. FIG. 12A is a plan side perspective view, and FIG. 12B is a bottom side perspective view. FIG. 13 is an exploded perspective view of the motor unit 1000B. 14A and 14B are a plan view and a cross-sectional view of the motor unit 1000B. 14(A) is a plan view, and FIGS. 14(B) and 14(C) are xx cross-sectional views and zz cross-sectional views of FIG. 14(A), respectively.

The vibrator 2 included in the motor unit 1000B of this embodiment is the same as the vibrator 2 of the first embodiment. The base member 105 is fixed to a fixing portion (not shown) with screws, and the friction member 107 is fixed with the screws. The friction member 107 is brought into frictional contact with the drive protrusions 2a and 2b by the pressure applied by the tension coil spring 110. As shown in FIG. The flexible substrate 106 is mechanically and electrically connected to the piezoelectric element 4 of the vibrator 2 with an anisotropic conductive paste or the like as in the first embodiment, and applies two-phase high-frequency voltage to the piezoelectric element 4 . The vibrator holding frame 108 is integrated with the vibrator 2 by fixing the fixed arm portions 2c and 2d of the vibrator 2 with an adhesive or the like. The pressure mediating member 109 includes a felt 109 a that contacts the vibrator 2 and a highly rigid plate 109 b made of metal or the like that receives pressure from the tension coil spring 110 . The felt 109 a transmits the pressing force of the tension coil spring 110 to the vibrator 2 without impeding the vibration excited in the vibrator 2 . Four extension coil springs (biasing means) 110 are arranged around the vibrator 2, and in this embodiment, they serve as pressure means to generate a pressure force as described above. A pressure plate (first pressure member) 111 is biased by an extension coil spring 110 . The pressure plate 111 also includes two spherical projections (pressure portions) 111a that contact the pressure mediating member 109 and are located at the same position in the y-axis direction. The two spherical projections 111a are provided so as to be symmetrical with respect to the left-right symmetry plane D within the front-rear symmetry plane C of the vibrator 2 . A movable portion outer frame 112 is integrated with a movable member (second pressure member) 114 with screws. The guide member 113 is fixed to the base member 105 with screws through a fixed metal plate 116 so as to be parallel to the contact surface of the friction member 107 with the drive protrusions 2a and 2b. The movable member 114 is biased by the extension coil spring 110 . Rolling balls (rolling members) 119x, 119y, and 119z are sandwiched between the guide member 113 and the movable member 114, respectively, and receive pressure from the tension coil spring 110. As shown in FIG. In this embodiment, the moving part composed of the vibrator 2, the vibrator holding frame 108, the pressure intermediate member 109, the tension coil spring 110, the pressure plate 111, the movable part outer frame 112, and the movable member 114 is arranged along the x-axis. It moves relative to the friction member 107 along.

Next, with reference to FIG. 15, the degree of freedom of movement of the vibrator 2 of this embodiment will be described. FIG. 15 is an explanatory diagram of the degree of freedom of movement of the vibrator 2. FIG. In FIG. 15, components of the motor unit 1000B that are unnecessary for explanation are omitted. FIG. 15A shows the movable portion outer frame 112 and the movable member 114 that are integrated with the vibrator holding frame 108 . FIG. 15B is a cross-sectional view of the configuration shown in FIG. 15A taken along a plane passing through the reference bar 117 and the biased bar 118. FIG. FIG. 15C is a cross-sectional view of the configuration shown in FIG.

The integrated spring 115 is a plate spring and is fixed to a spring mounting portion 112b provided on the outer frame 112 of the movable portion. Force in the D direction. Further, the plane portion 108a formed on the vibrator holding frame 108 is attached in the direction of arrow D through a reference bar 117 sandwiched between the plane portion 108a and the plane portion 112a formed on the outer frame 112 of the movable portion. It receives a reaction force in the direction of arrow E that balances the force. Therefore, the vibrator holding frame 108 and the movable section outer frame 112 are integrated in the x-axis direction via the reference bar 117 and the biased bar 118 by the biasing force of the integration spring 115 . Further, by sandwiching the reference bar 117 between the flat portion 112a and the flat portion 108a, the rotation of the vibrator holding frame 108 in the yaw direction is also restricted. Further, by fitting the vibrator holding frame 108 to the movable portion outer frame 112 in the z-axis direction, rotation of the vibrator holding frame 108 in the z-axis direction (z-axis translational direction) and roll direction is also restricted.

