JP6257224B2 - Motor and lens device - Google Patents

Description

The present invention relates to a motor capable of relatively moving a vibrator and a driven body by vibrating the vibrator in a state where the vibrator and the driven body are in pressure contact .

  Conventionally, for example, an ultrasonic motor has been adopted as a drive source for a camera or a lens, taking advantage of features such as silent operation, driving from low speed to high speed, and high torque output. For example, as disclosed in Patent Document 1, an ultrasonic motor is disclosed that includes a rectangular bar-like driven body and a vibrator that includes a contact portion that contacts the driven body.

  In the ultrasonic motor, the vibrator is held in a state of being pressed against the driven body, and the contact portion of the vibrator is pressed against and contacts the driven body, a so-called pressure contact state. It has become. When ultrasonic vibration is excited in the vibrator under the pressure contact state, elliptical motion is generated in the contact portion of the vibrator, and the driven body moves relative to the vibrator. The pressing contact state of the vibrator to the driven body can be obtained by pressurizing the vibrator against the driven body with the attractive force of the permanent magnet.

  In the ultrasonic motor of Patent Document 1, the vibrator is held via a thin plate-shaped support member. The support member has a shape that is not easily deformed by a force in the relative movement direction while giving a degree of freedom of deformation in the pressing direction. Therefore, the vibrator can move freely in the pressurizing direction, but can be fixed in position in the driving direction without play.

JP 2012-016107 A Japanese Patent Laid-Open No. 2004-304877

  However, in the ultrasonic motor disclosed in Patent Document 1, since the support member has a thin plate shape and easily deforms, there is a risk of plastic deformation when an external force is inadvertently applied during assembly. was there.

The present invention has been made to solve the above problems, and an object thereof is support member vibrator is fixed to provide a difficulty potatoes over data plastically deformed.

The ultrasonic motor of the present invention comprises a driven member having a contact surface, and the vibrator having at least one contact portion for contacting with the contact surface, and a support member to which the transducer is fixed, via the supporting member and a hold member that holds the vibrator Te, by vibrating the vibrator with a pressure contact state between the vibrator and the driven member, and the vibrator and the driven member The support member is a motor that urges the relative movement of the vibrator and the driven body to be more rigid than the rigidity of the vibrator and the driven body in the relative movement direction. The pressurization contact direction has low rigidity, and a pressing plate for fixing the support member to the holding member suppresses deformation of the support member in a direction from the vibrator to the driven body by a predetermined amount or more .

According to the present invention, it is possible to support member vibrator is fixed be inadvertently lost when an external force is applied to provide a plastically deformed difficulty potatoes over data.

It is a disassembled perspective view of the ultrasonic motor in Example 1 of the present invention. It is the figure of the state which incorporated each member shown by FIG. 1, Comprising: (a) is the figure seen from the upper side, (b) is sectional drawing seen from the side surface (section AA of (a)). It is an expansion perspective view which shows the joining state of a vibrator | oscillator and a supporting member. (A) And (b) is an expanded sectional view which shows the state which incorporated each member in Example 1, (a) is the figure seen from the side surface of the longitudinal direction of a slider, (b) is It corresponds to the view seen from the side surface in the axial direction of the slider. 5 is a diagram for explaining a movement restricting member that restricts the amount of movement of a vibrator 109. FIG. It is a figure for demonstrating the clearance gap between the vibrator | oscillator 109 and a movement amount control member, Comprising: (a) is the figure seen from the side surface of the longitudinal direction of a slider, (b) is the figure seen from the side surface of the slider in the axial direction. Corresponding to FIG. 6B is a diagram corresponding to FIG. 6B, in which the vibrator and the pressing plate collide with each other, (a) shows the state in which the support member moves in the direction opposite to the slider, and (b) shows the support member in the slider. It is the figure which showed the state which moved to the direction. FIG. 6B is a diagram corresponding to FIG. 6B, in which the vibrator 109 and the movement restricting portion 105c of the holding member 105 collide, and (a) shows the state where the support member has moved in the direction of the slider, and (b) shows the state. It is the figure which showed the state which the support member moved to the direction opposite to a slider. It is a figure for demonstrating the movement control member which controls the movement amount of the vibrator | oscillator 109 of Example 2 of this invention. It is a figure for demonstrating the clearance gap between the protrusion part 115d and the fixing stand 110 of Example 2 of this invention.

[Example 1]
Embodiments of the present invention will be described below with reference to the drawings. Here, a linear motion type ultrasonic motor unitized as a driving actuator such as a lens barrel for a digital camera will be described as the ultrasonic motor of the embodiment. However, the usage application is not limited to this. .

