JP6033278B2 - グラフェンに関する構造体および方法 - Google Patents
グラフェンに関する構造体および方法 Download PDFInfo
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Description
第1の封入層と、
第2の封入層と、
第1の封入層と第2の封入層の間に配置されたグラフェン層と、をもつグラフェンヘテロ構造体を提供しうる。
第1の封入層と、
第2の封入層と、
第1の封入層と第2の封入層の間に配置されたグラフェン層と、をもつグラフェンヘテロ構造体を提供しうる。
第1の封入層上にグラフェン層を成膜する工程と、
グラフェン層上に第2の封入層を成膜する工程とを含み、第1の封入層と第2の封入層の間にグラフェン層が配置される。
第2の封入層がグラフェン層に面した(したがってキャリア層はグラフェン層に面しない)状態でグラフェン層上に前駆体構造を成膜する工程と、
次に(すなわち、前駆体構造を表面上に成膜した後)、第2の封入層からキャリア層を除去する工程とを含む。この方法は、本発明の第2の態様に記載されるかまたはこれに関する追加的な工程を含んでもよい。
前駆体構造を用いて表面に材料の層を成膜する方法であって、前駆体構造がキャリア層上に配置された材料の層を含み、前記方法は、
最表面に面した(したがってキャリア層は最表面に面しない)材料層の表面上に前駆体構造を成膜する工程と、
次に(すなわち、前駆体構造を表面上に成膜した後)、材料層からキャリア層を除去する工程とを含む。
犠牲キャリア層上にキャリア層を成膜する工程と;
キャリア層上に材料層を成膜する工程と;
犠牲キャリア層を除去してキャリア層および材料の層を含む前駆体構造を犠牲キャリア層から分離することにより、前駆体構造を形成する工程とを包含していてもよい。
犠牲キャリア層上にキャリア層を成膜する工程と;
キャリア層上に材料層を成膜する工程と;
犠牲キャリア層を除去してキャリア層および材料層を含む前駆体構造を犠牲キャリア層から分離する工程と、と包含してもよい。
(封入グラフェンにおける常温でのマイクロメーターレベルの弾道輸送)
六方晶窒化ホウ素に封入されたグラフェンからなるデバイスは明白な負の耐屈曲性および変則のホール効果を示し、これらは広範囲のキャリア濃度に対するマイクロメーターレベルでの常温弾道輸送の直接的な影響である。
(非弱相互作用二重層BN‐グラフェンヘテロ構造体におけるクーロンドラッグ)
本実験例では、多層窒化ホウ素/グラフェンヘテロ構造体作製を検討する。開発された技術により、キャリア移動度を10m2/Vsと高く保ちつつグラフェンを2つの六方晶BN結晶の間に封入することができる。近接して離間された2つの、独立して接続されたグラフェン層に関する輸送研究の結果を示す。小規模の層間剥離により、クーロンドラッグは、従来研究されている弱相互作用レジームの範囲を超えた特異な挙動を示す。
図4(b)は多層の試料の光学像である。赤線はBNスペーサの端部を示す。これらの条件において、BN上のグラフェンにはほとんどコントラストがないが、BN下地層を部分的にエッチングしたことにより下部ホールバーが見える。スケールバーは5μmである。
図4(c)は、量子キャパシタンス(丸)および異なるスペーサ厚のシミュレーションの実験結果(実線)を示す。
図5(b)は、非対称の場合のドラッグ抵抗を示す図であり、両層の同じ型のキャリアに対して負となり(黒の曲線:正孔、赤の曲線:電子)、p‐n(n‐p)構成に対し正となる。これらの図は青い曲線に関連している。T=124Kである。
図5(c)は、異なるV intに対するバックゲート電圧の関数としてR dragを示す。T=110Kである。これらの図は黒い曲線に関連している。
(グラフェンの分極関数Π(q,ω)は文献から導き出すことができ、裸のクーロン相互作用のフーリエ成分νc(q)は、本発明の構造における静電気問題の解決策から求められる。以下の誘電率分布をもつ3領域媒体では、
Claims (14)
- 第1の封入層と、
第2の封入層と、
前記第1の封入層と前記第2の封入層の間に配置されたグラフェン層と、を有し、
前記第1の封入層および前記第2の封入層が六方晶窒化ホウ素からなり、
層間の界面は、ポリマー残留物および/または他の汚染から実質的にフリーであり、
ヘテロ構造のグラフェンコンポーネントが、100,000cm 2 V −1 s −1 以上のチャージキャリア移動度を有する、グラフェンヘテロ構造体。 - 前記グラフェン層が前記第1の封入層に直接隣接し、前記第2の封入層が前記グラフェン層に直接隣接する、請求項1に記載のグラフェンヘテロ構造体。
- 前記グラフェン層が、単層のグラフェンである、請求項1または2に記載のグラフェンヘテロ構造体。
- 前記グラフェン層が、一の構造体を形成するよう成形される、請求項1〜3のいずれか一に記載のグラフェンヘテロ構造体。
- 前記グラフェンヘテロ構造体が、1つ以上の接触部を含み、前記1つ以上の接触部のそれぞれが、前記グラフェン層内に形成される構造体に含まれる1つ以上の接続領域のそれぞれの上に配置される、請求項1〜4のいずれか一に記載のグラフェンヘテロ構造体。
- 前記第2の封入層が、前記グラフェン層の一部分のみを覆うように前記グラフェン層と一直線になるよう設けられ、前記グラフェン層内に形成される構造体に含まれる1つ以上の接続領域は前記第2の封入層に覆われない、請求項1〜5のいずれか一に記載のグラフェンヘテロ構造体。
- 前記グラフェンヘテロ構造体が、前記第1の封入層が配置される基板を含む、請求項1〜6のいずれか一に記載のグラフェンヘテロ構造体。
- 前記ヘテロ構造体がさらに第2のグラフェン層を含む、請求項1〜7のいずれか一に記載のグラフェンヘテロ構造体。
- 第1の封入層上にグラフェン層を成膜する工程と、
前記グラフェン層上に第2の封入層を成膜する工程とを含み、
前記第1の封入層と前記第2の封入層の間に前記グラフェン層が配置され、前記第1の封入層および前記第2の封入層が六方晶窒化ホウ素からなり、
1層以上の前記層が成膜された後に、グラフェンへテロ構造体をアニールにより浄化する工程を含む、グラフェンヘテロ構造体の製造方法。 - 前記第1の封入層が剥離により前記基板の上に成膜される、請求項9に記載の方法であって、
前記グラフェン層が、前駆体構造を用いて前記第1の封入層上に成膜され、前記前駆体構造はキャリア層上に配置された前記グラフェン層を含み、