As described above, in this embodiment, the movement of the transducer holding frame 108 integrated with the transducer 2 with respect to the movable member 114 has two degrees of freedom in the y-axis direction (y-axis translational direction) and the pitch rotation direction. In this embodiment, since the vibrator 2 has a degree of freedom of movement in the y-axis direction and the pitch direction, the drive protrusions 2 a and 2 b of the vibrator 2 can be reliably brought into contact with the friction member 107 . In addition, since the driving protrusions 2a and 2b and the friction member 107 are moved by rolling the reference bar 117 and the biased bar 118, it is possible to reduce the movement resistance. In addition, since the biasing force in the direction of arrow D and the reaction force in the direction of arrow E are balanced within one plane, unnecessary force imbalance does not occur with respect to the driving protrusions 2a and 2b.

16A and 16B are diagrams for explaining the relationship between the pressure plate 111 and the movable member 114. FIG. The four tension coil springs 110 are engaged with spring hooks of the pressure plate 111 and the movable member 114 . Since the space between the pressure plate 111 and the movable member 114 in the y-axis direction is determined by components of the motor unit 1000B (not shown), the four extension coil springs 110 bias the pressure plate 111 and the movable member 114 . In this embodiment, the pressure plate 111 abuts against the pressure intermediate member 109 with two spherical projections 111a that are positioned at the same position in the y-axis direction, and has a degree of freedom of movement (inclination) in the pitch direction with the two spherical projections 111a as fulcrums. have. That is, the pressure plate 111 can be tilted about an axis orthogonal to the left-right symmetry plane D within the front-rear symmetry plane C. As shown in FIG. Strictly speaking, it is not necessary to be able to tilt around the above-mentioned axis, and even if it is deviated from the above-mentioned axis by several millimeters, it is considered to be tiltable around each axis. For example, it may deviate by about ±0.2 mm depending on the performance and application. Therefore, the pressing forces of the four extension coil springs 110 acting on the driving protrusions 2a and 2b from the two spherical protrusions 111a via the pressure mediating member 109 are adjusted optimally.

In addition, since the pressure plate 111 has a degree of freedom of movement in the pitch direction relative to the transducer holding frame 108 including the pressure mediating member 109, regardless of the inclination of the transducer holding frame 108 and changes in inclination, The posture of the pressure plate 111 with respect to the movable member 114 is adjusted to an optimum state. In addition, although the distance in the y-axis direction between the pressure plate 111 and the movable member 114 may change, the tension coil spring 110 can have a smaller spring constant than leaf springs, etc., so that the pressure can be stabilized. Advantageous.

Moreover, since the projection 111b provided on the pressure plate 111 engages with the groove 108c formed in the vibrator holding frame 108 shown in FIG. The movable member 114 is integrated in the x-axis direction. Therefore, while the motor unit 1000B moves along the x-axis, the positional relationship among the tension coil spring 110, the pressure plate 111, and the movable member 114 does not change, and the pressure applied by the tension coil spring 110 is stable.

FIG. 17 is a perspective view of a rectilinear guiding portion composed of a guide member 113, a movable member 114, and rolling balls 119x, 119y, and 119z sandwiched by both members. The relationship between the guide member 113, the rectilinear guide grooves 114x, 114y, 114z formed in the movable member 114, and the rolling balls 119x, 119y, 119z is the same as that of the first embodiment, so the description is omitted. The guide member 113 is formed with planar portions 113v and 113w. Movable member 114 includes four spring hooks that engage tension coil spring 110 as previously described. As in the first embodiment, when the guide member 113 and the movable member 114 are in contact with the respective rolling balls, two of the four spring hooking portions have a restricting portion 114v that is a part thereof and a planar portion 113v. are provided so as to form an interval a in the y-axis direction. Further, the movable member 114 is provided with two stopper portions 114w so that the guide member 113 and the movable member 114 form a gap a in the y-axis direction with the planar portion 113w in a state in which the guide member 113 and the movable member 114 are in contact with the respective rolling balls. there is The above configuration prevents the rolling balls 119x, 119y, and 119z from falling off. Further, in this embodiment, as in the first embodiment, the spring hooking portion of the movable member 114 is arranged within the projection plane of the guide member 113 in the y-axis direction. By arranging them in this way, the space on the positive side of the y-axis of the guide member 113 can be effectively utilized, and the motor unit 1000B can be miniaturized.