  FIG. 1 is an exploded perspective view of an ultrasonic motor according to an embodiment of the present invention. In the drawings, the same members are indicated by the same symbols.

  The ultrasonic motor of the present invention includes a slider 101 as a driven body, a vibrator 109 including a vibration plate 102 and a piezoelectric element 103, a spring member 107, a support member 114, and a pressure member 105 as a holding member. It has. By applying a voltage to the piezoelectric element 103, ultrasonic vibration can be generated, and an elliptical motion can be generated in the diaphragm 102. In the entire unit of the ultrasonic motor, both ends of the slider 101 are fixed and held on the fixing base 110 by fixing screws 111, respectively.

  The vibrator 109 is formed by pressure-bonding the piezoelectric element 103 to the diaphragm 102 with an adhesive or the like. Two protrusions are attached to the surface 102 a opposite to the surface to which the piezoelectric element 103 is attached so as to be aligned in the longitudinal direction of the diaphragm 102. The slider 101 includes a contact surface 101 a that is in pressure contact with the vibrator 109, and the upper surface of the protrusion functions as a protrusion contact surface 102 b that is a contact portion that contacts the contact surface 101 a of the slider 101. In this embodiment, two protrusions are attached, and the two protrusion contact surfaces 102b are formed on the same plane. However, the number of protrusions is not limited to two, and at least one protrusion may be arranged. In order to improve the contact state with the contact surface 101a of the slider 101, it is finished to a uniform surface by polishing or the like during the manufacturing process.

  A blocking member 115 is affixed to the surface of the piezoelectric element 103 on the side not crimped to the diaphragm 102. The blocking member 115 blocks the ultrasonic vibration of the piezoelectric element 103 from being transmitted to other components. The piezoelectric element 103 is in surface contact with the small base 104 via the blocking member 115. The blocking member 115 has a function of preventing propagation of ultrasonic vibration to the small base 104 described later without attenuating the ultrasonic vibration of the piezoelectric element 103. As a material of the blocking member 115, for example, felt cloth is suitable.

  The small base 104 transmits a pressing force by a spring member 107 described later to the piezoelectric element 103. With this pressing force, in the diaphragm 102 a of the vibrator 109 pressed through the blocking member 115, the protrusion contact surface 102 b presses and contacts the contact surface 101 a of the slider 101. The small base 104 is attached to one side of the holding member 105.

  A screw portion 105 b is formed on the other surface of the holding member 105. A disk-shaped pressure receiving member 108 having a fitting hole 108a, which is a round hole in the center, is attached to the screw portion 105b of the holding member 105. The pressure receiving member 108 can be screwed and fixed to the screw portion 105 b of the holding member 105 with a screw portion formed on the outer peripheral side surface. In the fitting hole portion 108 a of the pressure receiving member 108, a compression coil spring 107 that is a spring member and a pressure member 106 that transmits the spring force of the compression coil spring 107 to the holding member 105 are through-hole portions of the pressure receiving member 108. 108a is fitted and held. One end of the compression coil spring 107 is fixed by the pressure receiving member 108, and the other end of the compression coil spring 107 is held in a direction in which the holding member 105 is pressed against the small base 104 within the screw portion 105 b of the holding member 105. ing. The compression coil spring 107 and the pressure member 106 are held so as to be movable only in a direction substantially perpendicular to the contact surface 101a of the slider 101. In this state, a pressing force is applied to the holding member 105. Therefore, the direction of the pressing force that the compression coil spring 107 applies to the holding member 105 via the pressure member 106 is substantially perpendicular to the contact surface 101 a of the slider 101.

  In the vibration plate 102a of the vibrator 109, a support member 114 is attached to a surface on which the blocking member 115 and the piezoelectric element 103 are not disposed and on the surface facing the contact surface 101a of the slider 101.

  The support member 114 has a shape of an annular thin plate in which a hole is arranged at the center. The support member 114 is disposed between the vibration plate 102a of the vibrator 109 and the contact surface 101a of the slider 101. The protrusion contact surface 102b of the protrusion portion of the vibration plate 102a passes through a hole at the center of the support member 114. It contacts the contact surface 101a of the slider 101. The support member 114 is pressed against the holding member 105 by the pressing plate 113, and both ends of the pressing plate 113 are fixed to the holding member 105 by the two fixing screws 112, whereby the support member 114 is fixed to the holding member 105. .

