JP6027543B2 - 穿孔ヘッドコーティング用ホールダ - Google Patents

穿孔ヘッドコーティング用ホールダ Download PDF

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Publication number
JP6027543B2
JP6027543B2 JP2013546606A JP2013546606A JP6027543B2 JP 6027543 B2 JP6027543 B2 JP 6027543B2 JP 2013546606 A JP2013546606 A JP 2013546606A JP 2013546606 A JP2013546606 A JP 2013546606A JP 6027543 B2 JP6027543 B2 JP 6027543B2
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JP
Japan
Prior art keywords
wall
holder
hole
drilling tool
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2013546606A
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English (en)
Japanese (ja)
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JP2014507558A (ja
JP2014507558A5 (cg-RX-API-DMAC7.html
Inventor
ハイネ−ケンプケンス，クラウス
ホックシュバルツァー，マルティン
ディーツ，マイケル
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oerlikon Surface Solutions AG Pfaeffikon
Original Assignee
Oerlikon Surface Solutions AG Pfaeffikon
Oerlikon Trading AG Truebbach
Oerlikon Surface Solutions AG Truebbach
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Surface Solutions AG Pfaeffikon, Oerlikon Trading AG Truebbach, Oerlikon Surface Solutions AG Truebbach filed Critical Oerlikon Surface Solutions AG Pfaeffikon
Publication of JP2014507558A publication Critical patent/JP2014507558A/ja
Publication of JP2014507558A5 publication Critical patent/JP2014507558A5/ja
Application granted granted Critical
Publication of JP6027543B2 publication Critical patent/JP6027543B2/ja
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C13/00—Means for manipulating or holding work, e.g. for separate articles
    • B05C13/02—Means for manipulating or holding work, e.g. for separate articles for particular articles
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D5/00—Supports, screens or the like for the charge within the furnace
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D5/00—Supports, screens or the like for the charge within the furnace
    • F27D5/005—Supports specially adapted for holding elongated articles in an upright position, e.g. sparking plugs
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
    • C21D9/0006—Details, accessories not peculiar to any of the following furnaces
    • C21D9/0025—Supports; Baskets; Containers; Covers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Drilling Tools (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
JP2013546606A 2010-12-28 2011-12-15 穿孔ヘッドコーティング用ホールダ Active JP6027543B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102010056157A DE102010056157A1 (de) 2010-12-28 2010-12-28 Halterung für Bohrkopfbeschichtung
DE102010056157.6 2010-12-28
PCT/EP2011/006321 WO2012089306A1 (de) 2010-12-28 2011-12-15 Halterung für bohrkopfbeschichtung

Publications (3)

Publication Number Publication Date
JP2014507558A JP2014507558A (ja) 2014-03-27
JP2014507558A5 JP2014507558A5 (cg-RX-API-DMAC7.html) 2015-01-29
JP6027543B2 true JP6027543B2 (ja) 2016-11-16

Family

ID=45418608

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013546606A Active JP6027543B2 (ja) 2010-12-28 2011-12-15 穿孔ヘッドコーティング用ホールダ

Country Status (11)

Country Link
US (1) US9869023B2 (cg-RX-API-DMAC7.html)
EP (1) EP2659023B1 (cg-RX-API-DMAC7.html)
JP (1) JP6027543B2 (cg-RX-API-DMAC7.html)
KR (2) KR20130132868A (cg-RX-API-DMAC7.html)
CN (1) CN103261475B (cg-RX-API-DMAC7.html)
BR (1) BR112013012779B1 (cg-RX-API-DMAC7.html)
CA (1) CA2824452C (cg-RX-API-DMAC7.html)
DE (1) DE102010056157A1 (cg-RX-API-DMAC7.html)
ES (1) ES2627812T3 (cg-RX-API-DMAC7.html)
PL (1) PL2659023T3 (cg-RX-API-DMAC7.html)
WO (1) WO2012089306A1 (cg-RX-API-DMAC7.html)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013007454A1 (de) * 2013-05-02 2014-11-06 Oerlikon Trading Ag, Trübbach Vielseitige Haltevorrichtung zur Oberflächenbehandlung von stangenförmigen Substraten
AR101884A1 (es) 2014-09-17 2017-01-18 Oerlikon Surface Solutions Ag Trubbach Soporte para tratar cuchillas
DE102015105169A1 (de) * 2015-04-02 2016-10-06 Cemecon Ag Chargierung von Werkstücken in einer Beschichtungsanlage
PL3583243T3 (pl) * 2017-02-16 2023-03-06 Oerlikon Surface Solutions Ag, Pfäffikon Mocowanie narzędziowe dla wielu etapów procesu
CA3095064A1 (en) * 2018-03-29 2019-10-03 Oerlikon Surface Solutions Ag, Pfaffikon Device and method for selective vapor coating of a substrate
CN116641031A (zh) * 2023-06-05 2023-08-25 武汉职业技术学院 一种制造长距离氢气传感光纤的磁控溅射涂覆装置及工艺

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4528208A (en) * 1983-10-13 1985-07-09 Zymet, Inc. Method and apparatus for controlling article temperature during treatment in vacuum
JPH0217552U (cg-RX-API-DMAC7.html) * 1988-07-19 1990-02-05
JPH0452274A (ja) * 1990-06-20 1992-02-20 Nissin Electric Co Ltd 工具への薄膜被覆方法
US5096736A (en) * 1990-08-07 1992-03-17 General Electric Company Cvd diamond for coating twist drills
US5489369A (en) * 1993-10-25 1996-02-06 Viratec Thin Films, Inc. Method and apparatus for thin film coating an article
US5750207A (en) * 1995-02-17 1998-05-12 Si Diamond Technology, Inc. System and method for depositing coating of modulated composition
US5753092A (en) * 1996-08-26 1998-05-19 Velocidata, Inc. Cylindrical carriage sputtering system
GB9916558D0 (en) * 1999-07-14 1999-09-15 Dormer Tools Sheffield Ltd Method and means for drill production
KR20010087664A (ko) * 2000-03-08 2001-09-21 손명호 전자파 차폐막 코팅방법 및 그 장치
CN100529171C (zh) * 2005-07-21 2009-08-19 林泓庆 物理气相沉积蒸镀机的被镀物固持装置
US7182814B1 (en) * 2005-08-12 2007-02-27 Hong-Cing Lin Sample holder for physical vapor deposition equipment
US7469570B2 (en) * 2006-04-11 2008-12-30 Owens Corning Intellectual Capital, Llc Calibrating system for measuring sprayed materials

Also Published As

Publication number Publication date
KR20180098680A (ko) 2018-09-04
CA2824452C (en) 2021-02-16
ES2627812T3 (es) 2017-07-31
EP2659023B1 (de) 2017-03-08
BR112013012779A2 (pt) 2016-09-13
EP2659023A1 (de) 2013-11-06
BR112013012779B1 (pt) 2020-04-07
PL2659023T3 (pl) 2017-08-31
US20130264169A1 (en) 2013-10-10
JP2014507558A (ja) 2014-03-27
KR20130132868A (ko) 2013-12-05
WO2012089306A1 (de) 2012-07-05
CA2824452A1 (en) 2012-07-05
US9869023B2 (en) 2018-01-16
DE102010056157A1 (de) 2012-06-28
CN103261475A (zh) 2013-08-21
CN103261475B (zh) 2015-12-09

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