The motor unit 1000B of this embodiment functions as part of the lens drive unit to drive the lens unit along the optical axis. FIG. 18 is an explanatory diagram of the connecting portion between the motor unit 1000B and the lens unit. As in the first embodiment, the rotational force in the direction of arrow R in FIG. It engages with the interlocking groove 401a having an opening angle of 100 degrees. Therefore, the driving force from the motor unit 1000B is transmitted to the interlocking member 401 via the outer frame 112 of the movable portion. Further, the rotational force in the direction of arrow R, which is the same as that shown in FIG. Therefore, unnecessary force is not transmitted to the vibrator holding frame 108 .

The configuration of a vibration wave motor unit (ultrasonic motor unit, hereinafter referred to as a motor unit) 1000C of this embodiment will be described with reference to FIGS. 19 to 21. FIG. FIG. 19 is a perspective view of the motor unit 1000C. FIG. 19A is a plan side perspective view, and FIG. 19B is a bottom side perspective view. FIG. 20 is an exploded perspective view of the motor unit 1000C. 21A and 21B are a plan view and a cross-sectional view of the motor unit 1000C. 21(A) is a plan view, and FIGS. 21(B) and 21(C) are xx cross-sectional views and zz cross-sectional views of FIG. 21(A), respectively.

A motor unit 1000C of this embodiment includes a first oscillator (first oscillator) 2_1 and a second oscillator (second oscillator) 2_2. The first oscillator 2_1 and the second oscillator 2_2 are the same as the oscillators 2 of the first and second embodiments. The first vibrator 2_1 and the second vibrator 2_2 sandwich the friction member 207 . The driving projections 2a_1 and 2b_1 of the first vibrator 2_1 come into contact with the first contact surface 207_1 of the friction member 207 on the side of the first vibrator 2_1. Further, the driving projections 2a_2 and 2b_2 of the second vibrator 2_2 come into contact with the second contact surface 207_2 of the friction member 207 on the side of the second vibrator 2_2.

The base member 205 is fixed to a fixing portion (not shown) with screws. The flexible substrates 206_1 and 206_2 are mechanically and electrically connected to the first oscillator 2_1 and the second oscillator 2_2 to vibrate the first oscillator 2_1 and the second oscillator 2_2, respectively. The first vibrator holding frame 208_1 and the second vibrator holding frame 208_2 fix the fixed arm portion of the first vibrator 2_1 and the fixed arm portion of the second vibrator 2_2 by bonding or the like. 2_1 and the second transducer 2_2. The pressure mediating member 209 includes a felt 209a that contacts the first vibrator 2_1, and a high-rigidity plate 209b made of metal or the like that receives pressure from the tension coil spring 210. FIG. The felt 209a transmits the pressing force of the tension coil spring 210 to the first oscillator 2_1 without inhibiting the vibration excited in the first oscillator 2_1. Two tension coil springs (biasing means) 210 are arranged around the first vibrator 2_1 and the second vibrator 2_2, and in this embodiment, they serve as pressure means to generate pressure as described above. A first pressure plate (first pressure member) 211 is biased by an extension coil spring 210 . The first pressure plate 211 also includes a spherical projection (pressure portion) 211a that contacts the pressure intermediary member 209 on the line of intersection between the front-rear symmetry plane C and the left-right symmetry plane D of the first vibrator 2_1. The first coupling sheet metal 212_1 and the second coupling sheet metal 212_2 are fixed to the first oscillator holding frame 208_1 and the second oscillator holding frame 208_2 with screws, respectively. A second pressure plate (second pressure member) 213 is biased by an extension coil spring 210 . The felt 214 transmits the pressing force of the extension coil spring 210 to the second oscillator 2_2 without impeding the vibration excited in the second oscillator 2_2. The integrated spring 215 is a tension coil spring and is hooked between a hook portion 212b_1 provided on the first coupling sheet metal 212_1 and a hook portion 212b_2 provided on the second coupling sheet metal 212_2. The integrated spring 215 biases the first oscillator holding frame 208_1 and the second oscillator holding frame 208_2 via the first coupling sheet metal 212_1 and the second coupling sheet metal 212_2. The first oscillator holding frame 208_1 and the second oscillator holding frame 208_2 biased by the integrated spring 215 are integrated with the base member 205 in the x-axis direction.