  Each of these members from the holding member 105 to the vibrator 109 is disposed between the top plate 117 and the fixed base 110. The top plate 117 is fixed to the fixing base 110 with four fixing screws 118. The top plate 117 is provided with an oblong rectangular opening 117a that extends along the direction in which the slider 101 extends and is formed so as to penetrate the front and back. An elongated groove is formed on the back surface of the top plate 117 facing inward in a state where the top plate 117 is fixed to the fixed base 110 so as to extend along the direction in which the slider 101 extends. At one end of the compression coil spring 107, a protrusion 105c is disposed on the holding plate 105 on the side where the pressure receiving member 108 is disposed. The width of the protruding portion 105 c substantially matches the short side width of the rectangular opening 117 a of the top plate 117. The holding plate 105 does not move in the short side width direction of the rectangular opening 117 a of the top plate 117 but engages so as to move along the rectangular opening 117 a of the top plate 117. A slender groove is also formed in the holding member 105 so as to face the groove on the back surface of the top plate 117 in a state where the protruding portion 105c of the holding plate 105 is engaged with the rectangular opening 117a. Due to the groove formed in the holding member 105 and the groove formed in the top plate 117, the rolling ball 116 is held so as to be able to roll between the grooves. The rolling ball 116 is interposed between the groove formed on the holding member 105 and the groove formed on the top plate 117, so that the holding member 105 is supported by rolling on the top plate 117.

  The groove formed in the top plate 117 has a long hole shape formed so as to extend along the direction in which the slider 101 extends. The rolling ball 116 is disposed between the holding member 105 holding the vibrator 109 and the top plate member 117 so that the holding member 105 is movable along the groove of the top plate 117. Each of the four corners of the top plate 117 is fixed to the fixing base 110 with fixing screws 118.

  A rolling ball 116 is disposed between the holding member 105 and the top plate member 117 so that the holding member 105 can move along the groove of the top plate 117. Thereby, elliptical motion is generated on the protrusion contact surface 102b of the protrusion of the vibration plate 102a of the vibrator 109 by the excited vibration of the piezoelectric element 103. By setting the direction of the elliptical motion to be in a plane including the direction in which the slider 101 extends, one of the slider 101 and the vibrator 109 moves relative to the other. That is, if the slider 101 fixed to the top plate member 117 and the fixed base 110 is fixed, the vibrator 109 moves. When the holding member 105 that holds the vibrator 109 is fixed, the top plate member 117 and the fixing base 110 move together with the slider 101.

  In this specification, the relative movement direction of the slider 101 and the vibrator 109 is defined as the X direction. The direction in which the pressing force by the spring member 107 is applied is defined as the Z direction. In the Z direction, the direction in which the vibrator 109 moves away from the slider 101 described later is defined as positive (+ Z direction), and the direction in which the vibrator 109 approaches the slider 101 is defined as negative (−Z direction). Further, a direction perpendicular to both the X direction and the Z direction is defined as the Y direction.

  Here, the relationship between the movement directions of the top plate 117 and the holding member 105 will be described in detail with reference to FIG. FIG. 2 is a view showing a state in which each member of FIG. 1 is incorporated. 2A is a view of the state in which each member of the ultrasonic motor unit is incorporated as seen from the + Z direction, and FIG. 2B is a cross-sectional view taken along the line AA of FIG. 2A as seen from the −Y direction. FIG.

  At the center of the top plate 117, a protruding portion 105c of the holding member 105 protrudes from the rectangular opening 117a.

  The vibration plate 102 is in contact with the slider 101. The diaphragm 102 is fixed to the holding member 105 through a thin plate-shaped support member 114. Therefore, the vibration plate 102 can move freely in the Z direction with respect to the holding member 105 due to the deformation of the support member 114, but can be fixed in position in the X direction without play.

  When relative movement in the X direction occurs between the vibrator 109 and the slider 101 due to the elliptical motion generated in the vibrator 109, the fixed base 110, the slider 101, the fixed screw 111, the top plate 117, and the fixed screw 118. Is the fixed part. On the other hand, the blocking member 115 including the vibrator 109, the small base 104, the fixing screw 112, the pressing plate 113, the supporting member 114, the pressing member 106, the spring member 107, the pressing pressing member 108, and holding them. The holding member 105 is a movable part. That is, the ultrasonic motor of the present invention is a self-propelled motor unit in which the vibrator 109 itself as a drive source is movable.