前記グラフェン層が前記第1の封入層に面した状態で前記前駆体構造を前記第1の封入層上に成膜する工程と、
次に前記グラフェン層から前記キャリア層を除去する工程とを含む、方法。 - 前記第2の封入層は前駆体構造を用いて前記グラフェン層上に成膜され、前記前駆体構造はキャリア層上に配置された前記第2の封入層を含む、請求項9または10に記載の方法であって:
前記第2の封入層が前記グラフェン層に面した状態で前記グラフェン層上に前記前駆体構造を成膜する工程と、
次に前記第2の封入層から前記キャリア層を除去する工程とを含む、方法。 - 前記各層のうちいずれか1つ以上を成膜した後に、グラフェンヘテロ構造体をアニールにより浄化する、請求項10〜11のいずれか一に記載の方法。
- 請求項1〜8のいずれか一に記載のグラフェンヘテロ構造体を含む電子回路に用いられる電子部品。
- 請求項1〜8のいずれか一に記載のグラフェンヘテロ構造体を含む電子装置。
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Families Citing this family (41)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2012088334A1 (en) | 2010-12-21 | 2012-06-28 | Kenneth Shepard | Electrical devices with graphene on boron nitride |
US8858778B2 (en) * | 2012-01-19 | 2014-10-14 | Michael James Darling | Method for DNA defined etching of a graphene nanostructure |
KR102113255B1 (ko) * | 2013-02-22 | 2020-05-20 | 삼성전자주식회사 | 그래핀 적층 구조체의 제조방법, 및 그래핀 적층 구조체와 이를 구비하는 전기소자 |
JP6228293B2 (ja) * | 2013-05-09 | 2017-11-08 | サンエディソン・セミコンダクター・リミテッドSunEdison Semiconductor Limited | 基板上の窒化ホウ素およびグラフェンの直接および連続形成 |
WO2015021479A1 (en) * | 2013-08-09 | 2015-02-12 | The Trustees Of Columbia University In The City Of New York | Systems and methods for assembling two-dimensional materials |
JP6388768B2 (ja) * | 2014-01-14 | 2018-09-12 | 株式会社Nttドコモ | ユーザ端末、無線基地局及び無線通信方法 |
US10306695B2 (en) * | 2014-01-31 | 2019-05-28 | Qualcomm Incorporated | Procedures for managing secondary eNB (SeNB) radio link failure (S-RLF) in dual connectivity scenarios |
GB201401715D0 (en) | 2014-01-31 | 2014-03-19 | Univ Manchester | Exfoliation |
CN104281351B (zh) * | 2014-10-10 | 2017-02-15 | 合肥鑫晟光电科技有限公司 | 触控基板及显示装置 |
US9484469B2 (en) | 2014-12-16 | 2016-11-01 | International Business Machines Corporation | Thin film device with protective layer |
JP6413824B2 (ja) * | 2015-02-17 | 2018-10-31 | 富士通株式会社 | ガスセンサ及びその製造方法 |
CN104944417A (zh) * | 2015-06-01 | 2015-09-30 | 中国科学院上海微系统与信息技术研究所 | 一种石墨烯-氮化硼异质结的制备方法 |
WO2016203184A1 (en) | 2015-06-18 | 2016-12-22 | The University Of Manchester | Heterostructures and electronic devices derived therefrom |
US10542541B2 (en) * | 2015-08-19 | 2020-01-21 | Qualcomm, Incorporated | Re-contention-based co-existence on a shared communication medium |
US10001529B2 (en) * | 2015-09-03 | 2018-06-19 | Texas Instruments Incorporated | Low-offset Graphene Hall sensor |
US9406872B1 (en) * | 2015-11-16 | 2016-08-02 | International Business Machines Corporation | Fabricating two-dimensional array of four-terminal thin film devices with surface-sensitive conductor layer |
KR102425131B1 (ko) * | 2016-02-05 | 2022-07-26 | 광주과학기술원 | 그래핀 트랜지스터 및 이를 이용한 3진 논리 소자 |
CN109791876B (zh) * | 2016-05-12 | 2023-08-15 | 环球晶圆股份有限公司 | 在硅基电介质上直接形成六方氮化硼 |
TWI660611B (zh) * | 2016-05-13 | 2019-05-21 | 聯發科技股份有限公司 | 一種配置用於ofdm系統的統一和擴展的訊框結構的方法及使用者設備 |