In this embodiment, the moving part composed of each vibrator, each vibrator holding frame, pressure intermediate member 209, tension coil spring 210, each pressure plate, each connecting sheet metal, and felt 214 is a friction member along the x-axis. 207. Note that the first oscillator 2_1 and the second oscillator 2_2, the first oscillator holding frame 208_1 and the second oscillator holding frame 208_2, and the first coupling sheet metal 212_1 and the second coupling sheet metal 212_2 are common parts.

Next, the degrees of freedom of movement of the first transducer 2_1 and the second transducer 2_2 of this embodiment will be described. FIG. 22 is an explanatory diagram of the degree of freedom of movement of the second oscillator 2_2. In FIG. 22, components of the motor unit 1000C that are unnecessary for explanation are omitted.

FIG. 22(A) shows the second transducer holding frame 208_2 and the base member 205 that are integrated with the integrated spring 215 via the second coupling sheet metal 212_2. The reference ball 217_2 is sandwiched between a conical hole 212a_2 formed in the second coupling sheet metal 212_2 and a conical hole 205a_2 formed in the base member 205. As shown in FIG. The ball 218_2 is sandwiched between the flat portion 208a_2 of the second oscillator holding frame 208_2 and the conical hole portion 205b_2 formed in the base member 205. As shown in FIG. By sandwiching the ball 218_2 between the flat portion 208b_2 and the conical hole portion 205c_2, rotation of the second oscillator holding frame 208_2 with respect to the base member 205 about the reference ball 217_2 is restricted.

FIG. 22(B) is a cross-sectional view of the motor unit 1000C cut along the plane of the set centers of the integrated spring 215, the reference ball 217_2, and the ball 218_2. Arrows A, B, and C represent forces acting on the second oscillator holding frame 208_2. The force represented by the arrow A causes the integrated spring 215 to rotate the second oscillator holding frame 208_2 about the reference ball 217_2 in the rotational direction (yaw direction) around the y-axis. 208_2. The force represented by the arrow B is the force that the ball 218_2 acts on the second oscillator holding frame 208_2. As described above, by sandwiching the ball 218_2 between the flat portion 208b_2 and the conical hole portion 205c_2, rotation of the second oscillator holding frame 208_2 with respect to the base member 205 about the reference ball 217_2 is restricted. Therefore, the rotation of the second oscillator holding frame 208_2 in the yaw direction is restricted. At this time, the moments of force A and force B about the reference ball 217_2 are balanced.

The force C is a force acting on the second oscillator holding frame 208_2 via the second coupling sheet metal 212_2, and is balanced with the resultant force of the forces A and B as shown in FIG. 22(C). Therefore, the degree of freedom of movement of the second transducer holding frame 208_2 in the x-axis direction (x-axis translational direction) and z-axis direction (z-axis translational direction) is restricted. Further, since the reference ball 217_2 is sandwiched between the conical hole portion 212a_2 and the conical hole portion 205a_2, the degree of freedom of movement of the second oscillator holding frame 208_2 in the y-axis direction (y-axis translational direction) is also restricted. be.

As described above, in this embodiment, the movement of the second transducer holding frame 208_2 integrated with the second transducer 2_2 with respect to the base member 205 is in the rotational direction (roll direction) about the x-axis and in the rotational direction about the z-axis. There are two degrees of freedom (pitch direction). In this embodiment, since the second oscillator 2_2 has degrees of freedom of movement in the roll direction and the pitch direction, the driving projections 2a_2 and 2b_2 of the second oscillator 2_2 are securely attached to the second contact surface 207_2 of the friction member 207. can be brought into contact with the In addition, since the forces AC that restrict the degree of freedom of movement of the vibrator 2 are balanced within one plane, unnecessary unbalanced forces do not occur with respect to the driving protrusions 2a_2 and 2b_2. The rotational movement of the second vibrator holding frame 208_2 with respect to the base member 205 about the reference ball 217_2 corresponds to the reference ball of the vibrator holding frame 8 shown in FIGS. Similar to roll direction and pitch rotation movement around 17 .