  Actually, when incorporated in a lens device of a camera or the like, the holding member 105 is driven by being connected to a lens barrel such as a focus mechanism or a zoom mechanism. That is, the lens device holds the lens and is movable along a rail fixed to the housing of the lens device. Here, when the lens barrel is fixed to either the holding member 105 or the slider 101, the slider 101 moves relative to the vibrator 109, and thus the lens barrel moves. At this time, whether the lens barrel is fixed to the holding member 105 or the slider 101 can be selected according to the design. That is, if the slider 101 is fixed to the housing, the vibrator 109 moves. Therefore, if the lens barrel is fixed to the holding member 105 that holds the vibrator 109, the lens barrel moves along the rail. Moving. Further, if the holding member 105 holding the vibrator 109 is fixed to the casing, the top plate member 117 and the fixing base 110 move together with the slider 101. If the lens barrel is fixed to these, the lens barrel is fixed. Moves along the rail.

  Next, the vibrator 109 and the support member will be described in detail with reference to FIGS. FIG. 3 is an enlarged perspective view for explaining the joined state of the diaphragm 102 and the support member 114 in FIGS. 1 and 2 and is a view seen from the slider 101 side.

  In FIG. 3, two protrusions are formed on the flat plate portion 102a at the center of the diaphragm 102, and a protrusion contact surface 102b as a contact portion is disposed on the upper end surface of the protrusion. The protrusion contact surface 102 b is a surface that contacts the contact surface 101 a of the slider 101. The two protrusion contact surfaces 102b are formed on the same plane, and are finished to a uniform surface by polishing or the like during the manufacturing process in order to improve the contact state with the contact surface 101a of the slider 101.

  On the other hand, the piezoelectric element 103 is pressure-bonded with an adhesive or the like on the back surface side (the surface side opposite to the surface on which the two protruding portions are formed) of the flat plate portion 102a shown in FIG. Note that the method of pressing the back surface of the flat plate portion 102a and the piezoelectric element 103 is not limited as long as the pressing is performed. The piezoelectric element 103 is formed by laminating and integrating a plurality of piezoelectric element films. The laminated piezoelectric element 103 is excited by applying a desired AC voltage, and two vibration modes are excited on the diaphragm 102 to which the piezoelectric element 103 is pressure-bonded. At this time, the vibration phases of the two vibration modes are set to have a desired phase difference. As a result, an elliptical motion occurs on the protrusion contact surface 102b as shown by the arrow in FIG. The direction of the elliptical motion is set so as to be in a plane including the direction in which the slider 101 extends. The elliptical motion is generated by the vibrator 109 and transmitted to the contact surface 101a of the slider 101, so that the vibrator 109 itself can be linearly driven with respect to the slider 101. Note that details regarding the laminated structure and vibration mode of the piezoelectric element described above are the same as the contents described in Patent Document 2, and a description thereof will be omitted.

  Next, at two ends of the diaphragm 102, two joint portions 102 c are formed for joining to a stepped portion 114 a that is one step lower formed on both sides of the support member 114. The diaphragm 102 is joined to the support member 114 by welding or adhesion at the joint portion 102c. However, the method is not limited as long as the diaphragm 102 and the support member 114 are joined. Two arm portions 102d are formed between the two joint portions 102c and the flat plate portion 102a, and the flat plate portion 102a to which the piezoelectric element 103 is pressure-bonded is formed on the support member 114 via the arm portions 102d. Fixed. The arm portion 102d has a narrow shape with respect to the flat plate portion 102a and the bonding portion 102c as shown in FIG. 3 in order to make it difficult to transmit the vibration generated in the flat plate portion 102a to the bonding portion 102c. In other words, a connection configuration in which the support member 114 does not hinder vibration generated in the flat plate portion 102a is realized by the arm portion 102d.

  The support member 114 has rigidity that is weaker in the Z direction than in the X direction. That is, the rigidity in the direction in which the pressing force is applied from the compression coil spring 107 and the pressing member 106 to the holding member 105 is weaker than the rigidity in the relative movement direction of the slider 101 and the vibrator 109. The support member 114 is interposed between the diaphragm 102 and the holding member 105, and functions so that the diaphragm 102 can move freely in the Z direction with respect to the holding member 105, but can be fixed in the X direction without play. Plays.

  Since the pressing plate 113 is disposed with a predetermined amount of gap from the vibrator 109, when the vibrator 109 moves by a predetermined amount or more in the −Z direction, the vibrator 109 contacts the pressing plate 113 and beyond. I can't move. With this configuration, the pressing plate 113 functions to restrict the vibrator 109 from moving in the −Z direction by a predetermined amount or more.