KR102115599B1 (ko) | 2016-12-27 | 2020-05-26 | 주식회사 엘지화학 | 분리막 및 이를 포함하는 리튬-황 전지 |
US10181521B2 (en) | 2017-02-21 | 2019-01-15 | Texas Instruments Incorporated | Graphene heterolayers for electronic applications |
US9793214B1 (en) | 2017-02-21 | 2017-10-17 | Texas Instruments Incorporated | Heterostructure interconnects for high frequency applications |
US20180254318A1 (en) * | 2017-03-02 | 2018-09-06 | William B Pohlman, III | Graphene based in-plane micro-supercapacitors |
WO2018230638A1 (ja) * | 2017-06-16 | 2018-12-20 | 株式会社Kri | カーボン修飾窒化ホウ素、その製造方法および高熱伝導性樹脂組成物 |
JP6803874B2 (ja) * | 2017-06-16 | 2020-12-23 | 株式会社Kri | カーボン修飾窒化ホウ素、その製造方法および高熱伝導性樹脂組成物 |
CN107748025B (zh) * | 2017-09-30 | 2019-10-29 | 中国人民解放军国防科技大学 | 一种石墨烯/六方氮化硼异质结构压力传感器及制备方法 |
KR20200106955A (ko) | 2018-01-19 | 2020-09-15 | 헬무트 바이트리시 | 전하캐리어 안내장치 및 그 용도 |
US10490673B2 (en) | 2018-03-02 | 2019-11-26 | Texas Instruments Incorporated | Integration of graphene and boron nitride hetero-structure device |
KR102231273B1 (ko) | 2018-04-06 | 2021-03-23 | 엘지전자 주식회사 | 무선 통신 시스템에서 단말의 슬롯 포맷 결정 방법 및 상기 방법을 이용하는 단말 |
CN109065735A (zh) * | 2018-06-19 | 2018-12-21 | 广东工业大学 | 一种二维材料范德瓦尔异质结的精确构建方法 |
AU2019295438B2 (en) | 2018-06-25 | 2023-09-28 | 2599218 Ontario Inc. | Graphene membranes and methods for making graphene membranes |
CN108793145B (zh) * | 2018-06-30 | 2021-08-31 | 中国人民解放军国防科技大学 | 一种原子级厚度石墨烯/氮化硼复合异质薄膜及制备 |
CN110963460B (zh) * | 2018-09-28 | 2020-12-25 | 复旦大学 | 二维材料解理方法 |
JP7196547B2 (ja) | 2018-11-08 | 2022-12-27 | 富士通株式会社 | 光検出素子、光センサ、及び光検出素子の製造方法 |
KR102149831B1 (ko) * | 2018-11-12 | 2020-09-01 | 한국과학기술연구원 | 그래핀 패턴의 합성 방법 및 이를 이용한 전광 모듈레이터의 제조 방법 |
US11415643B2 (en) | 2018-12-06 | 2022-08-16 | Texas Instruments Incorporated | Amplification using ambipolar hall effect in graphene |
US10505063B1 (en) * | 2019-05-24 | 2019-12-10 | Mathew M. Zuckerman | Graphene and hexagonal boron nitride van der waals heterostructured solar energy processing unit (SPU) |
CN110426429A (zh) * | 2019-08-01 | 2019-11-08 | 电子科技大学 | 一种基于二维玻璃石墨烯的化学传感器阵列 |
US11332374B2 (en) | 2020-03-06 | 2022-05-17 | 2599218 Ontario Inc. | Graphene membrane and method for making graphene membrane |
GB2603905B (en) * | 2021-02-17 | 2023-12-13 | Paragraf Ltd | A method for the manufacture of an improved graphene substrate and applications therefor |
WO2023038015A1 (ja) * | 2021-09-08 | 2023-03-16 | 音羽電機工業株式会社 | 電界強度を測定可能なセンサ装置及び外部電界を測定する方法 |
Family Cites Families (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10134866B4 (de) | 2000-07-18 | 2005-08-11 | Lg Electronics Inc. | Verfahren zum horizontalen Wachsenlassen von Kohlenstoff-Nanoröhren und Feldeffekttransistor, der die durch das Verfahren gewachsenen Kohlenstoff-Nanoröhren verwendet |
WO2002070274A1 (en) * | 2001-03-05 | 2002-09-12 | Pramic Limited | Process |