Although not shown in FIG. 22, the first oscillator 2_1, the first oscillator holding frame 208_1, and the first coupling sheet metal 212_1 are connected to the second oscillator 2_2, the second oscillator holding frame 208_2, and the second coupling. The metal plate 212_2 is arranged at a position rotated 180 degrees around the z-axis. The reference ball 217_1 is sandwiched between a conical hole formed in the first coupling sheet metal 212_1 and a conical hole 205a_1 formed in the base member 205. As shown in FIG. Also, the ball 218_1 is sandwiched between the flat portion 208a_1 of the first oscillator holding frame 208_1 and the conical hole portion 205b_1 formed in the base member 205 . Furthermore, the reference balls 217_1 and 217_2 are arranged on the same cross section shown in FIG. 22(B). Therefore, in this embodiment, the first oscillator holding frame 208_1 integrated with the first oscillator 2_1 has two degrees of freedom of movement with respect to the base member 205, ie, the roll direction and the pitch direction. In this embodiment, since the first oscillator 2_1 has degrees of freedom of movement in the roll direction and the pitch direction, the drive protrusions 2a_1 and 2b_2 of the first oscillator 2_1 are securely attached to the first contact surface 207_1 of the friction member 207. can be brought into contact with the

In this embodiment, by simultaneously driving the first oscillator 2_1 and the second oscillator 2_2 that sandwich the friction member 207, it is possible to generate a larger thrust force than in the case of driving with one oscillator. be. It is necessary to increase the biasing force of the integrated spring 215 according to the generated thrust. can be made larger. Further, since the pressure applied by the tension coil spring 210 that brings the friction member 207 into contact with each vibrator is balanced with the friction member 207 interposed therebetween, in the present embodiment, while receiving the pressure described in the first and second embodiments, Straight guides that smoothly guide the movement are not required.

FIG. 23 is a diagram for explaining the relationship between the first pressure plate 211 and the second pressure plate 213. As shown in FIG. Two tension coil springs 210 are engaged with respective spring hooks of first and second pressure plates 211 and 213 . Since the distance between the first and second pressure plates 211 and 213 in the y-axis direction is determined by the components of the motor unit 1000C (not shown), the two tension coil springs 210 are attached with the first and second pressure plates 211 and 213. force. The two extension coil springs 210 are springs of the same specification arranged diagonally with respect to the spherical projection 211a. However, the urging force of each extension coil spring at a predetermined length is not necessarily the same due to manufacturing variations, and the positions of the spring hooks of the first and second pressure plates 211 and 213 are also subject to manufacturing precision within a single component. Errors are caused by manufacturing errors in intervening parts. In this embodiment, the first pressure plate 211 abuts against the pressure intermediate member 209 with the spherical projection 211a, and has a degree of freedom of movement (inclination) in the roll direction and the pitch direction with the spherical projection 211a as the fulcrum. That is, the first pressure plate 211 can be tilted about an axis in the plane of left-right symmetry D that is perpendicular to the plane of front-back symmetry C and an axis in the plane of front-back symmetry C that is perpendicular to the plane of left-right symmetry D. Strictly speaking, it is not necessary to be able to tilt around each axis, and even if it is deviated from each axis by several millimeters, it is considered possible to tilt around each axis. For example, it may deviate by about ±0.2 mm depending on the performance and application. Therefore, the pressing forces of the two extension coil springs 210 acting on the driving protrusions 2a_1 and 2b_1 from the spherical protrusion 211a through the pressure mediating member 209 are optimally adjusted for the manufacturing variations described above. In addition, since the second vibrator 2_2 receives the reaction force from the second pressure plate 213, the optimally adjusted pressure acts on the driving projections 2a_2 and 2b_2.

Also, the first pressure plate 211 has a degree of freedom of movement in the roll and pitch directions relative to the first and second vibrator holding frames 208_1 and 208_2. Therefore, the posture of the first pressure plate 211 is adjusted to an optimum state regardless of the inclination and the change in inclination of the first and second oscillator holding frames 208_1 and 208_2, and the pressure forces of the two tension coil springs 210 are respectively , stabilizes without fluctuations.

A projection 211b provided on the first pressure plate 211 engages with a groove 208c_1 formed in the first oscillator holding frame 208_1 shown in FIG. 19(A). A projection 213b provided on the second pressure plate 213 engages with a groove 208c_2 formed in the second oscillator holding frame 208_2 shown in FIG. 19(B). Therefore, the first and second pressure plates 211 and 213 are integrated in the x-axis direction via the first and second vibrator holding frames 208_1 and 208_2. Therefore, while the moving part moves along the x-axis, the positional relationship among the tension coil spring 210, the first pressure plate 211, and the second pressure plate 213 does not change, and the pressure applied by the tension coil spring 210 is stable.