  FIG. 4 is an enlarged cross-sectional view showing a state in which each member is incorporated. In FIG. 4, the slider 101 is shown on the lower side. FIG. 4A is a cross-sectional view of a plane that passes through the center of the pressing member 106 in a plane perpendicular to the Y axis in FIG. FIG. 4B is a cross-sectional view of a plane that passes through the center of the pressing member 106 along a plane perpendicular to the X axis in FIG. 4A and 4B, 201 is a center line including the normal line of the contact surface 101a that passes through the center of gravity of the contact surface of all the protrusions contacting the contact surface 101a of the diaphragm 102.

  The protrusion contact surface 102b is in contact with the contact surface 101a of the slider 101 and is in a pressure contact state. Further, the diaphragm 102 is joined to the support member 114 at two stepped portions 114a at the joint portions 102c at both ends. The piezoelectric element 103 is in surface contact with the small base 104 via the blocking member 115.

  The holding member 105 is provided with two hole portions 105a, and two shaft portions 104a formed on the small base 104 are fitted. The two hole portions 105a provided in the holding portion 105 have a long hole shape extending in the X direction, and the small base 104 can be inclined to some extent.

  A contact portion 104 b is provided at the upper center of the small base 104. The abutting portion 104b has an arc shape in the cross section of FIG. 4A, and has a shape formed of a part of a cylinder extending in the depth direction on the paper surface (left and right direction in FIG. 4B). The lower end surface 106a of the pressing member 106 is in line contact with the contact portion 104b. Since the lower end surface 106a is formed as a flat surface, the line contact portion with the contact portion 104b is a line having a length in the depth direction in FIG. 4A (the left-right direction in FIG. 4B). Contact. Therefore, in the cross section in FIG. 4A, the small base 104 can be tilted. Even if a dimensional error during assembly, an assembly error, or an inclination of the member due to a disturbance occurs, the small base 104 tilts so that the protrusion contact surface 102b of the diaphragm 102 follows the contact surface 101a of the slider 101. And a favorable press contact state can be maintained.

  A screw hole 105b is formed in the holding member 105, and a screw portion 108b provided on the outer diameter side surface of the pressure receiving member 108 is screwed. The pressure is adjusted by changing the screwing amount according to the component variation. A configuration in which the pressurizing member 106 can move only in the Z direction by fitting and holding the fitting shaft portion 106b of the pressurizing member 106 in the fitting hole 108a formed in the center of the pressure receiving member 108. It has become.

  The top plate 117 is fixed to the fixed base 110 and plays a role of receiving a reaction force when the projection contact surface 102b of the vibration plate 102 is brought into pressure contact with the contact surface 101a of the slider 101 by the spring force of the spring member 107. . At that time, the holding member 105 and the top plate 117 are configured to be supported by rolling by sandwiching the rolling ball 116 between the groove portion 117 a formed on the top plate 117 and the groove portion 105 d formed on the holding member 105. ing. This minimizes the frictional resistance when moving in the X direction while receiving the reaction force of the pressure contact in the Z direction. Further, the rolling ball is sandwiched between the groove 117a of the top plate 117 and the groove 105d of the holding member 105, so that the position in the Y direction is determined. In the ultrasonic motor of the present invention, the holding member 105 is supported to roll without tilting with respect to the top plate 117 by receiving the spring force of the spring member 107 by the four rolling balls 116.

  A blocking member 115 is sandwiched between the piezoelectric element 103 and the small base 104. The blocking member 115 uses a material having a function of blocking the propagation of vibration without inhibiting the vibration, thereby preventing the propagation of vibration to the small base 104 without inhibiting the ultrasonic vibration of the piezoelectric element 103. suppress. An example of a material suitable for the blocking member 115 is felt cloth.

  In order to transmit a pressing force for bringing the protrusion contact surface 102b into pressure contact with the contact surface 101a of the slider 101, the vibrator 109 needs to be able to move freely in the Z direction. Further, in order to accurately drive the holding member 105 connected to the focus mechanism or the zoom mechanism, the vibrator 109 needs to be held on the holding member 105 without backlash. Therefore, the vibrator 109 is fixed to the holding member 105 via a support member 114 formed in a thin plate shape. Thereby, it can move freely in the Z direction and can be driven without play in the X direction.

  FIG. 5 is a diagram for explaining the holding plate 113 that fixes the support member 114 and the movement regulating member that regulates the amount of movement of the vibrator 109. FIG. 5 is an enlarged perspective view of the holding member 105 viewed from the slider 101 side.