US7619257B2 (en) * | 2006-02-16 | 2009-11-17 | Alcatel-Lucent Usa Inc. | Devices including graphene layers epitaxially grown on single crystal substrates |
US7915603B2 (en) | 2006-10-27 | 2011-03-29 | Qimonda Ag | Modifiable gate stack memory element |
US8485884B2 (en) | 2007-07-27 | 2013-07-16 | Ebet Ltd. | Reverse gaming systems and methods |
JP5553353B2 (ja) * | 2008-03-26 | 2014-07-16 | 学校法人早稲田大学 | 単原子膜の製造方法 |
US8384122B1 (en) | 2008-04-17 | 2013-02-26 | The Regents Of The University Of California | Tunneling transistor suitable for low voltage operation |
KR101490111B1 (ko) | 2008-05-29 | 2015-02-06 | 삼성전자주식회사 | 에피택셜 그래핀을 포함하는 적층구조물, 상기적층구조물의 형성방법 및 상기 적층구조물을 포함하는전자 소자 |
DE102008031819A1 (de) | 2008-07-05 | 2010-01-14 | Forschungszentrum Jülich GmbH | Drei- oder Mehrtorbauelement auf Basis des Tunneleffekts |
US20100176495A1 (en) * | 2009-01-12 | 2010-07-15 | International Business Machines Corporation | Low cost fabrication of double box back gate silicon-on-insulator wafers |
US8445893B2 (en) | 2009-07-21 | 2013-05-21 | Trustees Of Columbia University In The City Of New York | High-performance gate oxides such as for graphene field-effect transistors or carbon nanotubes |
US8236118B2 (en) | 2009-08-07 | 2012-08-07 | Guardian Industries Corp. | Debonding and transfer techniques for hetero-epitaxially grown graphene, and products including the same |
US8158200B2 (en) * | 2009-08-18 | 2012-04-17 | University Of North Texas | Methods of forming graphene/(multilayer) boron nitride for electronic device applications |
US8426309B2 (en) | 2009-09-10 | 2013-04-23 | Lockheed Martin Corporation | Graphene nanoelectric device fabrication |
US8227842B2 (en) * | 2009-09-21 | 2012-07-24 | Hitachi Global Storage Technologies Netherlands B.V. | Quantum well graphene structure |
US8501024B2 (en) * | 2009-09-30 | 2013-08-06 | The Regents Of The University Of California | Method of manufacture of atomically thin boron nitride |
KR101603771B1 (ko) * | 2009-10-21 | 2016-03-16 | 삼성전자주식회사 | 2차원 시트 물질을 이용한 전자 소자 및 그 제조 방법 |
US20110163298A1 (en) * | 2010-01-04 | 2011-07-07 | Chien-Min Sung | Graphene and Hexagonal Boron Nitride Devices |
US20110233513A1 (en) * | 2010-03-29 | 2011-09-29 | International Business Machines Corporation | Enhanced bonding interfaces on carbon-based materials for nanoelectronic devices |
KR101882035B1 (ko) * | 2010-06-25 | 2018-07-25 | 내셔널 유니버시티 오브 싱가포르 | 흑연 박리에 의한 그래핀 형성 방법 |
CN101950593B (zh) | 2010-09-21 | 2012-10-10 | 中国科学院苏州纳米技术与纳米仿生研究所 | 一种复合材料及其作为超级电容器电极材料的用途 |
US20130230722A1 (en) * | 2010-11-24 | 2013-09-05 | Fuji Electric Co., Ltd. | Conductive thin film and transparent conductive film comprising graphene |
US9059265B2 (en) | 2012-12-18 | 2015-06-16 | The United States Of America, As Represented By The Secretary Of The Navy | Graphene resonant tunneling transistor |
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