FIG. 24 is a perspective view of the lens drive unit. FIG. 24A is a perspective view of the lens driving unit with the motor unit 1000C attached. FIG. 24B is a perspective view of the lens drive unit without the motor unit 1000C attached. Lens unit 500 is supported for movement along the optical axis (x-axis) in a bar-and-sleeve arrangement. Guide bars 501 and 502 are formed parallel to the x-axis and supported by members (not shown). A friction member 207 provided in the motor unit 1000C is integrated with the lens unit 500 by screws, adhesion, or the like, and exerts a thrust to move the lens unit 500 in the optical axis direction.

Although preferred embodiments of the present invention have been described above, the present invention is not limited to these forms, and various modifications and changes are possible within the scope of the gist thereof.

Although four extension coil springs 110 are provided in the first and second embodiments, and two are provided in the third embodiment, the number of extension coil springs 110 may be different. Further, in the third embodiment, the engagement relationship between the first pressure plate 211 and the second pressure plate 213 may be reversed in the height direction, and a compression coil spring may be used instead of the extension coil spring as the pressure means.

Further, each member in each of the above-described embodiments may be construed as being in a certain plane so that at least part of the member intersects with that plane.

1000A, 1000B, 1000C Vibration wave motor unit (vibration wave motor)
2 oscillator (first oscillator)
2_1 First oscillator (first oscillator)
2_2 Second oscillator (second oscillator)
7, 107, 207 Friction member 10, 110, 210 Extension coil spring (pressure means)
11, 111 pressure plate (first pressure member)
11a, 111a, 211a Spherical projection (pressure part)
211 first pressure plate (first pressure member)
14, 114 movable member (second pressure member)
214 second pressure plate (second pressure member)

Claims (12)

a first oscillator;
a friction member in contact with the first oscillator;
a plurality of pressurizing means for generating a biasing force;
a first pressing member that engages with the pressing means and presses the first vibrator against the friction member by the biasing force;
a second pressurizing member that engages with the pressurizing means and is urged by the urging force to a surface of the friction member opposite to the surface that contacts the first vibrator. A vibration wave motor,
the first vibrator and the friction member are arranged so as to move relative to each other due to vibration generated in the first vibrator;
the first pressure member and the second pressure member move integrally with the first vibrator when the first vibrator moves;
The first pressurizing member is oriented in a moving direction in which the first vibrator and the friction member move relative to each other and a direction perpendicular to the moving direction and perpendicular to the pressurizing direction by the plurality of pressurizing means. A vibration wave motor characterized in that, when the first direction is assumed, the vibration wave motor is arranged so as to be tiltable about an axis along the first direction with respect to the first vibrator . the first pressurizing member includes a pressurizing part that pressurizes the first vibrator,
2. The vibration wave motor according to claim 1, wherein the pressurizing section pressurizes the first vibrator with biasing force of the plurality of pressurizing means. The pressurizing portion is arranged in a first plane parallel to the first direction and the pressurizing direction and symmetrically dividing a facing region of the first vibrator facing the friction member. 3. The vibration wave motor according to claim 2, wherein: The pressurizing part is arranged in a plane of a second plane that is parallel to the moving direction and the pressurizing direction and divides the opposing area symmetrically,
4. The vibration wave motor according to claim 3, wherein the first pressure member is tiltable about a straight line orthogonal to the first surface with the pressure portion serving as a fulcrum. The friction member is a flat plate having a surface opposite to the surface in contact with the first vibrator,
a second vibrator in contact with the friction member on the opposite surface;
the second vibrator and the friction member are arranged to move relative to each other due to vibration generated in the second vibrator;
5. The vibration wave motor according to claim 1 , wherein the second pressure member presses the second vibrator against the friction member with the biasing force. 6. The vibration wave motor according to claim 1 , wherein each of said plurality of pressurizing means is a coil spring. 6. The vibration wave motor according to claim 1 , wherein each of said plurality of pressurizing means is a tension coil spring. 8. The vibration wave motor according to claim 1 , wherein the plurality of pressurizing means are arranged in a direction orthogonal to the moving direction and the pressurizing direction. 9. The vibration wave motor according to any one of claims 1 to 8 , wherein the first vibrator has two driving protrusions that contact the friction member. 10. The vibration wave motor according to any one of claims 1 to 9 , wherein the first vibrator includes a piezoelectric element that excites vibration when a voltage is applied. A device comprising: the vibration wave motor according to any one of claims 1 to 10 ; and a member driven by a driving force from the vibration wave motor. 12. The device of Claim 11 , wherein the device is an optical instrument comprising a lens.

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