  The vibrator 109 is fixed to the holding member 105 via a thin plate-shaped support member 114. Accordingly, the vibrator 109 can freely move with respect to the holding member 105 in the Z direction that is the pressurizing direction. However, it is fixed with respect to the holding member 105 in the X direction, which is the driving direction, without positional deviation. The joint portions 102 c at both ends of the diaphragm 102 are joined to the two step portions 114 a of the support member 114. On the other hand, the support member 114 and the pressing plate 113 are fastened to the holding member 105 with two fixing screws 112 together. Since the support member 114 has a thin plate shape, when the screw is fixed directly with the fixing screw 112, the tightening torque is transmitted to the support member 114 by friction with the head of the fixing screw 112, and the support member 114 may be twisted and deformed. . Therefore, the pressing member 103 is sandwiched and fixed so that the tightening torque is not transmitted to the support member 114.

  The presser plate 113 and the holding member 105 function as a movement amount regulating member, and have a shape in which two screwing places are connected between the two protrusion contact portion surfaces 102b. Therefore, when the vibrator 109 moves by a predetermined amount in the −Z direction, the flat plate portion 102a of the diaphragm 102 collides with the holding plate 113 and does not move any more. Accordingly, the pressing plate 113 also serves as a movement restricting member that restricts the diaphragm 102 from moving in the −Z direction by a predetermined amount or more. The pressing plate 113 that fixes the support member 114 to the holding member 105 also has a function of restricting movement of the vibrator 109 by a predetermined amount or more without increasing the number of parts by serving also as a movement restricting member.

  On the other hand, a movement restricting portion 105c is provided below the joint portion 102c of the diaphragm 102 of the holding member 105, and when the vibrator 109 moves a predetermined amount in the + Z direction, the joint portion 102c of the diaphragm 102 becomes the movement restricting portion 105c. Collide and do not move any further. As a result, the holding member 105 also serves as a movement restricting member that restricts the vibrator 109 from moving in the + Z direction by a predetermined amount or more. The holding member 105 holding the vibrator 109 also functions as a movement restricting member, thereby giving a function of restricting the vibrator 109 from moving a predetermined amount or more without increasing the number of parts.

  Subsequently, with reference to FIG. 6 to FIG. 8, the relationship of movement of the holding member 105, the support member 114, and the pressing plate 113 will be described in detail.

  FIG. 6 is a diagram for explaining a gap between the vibrator 109 and the movement amount regulating member (the pressing plate 113 and the holding member 105). FIG. 6A is an enlarged view of the holding member 105 viewed from the −Y direction. FIG. 6B is an enlarged cross-sectional view of the holding member 105 taken along the YZ plane passing through the midpoint between the two protrusion contact surfaces 102b and viewed from the + X direction.

  The vibrator 109 is fixed to the holding member 105 via a thin plate-shaped support member 114. As a result, the vibrator 109 can freely move with respect to the holding member 105 in the Z direction, which is the pressurizing direction, but is fixed to the holding member 105 in the X direction, which is the driving direction, without being displaced.

  However, since the support member 114 has a thin plate shape and is easily deformed, there has been a risk of plastic deformation when an external force is inadvertently applied during assembly.

  Therefore, the ultrasonic motor according to the present invention includes the movement restricting portion 105c that protrudes from the holding member 105 toward the joining portion 102c of the diaphragm 102, and a predetermined gap L1 is provided between the joining portion 102c and the movement restricting portion 105c. . Therefore, when the vibrator 109 moves by a predetermined amount L1 in the + Z direction, the joint portion 102c of the diaphragm 102 collides with the movement restricting portion 105c, and therefore does not move any further. Thus, the holding member 105 serves as a movement restricting member that restricts the vibrator 109 from moving in the + Z direction by a predetermined amount L1 or more.

  On the other hand, the holding plate 113 has a shape in which two screwing places are connected between the two projecting contact surfaces 102b, and a predetermined amount is provided between the flat plate portion 102a of the diaphragm 102 and the holding plate 113. The gap L2 is provided. Therefore, when the vibrator 109 moves by a predetermined amount L2 in the −Z direction, the flat plate portion 102a of the diaphragm 102 collides with the holding plate 113 and does not move any more. In this way, the pressing plate 113 serves as a movement restricting member that restricts the vibrator 109 from moving in the −Z direction by a predetermined amount L2 or more.

  FIG. 7 is a diagram for explaining a state in which the vibrator 109 and the pressing plate 113 collide with each other. Fig.7 (a) is the enlarged view which looked at the holding member 105 from -Y direction. FIG. 7B is an enlarged cross-sectional view of the holding member 105 taken along the YZ plane passing through the midpoint between the two protrusion contact surfaces 102b and viewed from the + X direction.

  If an external force in the −Z direction is inadvertently applied to the vibrator 109 during assembly, the vibrator 109 tries to move in the −Z direction. In the support member 114, the stepped portion 114 a is joined to the joint portion 102 c of the diaphragm 102, and therefore tends to move in the −Z direction. However, the portion pressed by the pressing plate 113 cannot move because the holding member 105 is fixed. Therefore, the support member 114 that is thin and easily deformed is deformed as shown in FIG.

  However, when the vibrator 109 moves in the −Z direction by a predetermined amount L1, the flat plate portion 102a of the diaphragm 102 collides with the holding plate 113 as shown in FIG. Is regulated. In this way, the pressing plate 113 serves as a movement restricting member that restricts the vibrator 109 from moving in the −Z direction by a predetermined amount L1 or more.

  Conversely, the gap between the joint portion 102c of the diaphragm 102 and the movement restricting portion 105c of the holding member 105 is the gap L1 + L2 because the movement amount L2 of the vibrator 109 is added to the gap of the predetermined amount L1 that has been opened before the movement. It will be empty.

  FIG. 8 is a view for explaining a state in which the vibrator 109 and the movement restricting portion 105c of the holding member 105 collide with each other. FIG. 8A is an enlarged view of the holding member 105 viewed from the −Y direction. FIG. 8B is an enlarged cross-sectional view of the holding member 105 taken along the YZ plane passing through the midpoint between the two protrusion contact surfaces 102b and viewed from the + X direction.

  If an external force in the + Z direction is inadvertently applied to the vibrator 109 during assembly, the vibrator 109 tries to move in the + Z direction. In the support member 114, the stepped portion 114 a is joined to the joining portion 102 c of the diaphragm 102, and therefore tends to move in the + Z direction. However, the portion pressed by the pressing plate 113 cannot move because the holding member 105 is fixed. Accordingly, the support member 114 that is thin and easily deformed is deformed as shown in FIG.

  However, when the vibrator 109 moves by a predetermined amount L2 in the + Z direction, as shown in FIG. 8, the joint portion 102c of the diaphragm 102 collides with the movement restricting portion 105c, so that the vibrator 109 moves in the + Z direction. Be regulated. Thus, the holding member 105 serves as a movement restricting member that restricts the vibrator 109 from moving in the + Z direction by a predetermined amount L2 or more.

  Conversely, the gap between the flat plate portion 102a of the diaphragm 102 and the pressing member 113 is a gap of L1 + L2 because the movement amount L1 of the vibrator 109 is added to the gap of the predetermined amount L2 that has been opened before the movement.

  As described with reference to FIGS. 6 to 8, a movement restricting member for the vibrator 109 is provided to restrict movement of the predetermined amount L1 in the + Z direction and a predetermined amount L2 in the −Z direction. Thereby, even when an external force is inadvertently applied during assembly, the deformation of the support member 114 can be suppressed to a predetermined amount or less. As a result, the risk of plastic deformation of the thin plate-shaped support member 114 that is easily deformed is reduced. That is, the movement restricting portion 105c, which is a movement restricting member of the vibrator 109, and the pressing plate 113 serve as a deformation preventing unit that prevents the support member 114 from being deformed by a predetermined amount or more in the direction in which the pressing force is applied. Yes. The pressing direction is a direction in which a pressing force is applied from the compression coil spring 107 and the pressing member 106 to the holding member 105.

[Example 2]
In the first embodiment, the movement restriction of the vibrator 119 in the + Z direction is achieved by the movement restriction part 105 c provided on the holding member 105 colliding with the joint part 102 c of the diaphragm 102. On the other hand, in the second embodiment, the protruding portion 105 d that protrudes from the holding member 105 toward the fixed base 110 collides with the fixed base 110. This is different from the first embodiment in which the vibrator 109 is restricted from moving relative to the holding member 105 in the + Z direction. Hereinafter, Example 2 will be described with reference to FIG. Here, the same members as those in the first embodiment are indicated by the same symbols. The description of the same parts as in the first embodiment is omitted, and only the parts different from the first embodiment will be described.

  FIG. 9 is a diagram for explaining a holding plate 113 that fixes the vibration supporting member 114 and a movement restricting member that restricts the relative movement amount of the vibrator 109 relative to the holding member 105 in the ultrasonic motor according to the second embodiment. It is. FIG. 9 is an enlarged perspective view of the holding member 105 as viewed from the fixed base 110 side.

  The holding member 105 includes four protruding portions 105 d that protrude toward the fixed base 110. By providing a predetermined gap between the protrusion 105d and the fixed base 110, the protrusion 109 functions as a movement restricting member that restricts the vibrator 109 from moving in the + Z direction by a predetermined amount or more with respect to the holding member 105. 105d fulfills.

  FIG. 10 is a diagram for explaining a gap between the holding member 105 that holds the vibrator 109 and the protruding portion 105d. FIG. 10A is an enlarged view of the holding member 105 viewed from the −Y direction. FIG. 10B is an enlarged cross-sectional view of the holding member 105 taken along the YZ plane passing through the midpoint between the two protrusion contact surfaces 102b and viewed from the + X direction.

  The four protrusions 105d extending from the holding member 105 to the fixing base 110 are provided so as to sandwich the pressing plate 113 and the two fixing screws 112 in the X direction and sandwich the slider 101 in the Y direction. With this arrangement, the space in the ultrasonic motor is effectively used, and the entire ultrasonic motor unit is reduced in size.

  A predetermined gap L3 is provided between the protruding portion 105d and the fixed base 110. Therefore, for example, even when a force in the −Z direction is applied to the holding member 105 at the time of assembly, if the holding member 105 moves by a predetermined amount L1 in the + Z direction, the protruding portion 105d collides with the fixed base 110. Do not move. Therefore, the vibrator 109 can be restricted from moving with respect to the holding member 105 by a predetermined amount L1 or more in the + Z direction. Thus, the protrusion 105d of the holding member 105 serves as a movement restricting member that restricts the vibrator 109 from moving in the + Z direction by a predetermined amount L1 or more with respect to the holding member 105.

  As described with reference to FIGS. 9 to 10, the movement restricting member for the vibrator 109 is provided to restrict the movement in the + Z direction by a predetermined amount L1 or more. As a result, even when an external force is inadvertently applied to the holding member 105 during assembly, the deformation of the support member 114 can be suppressed to a predetermined amount or less. Further, the risk of plastic deformation of the thin plate-shaped support member 114 that is easily deformed is reduced. That is, the protruding portion 105d, which is a movement restricting member of the vibrator 109, and the fixing base 110 serve as a deformation preventing unit that prevents the support member 114 from being deformed by a predetermined amount or more.

As described above, in the ultrasonic motor, the holding member 105 and the pressing plate 113 are provided with a function as a movement restricting member that restricts the vibrator 109 from moving in a pressing direction by the spring member 107 by a predetermined amount or more. Thus, the movement amount of the vibrator 109 can be suppressed to a predetermined amount or less, and it is possible to reduce the plastic deformation of the support member 114.
As mentioned above, although the preferable Example of this invention was described, this invention is not limited to these Examples, A various deformation | transformation and change are possible within the range of the summary.

101 Slider (driven body)
101a Contact surface 102 Diaphragm 102b Projection contact surface (contact portion)
103 Piezoelectric element 104 Small base 105 Holding member 105c Movement restricting portion 105d Protruding portion 106 Pressure member 107 Spring member 108 Pressure receiving member 109 Vibrator 110 Fixing base 113 Press plate 114 Support member 115 Blocking member 116 Rolling ball 117 Top Plate L1 Gap L2 between the joining portion 102c and the movement restricting portion 105c L3 between the vibration plate 112 and the holding plate 113 L3 Gap between the protruding portion 105d and the fixed base 110

Claims (3)

A driven body having a contact surface;
A vibrator having at least one contact portion in contact with the contact surface ;
A support member to which the vibrator is fixed ;
And a hold member that holds the vibrator through said support member, by vibrating the vibrator with a pressure contact state between the vibrator and the driven member, and the vibrator A motor that evokes relative movement with the driven body ,
The support member has a lower rigidity in the direction of pressure contact between the vibrator and the driven body than the rigidity in the relative movement direction of the vibrator and the driven body ,
The motor which suppresses the deformation | transformation more than the predetermined amount of the said supporting member of the direction from the said vibrator | oscillator to the said to-be-driven body by the press plate which fixes the said supporting member to the said holding member . 2. The motor according to claim 1, wherein a part of the holding member prevents deformation of the support member in a direction from the driven body to the vibrator by a predetermined amount or more. The motor according to claim 1 or 2,
A lens apparatus, comprising: a lens barrel that holds a lens and is movable along a rail fixed to a housing by the motor.

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